JP2836058B2 - Dielectric barrier discharge lamp device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to, for example,
In connection with the improvement of the vacuum ultraviolet light source used for surface cleaning, sterilization, and the like, in particular, a so-called dielectric barrier discharge lamp that forms excimer molecules by dielectric barrier discharge and utilizes light emitted from the excimer molecules was used. The present invention relates to improvement of a dielectric barrier discharge lamp device.

[0002]

2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 1-144560.
There, a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric barrier discharge (also known as an ozonizer discharge or a silent discharge) is issued. (See page 263)
Describes excimer molecules, and uses a light emitted from the excimer molecules (hereinafter referred to as excimer light), that is, a dielectric barrier discharge lamp.

[0003] The publication also discloses that the discharge vessel is cylindrical, and at least a part of the discharge vessel also serves as a dielectric for the dielectric barrier discharge, and the dielectric is light-transmissive. A dielectric barrier discharge lamp in which a conductive mesh electrode is provided on at least a part of the dielectric is described.

[0004] CHEMITRON issued in September 1989
On page 202 of ICS magazine, a discharge vessel having a hollow cylindrical discharge space formed by arranging an outer tube made of quartz glass tube and an inner tube coaxially is filled with xenon as a discharge gas, A dielectric barrier discharge lamp is described in which an inner electrode made of aluminum foil is provided on at least a part of the outer wall of the inner tube, and a conductive mesh electrode is provided on at least a part of the outer wall of the outer tube.

[0005] Furthermore, in the above-mentioned document, from a dielectric barrier discharge lamp, only vacuum ultraviolet rays having a center wavelength of 172 nm and a half width of 12 nm, which are xenon excimer light, are emitted in a wavelength region between 100 nm and 800 nm. It is described that there is almost no emission at other wavelengths.

[0006]

The dielectric barrier discharge lamp device described above has the following advantages. (1) For example, if xenon or the like is selected as a discharge gas, vacuum ultraviolet light can be obtained with high efficiency. (2) Excimer light only It is useful because it has various features not found in conventional low-pressure mercury discharge lamps or high-pressure arc discharge lamps, such as a single-wavelength light source that emits light.

(A) However, on the other hand, the dielectric barrier discharge lamp device as described above emits very little visible light,
It was difficult to visually recognize that the lamp was lit. Therefore, even though the dielectric barrier discharge lamp that operates at a high power supply voltage of several kV at a high frequency of several tens of kHz and emits high-energy ultraviolet rays is being lit, it may be accidentally touched. There was a problem with safety.

(B) Based on the above circumstances, a method of displaying the lighting state of the lamp by detecting excimer light has been considered. However, when the wavelength of the excimer light is in the vacuum ultraviolet region, the excimer light is significantly absorbed by oxygen and moisture in the air. Therefore, the light intensity fluctuated remarkably, and it was difficult to confirm the lighting state of the lamp.

(C) In addition, it is difficult to apply a method for detecting electrical characteristics such as lamp current performed in a conventional arc discharge lamp device or the like to a dielectric barrier discharge lamp device for the following reasons. Met.

[0010] First, the dielectric barrier discharge lamp requires several kilohertz.
It is difficult to provide a detector on the high voltage side of the dielectric barrier discharge lamp because it operates at a high power supply voltage of several kV at a high frequency of z or more.

Second, when a detector is provided on the ground side, that is, on the conductive reticulated electrode side, the dielectric barrier discharge lamp is not grounded, which is dangerous.

Third, the inventors have found that it is impossible to reliably confirm the lighting state of a lamp by a method of detecting electrical characteristics such as lamp current. That is, when a dielectric barrier discharge lamp operating at a high power supply voltage of several kilovolts at a high frequency of several kilohertz or more becomes unlit for some reason, dielectric breakdown between the electric wires connecting the dielectric barrier discharge lamp and the power source occurs. And current flows. Therefore, a state similar to the state where the dielectric barrier discharge lamp is lit is simulated, and it becomes impossible to confirm the lit state of the lamp by such a method, which may cause burning of the apparatus. There was a problem of lack of reliability and safety.

The present invention has been made in view of the above circumstances, and an object of the present invention is to make it possible to easily and reliably identify that a lamp is lit, and thus to improve safety. An object of the present invention is to provide a highly reliable dielectric barrier discharge lamp device.

[0014]

In order to solve the above-mentioned problems, according to a first aspect of the present invention, an outer tube and an inner tube each having a substantially cylindrical outer shape are coaxially arranged, and the two tubes are arranged coaxially. A discharge vessel that forms a hollow cylindrical discharge space with both ends closed between is filled with a discharge gas that forms excimer molecules by dielectric barrier discharge, and at least a portion of the inner wall of the inner tube is made of metal. Is provided, and at least a part of the outer wall of the outer tube is light-transmissive to light emitted from the excimer molecule, and also functions as a dielectric of the dielectric barrier discharge. A dielectric barrier discharge lamp in which a conductive mesh electrode is provided on at least a part of a dielectric that is light transmissive to light emitted from the excimer molecule, and a power supply for performing the dielectric barrier discharge. Dielectric bar consisting of In the discharge lamp device, a detecting means for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp, a preset value and a value of the intensity of light having a wavelength of 200 nm or more detected by the detecting means Comparing means for comparing the two values detected by the detecting means.
When the intensity of light having a wavelength of 00 nm or more is equal to or less than a preset value, a display means for displaying the state is provided.

According to a second aspect of the present invention, there is provided a discharge vessel having a hollow cylindrical discharge space formed by coaxially arranging an outer tube and an inner tube, each of which has a substantially cylindrical outer shape. A discharge gas for forming excimer molecules by discharge is filled, an inner electrode made of metal is provided on at least a part of an outer wall of the inner tube, and at least a part of an outer wall of the outer tube is radiated from the excimer molecule. At least a portion of the dielectric material that is light-transmissive to light that is also light-transmissive to light emitted from the excimer molecule and also serves as a dielectric for the dielectric barrier discharge. A dielectric barrier discharge lamp device comprising: a dielectric barrier discharge lamp provided with a conductive mesh electrode; and a power supply for performing the dielectric barrier discharge. Detecting means for detecting light having a wavelength of 200 nm or more emitted from the light source; comparing means for comparing a preset value with a value of the intensity of light having a wavelength of 200 nm or more detected by the detecting means; 20 detected
A means is provided for automatically shutting off the voltage applied to the dielectric barrier discharge lamp when the intensity of light having a wavelength of 0 nm or more is equal to or less than a preset value.

According to a third aspect of the present invention, in the first aspect of the present invention or the second aspect of the present invention, light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp is detected. The detecting means is configured by a photodiode.

According to a fourth aspect of the present invention, there is provided the lamp cooling member according to any one of the first, second and third aspects of the present invention, wherein the lamp cooling member has a recess formed on the inner surface and communicating with the outside. A part of an outer wall of an outer tube of the dielectric barrier discharge lamp is provided in a lamp house having a light extraction window for extracting light emitted from the excimer molecule facing the inner surface of the lamp cooling member. The dielectric barrier discharge lamp is installed so as to be in contact with the depression of the cooling member, and a detection unit having a window and detecting light having a wavelength of 200 nm or more is provided in the external communication port of the depression ,
The optical axis of the detecting means and the central axis of the dielectric barrier discharge lamp are orthogonal to each other.

According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the radius of the inner electrode of the dielectric barrier discharge lamp is R, and the shortest distance between the window of the detecting means and the inner electrode. Is L, the solid angle looking into the dielectric barrier discharge lamp from the window of the detection means is πR ² / L
² or less.

[0019]

According to the first aspect of the present invention, there is provided a detecting means for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp, a predetermined value and a wavelength of 200 nm detected by the detecting means. Means for comparing the value of the above light intensity with 200 nm detected by the detecting means;
When the intensity of light having the above wavelength is equal to or less than a preset value, a means for displaying the state is provided. Here, if the value set in advance is the intensity of light having a wavelength of 200 nm or more emitted when the dielectric barrier discharge lamp is lit, the lighting state of the dielectric barrier discharge lamp can be easily and reliably determined. You can know.

The first aspect of the present invention is based on the following findings of the inventors. That is,
The inventors use a xenon as a discharge gas in a dielectric barrier discharge lamp having the above-described configuration and a dielectric barrier discharge lamp device including a power supply for performing the dielectric barrier discharge, The spectral characteristics of light output were examined.

The result is as shown in FIG. That is, at a wavelength of 200 nm or more, particularly, a wavelength of 200 n
In the wavelength range from m to 700 nm, it was found that light output was present although it was extremely small as compared with vacuum ultraviolet light having a maximum value at 172 nm which is xenon excimer light. Therefore, it can be seen that the lighting state of the dielectric barrier discharge lamp can be detected by using the detecting means for detecting light having a sensitivity at a wavelength of 200 nm or more.

According to a second aspect of the present invention, there is provided a detecting means for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp, a predetermined value and a value of 200 nm or more detected by the detecting means. Comparing means for comparing the value of the intensity of the light of the wavelength with 200 n detected by the detecting means
A means is provided for automatically shutting off the voltage applied to the dielectric barrier discharge lamp when the intensity of light having a wavelength of m or more is equal to or less than a preset value, so that a safe and highly reliable dielectric barrier discharge is provided. A lamp device can be obtained.

According to a third aspect of the present invention, in the first or the second aspect of the present invention, the detecting means for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp is a silicon photodetector. Diode, PI
Since it is constituted by a photodiode such as an N silicon photodiode or a GaAsP photodiode, it has the same advantages as the first or second aspect of the present invention.
There is an advantage that light in a wavelength range of 200 nm to 700 nm can be efficiently detected and the detector can be reduced in size.

According to a fourth aspect of the present invention, there is provided the lamp cooling member according to any one of the first, second and third aspects of the present invention, wherein the lamp cooling member has a recess formed on the inner surface and communicating with the outside. A part of an outer wall of an outer tube of the dielectric barrier discharge lamp is provided in a lamp house having a light extraction window for extracting light emitted from the excimer molecule facing the inner surface of the lamp cooling member. The dielectric barrier discharge lamp is installed so as to be in contact with the depression of the cooling member, and a detection unit having a window and detecting light having a wavelength of 200 nm or more is provided in the external communication port of the depression ,
Claim 1 wherein the optical axis of the detection means and the central axis of the dielectric barrier discharge lamp are orthogonal to each other.
In addition to having the same advantages as the invention of claim 2 or claim 3, the detection means enters the shadow of the dielectric barrier discharge lamp, so that the influence of visible light or the like for general illumination is reduced. This is advantageous in that the lighting state of the dielectric barrier discharge lamp can be checked with high reliability.

According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the radius of the inner electrode of the dielectric barrier discharge lamp is R, and the shortest distance between the window of the detecting means and the inner electrode. Is L, the solid angle looking into the dielectric barrier discharge lamp from the window of the detection means is πR ² / L
² or less, so that in addition to having the same advantages as the invention of claim 4, since the detection means enters the shadow of the inner electrode which does not transmit light, it is possible to use visible light for general illumination or the like. There is an advantage that the lighting state of the dielectric barrier discharge lamp can be checked with higher reliability because it is less susceptible to the influence.

[0026]

FIG. 1 is a schematic diagram for explaining a first embodiment of the present invention. The dielectric barrier discharge lamp device of the first embodiment has hollow cylindrical dielectric barrier discharge lamps 1a, 1b, 1c and 1d shown in FIG. 2 as constituent elements.

FIG. 2 shows a dielectric barrier discharge lamp 1a, 1
1 shows schematic diagrams of b, 1c and 1d. In FIG. 2, the discharge vessel 1 is made of synthetic quartz glass having a total length of about 300 mm.
In the discharge vessel 1, an inner tube 2 having an outer diameter of 16 mm and a wall thickness of 1 mm and an outer tube 3 having an inner diameter of about 24.5 mm and a wall thickness of 1 mm are coaxially arranged, and a hollow cylinder closed at both ends. A discharge space 8 is formed. Xenon gas of 250 torr is sealed in the discharge space 8 as a discharge gas.

The outer tube 3 serves as both a dielectric for dielectric barrier discharge and a light extraction window member. On its outer surface, a 250 mm long electrode 4 made of a conductive mesh through which light passes.
Is provided. On the outer surface of the inner tube 2, an inner electrode 5 serving as a light reflector and an electrode for dielectric barrier discharge is provided. The outer radius R of the inner electrode 5 is 7 mm. Electrode 4
And the inner electrode 5 are connected to a power supply 9. At one end of the discharge vessel 1, a getter chamber 7 for accommodating a getter 6 is provided. The getter 6 has a function of removing impurity gases (for example, H ₂ O or the like) in the discharge space 8 and stabilizing the discharge.

Returning to FIG. 1, the dielectric barrier discharge lamp 1
Reference numerals a, 1b, 1c, and 1d denote a light extraction window 31, a cooling block 34, and side plates 35a and 35 made of synthetic quartz glass.
It is hermetically sealed in a lamp house airtightly formed by b and side plates (not shown) at both ends of the lamp. Dielectric barrier discharge lamps 1a, 1b, 1c, 1d
Is supported by a not-shown supporting means so as to face the light extraction window portion 31 made of synthetic quartz glass and to locate each lamp in parallel. Also, of the dielectric barrier discharge lamps 1a, 1b, 1c, 1d, 1a, 1b
Are connected in parallel to the power supply 9a, and 1c and 1d are connected to the power supply 9a.
b is connected in parallel.

The cooling block 34 made of aluminum has recesses 38a, 38b, 38c and 38d formed on the inner surface. Each recess is 4mm in diameter and 20mm in length
Light introducing holes 37a, 37b, 37c, 37
It communicates with the outside through d. 30a, 30b
A hole for flowing a cooling fluid. Dielectric barrier discharge lamp 1
A part of the outer wall of the outer tube 3 of a, 1b, 1c, 1d is in contact with the recesses 38a, 38b, 38c, 38d for cooling. The effective light extraction area of the light extraction window 31 is 240 mm × 240 mm.

The silicon photodiodes 14 a, 14 b, 14 c, and 14 d having borosilicate glass windows correspond to the recesses 38 a, 38 b, 38 c, and 38 d of the cooling block 34.
Communication ports 39a, 39b, 39 with which
c, 39d. Each external communication port has a concave shape so that each silicon photodiode can be easily attached.

Silicon photodiodes 14a, 14
The shortest distance L between the borosilicate glass windows b, 14c and 14d and the inner electrodes 5 of the dielectric barrier discharge lamps 1a, 1b, 1c and 1d is 39.5 mm. The optical axes of the silicon photodiodes 14a, 14b, 14c, and 14d are orthogonal to the central axes of the dielectric barrier discharge lamps 1a, 1b, 1c, and 1d, respectively.

Silicon photodiodes 14a, 14
b, 14c, and 14d include a silicon photodiode 1
Comparison members 10a, 10b, 10c, which compare the output current values of 4a, 14b, 14c, 14d with preset values.
10d is connected. In addition, the comparison members 10a, 10
b, 10c, and 10d are connected to a display member 40 composed of a light emitting diode.

In the dielectric barrier discharge lamp device shown in FIG. 1, the dielectric barrier discharge lamps 1a, 1b, 1c,
Before starting lighting of 1d, nitrogen gas is introduced from the gas inlet 32 and the dielectric barrier discharge lamps 1a, 1b, 1
c, 1d and a light extraction window 3 made of synthetic quartz glass
The air existing in the space 36 between the first and second air is discharged from the inert gas outlet 33.

Light introduction holes 37a, 37b, 37c, 37d
Are the recesses 38a, 38b, 38 of the cooling block 34.
c, 38d and dielectric barrier discharge lamps 1a, 1b, 1
Since it is connected to the space 36 via the gaps between the light introducing holes 37a, 37b, 37c, and 37c.
The air in 37d is also replaced with nitrogen gas.

The space 36 and the light introducing holes 37a, 37b,
After the air present in 37c and 37d is replaced with nitrogen gas, the dielectric barrier discharge lamp 1 is supplied from power sources 9a and 9b.
A voltage of 9.4 kV was applied to a, 1b, 1c and 1d.
The tube wall load, which is the value obtained by dividing the value of the input power to the lamp by the value of the area of the portion where the outer tube 3 is in contact with the electrode 4, is 0.2.
It became 5 W / cm ² . Further, vacuum ultraviolet light having a maximum value at a wavelength of 172 nm in a wavelength range from 160 nm to 180 nm was emitted with high efficiency.

The dielectric barrier discharge lamps 1a, 1b, 1
Since c and 1d are arranged side by side in parallel, and the vacuum ultraviolet light emitted from the lamp is not absorbed in the space 36 filled with nitrogen gas, a substantially flat light source device is obtained.
Further, since a large number of expensive synthetic quartz glass plates are not used, a flat light source device was obtained at low cost.

The first embodiment has the following features. In FIG. 1, a dielectric barrier discharge lamp 1a, 1
If any one of the b, 1c and 1d is turned off, the silicon photodiodes 14a, 14b, 14c and 14d
The output current of one of the silicon photodiodes becomes smaller than a preset value, and this state is displayed on the display member 40.

(1) Therefore, the non-lighting state of the dielectric barrier discharge lamp can be easily and reliably confirmed. Therefore, the operator does not accidentally touch the dielectric barrier discharge lamp during lighting of the dielectric barrier discharge lamp, which is difficult to visually recognize, and a safe dielectric barrier discharge lamp device is obtained.

In the first embodiment, the display member 40 is turned on when at least one of the dielectric barrier discharge lamps 1a, 1b, 1c, 1d is turned off.
The display member 40 may be turned on when all of the dielectric barrier discharge lamps 1a, 1b, 1c, 1d are turned on.

(2) Silicon photodiodes 14a, 14b, 14c, and 14d are used as detecting means for detecting the lighting state of the dielectric barrier discharge lamp. Therefore, the dielectric barrier discharge lamps 1a, 1b, 1
c, 1d emitted from wavelength 200 nm to wavelength 70
The light output existing in the wavelength range of 0 nm could be detected efficiently.

(3) The size of the detecting means can be reduced.

(4) Silicon photodiodes 14a,
14b, 14c and 14d have borosilicate glass windows. Since borosilicate glass does not transmit light having a wavelength of 300 nm or less, the silicon photodiodes 14a, 14
b, 14c and 14d are hardly affected by excimer light which is vacuum ultraviolet light having a maximum value at a wavelength of 172 nm. Further, the borosilicate glass itself is less deteriorated by the irradiation of the vacuum ultraviolet rays. Thus, a highly reliable dielectric barrier discharge lamp device was obtained.

The silicon photodiodes 14a,
The windows 14b, 14c and 14d may be soda-lime glass.

(5) The optical axes of the silicon photodiodes 14a, 14b, 14c, 14d, which are detection means, are orthogonal to the central axes of the dielectric barrier discharge lamps 1a, 1b, 1c, 1d, respectively. Therefore, since the detection means enters the shadow of the dielectric barrier discharge lamp, the detection means is less likely to be affected by visible light or the like for general illumination, and the lighting state of the dielectric barrier discharge lamp can be checked with high reliability. Was completed.

A specific example is as follows. The outer radius R of the inner electrode 5 of each lamp is 7 mm, and the shortest distance L between the window of each silicon photodiode and the inner electrode 4 is L.
Is 39.5 mm, so that πR ² / L ² is 0.099
It is. From the window of each silicon photodiode, the solid angle looking into the dielectric barrier discharge lamp is π
× is ² 2/20 ^2, so 0.031, πR ² / L ²
It is as follows. Therefore, each silicon photodiode is behind the inner electrode 4 which does not transmit light.

FIG. 3 is a schematic diagram for explaining a second embodiment of the present invention. The second embodiment of the present invention is a dielectric barrier discharge lamp device for dry cleaning, for example, for cleaning a liquid crystal glass 41 as a sample.

The configuration shown in FIG. 3 is different from the configuration shown in FIG. 1 in that a sample transport member 42 is provided instead of the light extraction window 31. Also, instead of the display member 40, the comparison members 10a, 10b, 10c, 10d and the power source 9
An automatic shut-off member 50 connected to a and 9b is provided. The automatic shutoff member 50 has a function of automatically shutting off the voltage applied from the power supplies 9a, 9b to the dielectric barrier discharge lamps 1a, 1b, 1c, 1d by transmitting a signal to the power supplies 9a, 9b. In FIG. 3, components having the same reference numerals as those in FIG. 1 are the same as those in FIG.

In the dielectric barrier discharge lamp device for dry cleaning shown in FIG. 3, air is introduced from the gas inlet 32. By operating under the same operating conditions as in the first embodiment, the dielectric barrier discharge lamps 1a, 1b, 1c,
From 1d, the wavelength 160 having the maximum value at the wavelength 172 nm
Vacuum ultraviolet light in the wavelength range from nm to 180 nm was emitted with high efficiency. This vacuum ultraviolet light makes the space 36
Ozone was generated from oxygen in the air existing in the glass 41, and the organic matter on the surface of the glass 41 could be decomposed and removed by the ozone.

In the second embodiment, the silicon photodiodes 14a, 14b, 14c, 14d operate in air. Therefore, usually, the intensity of the vacuum ultraviolet light reaching the silicon photodiodes 14a, 14b, 14c, 14d is significantly reduced because the vacuum ultraviolet light is absorbed by air.

The gas generated by the decomposition of the organic substance on the surface of the glass 41 is generated by the light introducing holes 37a, 37b, 37b.
c, 37d, and this gas also absorbs vacuum ultraviolet light.

Therefore, it is particularly difficult to confirm the lighting state of the lamp by receiving and measuring vacuum ultraviolet light,
Here, since the light of 200 nm or more is detected, the non-lighting state of the dielectric barrier discharge lamp can be easily and reliably confirmed.

Further, the second embodiment has the following features. In FIG. 3, a dielectric barrier discharge lamp 1
If at least one of the a, 1b, 1c, and 1d is not lit, the silicon photodiodes 14a, 14b, 14d
c, 14d, the output current of one of the silicon photodiodes is compared with the comparison members 10a, 10b, 10c, 10d.
Becomes smaller than a preset value.

The dielectric barrier discharge lamps 1a, 1b, 1
Comparison members 10a, 10b,
10c and 10d transmit the non-lighting signal to the automatic shutoff member 50. The automatic shut-off member 50 that has received the signal transmits a stop signal to the power supplies 9a and 9b. As a result, power supply 9
a, 9b to dielectric barrier discharge lamps 1a, 1b, 1
The voltage applied to c and 1d is automatically cut off.

(6) Therefore, it is possible to prevent an operator from accidentally touching the dielectric barrier discharge lamp during lighting of the dielectric barrier discharge lamp, which is difficult to visually identify, and to provide a safe dielectric barrier discharge for the operator. A lamp device was obtained.

In the second embodiment, the display member 40 similar to that of the first embodiment may be provided instead of the automatic shutoff member 50, or the display member 40 and the automatic shutoff member 50 may be provided at the same time. .

In the first embodiment, the display member 4
Instead of 0, an automatic shutoff member 50 similar to that of the second embodiment may be provided, or the display member 40 and the automatic shutoff member 50 may be provided at the same time.

[0058]

As described above, according to the present invention, the following effects can be obtained. According to the invention of claim 1 of the present invention, an outer tube and an inner tube whose outer shapes are substantially cylindrical are coaxially arranged, and a hollow cylindrical discharge space having both ends closed is formed between the two tubes. The discharge vessel is filled with a discharge gas that forms excimer molecules by dielectric barrier discharge, an inner electrode made of metal is provided on at least a part of the inner wall of the inner tube, and at least a part of the outer wall of the outer tube is provided. , Light-transmitting to light emitted from the excimer molecule, and also serving as a dielectric of the dielectric barrier discharge, and light-transmitting to light emitted from the excimer molecule A dielectric barrier discharge lamp device comprising: a dielectric barrier discharge lamp in which a conductive mesh electrode is provided on at least a part of a dielectric; and a power supply for performing the dielectric barrier discharge. Et a detecting means for detecting light of the emitted 200nm or more wavelength, and detected by the value and the detection means to a preset 2
A comparing means for comparing the intensity of light having a wavelength of 00 nm or more with a value of light having a wavelength of 200 nm or more detected by the detecting means is provided when the intensity of the light having a wavelength of 200 nm or more is equal to or less than a preset value. And a lamp lighting detection device of the dielectric barrier discharge lamp device. Here, the preset value is
The intensity of light having a wavelength of 200 nm or more emitted when the dielectric barrier discharge lamp is turned on.

(1) Accordingly, the lighting state of the dielectric barrier discharge lamp can be easily and reliably known. (2) In addition, it is possible to prevent a worker from accidentally touching the dielectric barrier discharge lamp during lighting of the dielectric barrier discharge lamp, which is difficult to visually recognize, and to provide a safe dielectric barrier discharge lamp device. Have.

According to a second aspect of the present invention, there is provided a dielectric barrier discharge lamp device, comprising: detecting means for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp; 20 detected by the detection means
Comparing means for comparing the intensity of the light having a wavelength of 0 nm or more with the value of the intensity of the light having a wavelength of 200 nm or more detected by the detecting means; This is a lamp lighting detection device of a dielectric barrier discharge lamp device provided with means for automatically shutting off a voltage.

(3) Therefore, there is an effect that a dielectric barrier discharge lamp device which is safe for a worker and highly reliable can be obtained.

According to a third aspect of the present invention, in the first or the second aspect of the present invention, the detecting means for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp is a silicon photodetector. Diode, PI
It is constituted by a photodiode such as an N silicon photodiode or a GaAsP photodiode.

Accordingly, in addition to having the same advantages as the first or second aspect of the present invention, (4) light in the wavelength range of 200 nm to 700 nm can be efficiently detected, and the detector can be reduced in size. It has the effect of becoming.

According to a fourth aspect of the present invention, there is provided the lamp cooling member according to any one of the first, second and third aspects of the present invention, the lamp cooling member having a recess formed on the inner surface and communicating with the outside. A part of an outer wall of an outer tube of the dielectric barrier discharge lamp is provided in a lamp house having a light extraction window for extracting light emitted from the excimer molecule facing the inner surface of the lamp cooling member. The dielectric barrier discharge lamp is installed so as to be in contact with the depression of the cooling member, and a detection unit having a window and detecting light having a wavelength of 200 nm or more is provided in the external communication port of the depression ,
Claim 1 wherein the optical axis of the detection means and the central axis of the dielectric barrier discharge lamp are orthogonal to each other.
In addition to having the same advantages as the second or third aspect of the present invention, the following effects are provided.

(7) Since the detection means enters the shadow of the dielectric barrier discharge lamp, the detection means is less susceptible to visible light or the like for general illumination. This has the effect that it can be performed with reliability.

According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the radius of the inner electrode of the dielectric barrier discharge lamp is R, and the shortest distance between the window of the detecting means and the inner electrode. Is L, the solid angle looking into the dielectric barrier discharge lamp from the window of the detection means is πR ² / L
^Since it is set to ² or less, the following effects are obtained in addition to the effects similar to those of the fourth aspect of the present invention.

(8) That is, since the detection means enters the shadow of the inner electrode which does not transmit light, it is less susceptible to visible light for general illumination and the like, and therefore, the lighting state of the dielectric barrier discharge lamp Can be confirmed with higher reliability.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a first embodiment of a dielectric barrier discharge lamp device of the present invention.

FIG. 2 is an explanatory view of an embodiment of a dielectric barrier discharge lamp used in the present invention.

FIG. 3 is an explanatory view of a dielectric barrier discharge lamp device according to a second embodiment of the present invention.

FIG. 4 is a graph for explaining the principle of the dielectric barrier discharge lamp device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Discharge container 1a, 1b, 1c, 1d Dielectric barrier discharge lamp 2 Inner tube 3 Outer tube 4 Electrode 5 Inner electrode 6 Getter 7 Getter room 8 Discharge space 9, 9a, 9b Power supply 10a, 10b, 10c, 10d Comparison member 14a , 14b, 14c, 14d Photodiodes 30a, 30b Holes 31 Light extraction window 32 Gas inlet 33 Inert gas outlet 34 Cooling blocks 35a, 35b Side plate 36 Spaces 37a, 37b, 37c, 37d Light introducing holes 38a, 38b, 38c, 38d Depressed portion 39a, 39b, 39c, 39d External communication port 40 Display member 41 Glass for liquid crystal 42 Sample transport member 42 50 Automatic shut-off member

────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor, Fumitoshi Takemoto 1194, Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd. Examiner Hiroshi Ogawa (56) References (58) Fields investigated (Int. Cl. ⁶ , DB name) H01J 65/00 G21K 5/00

Claims (5)

(57) [Claims] 1. A discharge vessel in which a hollow cylindrical discharge space having both ends closed is formed by arranging an outer tube and an inner tube, both of which are substantially cylindrical in shape, coaxially. A discharge gas for forming excimer molecules by body barrier discharge is filled, an inner electrode made of metal is provided on at least a part of an inner wall of the inner tube, and at least a part of an outer wall of the outer tube is formed from the excimer molecule. Light transmissive to the emitted light, and
A dielectric barrier discharge lamp, which also serves as a dielectric of the dielectric barrier discharge, wherein a conductive mesh electrode is provided on at least a part of the dielectric that is light-transmissive to light emitted from the excimer molecule; A dielectric barrier discharge lamp device comprising: a power source for performing the dielectric barrier discharge;
Detecting means for detecting light of the above wavelength, comparing means for comparing a preset value with a value of light intensity of 200 nm or more detected by the detecting means, and 200 nm or more detected by the detecting means A dielectric barrier discharge lamp device comprising a display means for displaying the state of light having a wavelength equal to or less than a preset value. 2. A discharge in which excimer molecules are formed by a dielectric barrier discharge in a discharge vessel having a hollow cylindrical discharge space formed by coaxially arranging an outer tube and an inner tube having substantially cylindrical outer shapes. And an inner electrode made of metal is provided on at least a part of the outer wall of the inner tube, and at least a part of the outer wall of the outer tube is light-transmissive to light emitted from the excimer molecule. And
A dielectric barrier discharge lamp, which also serves as a dielectric of the dielectric barrier discharge, wherein a conductive mesh electrode is provided on at least a part of the dielectric that is light-transmissive to light emitted from the excimer molecule; A dielectric barrier discharge lamp device comprising: a power supply for performing the dielectric barrier discharge;
Detecting means for detecting light of the above wavelength, comparing means for comparing a preset value with a value of light intensity of 200 nm or more detected by the detecting means, and 200 nm or more detected by the detecting means A dielectric barrier discharge lamp device, further comprising means for automatically cutting off a voltage applied to the dielectric barrier discharge lamp when the intensity of light having a wavelength is equal to or less than a preset value. 3. The dielectric barrier discharge according to claim 1, wherein the detector for detecting light having a wavelength of 200 nm or more emitted from the dielectric barrier discharge lamp is a photodiode. Lamp device. 4. A lamp having a lamp cooling member formed on an inner surface thereof and having a recess communicating with the outside, and a light extraction window for extracting light emitted from the excimer molecule facing the inner surface of the lamp cooling member. In the house, the dielectric barrier discharge lamp is installed such that a part of an outer wall of an outer tube of the dielectric barrier discharge lamp contacts a recess of the lamp cooling member. A detecting means for detecting light having a wavelength of is provided in the external communication port of the recess , and an optical axis of the detecting means and a central axis of the dielectric barrier discharge lamp are orthogonal to each other. The dielectric barrier discharge lamp device according to any one of claims 1, 2 and 3. 5. When the radius of the inner electrode of the dielectric barrier discharge lamp is R and the shortest distance between the window of the detector and the inner electrode is L, the dielectric barrier discharge from the window of the detector is performed. 5. The dielectric barrier discharge lamp device according to claim 4, wherein a solid angle for viewing the lamp is not more than πR ² / L ² .