CN101847564A

CN101847564A - Excimer lamp

Info

Publication number: CN101847564A
Application number: CN201010150661A
Authority: CN
Inventors: 竹添法隆
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2009-03-23
Filing date: 2010-03-23
Publication date: 2010-09-29
Also published as: TWI449083B; JP2010225343A; TW201036028A; KR101301806B1; JP5201042B2; KR20100106207A

Abstract

A kind of Excimer lamp is provided, form whole shape electrode in the end of a pair of transmitance electrode, inner face at discharge vessel is formed with the starting auxiliary electrode, the inner surface of exporting a side at the non-light of discharge vessel forms reflectance coating, be formed with the aperture that light detection is used in the end of this reflectance coating, it is characterized by: on above-mentioned whole shape electrode, form the dendritic electrode that extends along tube axial direction, above-mentioned starting auxiliary electrode is configured to a part and is overlapped in this dendritic electrode, extend to the creeping discharge that whole shape electrode taken place from above-mentioned starting auxiliary electrode thus and can not involve, can correctly carry out light detection to above-mentioned aperture.

Description

Excimer lamp

Technical field

The present invention relates to a kind of Excimer lamp that in discharge vessel, forms reflectance coating, relate in particular to a kind of Excimer lamp that has applicable to the aperture of the monitoring usefulness that the light quantity device for monitoring is set.

Background technology

As existing Excimer lamp, the different shape of dual pipe type, cylinder type, square etc. is arranged by motion.These Excimer lamps, tube shape is not all by the high outputization of expectation.As the technology that realizes this high outputization, known have a formation Excimer lamp that reflectance coating became in discharge vessel, for example shown in the TOHKEMY 2007-335350 communique.

According to the prior art,, be formed on part except the light emission face by the formed reflectance coating of particulate of the silicon dioxide main body of light reflection ultraviolet at the inner face of the discharge vessels such as square of Excimer lamp.In addition, be provided with pair of external electrodes at the outer surface of the light emission face of this discharge vessel and the outer surface of opposition side thereof.Be formed at the outer electrode of this light emission face, in order to bring into play the so-called original function of output light, the transmitance electrode that for example uses lattice-shaped ground coating metal to stick with paste.

On the one hand, as being formed at the outer electrode of not exporting with respect to the outer surface of a side of the light of above-mentioned light emission face, on function, do not need transmitance, a lot of situations, from the viewpoint of the stability of the simplification of manufacturing process, the discharge that in this discharge vessel, taken place etc., similarly carry out former state with above-mentioned light emission face and use the transmitance electrode.

In addition, in Excimer lamp, shown in TOHKEMY 2005-322632 communique (Fig. 3), known have at the additional whole shape electrode in the end of transmitance electrode.In this communique, be directed on its action effect and might not clearly put down in writing, but the whole shape electrode of this end, guarantee the illuminance uniformity of tube axial direction, can expect to expand the effect of effective light-emitting zone.

That is, in the end of transmitance electrode, and compare near the central portion, the ultraviolet light intensity that is radiated must reduce.This ultraviolet light intensity reduces, it is even at effective light-emitting zone uneven illumination can to take place, so the shortcoming of the length that can't guarantee effective light-emitting zone self is fully arranged, and to guarantee this effective light-emitting zone fully, then can produce the elongated problem of overall length of Excimer lamp, and externally the end side of electrode is provided with whole shape electrode, and expectation can address these problems.

This is to consider that power-discharging density in whole shape electrode part than taller at the power-discharging density of transmitance electrode, prevents to reduce in the illumination of electrode tip thus, and its result can be implemented in the illumination homogenizing of effective light-emitting zone.

Also have, also known purpose because of the startability that improves Excimer lamp is provided with conductive material (starting auxiliary electrode) at the discharge space inner face.As this kind prior art, Japanese kokai publication hei 8-329903 communique is for example arranged.According to this communique, record near a square end portion of the pair of electrodes of being located at the discharge vessel outer surface promptly at this discharge vessel inner face, the situation of conductive material as the starting auxiliary electrode is set.Thus, by the discharge vessel inner face at Excimer lamp, between starting auxiliary electrode and outer electrode creeping discharge takes place, thus the discharge ionization voltage of the main discharge in the discharge vessel that is reduced between outer electrode to be taken place by expectation.Its result is even have the effect that also can positively light Excimer lamp with low starting voltage.

, between this starting auxiliary electrode and outer electrode, the creeping discharge that is taken place at the discharge vessel inner face, not only when the starting of Excimer lamp, after generally light a lamp the time, also continue generation.Owing to the creeping discharge of this continuation generation or the starting auxiliary electrode itself that is disposed, the even problem of uneven illumination of the tube axial direction that causes this Excimer lamp is arranged.Especially if will start near the axial central portion that auxiliary electrode is disposed at Excimer lamp, then this starting auxiliary electrode self becomes shadow with respect to radiating light, and become creeping discharge and be present near the central portion, and the problem of illuminance uniformity of the tube axial direction of remarkable this Excimer lamp of damage is arranged.

Therefore, when this kind starting auxiliary electrode is set,, be preferably disposed on axial end side in order not influence the uniformity of light of radiating from this Excimer lamp.

On the other hand, also known monitoring is from the situation of the light quantity of the ultraviolet light that Excimer lamp radiated.As this kind technology, for example known have a TOHKEMY 2005-322632 communique etc.In this communique, record in order to monitor the light quantity of the ultraviolet light that radiates from Excimer lamp, near the axial end of the non-transmitance electrode of this Excimer lamp, be provided with aperture.So aperture being disposed near the end of Excimer lamp, is in order to keep not becoming obstruction for from the basis of the axial illuminance uniformity of the light that this Excimer lamp radiated as far as possible.

According to as above-mentioned several prior aries, can suppose a pair of transmitance electrode that whole shape electrode become is set, is located at the starting auxiliary electrode in the discharge vessel and is formed in the Excimer lamp of reflectance coating of the part except the light emission face of discharge vessel inner surface having in the end, when forming light detection and use aperture, the structure that forms this aperture in the end of the tube axial direction of above-mentioned reflectance coating is what expect easily.

Patent documentation 1: TOHKEMY 2007-335350 communique

Patent documentation 2: Japanese kokai publication hei 8-329903 communique

Patent documentation 3: TOHKEMY 2005-322632 communique

Fig. 3 is the skeleton diagram of the structure of these existing Excimer lamps of expression, and Fig. 3 (a) is a vertical view, and Fig. 3 (b) is its A-A profile.Square discharge tube 1 has the discharge vessel 11 that is made of quartz glass, and the outer surface on these 11 opposed opposites of discharge vessel for example is formed with the outer electrode 2 of the transmitance that lattice-shaped ground forms with metal paste etc.In addition, be formed with whole shape electrode 3 in the end of this outer electrode 2.

On the one hand, at the inner face of the above-mentioned discharge vessel 11 of the part that is equivalent to be formed with above-mentioned whole shape electrode 3, be overlapped in the mode of this integral body shape electrode 3 with a part, configuration is formed with starting auxiliary electrode 6.In addition, in the part except the light emission face of these discharge vessel 11 inner faces,, for example be formed with the reflectance coating that particulate constituted 4 by the silicon dioxide main body in order to reflect the ultraviolet light that discharge took place by 2 of this outer electrodes.

In addition, on this reflectance coating 4, the ultraviolet light that takes place in order to monitor in discharge vessel 11 and be formed with the aperture 5 of output light, but this aperture 5 not to be to influence the mode of illuminance uniformity as far as possible is formed near the end of tube axial direction of discharge vessel 11.

Fig. 4 is near the creeping discharge the discharge vessel end of above-mentioned Excimer lamp is watched in explanation from the inner side of discharge vessel a concept map.

If light Excimer lamp, then at the inner face of discharge vessel 11, creeping discharge 12 occurs between above-mentioned starting auxiliary electrode 6 and whole shape electrode 3 or the outer electrode 2.This creeping discharge 12 is in order easily to take place with low-voltage when Excimer lamp is lit a lamp, thereby this creeping discharge 12 becomes explosive train and can reduce the some modulating voltage of Excimer lamp.

Yet, as above-mentioned ground, also take place during this creeping discharge 12 lighting a lamp usually except the starting of Excimer lamp the time, the aperture 5 that near the end that makes this creeping discharge 12 also can be discharged to be located at discharge vessel 11 light detection is used, its with mix from the quasi-molecule light that should monitor of this aperture 5, make this creeping discharge 12 become obstruction, the problem that can't correctly measure the light quantity of radiating from Excimer lamp is arranged.

Summary of the invention

In view of above-mentioned prior art problems, in the present invention, Excimer lamp, end at a pair of transmitance outer electrode of the outer surface that is arranged at discharge vessel is provided with whole shape electrode, being formed with the starting auxiliary electrode, be formed with reflectance coating at the inner face of above-mentioned discharge vessel at the inner surface of above-mentioned discharge vessel with the overlapping mode of this integral body shape electrode part, and, near the end of the tube axial direction of this reflectance coating, be formed with the aperture that light detection is used, it is characterized by:

Form the dendritic electrode that extends along tube axial direction on above-mentioned whole shape electrode, above-mentioned starting auxiliary electrode is configured to a part and is overlapped in this dendritic electrode.

In addition, above-mentioned Excimer lamp is characterized by, above-mentioned aperture by by notch part, and the ora terminalis of above-mentioned whole shape electrode separate and form, described notch part is formed along the direction of principal axis of this reflectance coating and extends and open-ended.

By adopting this kind structure, can far dispose the starting auxiliary electrode with aperture apart from light detection as far as possible, can not be subjected to can carrying out light detection in the influence of starting the creeping discharge that is taken place between auxiliary electrode and outer electrode, performance can correctly detect the effect of the ultraviolet light that radiates from this Excimer lamp.

In addition, the notch part by aperture being extended the reflectance coating end and the ora terminalis of whole shape electrode separate and form, and also have the effect that easily forms aperture thus.

Description of drawings

Fig. 1 is the skeleton diagram of structure of the Excimer lamp of expression the 1st embodiment of the present invention.

Fig. 2 is the concept map of structure of the Excimer lamp of expression the 2nd embodiment of the present invention.

Fig. 3 is the concept map of the structure of the existing Excimer lamp of expression.

Fig. 4 is the concept map of the creeping discharge watched from the inner surface of the discharge tube of existing Excimer lamp.

Among the figure, 1: the square discharge tube; 2: outer electrode; 3: whole shape electrode; 4: reflectance coating; 5: aperture; 6: the starting auxiliary electrode; 8: dendritic electrode; 10: notch part; 11: discharge vessel.

Embodiment

Fig. 1 is the skeleton diagram of the 1st embodiment of expression Excimer lamp of the present invention, and Fig. 1 (a) is a vertical view, and Fig. 1 (b) is its B-B profile.

In the drawings, on the whole shape electrode (べタ Zhuan Electricity Very) 3 of the end that is formed at transmitance electrode 2, form the

dendritic electrode

8,8 that extend towards the direction opposite with the transmitance electrode of tube axial direction lower end thereon.

In addition, at the inner face of the above-mentioned discharge vessel 11 of the part that is equivalent to be formed with this dendritic electrode 8, overlapping its is formed with starting auxiliary electrode 6 partially.Be directed to other structures, same as shown in Figure 3.

This

dendritic electrode

8,8, owing to have the effect that increases the distance L between aperture 5 and the starting auxiliary electrode 6, even thereby aperture 5 is disposed near the end to the few Excimer lamp of light distribution characteristic influence, the creeping discharge that when lamp is lighted, is taken place to outer electrode 2 from starting auxiliary electrode 6, can not feed through to above-mentioned aperture 5 yet, can not have influence on the light quantity of monitoring from this aperture 5, the action effect from the radiating light of lamp can be correctly monitored in performance.

Fig. 2 is the skeleton diagram of the 2nd embodiment of expression Excimer lamp of the present invention.

The basic structure of the 2nd embodiment promptly, is identical with above-mentioned the 1st embodiment relevant for whole shape electrode 3 with

dendritic electrode

8,8 and starting auxiliary electrode 6, and only the shape of aperture 5 is inequality.

In the present embodiment, on the reflectance coating 4 of discharge vessel 11 inner faces, be formed with axially the notch part 10 that extends and be formed with opening in its end, above-mentioned aperture 5 is that the ora terminalis 3a by this notch part 10 and above-mentioned whole shape electrode 3 is spaced and forms.

Though above-mentioned aperture 5 is in advance the mask band to be pasted in the discharge vessel 11, form after the reflectance coating 4, be with formedly by peeling off this, but owing to form by the notch part 10 that extends in the mode of carrying out opening in the end of reflectance coating 4, thereby it makes and becomes easy.

In addition, in the explanation of the foregoing description,, be not limited thereto, can adopt the different shape of round tube shape etc. certainly though discharge vessel 11 is illustrated as the square tube shape.

Claims

1. Excimer lamp, end at a pair of transmitance outer electrode of the outer surface that is arranged at discharge vessel is provided with whole shape electrode, at the inner face of above-mentioned discharge vessel to be formed with the starting auxiliary electrode with the overlapping mode of this integral body shape electrode part, inner surface at above-mentioned discharge vessel is formed with reflectance coating, and, near the end of the tube axial direction of this reflectance coating, be formed with the aperture that light detection is used, it is characterized by:

2. Excimer lamp as claimed in claim 1 is characterized by:

Above-mentioned aperture by by notch part, and the ora terminalis of above-mentioned whole shape electrode separate and form, described notch part is formed along the direction of principal axis of this reflectance coating and extends and open-ended.