JP2008059888A - Excimer lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent damaging or breaking of an eximer lamp 1 that is caused by the thermal expansion of an internal tube 4 in the axial direction, when the eximer lamp 1 is on to prevent surface discharge between an external electrode 8 and an internal electrode 3 upon starting turning on the eximer lamp 1 and start excimer light emission. <P>SOLUTION: The eximer lamp includes a discharge container having a discharge gas sealed therein; a dielectric material which is placed in the discharge container and is isolated therefrom; the internal electrode which is placed in the dielectric material, extends in the tube axis direction in the discharge container, and has one end sealed at an end of the discharge container; an outside lead which is connected to the internal electrode and projects out of the discharge container; and the external electrode disposed on the outer peripheral surface of the discharge container. A conductive material is disposed on the outer peripheral surface of the discharge container and is connected electrically to the internal electrode. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an excimer lamp that emits excimer light by discharging through a dielectric material, and more particularly to an excimer lamp having an inner electrode in a discharge vessel.

  In a semiconductor manufacturing process or a liquid crystal panel manufacturing process, an excimer lamp is used as a light source for performing surface treatment by irradiation with vacuum ultraviolet light.

Techniques relating to excimer lamps are disclosed in, for example, Japanese Patent Application Laid-Open Nos. 2005-100934 and 2006-12680.
FIG. 13 shows a conventional excimer lamp 1. 13A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 13B is a cross-sectional view taken along line AA in FIG.
The excimer lamp 1 is composed of a tubular discharge vessel 2 as a whole, and a light emitting portion 21 filled with a discharge gas and a discharge vessel that hermetically seals the light emitting portion 21 at both ends of the discharge vessel 2 in the tube axis direction. Two sealing portions 22 are formed. Inside the discharge vessel 2, the inner electrode 3 is arranged so as to extend the general tube axis of the discharge vessel 2. External leads 6 projecting at both ends of the sealing portion 22 of the discharge vessel 2 are disposed, and the inner electrode 3 and the external leads 6 are connected by a metal foil 7 embedded in the sealing portion 22. The inner tube 4 made of a dielectric material is spaced so that the end in the tube axis direction does not contact the inner surface of the discharge vessel 2 and is disposed on the outer periphery of the coiled inner electrode 31. The inner tube 4 has a disk-shaped support member 5 disposed on the outer peripheral surface thereof, and the support member 5 is disposed on the inner periphery of the discharge vessel 2. The outer electrode 8 is disposed on the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 so as to be shorter than both ends of the inner tube 4 in the tube axis direction.
By applying a voltage from an AC power source (not shown) connected to the external lead 6, the voltage is similarly applied to the inner electrode 3 connected via the metal foil 7. The excimer lamp 1 emits excimer light through the discharge vessel 2 and the inner tube 4 as dielectrics between the outer electrode 8 and the inner electrode 3 due to a potential difference between the outer electrode 8 and the inner electrode 3.
By separating both ends of the inner tube 4 in the tube axis direction so as not to contact the discharge vessel 2, when the excimer lamp 1 is lit, the inner tube 4 is restrained from thermal expansion in the tube axis direction in the discharge vessel 2. It can be expanded and contracted freely. For this reason, the inner tube 4 can prevent damage or breakage due to stress concentration or thermal strain at the end of the inner tube 4 in the tube axis direction.

Japanese Patent Application Laid-Open No. 2005-100934 JP 2006-12680 A

However, since both ends of the inner tube 4 in the tube axis direction are separated so as not to contact the discharge vessel 2, the radial direction is not covered by the inner tube 4 between the sealing portion 22 of the discharge vessel 2 and the inner tube 4. The inner electrode 33 exposed to the arc is formed, and arc-shaped creeping discharge occurs between the radially exposed inner electrode 33 and the outer electrode 8 that are not covered by the inner tube 4 when the excimer lamp 1 is turned on, and excimer light emission occurs. I can't start. When the creeping discharge occurs, the creeping discharge occurrence portion of the external electrode 8 becomes high temperature and is oxidized, and the conductivity is lost. Further, the creeping discharge generation portion of the inner electrode 3 is red hot and is cut off.
Accordingly, an object of the present invention is to prevent damage or breakage due to thermal expansion in the tube axis direction of the inner tube 4 when the excimer lamp 1 is lit, and to prevent a gap between the outer electrode 8 and the inner electrode 3 when the excimer lamp 1 is lit. This is to prevent the creeping discharge and to start excimer emission.

  The excimer lamp according to claim 1, wherein a discharge vessel in which a discharge gas is sealed, a dielectric material disposed in the discharge vessel and spaced apart from the discharge vessel, and disposed in the dielectric material, the discharge vessel An inner electrode extending in the direction of the inner tube axis and having one end sealed at the end of the discharge vessel, an external lead connected to the inner electrode and protruding from the discharge vessel, and an outer peripheral surface of the discharge vessel In the excimer lamp comprising the outer electrode, the conductive member is disposed on the outer peripheral surface of the discharge vessel and is electrically connected to the inner electrode.

The present invention has the following effects by the above configuration.
By separating the dielectric material disposed in the discharge vessel from the discharge vessel, it is possible to prevent damage or breakage due to thermal expansion in the tube axis direction of the inner tube when the excimer lamp is turned on. Furthermore, the conductive member is disposed on the outer peripheral surface of the discharge vessel and is electrically connected to the inner electrode, thereby preventing creeping discharge between the outer electrode and the inner electrode when the excimer lamp starts lighting. Thus, oxidation of the outer electrode and cutting of the inner electrode due to creeping discharge can be prevented.

<First embodiment>
A first embodiment of the excimer lamp of the present invention will be described with reference to FIG.
1A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, FIG. 1B is a cross-sectional view taken along line AA of FIG. 1A, and FIG. FIG. The same components as those shown in FIG. 13 are denoted by the same reference numerals.

The excimer lamp 1 includes a tubular discharge vessel 2 made of, for example, synthetic quartz glass. The light emission portion 21 is filled with, for example, xenon gas as a discharge gas, and the light emission portions 21 are disposed at both ends of the discharge vessel 2 in the tube axis direction. The sealing part 22 of the discharge vessel 2 that hermetically seals is formed.
The inner electrode 3 has a rod-like inner electrode 32 made of tungsten, for example, at both ends in the longitudinal direction of the coil-like inner electrode 31 made of tungsten, and the coil-like inner electrode 31 and the rod-like inner electrode 32 in the longitudinal direction. The central axes are arranged so as to coincide with each other and are joined by welding or the like. Inside the discharge vessel 2, the inner electrode 3 is arranged so as to extend to the approximate tube axis of the discharge vessel 2.
The inner tube 4 made of a tubular dielectric material is made of, for example, synthetic quartz glass, is separated so that both ends in the tube axis direction of the inner tube 4 do not contact the discharge vessel 2, and surrounds the outer periphery of the inner electrode 3. To be arranged. The inner tube 4 has a disk-shaped support member 5 made of, for example, synthetic quartz glass disposed on the outer periphery thereof, and the support member 5 is disposed inside the discharge vessel 2.
Projecting external leads 6 made of, for example, tungsten are disposed at both ends of the sealing portion 22 of the discharge vessel 2, and the sealing portion 22 of the discharge vessel 2 melts the pipe bodies at both ends in the tube axis direction of the light emitting portion 21. A foil 7 made of, for example, molybdenum, for electrically connecting the inner electrode 3 and the outer lead 6 is embedded in the sealing portion 22 of the discharge vessel 2. Moreover, you may form the sealing part 22 of the discharge vessel 2 by the shrink seal method formed by making a pipe body into a molten state and decompressing an inside. As a result, the inner electrode 3 is not covered by the inner tube 4 in the radial direction between the both ends of the inner tube 4 in the tube axis direction and the sealing portion 22 of the discharge vessel 2. A radially exposed inner electrode 33 that is not embedded by the sealing portion 22 is formed.
A net-like outer electrode 8 made of, for example, a copper / nickel alloy is in close contact with the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4, and from both ends of the inner tube 4 in the tube axis direction in the tube axis direction of the discharge vessel 2. Arranged to be shorter.
Of the pair of external leads 6 protruding from the sealing portion 22 of the discharge vessel 2, one external lead 6 is connected to an AC power source (not shown).

  As a specific numerical example of the excimer lamp 1, the length of the discharge vessel 2 in the tube axis direction is 2250 mm, the outer diameter of the discharge vessel 2 is 18.5 mm, and the inner diameter is 16.5 mm. The amount of xenon gas sealed as discharge gas in the light emitting part 21 of the container 2 is 66.5 KPa, the length of the inner tube 4 in the tube axis direction is 2200 mm, and the outer diameter of the inner tube 4 is 4 mm. The inner diameter is 2 mm. The length of the coiled inner electrode 31 in the longitudinal direction is 2030 mm, the outer diameter of the coiled inner electrode 31 is 1.8 mm, and the voltage waveform supplied to the excimer lamp 1 is a rectangular wave, for example. The voltage is 5 KV and the frequency is 60 KHz. Naturally, the numerical examples are not limited to these, but in order to prevent damage to the inner tube 4 when the excimer lamp 1 is lit, the end of the inner tube 4 in the tube axis direction is in contact with the discharge vessel 2. Need to be separated so as not to.

  The conductive member 9 is made of, for example, stainless steel, and includes a surrounding portion 91 and a connecting portion 92. The surrounding portion 91 disposed on the outer peripheral surface of the discharge vessel 2 has a C-shaped cross section in a direction perpendicular to the tube axis direction of the discharge vessel 2 and has a substantially circular hole portion. A protrusion 911 extending in the radial direction of the surrounding portion 91 is provided in the vicinity of the opening 912. The connecting portion 92 arranged on the outer peripheral surface of the discharge vessel 2 has an L-shaped cross section along the tube axis direction of the discharge vessel 2, and one of the connecting portions 92 extending in the tube axis direction of the discharge vessel 2. And the surrounding portion 91 are connected, and an uneven projection 921 is provided at the other end of the connecting portion 92 extending in a direction perpendicular to the tube axis direction of the discharge vessel 2.

  The surrounding portion 91 is made of, for example, plate-shaped stainless steel, and a section perpendicular to the tube axis direction of the discharge vessel 2 is formed in a C shape by pressing or the like, and the opening portion 912 of the surrounding portion 91 is formed. Protrusions 911 extending in the radial direction of the surrounding portion 91 are formed in the vicinity. The connecting portion 92 is made of a plate-like stainless steel, for example, and the cross section in the tube axis direction of the discharge vessel 2 is formed in an L shape by pressing or the like. The protrusion 921 provided at the connecting portion is formed in a concavo-convex shape by pressing a plate-like, for example, stainless steel. The protrusion 921 provided at the connecting portion is connected to the end of the connecting portion 92 by welding or the like so that the external lead 6 and the projections and recesses engage with each other when the protrusion 921 is disposed on the outer peripheral surface of the discharge vessel 2.

The surrounding portion 91 is inserted into the outer peripheral surface of the discharge vessel 2 from the opening 912 of the surrounding portion 91 by bending or the like, is separated from the outer electrode 8, and is the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4. Are arranged around the entire circumference of the discharge vessel 2 and are brought into close contact with the outer periphery of the discharge vessel 2 by the energizing of the surrounding portion 91. Further, the surrounding portion 91 may be inserted into the outer peripheral surface of the discharge vessel 2 from the substantially circular hole portion 93 of the surrounding portion 91 through the external lead 6. The connecting portion 92 is disposed so that the uneven projection 921 provided at the end thereof is in contact with the external lead 6 and is connected by spot welding or the like.
As a result, the surrounding portion 91 of the conductive member 9 has the outer peripheral surfaces 23 and 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Are disposed at each of the two locations, are not electrically connected by being separated from the outer electrode 8, and are separated from the outer periphery of the discharge vessel 2 in the radial direction at the end of the inner tube 4 in the tube axis direction. Since it is arranged at L1, the outer peripheral surfaces 23, 24 in the tube axis direction of the discharge vessel 2 between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4 Placed in part. Furthermore, since the surrounding portion 91 of the conductive member 9 has the opening 912, it surrounds the entire circumference of the outer peripheral surfaces 23 and 24 of the discharge vessel 2. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.

By providing the protrusion 911 extending in the radial direction of the surrounding portion 91 in the vicinity of the opening 912 of the surrounding portion 91, it is possible to suppress damage to the outer peripheral surface of the discharge vessel 2 when the surrounding portion 91 is disposed on the discharge vessel 2. it can.
By making the protrusion 921 provided at the end of the connecting portion 92 uneven, when the external lead 6 is arranged to engage, the surface of the connecting portion 92 that contacts the protrusion 921 and the external lead 6 becomes large, Bondability is improved by spot welding or the like.

An experiment was conducted to confirm the effect of the present invention in the first embodiment of the excimer lamp 1.
As the excimer lamp 1, five conventional excimer lamps 1 shown in FIG. 13 were prepared, and five excimer lamps 1 in which the conductive member 9 of the present invention shown in FIG. 1 was arranged were prepared. In the excimer lamp 1 of the prior art and the present invention, the length of the discharge vessel 2 in the tube axis direction is 2250 mm, the outer diameter of the light emitting portion 21 is 18.5 mm, the inner diameter of the light emitting portion 21 is 16.5 mm, and the outer diameter of the inner tube 4. Is 1.8 mm, the length in the longitudinal direction of the coiled inner electrode 31 is 2030 mm, the length of the inner electrode exposed in the radial direction is 10 mm, and the amount of xenon gas enclosed in the light emitting portion 21 is 66.mm. Common in that it is 5 KPa. The excimer lamp 1 of the prior art and the present invention is supplied with a peak voltage of 5 KV and a frequency of 60 KHz having a rectangular waveform in a nitrogen atmosphere to light the lamp 1.
In the excimer lamp 1 of the present invention, the discharge vessel 2 is placed at a position 5 mm (L1 in FIG. 1) from the outer periphery of the discharge vessel 2 to the outer electrode 3 side in the radial direction of the end of the inner tube 4 in the tube axis direction. The surrounding portion 91 of the conductive member in which the length L2 of the surrounding portion 91 of the conductive member 9 in the tube axis direction is 3 mm and the length L3 in the direction perpendicular to the tube axis direction of the discharge vessel 2 is 0.3 mm is discharged. It arrange | positions so that it may closely_contact | adhere to the one round of the outer periphery of the container 2. FIG. The connecting portion 92 of the conductive member 9 is connected to the external lead 6 by spot welding. As a result, the surrounding portion 91 of the conductive member 9 has the outer peripheral surfaces 23 and 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Are disposed at each of the two locations, are not electrically connected by being separated from the outer electrode 8, and are separated from the outer periphery of the discharge vessel 2 in the radial direction at the end of the inner tube 4 in the tube axis direction. Since it is arranged at L1, the outer peripheral surfaces 23, 24 in the tube axis direction of the discharge vessel 2 between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4 Placed in part. Furthermore, since the surrounding portion 91 of the conductive member 9 has the opening 912, it surrounds the entire circumference of the outer peripheral surface of the discharge vessel 2. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.
In the experiment, in each of the prepared conventional and excimer lamps 1 of the present invention, the presence or absence of creeping discharge at the start of lighting of the lamp 1 was visually confirmed.
The experimental results are shown in FIG. The excimer lamp 1 in which creeping discharge occurred was marked with x, and the excimer lamp 1 in which creeping discharge did not occur was marked with ◯. As shown in the experimental results, the creeping discharge was generated with all five of the conventional excimer lamps 1. However, the excimer lamp 1 of the present invention was able to prevent the occurrence of the creeping discharge with all five.
From the experimental results, the effects of the occurrence of the creeping discharge of the conventional excimer lamp 1 and the prevention of the creeping discharge of the excimer lamp 1 of the present invention will be discussed below.

The occurrence of creeping discharge in the conventional excimer lamp 1 will be considered with reference to FIGS. FIG. 3 is a view for explaining the occurrence of creeping discharge of the conventional excimer lamp 1, and is an enlarged view of one end portion in the tube axis direction of the discharge vessel 2 of FIG.
In the conventional excimer lamp 1, when the lamp 1 starts lighting, a voltage is applied from an AC power source (not shown) connected to one external lead 6, so that the potential of the inner electrode 3 becomes higher than that of the outer electrode 8. For this reason, it is considered that a discharge container 25 having a high potential is formed in the vicinity of the inner electrode 3, and a discharge container 26 having a low potential is formed between the discharge container 25 having a high potential and the outer electrode 8. To summarize these, when the lamp 1 starts to light, the inner electrode 3 has the highest potential, the discharge vessel 2 next, and the outer electrode 8 has the lowest potential. In the discharge vessel 2 between the inner electrode 3 and the outer electrode 8, a discharge vessel 25 having a high potential is formed, and a discharge vessel 26 having a lower potential is formed.
Due to the relationship of the potential at the time of starting the lamp 1, the inner electrode 33 exposed in the radial direction between the end portion in the tube axis direction of the inner tube 4 and the sealing portion 22 in the vicinity thereof has a lower potential than this. It is considered that charges are released toward the discharge vessel 2 and the released charges move toward the outer electrode 8 having a lower potential than the discharge vessel 2. Since the charge released from the radially exposed inner electrode 33 moves to the outer electrode 8, the charge is continuously discharged from the radially exposed inner electrode 33 and continuously moved to the outer electrode 8. it is conceivable that. It is considered that this continuous discharge and continuous movement of electric charge results in creeping discharge between the radially exposed inner electrode 33 and the outer electrode 8, and creeping discharge occurs in all the conventional excimer lamps 1 of this experiment. It is estimated that occurred.

Next, the effect of preventing creeping discharge of the excimer lamp 1 according to the first embodiment of the present invention will be considered with reference to FIGS. FIG. 4 is a diagram for explaining the effect of preventing creeping discharge of the excimer lamp 1 according to the first embodiment of the present invention, and is an enlarged view of one end of the discharge vessel 2 in FIG. 1 in the tube axis direction. It is.
The surrounding portion 91 of the conductive member 9 has two locations on the outer peripheral surfaces 23 and 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Of the inner tube 4, which is separated from the outer electrode 8 and at a position L 1 separated from the outer periphery of the discharge vessel 2 in the radial direction of the end of the inner tube 4 in the tube axis direction. Between the outer periphery of the discharge vessel 2 in the radial direction at both ends in the axial direction and the outer electrode 8, the discharge vessel 2 is disposed on a part of the outer peripheral surfaces 23, 24 in the tube axis direction. Furthermore, since the surrounding portion 91 of the conductive member 9 has the opening 912, it surrounds the entire circumference of the outer peripheral surface of the discharge vessel 2. In addition, the connecting portion 92 of the surrounding portion 91 of the conductive member 9 is connected to the external lead 6. As a result, the conductive member 9 is at the same potential as the inner electrode 3 without being electrically connected to the outer electrode 8 at the start of lighting of the lamp 1. In the discharge vessel 2, a discharge vessel 25 having a high potential is formed in the vicinity of the inner electrode 3, and a discharge vessel 25 having a high potential is similarly formed in the vicinity of the conductive member 9. It is considered that a discharge container 26 having a low potential is formed between the discharge container 25 having a high potential and the discharge container 25 having a high potential in the vicinity of the conductive member 9.
The outer peripheral surfaces 23, 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8, which are spaced apart from the outer electrode 8 and in the radial direction at both ends in the tube axis direction of the inner tube 4. It is considered that the range of the discharge vessel 25 having a high potential can be formed wider than that of the conventional one, and the discharge of charges from the inner electrode 33 exposed in the radial direction can be suppressed. Even if the charge is released from the radially exposed inner electrode 33 to the discharge vessel 2 as shown in FIG. 4, the charge is surrounded by the discharge vessel 25 having a high potential, and therefore remains in the discharge vessel 26 having a low potential. Therefore, it is considered that it is impossible to move to the outer electrode 8. By preventing the movement of charges, it is considered that continuous discharge of charges from the radially exposed inner electrode 33 can be prevented.
Thus, it is presumed that creeping discharge could be prevented in all the excimer lamps 1 of the present invention. In the excimer lamp 1 of the present invention, the conductive member 9 is not electrically connected to the outer electrode 8, and the inner tube 4 and the discharge vessel 2, which are dielectric materials, are connected by the potential difference between the inner electrode 3 and the outer electrode 8. Excimer light emission was started through.

Another embodiment of the excimer lamp of the present invention will be described with reference to FIG.
FIG. 5A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 5B is a cross-sectional view taken along line AA in FIG. The same reference numerals are given to the same components as those shown in FIG.
The excimer lamp 1 of FIG. 5 is different from FIG. 1 in that the surrounding portion 91 of the conductive member 9 is in a film shape and that the surrounding portion 91 and the connecting portion 92 of the conductive member 9 are made of different materials.

  The conductive member 9 includes a surrounding portion 91 and a connecting portion 92. The surrounding portion 91 is formed of a film shape, for example, gold, and the connecting portion 92 is formed of a linear shape, for example, stainless steel.

The surrounding portion 91 is spaced apart from the outer electrode 8 and is disposed in a film shape, for example, by a vacuum deposition method or the like so as to coat the entire circumference of the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4. The By being formed by a vacuum deposition method or the like, it can be in close contact with the outer peripheral surface of the discharge vessel 2. The connecting portion 92 is wound around the film-shaped surrounding portion 91 and connected to the external lead 6 by spot welding or the like.
As a result, the surrounding portion 91 of the conductive member 9 has the outer peripheral surfaces 23 and 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Are disposed at each of the two locations, surround one circumference of the outer peripheral surfaces 23 and 24 of the discharge vessel 2, and are not electrically connected by being separated from the outer electrode 8. Further, the connecting portion 92 of the conductive member 9 is electrically connected by being wound around the surrounding portion 91. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.

At the start of lighting of the lamp 1, the conductive member 9 is electrically connected to the inner electrode 3 to have the same potential as the inner electrode 3. For this reason, it is considered that the discharge vessel 2 having a high potential is formed in the vicinity of the inner electrode 3 and the discharge vessel 2 having a high potential is also formed in the vicinity of the conductive member 9 in the discharge vessel 2.
The conductive member 9 is separated from the outer electrode 8, and is formed on the outer peripheral surfaces 23, 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. It is considered that the electric potential of the discharge vessel 2 can be increased by being electrically connected to the inner electrode 3 while being disposed, and the discharge of electric charges from the inner electrode 33 exposed in the radial direction can be suppressed. Creeping discharge can be suppressed. Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2, the charge is surrounded by the discharge vessel 2 having a high potential, so that it can be prevented from moving to the outer electrode 8. It is possible to prevent creeping discharge.

Another embodiment of the excimer lamp of the present invention will be described with reference to FIGS.
6A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 6B is a cross-sectional view taken along line AA in FIG. The same reference numerals are given to the same components as those shown in FIG. FIG. 7 is a view for explaining the effect of preventing creeping discharge of the excimer lamp 1 of FIG. 6, and is an enlarged view of one end portion in the tube axis direction of FIG.
The excimer lamp 1 in FIG. 6 has the same conductive member 9 as that in FIG. 1, and the arrangement position of the surrounding portion 91 of the conductive member 9 is different from that in FIG. 1.

The surrounding portion 91 of the conductive member 9 is inserted into the outer peripheral surface of the discharge vessel 2 from the opening portion 912 of the surrounding portion 91 by bending or the like, separated from the outer electrode 8, and in the radial direction of the inner tube 4. The outer peripheral surface of the discharge vessel 2 is arranged around the entire circumference and is in close contact with the outer periphery of the discharge vessel 2 by the biasing of the surrounding portion 91. Further, the surrounding portion 91 may be inserted into the outer peripheral surface of the discharge vessel 2 from the substantially circular hole portion 93 of the surrounding portion 91 through the external lead 6. The connecting portion 92 is disposed so that the uneven projection 921 provided at the end thereof is in contact with the external lead 6 and is connected by spot welding or the like.
Thereby, the surrounding part 91 of the electrically-conductive member 9 is each of two places of the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction of both ends of the inner electrode 3 in the tube axis direction. And is not electrically connected by being separated from the outer electrode 8. Furthermore, since the surrounding portion 91 of the conductive member 9 has the opening 912, it surrounds the entire circumference of the outer peripheral surfaces 27 and 28 of the discharge vessel 2. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.

At the start of lighting of the lamp 1, the conductive member 9 is not electrically connected to the outer electrode 8 and has the same potential as the inner electrode 3. In the discharge vessel 2, a discharge vessel 25 having a high potential is formed in the vicinity of the inner electrode 3, and a discharge vessel 25 having a high potential is similarly formed in the vicinity of the conductive member 9. It is considered that a discharge container 26 having a low potential is formed between the discharge container 25 having a high potential and the discharge container 25 having a high potential in the vicinity of the conductive member 9.
The conductive member 9 is disposed on the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 that is spaced apart from the outer electrode 8 and exposed in the radial direction at both ends of the inner electrode 3 in the tube axis direction. Thus, the range of the discharge vessel 25 having a high potential can be formed wider than the conventional one as shown in FIG. 3, and it is considered that the discharge of electric charges from the inner electrode 33 exposed in the radial direction can be suppressed. Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2 as shown in FIG. 7, the charge is surrounded by the discharge vessel 25 having a high potential, and therefore remains in the discharge vessel 26 having a low potential. Therefore, it is considered that it is impossible to move to the outer electrode 8. By preventing the movement of charges, it is considered that continuous discharge of charges from the radially exposed inner electrode 33 can be prevented.

Another embodiment of the excimer lamp of the present invention will be described with reference to FIG.
8A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 8B is a cross-sectional view taken along the line AA in FIG. The same components as those shown in FIG. 2 are denoted by the same reference numerals.
The excimer lamp 1 of FIG. 8 is different from FIG. 6 in that the surrounding portion 91 of the conductive member 9 is a film and that the surrounding portion 91 and the connecting portion 92 of the conductive member 9 are made of different materials. Further, the excimer lamp 1 of FIG. 8 has the same conductive member 9 as that of FIG. 2, and the arrangement position of the surrounding portion 91 of the conductive member 9 is different from that of FIG.

  The surrounding portions 91 of the conductive member 9 are disposed at two locations on the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction at both ends of the inner electrode 3 in the tube axis direction. The discharge vessel 2 surrounds one circumference of the outer peripheral surfaces 27 and 28 and is not electrically connected by being separated from the outer electrode 8. Further, the connecting portion 92 of the conductive member 9 is electrically connected by being wound around the surrounding portion 91. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.

At the start of lighting of the lamp 1, the conductive member 9 is electrically connected to the inner electrode 3 to have the same potential as the inner electrode 3. For this reason, it is considered that the discharge vessel 2 having a high potential is formed in the vicinity of the inner electrode 3 and the discharge vessel 2 having a high potential is also formed in the vicinity of the conductive member 9 in the discharge vessel 2.
The conductive member 9 is spaced from the outer electrode 8 and is disposed on the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction at both ends of the inner electrode 3 in the tube axis direction. By being electrically connected to the inner electrode 3, the potential of the discharge vessel 2 can be increased, and it is considered that discharge of charges from the inner electrode 33 exposed in the radial direction can be suppressed, and creeping discharge can be suppressed. . Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2, the charge is surrounded by the discharge vessel 2 having a high potential, so that it can be prevented from moving to the outer electrode 8. It is possible to prevent creeping discharge.

From the embodiment shown in FIG. 1 and FIG. 5, the conductive member 9 is separated from the outer electrode 8, and between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. It has been found that the occurrence of creeping discharge can be prevented by being disposed on the outer peripheral surfaces 23 and 24 of the discharge vessel 2 and being electrically connected to the inner electrode 3. Further, from the embodiment shown in FIGS. 6 and 8, the conductive member 9 is separated from the external electrode 8 and is discharged in the radial direction of the inner electrode 33 exposed in the radial direction at both ends of the inner electrode 3 in the tube axis direction. It has been found that creeping discharge can be prevented by being disposed on the outer peripheral surfaces 27 and 28 of the container 2 and being electrically connected to the inner electrode 3.
Considering the above embodiment, the conductive member 9 is spaced apart from the outer electrode 8, disposed on the outer peripheral surface of the discharge vessel 2, and electrically connected to the inner electrode 3, thereby causing the potential of the discharge vessel 2. Therefore, the discharge or movement of charges from the radially exposed inner electrode 33 can be prevented, and the occurrence of creeping discharge can be prevented.
In the excimer lamp 1 that can prevent the creeping discharge, since the conductive member 9 is not electrically connected to the outer electrode 8, a potential difference is generated between the inner electrode 3 and the outer electrode 8, and the inner side that is a dielectric material is formed. Excimer light emission is started through the tube 4 and the discharge vessel.

<Second embodiment>
A second embodiment of the excimer lamp of the present invention will be described with reference to FIG.
9A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 9B is a cross-sectional view taken along line AA in FIG. The same reference numerals are given to the same components as those shown in FIG.
The excimer lamp 1 of FIG. 9 is different from FIGS. 1, 5, 6 and 8 in that the conductive member 9 is coiled, and the arrangement position of the conductive member 9 is as shown in FIGS. And different.

  The conductive member 9 is made of, for example, stainless steel, and includes a surrounding portion 91 and a connecting portion 92. The surrounding portion 91 has a coil shape with a larger diameter than the connecting portion 92, and the connecting portion 92 has a coil shape with a smaller diameter than the surrounding portion 91, and has a hole (not shown) that extends to the central axis of the conductive member 9.

  The conductive member 9 is made of, for example, a linear stainless steel having one end face in the cylindrical axis direction of a large-diameter cylindrical body having a large outer diameter and one end face in the cylindrical axis direction of a small-diameter cylindrical body having a small outer diameter. By continuously winding the connected multi-diameter cylindrical body, it is formed in a coil shape.

  The composite cylinder used to form the conductive member 9 is biased to the conductive member when arranged on the outer peripheral surface of the discharge vessel by designing the diameter of the large cylinder to be smaller than the diameter of the discharge vessel. Can be given.

The conductive member 9 is inserted into the outer peripheral surface of the discharge vessel 2 through the outer lead 6 from the hole 93 on the side of the surrounding portion 91 extending to the central axis thereof, is separated from the outer electrode 8, and has a diameter of at least the inner tube 4. The discharge vessel 2 is arranged around the circumference of the discharge vessel 2 in the direction, continuously wound so as to surround the sealing portion 22 of the discharge vessel 2, and closely attached to the outer circumference of the discharge vessel 2 by the energizing of the surrounding portion 91. Is done. The coiled connecting portion 92 that is continuously wound from the coiled surrounding portion 91 is disposed so as to wind from the end of the sealing portion 22 of the discharge vessel 2 to the outer periphery of the external lead 6, and is spotted. It is connected to the external lead 6 by welding or the like. For this reason, the surrounding portion 91 is disposed so as to wind from at least approximately one circumference of the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 to the sealing portion 22 of the discharge vessel 2.
As a result, the surrounding portion 91 of the conductive member 9 has the outer peripheral surfaces 23 and 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Are disposed at the two locations, surround the entire circumference of the outer peripheral surfaces 23 and 24 of the discharge vessel 2, and are electrically connected by being separated from the outer electrode 8. Further, the surrounding portion 91 of the conductive member 9 is formed by coiling the outer peripheral surface of the discharge vessel 2 from the outer periphery of the discharge vessel 2 to the end of the sealing portion 22 in the radial direction of the end portion in the tube axis direction of the inner tube 4. The outer peripheral surface of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction at both ends in the tube axis direction of the inner electrode 3 by covering substantially so as to be continuously wound while forming a gap. 27 and 28 are also arranged at two locations. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.

At the start of lighting of the lamp 1, the conductive member 9 is electrically connected to the inner electrode 3 to have the same potential as the inner electrode 3. For this reason, it is considered that the discharge vessel 2 having a high potential is formed in the vicinity of the inner electrode 3 and the discharge vessel 2 having a high potential is also formed in the vicinity of the conductive member 9 in the discharge vessel 2.
The conductive member 9 is separated from the outer electrode 8, and is formed on the outer peripheral surfaces 23, 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Further disposed on the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction of both end portions of the inner electrode 3 in the tube axis direction, and further on the sealing portion of the discharge vessel 2 The electric potential of the discharge vessel 2 can be increased by being arranged on the outer peripheral surface 22 and electrically connected to the inner electrode 3, and the discharge of electric charges from the inner electrode 33 exposed in the radial direction is suppressed. It can be considered that creeping discharge can be suppressed. Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2, the charge is surrounded by the discharge vessel 2 having a high potential, so that it can be prevented from moving to the outer electrode 8. It is possible to prevent creeping discharge.

Another embodiment of the excimer lamp of the present invention will be described with reference to FIG.
10A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 10B is a cross-sectional view taken along the line AA in FIG. The same components as those shown in FIG. 9 are denoted by the same reference numerals.
Excimer lamp 1 in FIG. 10 is different from FIG. 9 in that conductive member 9 has a net shape.

  The conductive member 9 is formed of, for example, a net-like copper / nickel alloy. The conductive member 9 is, for example, a flat one that is wound around the outer periphery of the discharge vessel 2 into a cylindrical shape. Further, it may have a cylindrical shape having elasticity and a hole extending to the cylindrical shaft.

The planar conductive member 9 is separated from the outer electrode 8 and wound so as to be in close contact with the outer circumference of the discharge vessel in the radial direction of the inner tube, and continuously connected to the external lead 6. Wound around. Further, when the conductive member 9 is cylindrical, it is inserted into the outer peripheral surface of the discharge vessel 2 through an external lead 6 from a hole (not shown) extending to the cylindrical central axis, and is reduced in diameter and is in close contact. You may arrange as follows. Either the planar or cylindrical conductive member 9 is connected to the external lead by spot welding or the like. For this reason, the conductive member 9 is disposed so as to cover at least approximately one circumference of the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 to the sealing portion 22 of the discharge vessel 2.
As a result, the conductive member 9 has two locations on the outer peripheral surfaces 22 and 23 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. They are arranged respectively, surround one circumference of the outer peripheral surfaces 23 and 24 of the discharge vessel 2, and are electrically connected by being separated from the outer electrode 8. Furthermore, since the conductive member 9 is a net-like outer peripheral surface of the discharge vessel 2 from the outer circumference of the discharge vessel 2 to the end of the sealing portion 22 in the radial direction of the end of the inner tube 4 in the tube axis direction, a gap is formed. However, it is also disposed at two locations on the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction at both ends of the inner electrode 3 in the tube axis direction. In addition, the conductive member 9 is electrically connected to the inner electrode 3 by being connected to the external lead 6.

At the start of lighting of the lamp 1, the conductive member 9 is electrically connected to the inner electrode 3 to have the same potential as the inner electrode 3. For this reason, it is considered that the discharge vessel 2 having a high potential is formed in the vicinity of the inner electrode 3 and the discharge vessel 2 having a high potential is also formed in the vicinity of the conductive member 9 in the discharge vessel 2.
The conductive member 9 is separated from the outer electrode 8, and is formed on the outer peripheral surfaces 23, 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Further disposed on the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction of both end portions of the inner electrode 3 in the tube axis direction, and further on the sealing portion of the discharge vessel 2 The electric potential of the discharge vessel 2 can be increased by being arranged on the outer peripheral surface 22 and electrically connected to the inner electrode 3, and the discharge of electric charges from the inner electrode 33 exposed in the radial direction is suppressed. It can be considered that creeping discharge can be suppressed. Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2, the charge is surrounded by the discharge vessel 2 having a high potential, so that it can be prevented from moving to the outer electrode 8. It is possible to prevent creeping discharge.

From the embodiment shown in FIGS. 9 and 10, the conductive member 9 is separated from the outer electrode 8, and is between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. On the outer peripheral surfaces 27 and 28 of the discharge vessel 2 in the radial direction of the inner electrode 33, which are disposed on the outer peripheral surfaces 23 and 24 of the discharge vessel 2 and exposed radially at both ends of the inner electrode 3 in the tube axis direction. It has been found that the occurrence of creeping discharge can be prevented by being disposed on the outer peripheral surface of the sealing portion 22 of the discharge vessel 2 and being electrically connected to the inner electrode 3.
Considering the above embodiment, the conductive member 9 is spaced apart from the outer electrode 8 and disposed on the outer peripheral surface of the discharge vessel 2 and electrically connected to the inner electrode 3 as in the first embodiment. As a result, the electric potential of the discharge vessel 2 is increased, so that the discharge or movement of charges from the radially exposed inner electrode 33 can be prevented, and the occurrence of creeping discharge can be prevented.
In the excimer lamp 1 that can prevent the creeping discharge, since the conductive member 9 is not electrically connected to the outer electrode 8, a potential difference is generated between the inner electrode 3 and the outer electrode 8, and the inner side that is a dielectric material is formed. Excimer light emission is started through the tube 4 and the discharge vessel.

  In addition, the Example of this invention is not limited to the above-mentioned thing, The thing of FIG.11 and FIG.12 demonstrated below may be used.

Another embodiment of the excimer lamp of the present invention will be described with reference to FIGS.
FIG. 11A is a cross-sectional view of the excimer lamp 1 in the direction along the tube axis direction. The same reference numerals are given to the same components as those shown in FIG.
The excimer lamp 1 in FIG. 11 is sealed at one end in the tube axis direction of the inner tube, and the inner electrode 3 is not formed between the sealed end of the inner tube and the sealed portion. 1 is different from FIG. 1 in that no external lead or metal foil is disposed in the sealed portion of the sealed discharge tube on the end side.

  The excimer lamp 1 is composed of a tubular discharge vessel 2 made of, for example, synthetic quartz glass, and a light emitting portion 21 filled with, for example, xenon gas as a discharge gas, and light emitting portions 21 at both ends of the discharge vessel 2 in the tube axis direction. The sealing part 22 of the discharge vessel 2 that hermetically seals is formed.

  The inner electrode 3 includes a rod-shaped inner electrode 32 made of tungsten, for example, at one end portion in the longitudinal direction of the coil-shaped inner electrode 31 made of tungsten, and the coil-shaped inner electrode 31 and the rod-shaped inner electrode 32 made of a longitudinal axis. They are arranged so that their central axes coincide with each other, and are joined by welding or the like. Inside the discharge vessel 2, the inner electrode 3 is arranged so as to extend to the approximate tube axis of the discharge vessel 2.

The inner tube 4 made of a tubular dielectric material is made of, for example, synthetic quartz glass. One end of the inner tube 4 in the tube axis direction is melted by heating to a high temperature with a burner or the like to reduce the diameter. Sealed. The inner tube 4 with one end sealed is separated so that both ends in the tube axis direction do not contact the discharge vessel 2 and the sealed portion of the inner tube 4 in the tube axis direction of the inner tube 4 It arrange | positions so that the outer periphery of the inner side electrode 3 may be surrounded so that the inner side electrode 3 may not protrude from 41. FIG.
The inner tube 4 has a disk-shaped support member 5 made of, for example, synthetic quartz glass disposed on the outer periphery thereof, and the support member 5 is disposed inside the discharge vessel 2.

  A projecting external lead 6 made of, for example, tungsten is disposed on the sealing portion 22 of the discharge vessel 2 near the unsealed end portion in the tube axis direction of the inner tube 4, and the sealing portion 41 of the inner tube 4 The external lead 6 is not disposed in the sealing portion 22 of the discharge vessel 2 in the vicinity, and the sealing portion 22 of the discharge vessel 2 is crushed by melting the pipe bodies at both ends of the light emitting portion 21 in the tube axis direction. The inner electrode 3 and the external lead 6 are electrically connected in the sealing portion 22 of the discharge vessel 2 in the vicinity of the unsealed end portion in the tube axis direction of the inner tube 4. For example, a foil 7 made of molybdenum is buried. On the other hand, the external lead 6 is not disposed and the foil 7 is not embedded in the sealing portion 22 of the discharge vessel 2 in the vicinity of the sealing portion 41 of the inner tube 4. Moreover, you may form the sealing part 22 of the discharge vessel 2 by the shrink seal method formed by making a pipe body into a molten state and decompressing an inside. Thus, the radial direction of the inner electrode 3 is not covered by the inner tube 4 between the unsealed end portion in the tube axis direction of the inner tube 4 and the sealed portion 22 of the discharge vessel 2 in the vicinity thereof and the discharge is performed. A radially exposed inner tube 33 that is not embedded by the sealing portion 22 of the container 2 is formed. On the other hand, the radially exposed inner electrode 33 is not formed between the sealing portion 41 of the inner tube 4 and the sealing portion 22 of the discharge vessel 2 in the vicinity thereof.

A net-like outer electrode 8 made of, for example, a copper / nickel alloy is in close contact with the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4, and from both ends of the inner tube 4 in the tube axis direction in the tube axis direction of the discharge vessel 2. Arranged to be shorter.
The external lead 6 protruding from the sealing portion 22 of the discharge vessel 2 is connected to an AC power source (not shown).

The conductive member 9 used in this embodiment is the same as that shown in FIG.
The surrounding portion 91 of the conductive member 9 is separated from the outer electrode 8 and is arranged around the radial direction of the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 in the vicinity of the radially exposed inner electrode 33. At the same time, the outer peripheral surface of the discharge vessel 2 is brought into close contact with the entire circumference by the urging of the surrounding portion 91. The connecting portion 92 of the conductive member 9 is disposed such that the uneven projection 921 provided at the end thereof is in contact with the external lead, and is connected by spot welding or the like.
Thereby, the surrounding part 91 of the conductive member 9 is the outer peripheral surface of the discharge vessel 2 between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction of the unsealed end portion of the inner tube 4 in the tube axis direction. 23, is not electrically connected by being separated from the outer electrode 8, and is disposed at a position separated from the outer periphery of the discharge vessel 2 in the radial direction of the end portion of the inner tube 4 in the tube axis direction. Therefore, it is arranged on a part of the outer peripheral surface 23 in the tube axis direction of the discharge vessel 2 between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Furthermore, since the surrounding portion 91 of the conductive member 9 has the opening 912, it surrounds the entire circumference of the outer peripheral surface of the discharge vessel 2. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.

At the start of lighting of the lamp 1, the conductive member 9 is electrically connected to the inner electrode 3 to have the same potential as the inner electrode 3. For this reason, it is considered that the discharge vessel 2 having a high potential is formed in the vicinity of the inner electrode 3 and the discharge vessel 2 having a high potential is also formed in the vicinity of the conductive member 9 in the discharge vessel 2.
The conductive member 9 is separated from the outer electrode 8 and disposed on the outer peripheral surface of the discharge vessel 2 and is electrically connected to the inner electrode 3, whereby the potential of the discharge vessel 2 can be increased, and the radial direction It is considered that the release of electric charges from the inner electrode 33 exposed to the surface can be suppressed, and creeping discharge can be suppressed. Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2, the charge is surrounded by the discharge vessel 2 having a high potential, so that it can be prevented from moving to the outer electrode 8. It is possible to prevent creeping discharge.
Further, by forming a sealing portion 41 on the inner tube 4 and covering the inner electrode 3 so as not to protrude from the sealing portion 41 of the inner tube 4, the sealing portion 41 of the inner tube 4 and the discharge vessel 2 in the vicinity thereof. The inner electrode 33 exposed in the radial direction is not formed between the sealing portions 22 of the inner tube 4, thereby preventing discharge of charges from between the sealing portion 41 of the inner tube 4 and the sealing portion 22 of the discharge vessel 2 in the vicinity thereof. it can.
In the excimer lamp 1 that can prevent the creeping discharge, since the conductive member 9 is not electrically connected to the outer electrode 8, a potential difference is generated between the inner electrode 3 and the outer electrode 8, and the inner side that is a dielectric material is formed. Excimer light emission is started through the tube 4 and the discharge vessel.
As described above, in the excimer lamp 1 of the present invention, the conductive member 9 is not necessarily disposed at both ends of the discharge vessel 2 in the tube axis direction, and the conductive member 9 is not formed on the side where the radially exposed inner electrode 33 is formed. Does not have to be placed.

Another embodiment of the excimer lamp according to the present invention will be described with reference to FIGS.
12A is a cross-sectional view in the direction along the tube axis direction of the excimer lamp 1, and FIG. 12B is a cross-sectional view taken along line AA in FIG. The same components as those shown in FIG. 11 are denoted by the same reference numerals.
The excimer lamp 1 shown in FIG. 12 has a point that the inner electrode 3 has a rod shape, a point that the outer electrode 8 has a plate shape having an arc in a direction perpendicular to the tube axis direction of the discharge vessel, and both ends of the discharge vessel 2. 1 and FIG. 10 in that the conductive members 9 arranged in the are different from each other.

  The inner electrode 3 is a rod-shaped inner electrode 32 made of, for example, tungsten, and is disposed in the discharge vessel 2 so as to extend to the approximate tube axis of the discharge vessel 2.

The outer electrode 8 is formed in a plate shape in which the cross section in the direction perpendicular to the tube axis direction of the discharge vessel is an arc when the plate-like aluminum, for example, is placed on the outer peripheral surface of the discharge vessel 2 by pressing or the like. Is done.
A plate-like outer electrode 8 is in close contact with the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 and is disposed so as to be shorter than both ends of the inner tube 4 in the tube axis direction in the tube axis direction of the discharge vessel 2. The

One of the conductive members 9 used in this embodiment is the same as the conductive member 9 shown in FIG. 1, and the other is the same as the conductive member 9 shown in FIG. The arrangement of the conductive member 9 of the excimer lamp 1 in FIG. 9 will be described with reference to the conductive member 9 in FIGS.
The surrounding portion 91 of the same conductive member 9 as that in FIG. 1 is spaced apart from the outer electrode 8 and is arranged around the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 and energizes the surrounding portion 91. Is brought into close contact with the entire circumference of the outer peripheral surface of the discharge vessel 2. The connecting portion 92 of the same conductive member 9 as in FIG. 1 is arranged so that the uneven projection 921 provided at the end thereof is in contact with the external lead, and is connected by spot welding or the like.
Thereby, the surrounding part 91 of the conductive member 9 is the outer peripheral surface of the discharge vessel 2 between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction of the unsealed end portion of the inner tube 4 in the tube axis direction. 23, is not electrically connected by being separated from the outer electrode 8, and is disposed at a position separated from the outer periphery of the discharge vessel 2 in the radial direction of the end portion of the inner tube 4 in the tube axis direction. Therefore, it is arranged on a part of the outer peripheral surface 23 in the tube axis direction of the discharge vessel 2 between the outer periphery of the discharge vessel 2 and the outer electrode 8 in the radial direction at both ends in the tube axis direction of the inner tube 4. Furthermore, since the surrounding portion 91 of the conductive member 9 has the opening 912, it surrounds the entire circumference of the outer peripheral surface of the discharge vessel 2. In addition, the surrounding portion 91 of the conductive member 9 is electrically connected to the inner electrode 3 by connecting the connecting portion 92 to the external lead 6.
On the other hand, the same conductive member 9 as in FIG. 10 is spaced apart from the outer electrode 8, spaced away from the same conductive member 9 as in FIG. 1, and closely contacts the outer peripheral surface of the discharge vessel in the radial direction of the inner tube at least approximately once. And is wound so as to be continuously connected to the external lead 6. The same conductive member 9 as in FIG. 10 is also connected to the external lead by spot welding or the like. For this reason, the conductive member 9 is disposed so as to cover at least approximately one circumference of the outer peripheral surface of the discharge vessel 2 in the radial direction of the inner tube 4 to the sealing portion 22 of the discharge vessel 2.
As a result, the conductive member 9 is disposed on the outer peripheral surface 24 of the discharge vessel 2 between the outer circumference of the discharge vessel 2 and the outer electrode 8 in the radial direction of the end of the inner tube 4 in the tube axis direction. 2 is surrounded by one circumference of the outer peripheral surface 24 and is electrically connected by being separated from the outer electrode 8. Furthermore, since the conductive member 9 is a net-like outer peripheral surface of the discharge vessel 2 from the outer circumference of the discharge vessel 2 to the end of the sealing portion 22 in the radial direction of the end of the inner tube 4 in the tube axis direction, a gap is formed. However, it is also disposed on the outer peripheral surface 28 of the discharge vessel 2 in the radial direction of the inner electrode 33 exposed in the radial direction of one end portion of the inner electrode 3 in the tube axis direction. In addition, the conductive member 9 is electrically connected to the inner electrode 3 by being connected to the external lead 6.

At the start of lamp 1 lighting, the same conductive member 9 as in FIGS. 1 and 10 is electrically connected to the inner electrode 3, thereby having the same potential as the inner electrode 3. For this reason, in the discharge vessel 2, the discharge vessel 2 having a high potential is formed in the vicinity of the inner electrode 3, and the discharge vessel 2 having a high potential is similarly provided in the vicinity of the same conductive member 9 as in FIGS. 1 and 10. Is thought to be formed.
The same conductive member 9 as in FIGS. 1 and 10 is separated from the outer electrode 8, disposed on the outer peripheral surface of the discharge vessel 2, and electrically connected to the inner electrode 3, whereby the potential of the discharge vessel 2 is increased. It is considered that the discharge of charges from the inner electrode 33 exposed in the radial direction can be suppressed, and creeping discharge can be suppressed. Even if charge is released from the radially exposed inner electrode 33 to the discharge vessel 2, the charge is surrounded by the discharge vessel 2 having a high potential, so that it can be prevented from moving to the outer electrode 8. It is possible to prevent creeping discharge.
In the excimer lamp 1 that can prevent the creeping discharge, since the conductive member 9 is not electrically connected to the outer electrode 8, a potential difference is generated between the inner electrode 3 and the outer electrode 8, and the inner side that is a dielectric material is formed. Excimer light emission is started through the tube 4 and the discharge vessel.
As described above, in the excimer lamp 1 of the present invention, the conductive members 9 disposed at both ends of the discharge vessel 2 in the tube axis direction are not necessarily the same, and different conductive members 9 may be used. Further, the arrangement positions of the conductive members 9 arranged at both ends of the discharge vessel 2 in the tube axis direction are not necessarily the same, and may be arranged on the outer peripheral surface of the discharge vessel 2.

  The numerical example of the excimer lamp 1 is not limited to the above, but the length of the discharge vessel 2 in the tube axis direction is 220 to 2700 mm, the outer diameter of the discharge vessel 2 is 10 to 40 mm, The inner diameter may be 8 to 30 mm, the length of the inner tube 4 in the tube axis direction may be 170 to 2650 mm, the outer diameter of the inner tube 4 may be 2 to 32 mm, and the inner diameter of the inner tube 4 may be 1 to 30 mm. The length in the longitudinal direction of the coiled inner electrode 31 may be 190 to 2500 mm, and the outer diameter of the coiled inner electrode 31 may be 1 to 30 mm. The peak voltage supplied to the excimer lamp 1 may be 1 to 8 KV and the frequency may be 5 to 500 KHz.

  The conductive member 9 is not limited to a metal or an alloy. For example, indium tin oxide (ITO) or the like may be formed by sputter deposition or the like, and any conductive material may be used. .

It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of an experimental result. It is explanatory drawing of an experimental result. It is explanatory drawing of an experimental result. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the excimer lamp of this invention. It is explanatory drawing of the conventional excimer lamp.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Excimer lamp 2 Discharge container 21 Light emission part 22 Sealing parts 23 and 24 of a discharge container The outer peripheral surface 25 of the discharge container between the outer periphery of the discharge container in the radial direction of the edge part of an inner side tube, and an outer electrode High electric potential Discharge vessel 26 Discharge vessel 27, 28 with low potential Outer peripheral surface 3 of discharge vessel in radial direction of inner electrode exposed in radial direction Inner electrode 31 Coiled inner electrode 32 Rod-shaped inner electrode 33 Inner electrode exposed in radial direction 4 Inner tube 41 Inner tube sealing portion 5 Support member 6 External lead 7 Foil 8 Outer electrode 9 Conductive member 91 Enclosed portion 911 Protrusion 912 provided in the enclosed portion 92 Opening portion 92 Connecting portion 921 Protrusion 93 provided in the connecting portion Hole portion

Claims (1)

A discharge vessel filled with a discharge gas, a dielectric material disposed in the discharge vessel and spaced apart from the discharge vessel;
An inner electrode disposed in the dielectric material, extending in the tube axis direction in the discharge vessel and sealed at the end of the discharge vessel;
An external lead connected to the inner electrode and protruding from the discharge vessel;
In an excimer lamp comprising an outer electrode disposed on the outer peripheral surface of the discharge vessel,
An excimer lamp, wherein a conductive member is disposed on an outer peripheral surface of a discharge vessel and electrically connected to an inner electrode.

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