CN1806311A - Dielectric barrier discharge lamp - Google Patents
Dielectric barrier discharge lamp Download PDFInfo
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- CN1806311A CN1806311A CNA200580000556XA CN200580000556A CN1806311A CN 1806311 A CN1806311 A CN 1806311A CN A200580000556X A CNA200580000556X A CN A200580000556XA CN 200580000556 A CN200580000556 A CN 200580000556A CN 1806311 A CN1806311 A CN 1806311A
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- electrode
- light inlet
- inlet window
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/305—Flat vessels or containers
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
A dielectric barrier discharge lamp, comprising a first electrode and a second electrode mounted on the outer surface of a discharge tube. The first electrode is formed of a mesh-like conductor, and the second electrode is formed of a solid conductor and partly formed in a light transmitting window by cutting out the conductor. The mesh-like conductor is disposed at the light transmitting window and electrically connected to the solid conductor around the light transmitting window.
Description
Technical field
The present invention is relevant dielectric barrier discharge lamp.
Background technology
In the past, open the bulletin of 2000-260396 communique institute as the spy, using such rectangular discharge vessel 103 dielectric barrier discharge lamps 100 of Fig. 9 has been many known.
The outside, discharge tube 103 tops of dielectric barrier discharge lamp in the past is provided with overall electrode 105, and the outside, below is provided with grid electrode 107.Ultraviolet ray (Fig. 9 arrow indication) radiates from the grid slit of grid electrode 107.Ultraviolet irradiation decomposes object being treated 109 lip-deep organic substances to object being treated (glass plate that liquid crystal indicator is used etc.) surface.Arrive the purpose of cleaning object being treated with this.
Summary of the invention
The uitraviolet intensity that dielectric barrier discharge lamp 100 radiates can use and deterioration with work, reduces at leisure.Therefore, in order to grasp the replacing period of dielectric barrier discharge lamp 100, need to measure ultraviolet intensity.
Therefore but former dielectric barrier discharge lamp is not radiate ultravioletly from overall electrode 105 sides, can not measure uitraviolet intensity.So people can expect measuring uitraviolet intensity in grid electrode 107 sides naturally, still, grid electrode 107 sides are provided with object being treated 109, and therefore, the sensitive device that the transducer of measuring uitraviolet intensity will be set again is just relatively more difficult.
The present invention finishes according to the demand.That is, the present invention is that can to measure the dielectric barrier discharge lamp of uitraviolet intensity be purpose to be provided at the overall electrode side.
As the means that arrive above-mentioned purpose, be provided with on the 1st electrode and the 2nd electrolyte of electrodes barrier discharge lamp in the discharge tube outside, above-mentioned the 1st electrode is made of latticed electric conductor.Above-mentioned the 2nd electrode is made of the electric conductor of whole shape, and wherein a part of field is the light inlet window that does not have electric conductor simultaneously, and above-mentioned light inlet window is provided with latticed electric conductor, and this electric conductor is switched on the whole shape electric conductor around the above-mentioned light inlet window and is connected.
The patent according to the present invention, the 2nd electrode are the electrodes of whole shape, can not leak ultraviolet ray from the 2nd electrode side.Therefore, the deterioration that is arranged on the material (as the resin skin of power line) of the 2nd electrode side can be inhibited.In addition, a part of field of the 2nd electrode does not have electric conductor, and the light inlet window that allows ultraviolet ray pass through is so thereby the light inlet window ultraviolet ray of radiating from then on can be measured ultraviolet intensity.So-called herein [whole shape electrode] is meant the membranaceous electrode that is made of uvioresistant metallic conductor, is not leak ultraviolet electrode so also meaning is outstanding simultaneously because of there not being the hole.But the electrode that can not measure uitraviolet intensity because of Kong Taixiao in fact is also included within [whole shape electrode].
If the 2nd electrode is provided with the light inlet window (40 among Fig. 6) that ultraviolet ray sees through, this part can not discharged.Therefore, the uitraviolet intensity that comes out in the radiation of the position (with reference to the position B of Fig. 6) of the 1st electrode side on light inlet window opposite than other parts (the position C among Fig. 6, D) little.The evaluated error of uitraviolet intensity is bigger in addition.
But in patent of the present invention, light inlet window is provided with latticed electric conductor, and this electric conductor is connected work with electric conductor energising around the light inlet window.Therefore, also produce discharge in the light inlet window part.The uitraviolet intensity of (the position B among Fig. 7) and other parts on the position of the 1st electrode side relative with light inlet window (the position C among Fig. 7, D) the same substantially.In addition, because of light inlet window part also produces discharge,, also suppressed the error of its mensuration so suppressed the attenuating of the uitraviolet intensity that radiates out from light inlet window.
In patent of the present invention, light inlet window can be arranged on the end of the above-mentioned electric conductor of whole shape.Such as, Fig. 8 has shown this point.Also can obtain the effect of patent of the present invention according to such execution mode.
Light inlet window and the electric conductor that above-mentioned the 2nd electrifying electrodes is connected can be latticed, striated, other shapes such as radial or swirl shape.No matter electric conductor is any shape, as long as can replenish the effect that discharge has just obtained patent of the present invention in the transmittance section.
Dielectric barrier discharge lamp and the sensor combination that detects uitraviolet intensity according to the application's patent can constitute ultraviolet lamp.Like this, just can provide a kind of uitraviolet intensity even, and can measure the ultraviolet lamp that uitraviolet intensity changes.
Description of drawings
Fig. 1 is the profile of dielectric barrier discharge lamp.
Fig. 2 is the oblique view of discharge tube.
Fig. 3 is the oblique view of discharge tube.
Fig. 4 is the expansion plane graph of light inlet window.
Fig. 5 is discharge tube (1 a type) profile.
Fig. 6 is discharge tube (2 a type) profile.
Fig. 7 is discharge tube (3 a type) profile.
Fig. 8 is the oblique view of relevant other execution mode discharge tubes.
Fig. 9 is the oblique view of former dielectric barrier discharge lamp.
Herein, 1 expression dielectric barrier discharge lamp, 3 expression discharge tubes, 7 expression electrodes, 7A represents the 1st electrode, 7B represents the 2nd electrode, 40 expression light inlet windows, 43 expression metal films, 45 expression metal films.
Embodiment
With reference to Fig. 1～Fig. 7 one embodiment of the present invention is described.
In the following description, relevant above-below direction is benchmark with Fig. 1.Fore-and-aft direction is the place ahead with Fig. 1 right side.
The dielectric barrier discharge lamp 1 of present embodiment is filled with the gas of dielectric barrier discharge usefulness in the discharge space 5 that is formed by discharge tube 3.Be relatively set with pair of electrodes 7A on the outer surface of discharge tube 3,7B.These two electrode 7A, 7B is connected with lead 9.Electrode 7A is latticed, and electrode 7B is whole shape.
The part of the electrode 7B of whole shape has light inlet window 40.Light inlet window 40 is provided with latticed electric conductor 43.
Electrode 7A and earth connection, electrode 7B is connected with the supply unit that has applied alternating voltage (diagram is omitted).
The dielectric barrier discharge can be used xenon (Xe) with gas, argon (Ar) and krypton rare gas such as (Kr), or use fluorine, and (F2), chlorine halogen gass such as (Cl2).Dielectric barrier discharge lamp 1 sends the Ai Ke Sigma light of different wave length (172nm, 222nm, 308nm equiwavelength) according to the kind of gas.For example, when cleaning electronic component, that is, divide when desorbing the organic compound of showing on electronic component, can use the Ai Ke Sigma light as centre wavelength with 172nm.Gu can use the gas that contains xenon (Xe) this moment.
In addition, the inclosure pressure of gas is restriction especially not, but encloses with the pressure of 10～60Kpa degree usually.
There is the 1st electrode 7A of the chromium/nickel film (being equivalent to electric conductor) of the mesh shape (latticed) that evaporation forms in the outside, the below of discharge tube 3.The upper outer of discharge tube 3 then forms the 2nd electrode 7B of chromium/nickel film (being equivalent to electric conductor).The thickness of the 1st electrode 7A and the 2nd electrode 7B is an ideal with 0.1～100 μ all.
The 2nd electrode 7B is formed by the metal film of whole shape, and the one certain fields are the light inlet windows 40 that are used for measuring uitraviolet intensity that do not have whole shape metal film.This structure describes in detail later.
Electrode 7A, 7B forms near the two ends of discharge tube 3.The leading section of the 1st electrode 7A forms the whole 7C of portion, forwards extends from the whole 7C of portion to be provided with rectangular-shaped extension 7D.The 2nd electrode 7B also has the extension 7D identical with the 1st electrode 7A.
The rear end that light inlet window 40 is positioned at the 2nd electrode 7B is Long Circle.The area of this light inlet window 40 does not have special the qualification, but more satisfactory more than 0.5cm2.Because more than 0.5cm2, just can obtain measuring the sufficient ultraviolet ray of uitraviolet intensity from light inlet window.On the other hand, as shown in Figure 2, the light accepting part 50 of general ultraviolet sensor, because of being cylindrical about a diameter 4mm, so if the area of light inlet window 40 is excessive, light accepting part 50 can not be subjected to light, and the leakage at light accepting part 50 rears ultraviolet ray amount increases, so more satisfactory below 2cm2.
Moreover light inlet window 40 is provided with latticed metal film 43, and metal film 45 energisings around metal film 43 and the light inlet window 40 are connected, and latticed metal film 43 is the straight line strips that have in cancellate in length and breadth.
As shown in Figure 4, though latticed metal film 43 its opening size L do not have particular determination, with more satisfactory below the 3mm.If greater than 3mm, the power-discharging density of light inlet window 40 parts is compared the tendency with reduction with metal film 45 parts of whole shape because of opening size L.In addition, if opening size L greater than 3mm, reduces the distributing homogeneity that will damage uitraviolet intensity on the length direction because of power-discharging density.
In order to increase power-discharging density, opening size L as far as possible with little for well, but live width W one is regularly, the little then aperture opening ratio of opening size L reduces and ultravioletly radiates out from the slit of line portion with regard to being difficult to.Therefore, in order to make the less aperture opening ratio of keeping again of opening size L, the width of line also need diminish thereupon.But, difficult when the reduced width of line is made.Therefore, opening size is comparatively desirable more than 1mm.
As mentioned above, the dielectric barrier discharge lamp 1 of patent of the present invention comes to this and constitutes.When using this dielectric barrier discharge lamp 1, the light accepting part of uitraviolet intensity transducer is arranged on the top position of light inlet window 40, accepts to measure the ultraviolet ray that intensity is used by light accepting part 50.
＜experiment 1 〉
Having investigated uitraviolet intensity that the uitraviolet intensity that radiates from light inlet window 40 and the 1st electrode 7A be sidelong ejaculation in this experiment axially has the differences of which kind of degree at discharge tube 3.
As Fig. 5～shown in Figure 7, in the 2nd electrode 7B side, the top position A of light inlet window 40 is provided with the light accepting part 50 of uitraviolet intensity transducer.In the 1st electrode 7A side, the position B relative with position A, the middle position C of discharge tube 3 on Fig. 5 of discharge tube 3～Fig. 7 right end position D, respectively disposes the light accepting part 50 of uitraviolet intensity transducer, measures the uitraviolet intensity of each position of A～D.
The whichever position, discharge tube 3 is about 4mm with the interval of uitraviolet intensity transducer light accepting part 50.
In addition, no matter be which above-mentioned type, discharge tube 3 is of a size of the about 13mm of the about 40mmx of about 350mmx.The gas of enclosing is xenon, encloses with the pressure of 40Kpa.Being applied to interelectrode crest voltage (crest voltage of lamp) Vp when lighting a lamp is 6.5kV.In addition, frequency f is certain, is 30kHz.
The light inlet window 40 of 2 types and 3 types is long La=18mm, the Long Circle of wide Wa=8mm.The width W that constitutes the line part of 3 type grids is 0.4mm, and the opening size L of grid is 2mm (with reference to Fig. 4).
＜result 1 〉
Experimental result is as shown in table 1 below
Table 1
| The discharge tube model | Uitraviolet intensity (mW/cm 2) | |||
| Position A | Position B | Position C | Position D | |
| 1 type | - | 20.3 | 20.2 | 20.1 |
| 2 types | 3.7 | 4.9 | 20.1 | 20.0 |
| 3 types | 15.4 | 20.1 | 20.2 | 20.3 |
In 2 types and 3 types, light inlet window 40 can be measured ultraviolet intensity because of being arranged on the 2nd electrode 7B on the A position of the 2nd electrode 7B side.To this, the light inlet window 40 of 1 type can not be measured ultraviolet intensity because of not being arranged on the 2nd electrode 7B on the A position of the 2nd electrode 7B side.Moreover the locational uitraviolet intensity of 3 type A is about 4 times of 2 types, has confirmed to reduce the error that uitraviolet intensity is measured.
In 3 types, the uitraviolet intensity of the position B～D of the 1st electrode 7A side is substantially the same.In 2 types, with respect to the B of light inlet window 40 positions, compare with position C and position D uitraviolet intensity a little less than.Like this, can know that in 3 types, the uitraviolet intensity on the tube axial direction of discharge tube 3 does not have deviation.This is because light inlet window 40 parts of 3 types also have the result of latticed metal film 43 discharges.
＜experiment 2 〉
3 types have been carried out making the experiment of opening size L variation.Other conditions are identical with experiment 1.
＜result 2 〉
Experimental result is as shown in table 2 below.
Table 2
| Opening size L (mm) | Uitraviolet intensity (mW/cm 2) | |||
| Position A | Position B | Position C | Position D | |
| 0.5 | 6.9 | 20.3 | 20.3 | 20.1 |
| 1 | 11.3 | 20.0 | 20.1 | 20.0 |
| 2 | 15.4 | 20.1 | 20.2 | 20.3 |
| 3 | 12.2 | 15.9 | 20.3 | 20.2 |
| 5 | 8.4 | 11.0 | 20.2 | 20.1 |
From its result as can be known, below 3mm, the uitraviolet intensity of the position B～D of the 1st electrode 7A side is identical basically as opening size.That is, the uitraviolet intensity of the tube axial direction of discharge tube 3 does not have deviation.
＜other execution modes 〉
The present invention is not limited to the execution mode of above-mentioned record and drawing explanation.For example, following execution mode is also contained in the technical scope of the present invention.
Moreover, even the execution mode beyond following as long as in the scope that does not break away from the invention main idea, all can various alter modes be implemented.
(1) in the above-described embodiment, the 1st electrode 7A and the 2nd electrode 7B are chromium/nickel electrodes.But the electric conductor that constitutes electrode there is no special restriction.For example, at the 1st electrode 7A and the 2nd electrode 7B, except that metal, also can use metal and ceramic intermediate materials [ceramal].
(2) in the above-described embodiment, the shape of light inlet window 40 is oblong, but is not limited to this shape.
(3) in the above-described embodiment, discharge tube body 13 is rectangular tubulars.But do not limit this shape.For example, discharge tube body 13 also can be columnar.
(4) position of light inlet window 40 does not limit especially.As shown in Figure 8, light inlet window 40 also can be arranged on the end of the 2nd electrode 7B.
(5) the electric conductor shape that is configured on the light inlet window is not limited to latticed.For example, striated, swirl shape, radial grade can.
(6) the described light inlet window part of patent of the present invention also can be [the membranaceous electric conductor that has most apertures to constitute].At this moment the 2nd electrode has and is formed with most intensive apertures on the part of the 2nd electrode (this part can be measured uitraviolet intensity.And this part is also had a function of transmittance section) the meaning of membranaceous electric conductor.Implement also can obtain effect of the present invention according to such mode.And the aperture of membranaceous electric conductor can be circular in this execution mode, Long Circle, the shape of quadrangle etc.
Present patent application is to carry out according to the Japanese patent application (patent application 2004-113531) that on April 7th, 2004 applied for, its content is recorded and narrated as reference at this.
Claims (8)
1. a dielectric barrier discharge lamp has the 1st electrode and the 2nd electrode in the outside of discharge tube, wherein:
Above-mentioned the 1st electrode is made of latticed electric conductor,
Above-mentioned the 2nd electrode is made of the electric conductor of whole shape, and simultaneously, wherein a part of field is the light inlet window that does not have electric conductor,
Dispose latticed electric conductor on the above-mentioned light inlet window, this electric conductor is electrically connected with the above-mentioned electric conductor of above-mentioned light inlet window whole shape on every side.
2. dielectric barrier discharge lamp according to claim 1, wherein:
Above-mentioned light inlet window is configured in the end of the above-mentioned electric conductor of whole shape.
3. ultraviolet lamp, the transducer that possesses the described dielectric barrier discharge lamp of claim 1 and measure the uitraviolet intensity that above-mentioned light inlet window irradiates.
4. a dielectric barrier discharge lamp possesses discharge tube, wherein:
The outside of above-mentioned discharge tube possesses the 1st electrode and the 2nd electrode,
Above-mentioned the 2nd electrode is the membranaceous electric conductor that light inlet window is arranged,
Dispose the electric conductor that is electrically connected with above-mentioned the 2nd electrode on the above-mentioned light inlet window.
5. dielectric barrier discharge lamp according to claim 4, wherein:
The above-mentioned electric conductor that is electrically connected with above-mentioned the 2nd electrode is latticed, striated, radial or swirl shape.
6. according to claim 4 or 5 described dielectric barrier discharge lamps, wherein:
Above-mentioned the 1st electrode is made of latticed electric conductor.
7. dielectric barrier discharge lamp according to claim 6, wherein:
Above-mentioned light inlet window is configured in the end of above-mentioned the 2nd electrode.
8. ultraviolet lamp, the transducer that possesses claim 4 or 5 described dielectric barrier discharge lamps and measure the uitraviolet intensity that above-mentioned light inlet window irradiates.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004113531 | 2004-04-07 | ||
| JP113531/2004 | 2004-04-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1806311A true CN1806311A (en) | 2006-07-19 |
| CN100524606C CN100524606C (en) | 2009-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200580000556XA Active CN100524606C (en) | 2004-04-07 | 2005-04-04 | Dielectric barrier discharge lamp |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR100717704B1 (en) |
| CN (1) | CN100524606C (en) |
| TW (1) | TWI258163B (en) |
| WO (1) | WO2005098904A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101847564A (en) * | 2009-03-23 | 2010-09-29 | 优志旺电机株式会社 | Excimer lamp |
| CN103081058A (en) * | 2010-09-30 | 2013-05-01 | 株式会社杰士汤浅国际 | Dielectric barrier discharge lamp device |
| CN103081057A (en) * | 2010-08-24 | 2013-05-01 | 耶合-奥灯具创造有限公司 | Energy efficient lamp |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009078249A1 (en) * | 2007-12-17 | 2009-06-25 | Orc Manufacturing Co., Ltd. | Discharge lamp |
| CN102822941A (en) * | 2010-03-18 | 2012-12-12 | 株式会社杰士汤浅国际 | Dielectric barrier discharge lamp and lamp unit |
| US20210399440A1 (en) * | 2020-06-17 | 2021-12-23 | The Boeing Company | Systems and methods for maintaining electrical contact in relation to an ultraviolet lamp |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3025390B2 (en) * | 1993-04-23 | 2000-03-27 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
| JP2836058B2 (en) * | 1994-09-20 | 1998-12-14 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
| JPH0992227A (en) * | 1995-09-25 | 1997-04-04 | Toshiba Lighting & Technol Corp | Fluorescent lamp and lighting system |
| JP3353684B2 (en) * | 1998-01-09 | 2002-12-03 | ウシオ電機株式会社 | Dielectric barrier discharge lamp light source device |
| CA2325625A1 (en) * | 1998-03-24 | 1999-09-30 | Corning Incorporated | External electrode driven discharge lamp |
| KR100503221B1 (en) * | 1999-10-28 | 2005-07-25 | 우시오덴키 가부시키가이샤 | Dielectric-barrier discharge lamp and irradiation apparatus |
| JP2004097986A (en) * | 2002-09-11 | 2004-04-02 | Japan Storage Battery Co Ltd | Ultraviolet irradiation device |
-
2005
- 2005-04-04 TW TW094110683A patent/TWI258163B/en active
- 2005-04-04 WO PCT/JP2005/006980 patent/WO2005098904A1/en active Application Filing
- 2005-04-04 CN CNB200580000556XA patent/CN100524606C/en active Active
- 2005-04-04 KR KR1020057010380A patent/KR100717704B1/en active IP Right Grant
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101847564A (en) * | 2009-03-23 | 2010-09-29 | 优志旺电机株式会社 | Excimer lamp |
| TWI449083B (en) * | 2009-03-23 | 2014-08-11 | Ushio Electric Inc | Excimer lamp |
| CN103081057A (en) * | 2010-08-24 | 2013-05-01 | 耶合-奥灯具创造有限公司 | Energy efficient lamp |
| CN103081058A (en) * | 2010-09-30 | 2013-05-01 | 株式会社杰士汤浅国际 | Dielectric barrier discharge lamp device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI258163B (en) | 2006-07-11 |
| WO2005098904A1 (en) | 2005-10-20 |
| CN100524606C (en) | 2009-08-05 |
| KR100717704B1 (en) | 2007-05-11 |
| KR20060052655A (en) | 2006-05-19 |
| TW200534322A (en) | 2005-10-16 |
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Owner name: HODGES YUASA INTERNATIONAL CO., LTD. Free format text: FORMER OWNER: YUASA BATTERY CO LTD Effective date: 20101117 |
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Effective date of registration: 20101117 Address after: Kyoto Prefecture Patentee after: GS Yuasa International Corporation Address before: Kyoto Prefecture Patentee before: Yuasa Battery Co., Ltd. |