WO2005098904A1

WO2005098904A1 - Dielectric barrier discharge lamp

Info

Publication number: WO2005098904A1
Application number: PCT/JP2005/006980
Authority: WO
Inventors: Koji Hosotani; Kazuya Hatase; Shingo Ezaki
Original assignee: Japan Storage Battery Co., Ltd.
Priority date: 2004-04-07
Filing date: 2005-04-04
Publication date: 2005-10-20
Also published as: CN1806311A; TW200534322A; CN100524606C; KR100717704B1; TWI258163B; KR20060052655A

Abstract

A dielectric barrier discharge lamp, comprising a first electrode and a second electrode (7B) mounted on the outer surface of a discharge tube (3). The first electrode is formed of a mesh-like conductor, and the second electrode (7B) is formed of a solid conductor (45) and partly formed in a light transmitting window (40) by cutting out the conductor (45). The mesh-like conductor (43) is disposed at the light transmitting window (40) and electrically connected to the solid conductor (45) around the light transmitting window (40).

Description

Description Dielectric barrier discharge lamp Technical field

The present invention relates to a dielectric paria discharge lamp. Background art

Conventionally, as disclosed in Japanese Patent Application Laid-Open No. 2000-260396, a dielectric barrier discharge lamp 100 using a rectangular box-shaped discharge vessel 103 as shown in FIG. The solid discharge electrode 105 is disposed on the upper and outer surfaces of the discharge tube 103 of the conventional dielectric barrier discharge lamp, and the mesh electrode 107 is disposed on the lower outer surface. Ultraviolet light (indicated by the arrow in FIG. 9) is radiated from the mesh gap of the mesh electrode 107. By irradiating the surface of the object to be processed 109 (such as a glass substrate used for a liquid crystal display device) with the ultraviolet rays, organic substances on the surface of the object to be processed 109 are decomposed. Thereby, the object to be processed 109 is washed. Disclosure of the invention

The intensity of the ultraviolet light emitted by the dielectric barrier discharge lamp 100 gradually decreases due to deterioration accompanying use. Therefore, it is necessary to measure the intensity of the ultraviolet light in order to grasp the replacement time of the dielectric barrier discharge lamp 100.

However, in the conventional dielectric barrier discharge lamp, no ultraviolet light is emitted from the solid electric lever 105 side. Therefore, it was not possible to measure the UV intensity. It seems that the UV intensity can be measured on the mesh electrode 107 side, but since the object to be treated 1109 is arranged on the mesh electrode 107 side, an infrared sensor for measuring the UV intensity can be used. It was difficult to arrange the light receiving section.

Therefore, the present invention has been completed based on the above circumstances. That is, an object of the present invention is to provide a dielectric flash discharge lamp capable of measuring the intensity of ultraviolet light on the solid electrode side.

As a means for achieving the above object, in a dielectric barrier discharge lamp including a first electrode and a second electrode on an outer surface of a discharge tube, the first electrode is formed of a Megsch-like conductor, The second electrode is formed of a solid conductor, and a part thereof. The region is a light-transmitting window lacking a conductor, and the light-transmitting window is provided with a mesh-shaped conductor. The conductor is electrically connected to the solid conductor around the light-transmitting window. Connected.

According to the present invention, since the second electrode is a solid electrode, no ultraviolet light leaks from the second electrode side. Therefore, deterioration of the member (for example, resin coating of the power cord) disposed on the second electrode side is suppressed. Further, since the partial region of the second electrode is a light-transmitting window through which the ultraviolet light lacking the conductor passes, the intensity of the ultraviolet light is measured by the ultraviolet light emitted from the light-transmitting window. Here, the “solid electrode” means an electrode formed in a film shape by a metal conductor that does not transmit ultraviolet light. Also, it means an electrode that does not leak ultraviolet light because there is no hole. However, electrodes that are extremely small and have holes that are not capable of substantially measuring the intensity of ultraviolet light are included in “solid electrodes”.

If the second electrode is provided with a light-transmitting window (see reference numeral 40 in FIG. 6) for transmitting ultraviolet light, no discharge occurs in this portion. For this reason, at the position on the first electrode side facing the translucent window (see position B in FIG. 6), the intensity of the emitted ultraviolet light is smaller than that of the other parts (see position C and position D in FIG. 6). . Also, the measurement error of the ultraviolet intensity becomes large.

However, in the present invention, the light-transmitting window is provided with a mesh-shaped conductor, and the conductor is electrically connected to the conductor around the light-transmitting window. Therefore, discharge occurs also in the light transmitting window portion. Therefore, even at the position on the first electrode side facing the light-transmitting window (see position B in FIG. 7), the ultraviolet intensity becomes almost the same as the other parts (see position C and position D in FIG. 7). In addition, since discharge is generated also in the light transmitting window portion, a decrease in the intensity of the ultraviolet light radiated from the light transmitting window is suppressed, and a measurement error is suppressed.

In the present invention, the light-transmitting window may be disposed at an end of the solid conductor. This is illustrated, for example, by FIG. According to such an embodiment, the effect of the present invention can be obtained.

In the light transmitting window, the conductor electrically connected to the second electrode may have any shape such as a mesh shape, a strip shape, a radial shape, or a spiral shape. Regardless of the shape of the conductor, the effects of the present invention can be obtained as long as the discharge in the light transmitting portion is captured.

An ultraviolet irradiation device is configured by combining the dielectric barrier discharge lamp of the present application with a sensor capable of detecting ultraviolet intensity. This provides an ultraviolet irradiation device having a uniform ultraviolet intensity and capable of measuring a change in the ultraviolet intensity. Brief Description of Drawings

FIG. 1 is a sectional view of a dielectric barrier discharge lamp.

FIG. 2 is a perspective view of the discharge tube.

FIG. 3 is a perspective view of the discharge tube.

FIG. 4 is an enlarged plan view of the translucent window.

FIG. 5 is a cross-sectional view of a discharge tube (type 1).

Figure 6 is a cross-sectional view of a discharge tube (type 2).

FIG. 7 is a cross-sectional view of a discharge tube (type 3).

FIG. 8 is a perspective view of a discharge tube according to another embodiment.

FIG. 9 is a perspective view of a conventional dielectric barrier discharge lamp.

Here, 1 is a dielectric barrier discharge lamp, 3 is a discharge tube, 7 is an electrode, 7 A is a first electrode, 7 B is a second electrode, 40 is a translucent window, 43 is a metal film, and 45 is metal. Show the membrane. BEST MODE FOR CARRYING OUT THE INVENTION

One embodiment of the present invention will be described with reference to FIGS.

In the following description, the vertical direction is based on FIG. In the front-rear direction, the right side in Fig. 1 is the front.

In the dielectric barrier discharge lamp 1 of the present embodiment, a discharge space 5 formed by the discharge tube 3 is filled with a gas for dielectric barrier discharge. A pair of electrodes 7 A and 7 B facing each other are provided on the outer surface of the discharge tube 3. A lead wire 9 is connected to these electrodes 7A and 7B. The electrode 7A has a mesh shape. Electrode 7B is solid.

Part of the solid electrode 7B has a light transmitting window 40. In the translucent window 40, a mesh-shaped conductor 43 is formed.

Electrode 7A is connected to ground, and electrode 7B is connected to a power supply (not shown) that applies AC voltage.

The dielectric barrier discharge gas, xenon (X e), argon (A r), and krypton (K r), noble gases etc, and fluorine (F _2), halogen such as chlorine (C 1 ₂₎ Gas or the like is used. The dielectric barrier discharge lamp 1 emits excimer light having different wavelengths (wavelengths such as 1722 nm, 222 nm, and 308 nm) depending on the type of gas. For example, excimer light having a center wavelength of 170 nm is used for cleaning electronic components, that is, for decomposing organic compounds attached to electronic components. Therefore, in this case, a gas containing xenon (Xe) is used. Gas filling pressure is particularly limited However, it is usually sealed at a pressure of about 10 to 60 KPa.

The discharge tube 3 is formed by closing both ends of a flat rectangular tube made of synthetic quartz.

On the lower outer surface of the discharge tube 3, a first electrode 7A, which is a mesh-like (mesh-like) chrome Z nickel film (corresponding to a conductor), is formed by vapor deposition. A second electrode 7B, which is a chromium / nickel film (corresponding to a conductor), is formed on the upper and outer surfaces of the discharge tube 3. The thickness of each of the first electrode 7A and the second electrode 7B is preferably 0.1 to 100 μm.

The second electrode 7B is formed of a solid metal film, and a part of the second electrode 7B is a light-transmitting window 40 for ultraviolet intensity measurement lacking the solid metal film. This structure will be described later in detail. Both electrodes 7 A and 7 B are formed up to near both ends of the discharge tube 3. A solid portion 7C is formed at the front end of the first electrode 7A, and a rectangular extending portion 7D extending forward from the solid portion 7C is provided. The second electrode 7B also has an extension 7D similar to that of the first electrode 7A.

The light transmitting window 40 is formed in an oval shape at a position near the rear end of the second electrode 7B. The area of the transparent window 40 is not particularly limited, but is preferably 0.5 cm ² or more. If it is 0.5 cm ² or more, sufficient ultraviolet light for measuring the ultraviolet light intensity can be obtained from the light transmitting window 40. On the other hand, as shown in FIG. 2, the light receiving portion 50 of a general ultraviolet sensor has a substantially cylindrical shape with a diameter of about 4 mm. Therefore, if the area of the light transmitting window 40 is too large, the light receiving portion Since the amount of ultraviolet rays leaking to the rear of the light receiving portion 50 without being received by 50 increases, the amount is preferably 2 cm ² or less.

Further, a mesh-shaped metal film 43 is provided in the light-transmitting window 40, and the metal film 43 is electrically connected to the metal film 45 around the light-transmitting window 40. The mesh-like metal film 43 is formed by arranging linear element portions in a lattice.

The opening dimension L of the mesh-like metal film 43 shown in FIG. 4 is not particularly limited, but is preferably 3 mm or less. If the opening dimension L is larger than 3 mm, the discharge density of the light transmitting window 40 tends to be lower than that of the solid metal film 45. On the other hand, if the opening dimension L is larger than 3 mm, the uniformity of the ultraviolet intensity distribution in the longitudinal direction is impaired because the discharge density decreases.

By the way, it is desirable to reduce the opening dimension L as much as possible in order to increase the discharge density.However, when the opening dimension L is reduced with the line width W kept constant, the opening ratio decreases. In addition, ultraviolet rays are less likely to be radiated from the gaps between the strands. For this reason, in order to reduce the opening dimension L and maintain the opening ratio, the line width W must also be reduced accordingly. However, reducing the line width W is difficult in manufacturing. Therefore, the opening dimension L is preferably 1 mm or more. As described above, the dielectric barrier discharge lamp 1 according to the present invention is configured. When the dielectric z rear discharge lamp 1 is used, the light receiving portion 50 of the ultraviolet intensity sensor is installed above the light transmitting window 40, and the light receiving portion 50 receives ultraviolet light for intensity measurement.

Experiment 1>

In this experiment, it was examined how much the intensity of the ultraviolet light radiated from the light transmitting window 40 and the intensity of the ultraviolet light radiated from the first electrode 7A side varied in the tube axis direction of the discharge tube 3. Three types of discharge tubes 3 were used as shown in the sectional views of FIGS. That is, the conventional type 1 without the light-transmitting window 40 (FIG. 5) and the type 2 without the light-transmitting window 40 but having the mesh-like metal film 43 disposed on the light-transmitting window 4O (FIG. 5). This is a type 3 (FIG. 7) in which the light-transmitting window 40 is grained and the light-transmitting window 40 is provided with a mesh-shaped metal film 43.

Then, as shown in FIGS. 5 to 7, on the second electrode 7B side, the light receiving section 50 of the ultraviolet intensity sensor was disposed at a position A above the light transmitting window 40. On the first electrode 7A side, the position B facing the position A, the position C at the center of the discharge tube 3, and the position D near the right end of the discharge tube 3 in FIGS. Were arranged, and the ultraviolet intensity at each of the positions A to D was measured.

In each of the positions, the distance between the discharge tube 3 and the light receiving section 50 of the ultraviolet intensity sensor was set to about 4 mm.

Further, in any of the above types, the discharge tube 3 had a size of about 35 OmmX about 4 OmmX about 13 mm. Xenon was sealed at a pressure of 40 KPa. The peak voltage (lamp peak voltage) Vp applied between the electrodes during lighting was 6.5 kV. The frequency f was fixed at 30 kHz.

In type 2 and type 3, the light-transmitting window 40 had an elliptical shape with a length L a = 18 mm and a width W a = 8 mm.

The line width W of the strands composing the type 3 mesh was set to 0.4 mm, and the opening dimension L of the mesh was set to 2 mm (see Fig. 4).

<: Result 1>

The experimental results are shown in Table 1 below. Discharge tube type UV intensity (mW / _C m ² )

Position A Position B Position C Position D

Type 1 ― 20.3 2 0.2 20.1 Type 2 3.7 4.9 20.1 20.0 Type 3 1 5.4 20.1 2 0.2 20.3 For Type 2 and Type 3, Since the translucent window 40 was provided in the second electrode 7B, the ultraviolet intensity could be measured at the position A on the second electrode 7B side. On the other hand, in the case of type 1, since the translucent window 40 was not provided in the second electrode 7B, the ultraviolet intensity could not be measured at the position A on the second electrode 7B side. Furthermore, in the case of type 3, the UV intensity at position A was about four times that of type 2, and it was confirmed that the measurement error in UV intensity measurement could be reduced.

In type 3, the ultraviolet intensities at positions B to D on the first electrode 7A side were almost the same. In the type 2, the ultraviolet intensity was lower at the position B facing the translucent window 40 than at the positions C and D. Thus, it was found that in type 3, the ultraviolet intensity in the tube axis direction of the discharge tube 3 did not vary. This is considered to be because in the type 3, the light transmitting window 40 is also discharged by the mesh-like metal film 43.

For type 3, an experiment was performed in which the opening dimension L was changed. Other conditions are the same as in Experiment 1.

The experimental results are shown in Table 2 below. ■

From these results, it was found that if the opening size was set to 3 mm or less, the ultraviolet intensity at the positions BD on the first electrode 7A side was almost the same. That is, ultraviolet rays in the direction of the tube axis of the discharge tube 3 The strength was found not to vary.

The present invention is not limited to the embodiment described above with reference to the drawings. For example, the following embodiments are also included in the technical scope of the present invention.

Further, even in the embodiments other than those described below, various modified embodiments can be implemented without departing from the gist of the invention.

(1) In the above embodiment, the first electrode 7A and the second electrode 7B are both chromium Z nickel electrodes. However, the conductor constituting the electrode is not particularly limited. For example, for the first electrode 7A and the second electrode 7B, "cermet" or the like, which is an intermediate material between metal and ceramic, may be used in addition to metal.

(2) In the above embodiment, the shape of the light transmitting window 40 is an oval. However, the shape is not particularly limited.

(3) In the above embodiment, the discharge tube main body 13 is a rectangular tube. However, the shape is not particularly limited. For example, the discharge tube body 13 may be in the shape of a round tube.

(4) The position of the translucent window 40 is not particularly limited. For example, as shown in FIG. 8, the position of the light transmitting window 40 may be provided at the end of the second electrode 7B.

(5) The shape of the conductor arranged in the light transmitting window is not limited to a mesh shape. For example, the shape may be a stripe shape, a spiral shape, a radial shape, or the like.

(6) The portion of the light-transmitting window referred to in the invention of the present application may be constituted by "a film conductor having a plurality of small holes". In this case, the second electrode is a portion where the / J is formed in a part of the second electrode and a plurality of holes are densely formed (in this portion, the ultraviolet intensity can be measured. Means a film-shaped conductor having According to such an embodiment, the effect of the present invention can be obtained. In this embodiment, the small hole of the film-shaped conductor may be formed in any shape such as a circle, an ellipse, and a square.

This application is based on a Japanese patent application filed on April 7, 2004 (Japanese Patent Application No. 2004-1-113531), the contents of which are incorporated herein by reference. It is.

Claims

The scope of the claims

1. In a dielectric barrier discharge lamp having a first electrode and a second electrode on the outer surface of a discharge tube,

The first electrode is formed of a mesh-shaped conductor,

The second electrode is formed of a solid conductor, and a part of the second electrode is a light-transmitting window lacking the conductor,

The translucent window is provided with a mesh-shaped conductor,

The conductor is electrically connected to the solid conductor around the light-transmitting window.

2. In the dielectric barrier discharge lamp according to claim 1,

The light-transmitting window is disposed at an end of the solid conductor.

3. The dielectric barrier discharge lamp of claim 1; and

A sensor for measuring the intensity of ultraviolet light emitted from the light transmitting window

UV irradiation device equipped with.

4. In a dielectric barrier discharge lamp with a discharge tube,

A first electrode and a second electrode are provided on an outer surface of the discharge tube,

The second electrode is a film conductor having a light-transmitting window,

A conductor electrically connected to the second electrode is disposed in the light transmitting window.

5. The dielectric barrier discharge lamp according to claim 4, wherein:

The conductor electrically connected to the second electrode has a mesh shape, a stripe shape, a radial shape, or a spiral shape.

6. The dielectric barrier discharge lamp according to claim 4 or 5, wherein the first electrode is formed of a mesh-shaped conductor.

7. The dielectric barrier discharge lamp according to claim 6, wherein:

The light-transmitting window is provided at an end of the second electrode. 6. An ultraviolet irradiation device, comprising: the dielectric barrier discharge lamp according to claim 4 or 5; and a sensor for measuring intensity of ultraviolet light emitted from the translucent window.