201036028 六、發明說明 【發明所屬之技術領域】 本發明是關於一種在放電容器內形成反射膜的準分子 燈，尤其是，關於一種具有可適用於設置光量監測的裝置 的監測用的採光口的準分子燈者。 【先前技術】 0 作爲傳統的準分子燈，被提案有雙重管型、圓筒型、 方型等的各種形狀。此些準分子燈，是不管形狀都被期待 高輸出化。作爲實現此種高輸出化的技術，眾知有在放電 容器內形成反射膜所成的準分子燈，例如表示於日本特開 2007-3 3 5 3 5 0號公報者。 依照該傳統技術，在準分子燈的方型等放電容器的內 面，有反射紫外光的二氧化矽主體的微粒子所形成的反射 膜被形成於除了光放射面以外的部分。又，在該放電容器 〇 的光放射面的外表面，及其相反側的外表面設有一對外部 電極。形成於該光放射面的外部電極，是爲了發揮取出光 的所謂原來的功能，例如使用著格柵狀地塗佈金糊的光透 射性電極。 一方面，作爲形成於不取出相對於上述光放射面的光 的一側的外表面的外部電極，在功能不需要爲光透射性， 惟很多情形，由製程的簡化，在該放電容器內所發生的放 電的穩定性等的觀點，與上述光放射面同樣地進行著仍然 使用光透射性電極。 -5- 201036028 又’在準分子燈中’如日本特開2005_322632號公報 (第3圖）所示地，眾知在光透射性電極的端部附加整體 狀電極者。在該公報中，針對於其作用效果上並不一定明 記，惟該端部的整體狀電極，是確保管軸方向的照度均勻 性，可期待擴展有效發光領域的效果。 亦即，在光透射性電極的端部，與中央部附近相比較 ，所放射的紫外光強度必定降低。降低該紫外的強度，在 有效發光領域會發生照度不均勻，所以有無法充分地確保 有效發光領域本體的長度的缺點，而欲充分地確保該有效 發光領域，則會產生準分子燈的全長度變長的問題，而在 外部電極的端部側設置整體狀電極，期待可解決此些問題 者。 此爲，整體狀電極部分放電密度比光透射性電極的放 電密度還要高，藉此防止在電極端部的降低照度，結果， 可達成在有效發光領域的照度均勻化。 還有，眾知以改善準分子燈的起動性的目的，在放電 空間內面也設置導電性物質（起動補助電極）。作爲此種 傳統技術，例如有日本特開平8 - 3 2 9 9 0 3號公報。依照該 公報，記載在設於放電容器外表面的一對電極的一方端部 近旁而在該放電容器內面，設置導電性物質，作爲起動補 助電極的情形。藉此，位在準分子燈的放電容器內面，在 起動補助電極與外部電極之間會發生沿表面放電，藉此被 期待降低在外部電極間所發生的放電容器內的主放電的放 電開始電壓的情形。結果，具有在低起動電壓也可確實地 -6- 201036028 點燈準分子燈的效果。 可是，在該起動補助電極與外部電極之間，在放電容 器內面所發生的沿表面放電，是不僅在準分子燈的起動時 ’在之後的一般點燈時，也繼續發生。藉由該繼續所發生 的沿表面放電，或是所配置的起動補助電極本身，有所謂 產生該準分子燈的管軸方向的照度不均勻的問題。尤其是 若將該起動補助電極配置於準分子燈的軸方向的中央部附 0 近，則該起動補助電極本體對於放射光成爲影子，且成爲 沿表面放電存在於中央部附近，而有所謂顯著損及該準分 子燈的管軸方向的照度均勻性的問題。 因此，設置此種起動補助電極時，不會影響到從該準 分子燈所放射的光的均勻性的方式，盡量設於軸方向的端 部側較佳。 又一方面，也眾知監測從準分子燈所放射的紫外光的 光量的情形。作爲此種技術，例如眾知有日本特開2 0 0 5 -〇 3 22632號公報等。在該公報中記載著爲了監測從準分子燈 所放射的紫外光的光量，在該準分子燈的非光透射性電極 的軸方向的端部附近設有採光口者。如此地將採光口配置 於準分子燈的端部近旁，在保持對於從該準分子燈所放射 的光的軸方向的照度均勻性上，盡量作成不會有阻礙。 由如上述的幾種傳統技術，就可假設在具有在端部設 置整體狀電極所成的一對光透射性電極，及設於放電容器 內的起動補助電極，及形成於除了放電容器內表面的光放 射面以外的部分的反射膜的準分子燈中，在上述反射膜的 201036028 管軸方向的端部作成如形成該採光口的構成的情形爲容易 地想得到者。 專利文獻1:日本特開2007-335350號公報 專利文獻2 :日本特開平8-329903號公報 專利文獻3 :日本特開2005-322632號公報 【發明內容】 第3圖是表示此些傳統的準分子燈的構成的槪略圖， 第3(a)圖是俯視圖，而第3(b)圖是其A-A斷面圖。 方型放電管1是具有石英玻璃所成的放電容器1 1，而在相 對於該放電容器1 1的一對的一面的外表面，例如以金糊 等形成有格柵狀地所形成的光透射性的外部電極2。又， 在外部電極2的端部形成有整體狀電極3。 一方面，在相當於形成有上述整體狀電極3的部分的 上述放電容器11的內面，一部分重疊於該整體狀電極3 的方式，配置形成有起動補助電極6。又，在除了該放電 容器11內面的光放射面以外的部分，爲了反射藉由該外 部電極2間的放電所發生的紫外光，例如形成有二氧化矽 主體的微粒子所成的反射膜4。 又’在反射膜4，爲了監測在放電容器1 1內所發生的 紫外光形成有取出光的採光口 5，惟該採光口 5是盡量不 會影響到照度均勻性的方式，形成於放電容器1 1的管軸 方向的端部近旁。 第4圖是說明從放電容器內部側觀看上述準分子燈的 -8 - 201036028 放電容器端部近旁的沿表面放電的槪念圖。 當點燈準分子燈，則在放電容器1 1的內面，沿表面 放電12發生在上述起動補助電極6，與整體狀電極3或外 部電極2之間。該沿表面放電1 2是在點燈準分子燈時以 低電壓容易地發生之故，因而該沿表面放電12成爲火種 而可降低準分子燈的點燈電壓。 然而，如上述地，該沿表面放電12是在除了準分子 0 燈的起動時以外的通常點燈時也發生，使得此沿表面放電 1 2也會跑到設於放電容器1 1的端部近旁的光電監測用的 採光口 5的情形，而此與來自該採光口 5的須監測的準分 子光混在一起，使得該沿表面放電1 2成爲阻礙，有無法 正確地測出從準分子燈所放射的光量的問題。 鑑於上述傳統技術的問題處，在本發明中，一種準分 子燈，屬於在設於放電容器的外表面的一對光透射性外部 電極的端部設有整體狀電極，而在上述放電容器的內面與 〇 該整體狀電極以一部分重疊的方式形成有起動補助電極， 在上述放電容器的內表面形成有反射膜，而且在該反射膜 的管軸方向的端部近旁形成有光電監測用的採光口所成的 準分子燈，其特徵爲： 在上述整體狀電極形成朝管軸方向延伸的枝狀電極， 上述起動補助電極是一部分重疊於該枝狀電極的方式所配 置。 又，上述採光口是藉由以朝該反射膜的軸方向延伸而 在端部進行開口的方式所形成的缺口部，及上述整體狀電 -9- 201036028 極的端緣，被隔開所形成。 藉由採用此種構成，成爲可將起動補助電極盡量較遠 地配置於距光電監測用的採光口，不會受到在起動補助電 極與外部電極間所發生的沿表面放電的影響而可進行光電 監測，發揮正確地可檢測出從該準分子燈所放射的紫外光 的效果。 又，藉由將採光口以延伸到反射膜端部的缺口部與整 體狀電極的端緣所隔開所形成，藉此也有容易形成採光口 0 的效果。 【實施方式】 第1圖是表示本發明的準分子燈的第1實施例的槪略 圖，第1 ( a)圖是俯視圖，而第1 ( b )圖是其B_B斷面 圖。 在圖中，在形成於光透射性電極2的端部的整體狀電 極3，一體地形成有在其上下端朝與管軸方向的光透射性 〇 電極相反方向延伸的枝狀電極8、8。 又，在相當於形成有此枝狀電極8的部分的上述放電 容器11的內面，重疊其一部分地形成有整體狀電極6。針 對於其他構成，與表示於第3圖者同樣。 該枝狀電極8、8，是具有增加採光口 5與起動補助電 極6之間的距離L的作用之故，因而即使將採光口 5配置 於對配光特性影響少的準分子燈的端部近旁，在燈點亮時 從起動補助電極3朝外部電極2所發生的沿表面放電，也 -10- 201036028 不會及於上述採光口 5，不會影響到從該採光口 5欲監測 的光量，發揮可正確地監測來自燈的放射光的作用效果。 第2圖是表示本發明的準分子燈的第2實施例的槪略 圖。 該第2實施例的基本上構成，亦即，有關於整體狀電 極3與枝狀電極8、8及起動補助電極6爲與上述第1實 施例同樣，僅採光口 5的形狀不相同。 0 在本實施例中，在放電容器11內面的反射膜4，形成 有朝軸方向延伸在其端部形成有開口的缺口部1 〇，上述採 光口 5是藉由該缺口部10，與上述整體狀電極3的端緣 3 a被隔開所形成。 上述採光口 5是事先將遮罩帶黏貼於放電容器11內 ，形成反射膜4之後，藉由剝離該帶所形成者，惟在反射 膜4的端部作成開口的方式所延伸的缺口部10所形成之 故，因而該製作成爲容易。 〇 又，在上述實施例的說明，放電容器11是說明作爲 方型管形狀，惟並不被限定於此者，當然可採用圓型管形 狀等的各種形狀。 【圖式簡單說明】 第1(a)圖及第1(b)圖是表示本發明的第1實施 例的準分子燈的構成的槪略圖。 第2圖是表示本發明的第2實施例的準分子燈的構成 的槪念圖。 -11 - 201036028 第3 ( a )圖及第3 ( b )圖是表示傳統的準分子燈的 構成的槪念圖。 第4圖是表示從傳統的準分子燈的放電管的內表面觀 看的沿表面放電的槪念圖。 【主要元件符號說明】 1 :方型放電管 2 :外部電極 3 :整體狀電極 4 :反射膜 5 :採光口 6 :起動補助電極 7 :枝狀電極 1 0 :缺口部 1 1 :放電容器BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an excimer lamp for forming a reflective film in a discharge vessel, and more particularly to a lighting port for monitoring having a device suitable for setting light amount monitoring. Excimer lamp. [Prior Art] 0 As a conventional excimer lamp, various shapes such as a double tube type, a cylinder type, and a square type are proposed. These excimer lamps are expected to have high output regardless of the shape. As a technique for realizing such high output, an excimer lamp in which a reflective film is formed in a discharge container is known, and is disclosed, for example, in Japanese Laid-Open Patent Publication No. 2007-3 3 5 3 0. According to this conventional technique, a reflective film formed of fine particles of a ceria main body reflecting ultraviolet light is formed on a portion other than the light radiating surface inside the discharge vessel such as a square of an excimer lamp. Further, a pair of external electrodes are provided on the outer surface of the light-emitting surface of the discharge vessel , and on the outer surface on the opposite side. The external electrode formed on the light-emitting surface is a so-called original function for extracting light, and for example, a light-transmitting electrode coated with a gold paste in a grid shape is used. On the one hand, as an external electrode formed on the outer surface of the side on which the light with respect to the light-emitting surface is not taken out, the function does not need to be light-transmitting, but in many cases, the simplification of the process is performed in the discharge vessel. From the viewpoint of the stability of the generated discharge and the like, the light-transmitting electrode is still used in the same manner as the above-described light-emitting surface. -5-201036028 Further, as shown in Japanese Laid-Open Patent Publication No. 2005-322632 (Fig. 3), it is known that a whole electrode is attached to the end of the light-transmitting electrode. In this publication, the effect of the operation is not necessarily clarified, but the uniform electrode at the end portion ensures uniformity of illuminance in the tube axis direction, and it is expected to expand the effect in the field of effective light emission. That is, at the end of the light-transmitting electrode, the intensity of the emitted ultraviolet light is necessarily lowered as compared with the vicinity of the central portion. When the intensity of the ultraviolet light is lowered, illuminance unevenness occurs in the field of effective light emission, so that there is a disadvantage that the length of the body of the effective light-emitting field cannot be sufficiently ensured, and in order to sufficiently secure the effective light-emitting field, the full length of the excimer lamp is generated. The problem of lengthening is to provide an integral electrode on the end side of the external electrode, and it is expected that those problems can be solved. Therefore, the discharge density of the integral electrode portion is higher than that of the light-transmitting electrode, thereby preventing the illuminance at the end of the electrode from being lowered, and as a result, uniformity of illuminance in the field of effective light emission can be achieved. Further, it is known that a conductive material (starting auxiliary electrode) is also provided on the inner surface of the discharge space for the purpose of improving the startability of the excimer lamp. As such a conventional technique, for example, Japanese Laid-Open Patent Publication No. Hei 8-2-3999. According to this publication, it is described that a conductive material is provided on the inner surface of the discharge vessel in the vicinity of one end portion of the pair of electrodes provided on the outer surface of the discharge vessel as a starting auxiliary electrode. Thereby, the inner surface of the discharge vessel of the excimer lamp is discharged along the surface between the starting auxiliary electrode and the external electrode, whereby it is expected to reduce the discharge of the main discharge in the discharge vessel occurring between the external electrodes. The case of voltage. As a result, it has the effect of lighting the excimer lamp at a low starting voltage -6-201036028. However, the surface discharge occurring between the starting auxiliary electrode and the external electrode on the inner surface of the discharge capacitor continues to occur not only at the time of starting the excimer lamp but also after the normal lighting. The surface discharge caused by the continuation or the priming auxiliary electrode itself is arranged to have a problem that the illuminance in the tube axis direction of the excimer lamp is uneven. In particular, when the start-up auxiliary electrode is disposed in the vicinity of the central portion of the excimer lamp in the axial direction, the start-up auxiliary electrode body has a shadow on the emitted light, and the surface discharge is present in the vicinity of the center portion, and there is a so-called remarkable The problem of uniformity of illuminance in the tube axis direction of the excimer lamp is impaired. Therefore, when such a starter auxiliary electrode is provided, the uniformity of the light emitted from the quasi-molecular lamp is not affected, and it is preferable to provide the end portion in the axial direction as much as possible. On the other hand, it is also known to monitor the amount of light of ultraviolet light emitted from an excimer lamp. As such a technique, for example, Japanese Laid-Open Patent Publication No. 2000-A No. 3 22632 and the like are known. In this publication, in order to monitor the amount of ultraviolet light emitted from the excimer lamp, a lighting port is provided in the vicinity of the end portion of the non-light transmitting electrode of the excimer lamp in the axial direction. In this manner, the lighting opening is disposed in the vicinity of the end of the excimer lamp, and the illuminance uniformity in the axial direction of the light emitted from the excimer lamp is maintained as much as possible without hindrance. According to several conventional techniques as described above, it is assumed that a pair of light transmissive electrodes formed by providing integral electrodes at the ends, and a starting auxiliary electrode provided in the discharge vessel, and formed on the inner surface of the discharge vessel In the excimer lamp of the reflective film of the portion other than the light-emitting surface, it is easy to obtain a configuration in which the light-emitting port is formed at the end portion of the reflecting film in the direction of the tube axis of 201036028. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. A schematic diagram of the constitution of the molecular lamp, Fig. 3(a) is a plan view, and Fig. 3(b) is a cross-sectional view taken along line AA. The square discharge tube 1 is a discharge vessel 1 having quartz glass, and is formed on the outer surface of a pair of surfaces of the discharge vessel 1 1 by, for example, a gold paste or the like. Transmissive external electrode 2. Further, the integral electrode 3 is formed at the end of the external electrode 2. On the other hand, the start assist electrode 6 is disposed so as to partially overlap the inner surface of the discharge vessel 11 corresponding to the portion in which the integral electrode 3 is formed. Further, in a portion other than the light emitting surface of the inner surface of the discharge vessel 11, in order to reflect ultraviolet light generated by discharge between the external electrodes 2, for example, a reflective film 4 formed of fine particles of a cerium oxide main body is formed. . Further, in the reflective film 4, in order to monitor the ultraviolet light generated in the discharge vessel 1 1, a light collecting opening 5 for taking out light is formed, but the lighting opening 5 is formed in the discharge vessel in such a manner as not to affect the uniformity of the illuminance as much as possible. 1 1 is near the end of the tube axis direction. Fig. 4 is a view showing the surface discharge near the end of the discharge vessel of the excimer lamp -8 - 201036028 viewed from the inner side of the discharge vessel. When the excimer lamp is turned on, the surface discharge 12 occurs on the inner surface of the discharge vessel 1 1 between the start assist electrode 6 and the monolithic electrode 3 or the outer electrode 2. The surface discharge 1 2 is easily generated at a low voltage when the spotlight is excited, so that the surface discharge 12 becomes a fire and the lighting voltage of the excimer lamp can be lowered. However, as described above, the along-surface discharge 12 also occurs at the time of normal lighting other than the start of the excimer 0 lamp, so that the surface discharge 12 also goes to the end provided at the discharge vessel 1 1 . In the vicinity of the light-collecting port 5 for photoelectric monitoring, which is mixed with the excimer light to be monitored from the lighting port 5, the surface discharge 1 2 becomes an obstacle, and the excimer lamp cannot be accurately detected. The problem of the amount of light emitted. In view of the problems of the above conventional techniques, in the present invention, an excimer lamp is provided with an integral electrode at the end of a pair of light transmissive external electrodes provided on the outer surface of the discharge vessel, and in the above discharge vessel A starting auxiliary electrode is formed on the inner surface and the inner electrode so as to partially overlap the electrode, a reflective film is formed on the inner surface of the discharge vessel, and photoelectric monitoring is formed in the vicinity of the end portion of the reflecting film in the tube axis direction. The excimer lamp formed by the lighting port is characterized in that the integral electrode is formed with a branch electrode extending in the tube axis direction, and the starting auxiliary electrode is partially overlapped with the branch electrode. Further, the lighting port is formed by a notch portion formed to open at an end portion in a direction extending in the axial direction of the reflecting film, and an end edge of the integral electric -9-201036028 electrode . By adopting such a configuration, it is possible to arrange the starting auxiliary electrode as far as possible from the light collecting port for photoelectric monitoring, and to perform photoelectric monitoring without being affected by the surface discharge occurring between the starting auxiliary electrode and the external electrode. The effect of accurately detecting the ultraviolet light emitted from the excimer lamp is exerted. Further, since the lighting opening is formed by separating the notch portion extending to the end portion of the reflecting film from the edge of the entire electrode, the effect of the lighting opening 0 can be easily formed. [Embodiment] Fig. 1 is a schematic view showing a first embodiment of an excimer lamp according to the present invention, wherein Fig. 1(a) is a plan view and Fig. 1(b) is a B_B cross-sectional view. In the figure, the integral electrode 3 formed at the end of the light-transmitting electrode 2 is integrally formed with branch electrodes 8, 8 extending in the opposite direction to the light-transmitting 〇 electrode in the tube axis direction at the upper and lower ends thereof. . Further, an integral electrode 6 is formed on a part of the inner surface of the discharge container 11 corresponding to the portion where the branch electrode 8 is formed. The needle is the same as the other configuration shown in Fig. 3. The branch electrodes 8 and 8 have an effect of increasing the distance L between the lighting opening 5 and the starting auxiliary electrode 6, and therefore, the lighting opening 5 is disposed at the end of the excimer lamp having little influence on the light distribution characteristics. In the vicinity, when the lamp is turned on, the surface discharge from the starting auxiliary electrode 3 to the external electrode 2 is also discharged, and -10-201036028 does not correspond to the above-mentioned lighting port 5, and does not affect the amount of light to be monitored from the lighting port 5. The effect of correcting the radiation from the lamp is exerted. Fig. 2 is a schematic view showing a second embodiment of the excimer lamp of the present invention. The basic configuration of the second embodiment, that is, the integral electrode 3, the branch electrodes 8, 8 and the starter auxiliary electrode 6 are the same as those of the above-described first embodiment, and only the shape of the lighting port 5 is different. In the present embodiment, the reflection film 4 on the inner surface of the discharge vessel 11 is formed with a notch portion 1 延伸 extending in the axial direction and having an opening formed at an end portion thereof, and the light collection opening 5 is formed by the notch portion 10, The end edges 3a of the above-mentioned unitary electrodes 3 are formed by being spaced apart. The lighting port 5 is a notch portion 10 that is formed by adhering the mask tape to the discharge vessel 11 in advance, and forming the reflecting film 4, and then forming the reflecting film 4, but opening the end portion of the reflecting film 4 This is formed so that the production becomes easy. Further, in the above description of the embodiment, the discharge vessel 11 has been described as a square tube shape, but it is not limited thereto, and various shapes such as a circular tubular shape may be employed. [Brief Description of the Drawings] Figs. 1(a) and 1(b) are schematic views showing the configuration of an excimer lamp according to a first embodiment of the present invention. Fig. 2 is a view showing the configuration of an excimer lamp according to a second embodiment of the present invention. -11 - 201036028 Figures 3 (a) and 3 (b) are diagrams showing the structure of a conventional excimer lamp. Fig. 4 is a view showing the discharge along the surface as viewed from the inner surface of the discharge tube of the conventional excimer lamp. [Explanation of main component symbols] 1 : Square discharge tube 2 : External electrode 3 : Monolithic electrode 4 : Reflective film 5 : Lighting port 6 : Starter auxiliary electrode 7 : Branch electrode 1 0 : Notch 1 1 : Capacitor