CN102683163B - Excimer lamp - Google Patents
Excimer lamp Download PDFInfo
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- CN102683163B CN102683163B CN201210061713.XA CN201210061713A CN102683163B CN 102683163 B CN102683163 B CN 102683163B CN 201210061713 A CN201210061713 A CN 201210061713A CN 102683163 B CN102683163 B CN 102683163B
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- electrode
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- dendritic
- branch portion
- discharge vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/10—Shields, screens, or guides for influencing the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
- H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
A kind of Excimer lamp is provided, the outer electrode that at least one party is transmitance is provided with at the outer surface of discharge vessel, be configured with starting auxiliary electrode at above-mentioned discharge vessel inner face and form, from starting auxiliary electrode to outer electrode generation creeping discharge, thus do not affect the normal discharge between outer electrode.It is characterized by, said external electrode is provided with dendritic electrode, this dendritic electrode comprises: root, and the tube axial direction from the end of the axis of this outer electrode along above-mentioned discharge vessel extends; And branch portion, the Width from the front end of this root to above-mentioned discharge vessel extends; Above-mentioned starting auxiliary electrode, configures in the mode at least overlapped each other with the front end, branch portion of the dendritic electrode of the said external electrode of a side.
Description
Technical field
The present invention relates to the Excimer lamp at the outer surface of discharge vessel with a pair transmitance outer electrode, particularly relate to and be configured with at the inner face of discharge vessel the Excimer lamp starting auxiliary electrode.
Background technology
In the past, there will be a known the Excimer lamp formed in the outer surface of discharge vessel pair of external electrodes arranged opposite, at the outer electrode that the light emitting surface place of this discharge vessel is formed, in order to play the original function allowing light penetrate, using and such as gold size being coated into cancellate transmitance electrode.
On the other hand, as the outer electrode that the outer surface in the side not penetrating the light opposite with above-mentioned smooth emitting surface is formed, though functionally without the need to possessing transmitance, but in most cases, in the simplification and this discharge vessel of manufacturing process, there is the viewpoint of the stability of discharging etc., still adopt transmitance electrode with the same former state of above-mentioned smooth emitting surface.
For the purpose of the startability improving this type of Excimer lamp, there will be a known and also the starting auxiliary electrode be made up of conductive material is set at discharge vessel inner face.Such as, Japanese Unexamined Patent Publication 11-273629 publication (patent documentation 1) is so, in the end of pair of external electrodes being located at luminous tube outer surface, is provided with at this luminous tube inner surface place the starting auxiliary electrode be made up of conductive material.And also disclosing following content: this starting auxiliary electrode is located between outer electrode, also can be not necessarily overlapping with two outer electrodes.
In Fig. 8, shown with the Excimer lamp using transmitance electrode as outer electrode, in the outer surface of discharge vessel 11, the outer electrode 12 having a pair transmitance arranged opposite.In an end of this outer electrode 12, be provided with at the inner surface of discharge vessel 11 and start auxiliary electrode 13.
Starting auxiliary electrode 13 by configuring like this, such as, when applying high-frequency high voltage to the outer electrode 12 of a side and carrying out lighting, being moved by the outer electrode making electric charge be rapidly to the opposing party via this starting auxiliary electrode, startability promotes.
But, the electric discharge between above-mentioned starting auxiliary electrode 13 and outer electrode 12, not only start time carry out, after moving to usual lighting, still can produce this electric discharge, this phenomenon as shown in the figure, as creeping discharge X towards the outside electrode 12 direction transmit.
When there is creeping discharge X like this, consume the energy of this amount, the integral energy needed for normal discharge originally between outer electrode reduces, and causes illumination to reduce.
In addition, the part illumination at the position also causing this creeping discharge X to occur reduces, and is not preferred.
As the technology of the creeping discharge prevented between such starting auxiliary electrode and outer electrode, in Japanese Unexamined Patent Publication 2010-225343 publication (patent documentation 2), disclose the structure being provided with the dendritic electrode extended vertically in the end of transmitance electrode.
This conventional example shown in Figure 9, in the end of the transmitance outer electrode 12 of discharge vessel 11 outer surface, is provided with the dendritic electrode 14 extended vertically.At the inner face of above-mentioned discharge vessel 11, be provided with the starting auxiliary electrode 13 be made up of conductive material, this starting auxiliary electrode 13 is configured to overlap each other via the leading section of above-mentioned dendritic electrode 14 and discharge vessel 11.
In the prior art, being formed, the distance increasing this outer electrode 12 thus and start between auxiliary electrode 13 by making starting auxiliary electrode 13 correspond to the end of this dendritic electrode 14, making and making creeping discharge be not easy the structure produced.
But, require lamp further high inputization along with the requirement of the recent high illumination to Excimer lamp, even if with above-mentioned existing structure, also the creeping discharge X that there is self-starting auxiliary electrode 13 arrives the situation of outer electrode 12 along dendritic electrode 14, its impact impacts the normal discharge between outer electrode 12.In the structure of above-mentioned prior art, to avoid this problem, dendritic electrode 14 can be made to extend along tube axial direction longer, but cause longizationer of lamp total length like this, taking into account effective length of illumination, inappropriate in practical, cannot make us accepting.
Patent documentation 1: Japanese Unexamined Patent Publication 11-273629 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2010-225343 publication
Summary of the invention
The present invention is in view of the problem of above-mentioned prior art, a kind of Excimer lamp is provided, the pair of external electrodes that at least one party is transmitance is provided with at the outer surface of discharge vessel, be configured with starting auxiliary electrode at above-mentioned discharge vessel inner face and form, in this Excimer lamp, by arranging creepage distance dendritic electrode long as far as possible in limited space, make the creeping discharge from above-mentioned starting auxiliary electrode before this dendritic electrode and then can not outer electrode be arrived, thus not affecting the normal discharge between outer electrode.
In order to solve above-mentioned problem, in the invention, it is characterized by, said external electrode is provided with dendritic electrode, this dendritic electrode comprises: root, and the tube axial direction from the end of the axis of this outer electrode along above-mentioned discharge vessel extends; And branch portion, the Width from the front end of this root to above-mentioned discharge vessel extends; Above-mentioned starting auxiliary electrode, configures in the mode at least overlapped each other with the front end, branch portion of the dendritic electrode of the said external electrode of a side.
And it is characterized by, the root of above-mentioned dendritic electrode extends from an end of the Width of said external electrode along tube axial direction, the other end from the front end of this root to the Width of above-mentioned discharge vessel, above-mentioned branch portion extends.
And it is characterized by, the above-mentioned root of above-mentioned dendritic electrode is larger than the width in above-mentioned branch portion with the width of the connecting portion in above-mentioned branch portion.
And it is characterized by, the width of the leading section in the branch portion of above-mentioned dendritic electrode is larger than the width in the region beyond the leading section in this portion.
Invention effect
According to the present invention, the branch portion that the dendritic electrode be located on outer electrode is extended by the root extended along tube axial direction and broad ways is formed, advances along this portion so start creeping discharge initial occurred between auxiliary electrode and the front end, branch portion of dendritic electrode.To this, because there is not electrode at the space part connecting outer electrode from above-mentioned starting auxiliary electrode straight line, so do not accumulate electric charge at glass inner face, current potential can not be formed, so do not produce the electric field to space part direction, there is not the creeping discharge of externally electrode direction.
And, the end, the position root of above-mentioned dendritic electrode being arranged to the Width of the end from outer electrode extends, make the length in a portion rise to greatest extent thus, the total length of dendritic electrode is obtained comparatively large, can reliably prevent creeping discharge from arriving the situation of outer electrode.
And, compared with the branch portion of dendritic electrode, width is made by the coupling part in root and branch portion comparatively large, comparatively multi-charge is accumulated in the coupling part as larger area part of electrode section.Thus, start the creeping discharge occurred at first between auxiliary electrode and front end, branch portion, the easier connecting portion direction more towards this charge accumulation and advancing along above-mentioned branch portion.
In addition, by increasing the width of the leading section in the branch portion of dendritic electrode, the glass inner face between starting auxiliary electrode and the leading section of this wider width more easily accumulating electric charge, easily initial creeping discharge occurring between the two at this.This initial creeping discharge, advances along branch portion as mentioned above, so can not there is straight line to connect the creeping discharge of starting between auxiliary electrode and outer electrode.
Like this, without the need to making lamp total length for long sizing, lengthening distance that creeping discharge advances and making it not arrive outer electrode, dysgenic effect can not be brought to the original normal discharge between outer electrode so play.
Accompanying drawing explanation
Fig. 1 is the stereogram of Excimer lamp of the present invention.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the A-A cutaway view of Fig. 2.
Fig. 4 is the B-B partial sectional view of Fig. 2.
Fig. 5 is the schematic diagram representing the dendritic electrode shown in Fig. 1 and start the relation between auxiliary electrode.
Fig. 6 is the partial top view of other embodiments.
Fig. 7 is the partial top view of another other embodiments.
Fig. 8 is vertical view (A) and the cutaway view (B) thereof of prior art.
Fig. 9 is the vertical view of other prior aries.
Description of symbols
1: Excimer lamp
2: discharge vessel
3: outer electrode
4: dendritic electrode
5: root
6: branch portion
6a: leading section
7: start auxiliary electrode
8: connecting portion
11: discharge vessel
12: outer electrode
13: start auxiliary electrode
14: dendritic electrode
X: creeping discharge
Embodiment
As shown in Figure 1, on the discharge vessel 2 of Excimer lamp 1 of the present invention, the outer electrode 3,3 having a pair transmitance arranged opposite on its two sides.
Each figure as later in Fig. 2 is shown specifically, the end of above-mentioned each outer electrode 3 is provided with the dendritic electrode 4 of roughly L-shaped.This dendritic electrode 4 comprises root 5 and branch portion 6, and this root 5 extends from one end of the Width of the discharge vessel 2 of said external electrode 3 along tube axial direction, and another side from the front end of this root 5 towards the Width of discharge vessel 2, above-mentioned branch portion 6 extends.
Particularly, as Fig. 3 of the A-A cutaway view as Fig. 2 or as only taking out dendritic electrode and starting the stereogram of auxiliary electrode as shown in Figure 5, be provided with at above-mentioned discharge vessel 2 inner face the starting auxiliary electrode 7 be made up of conductive material.And this starting auxiliary electrode 7 clips discharge vessel 2 and configures overlappingly with the leading section 6a in the branch portion 6 of above-mentioned dendritic electrode 4.
In said structure, when Excimer lamp starts, the high-frequency current putting on the outer electrode 3 of a side becomes a kind of capacity coupled state, through the dielectric wall forming discharge vessel 2, outer electrode 3 to the opposing party flows high-frequency current, easily discharges, and startability improves.
Now, the dendritic electrode 4 being connected to outer electrode 3 is roughly L-shaped, accumulates in the electric charge starting auxiliary electrode 7 and moves along position, i.e. the branch portion 6 forming dendritic electrode 4, move thereafter along root 5, become like this and move along longer path, just can not arrive outer electrode 3.And, on the path connecting the beeline of starting between auxiliary electrode 7 and outer electrode 3, there is not dendritic electrode, the movement of electric charge can't occur therebetween, so be difficult to creeping discharge occurs between starting auxiliary electrode 7 and outer electrode 3.
If be described in further detail, when lamp starts, there is electric charge at the inner area of the glass tube (discharge vessel 2) opposed with the branch portion 6 of dendritic electrode 4, forms current potential.
Start auxiliary electrode 7 and the leading section 6a in above-mentioned branch portion 6 and clip glass and overlapping, distance is therebetween very little, so generation highfield, and in the generation creeping discharge of this position.
If electric discharge herein terminates, then successively along branch portion 6 to the mode of the direction movement of root 5, discharge between starting auxiliary electrode 7 and branch portion 6 continuously.That is, with the mode generation creeping discharge of branch portion 6 movement along dendritic electrode 4.
On the other hand, between the leading section 6a and outer electrode 3 in the branch portion 6 of dendritic electrode 4, their short circuits are not linked such dendritic electrode, so glass inner face can not accumulate electric charge, can not current potential be formed.Therefore, can not electric field be produced at the glass surface linking the rectilinear direction of starting auxiliary electrode 7 and outer electrode 3, the creeping discharge to this outer electrode 3 direction can not occur.
Fig. 6 illustrates other embodiments, and the root 5 of dendritic electrode 4 is larger than the width in above-mentioned branch portion 6 with the width of the connecting portion 8 in branch portion 6.
By like this, the connecting portion 8 with wider area accumulates comparatively multi-charge, start the electric field grow in the direction of the connecting portion 8 in auxiliary electrode 7 and branch portion 6, the creeping discharge occurred between this starting auxiliary electrode 7 and the leading section 6a in branch portion 6 is easily moved towards the direction of this connecting portion 8.Therefore, more can prevent from, from the direct electrode 3 towards the outside in the branch portion 6 of dendritic electrode 4, the situation of creeping discharge occurs.
In addition, Fig. 7 illustrates another other embodiments, and the width of the leading section 6a in the branch portion 6 of dendritic electrode 4 is formed larger than the width of other area parts.
By like this, the accumulated charge in this leading section 6a becomes more, and the creeping discharge easily this part occurring and start between auxiliary electrode 7, prevents from discharging from this starting auxiliary electrode 7 to outer electrode 3.
In addition, in the above-described embodiments, the structure that the root 5 showing dendritic electrode 4 extends from an end of the Width of outer electrode 3 along tube axial direction, but might not be defined in strictly from the structure that an end extends, as long as the end of Width, its position can suitably be selected.
Under these circumstances, only dendritic electrode 4 is being made L-shaped shape and is being formed in the part in the branch portion 6 that Width extends, in the comparing of the dendritic electrode 14 with the prior art shown in Fig. 9, do not change the total length of discharge vessel 2 and can the length that creeping discharge is advanced be obtained larger.
, as shown in above-described embodiment, extend preferably by the end root 5 of dendritic electrode 4 is arranged to from the Width of outer electrode 3, the length in a portion 6 can be increased to greatest extent.
And, show the situation of starting auxiliary electrode 7 and overlapping each other with both dendritic electrodes 6,6 of pair of external electrodes 3,3, but not necessarily need to overlap each other with both, also can be configured in the mode that the dendritic electrode 6 with one party is overlapping, this be identical with above-mentioned prior art 1.
In addition, show the structure that pair of external electrodes 3 is all transmitance electrode, but also can be, only the outer electrode of the light emitting surface side of discharge vessel is made transmitance, and other outer electrodes are not transmitances, it namely, also can be so-called tabular (ベ タ shape) electrode.
As described above, in Excimer lamp of the present invention, in the end of the transmitance outer electrode of discharge vessel outer surface, the dendritic electrode be made up of root and branch portion is set, and at discharge vessel inner face, starting auxiliary electrode is configured at least overlapped with the front end, branch portion of the dendritic electrode of the said external electrode of side mode, the creeping discharge occurred between starting auxiliary electrode and front end, branch portion is made to move along this portion thus, electric discharge externally electrode direction straightaway can not be made, so harmful effect can not be brought to the normal discharge between outer electrode.
Claims (4)
1. an Excimer lamp, at least one party is that the pair of external electrodes of transmitance is arranged on the outer surface of discharge vessel along tube axial direction, and the inner face of above-mentioned discharge vessel is configured with and starts auxiliary electrode and form, the feature of this Excimer lamp is,
Said external electrode is provided with dendritic electrode, and this dendritic electrode comprises: root, and the tube axial direction from the end of the axis of this outer electrode along above-mentioned discharge vessel extends; And branch portion, the Width from the front end of this root to above-mentioned discharge vessel extends;
Above-mentioned starting auxiliary electrode, configures in the mode at least overlapped each other with the front end, branch portion of the dendritic electrode of the said external electrode of a side.
2. Excimer lamp as claimed in claim 1, is characterized in that,
The root of above-mentioned dendritic electrode extends from an end of the Width of said external electrode along tube axial direction, and the other end from the front end of this root to the Width of above-mentioned discharge vessel, above-mentioned branch portion extends.
3. Excimer lamp as claimed in claim 1, is characterized in that,
The above-mentioned root of above-mentioned dendritic electrode is larger than the width in above-mentioned branch portion with the width of the connecting portion in above-mentioned branch portion.
4. Excimer lamp as claimed in claim 1, is characterized in that,
The width of the leading section in the branch portion of above-mentioned dendritic electrode is larger than the width in the region beyond the leading section in this portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP053798/2011 | 2011-03-11 | ||
| JP2011053798A JP5376410B2 (en) | 2011-03-11 | 2011-03-11 | Excimer lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102683163A CN102683163A (en) | 2012-09-19 |
| CN102683163B true CN102683163B (en) | 2015-12-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210061713.XA Active CN102683163B (en) | 2011-03-11 | 2012-03-09 | Excimer lamp |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5376410B2 (en) |
| KR (1) | KR101464034B1 (en) |
| CN (1) | CN102683163B (en) |
| TW (1) | TWI482196B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3491532B2 (en) * | 1998-07-01 | 2004-01-26 | 東亞合成株式会社 | Curable composition for backing material during shadow mask production |
| JP6232782B2 (en) * | 2013-07-01 | 2017-11-22 | ウシオ電機株式会社 | Excimer lamp |
| JP6191870B2 (en) * | 2013-11-22 | 2017-09-06 | ウシオ電機株式会社 | Excimer lamp |
| JP6729820B1 (en) * | 2018-11-13 | 2020-07-22 | ウシオ電機株式会社 | Excimer lamp light source device |
| KR20230163552A (en) | 2021-04-16 | 2023-11-30 | 우시오덴키 가부시키가이샤 | ultraviolet ray generator |
| EP4362063A1 (en) | 2021-06-21 | 2024-05-01 | Ushio Denki Kabushiki Kaisha | Excimer lamp and excimer lamp device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6614185B1 (en) * | 1999-06-07 | 2003-09-02 | Toshiba Lighting & Technology Corporation | Discharge tube with interior and exterior electrodes |
| CN1713337A (en) * | 2004-06-23 | 2005-12-28 | 豪雅冠得股份有限公司 | Excited quasi-molecular lampbulb |
| CN1815682A (en) * | 2005-02-02 | 2006-08-09 | 优志旺电机株式会社 | Rare gas fluorescent lamp |
| CN101847564A (en) * | 2009-03-23 | 2010-09-29 | 优志旺电机株式会社 | Excimer lamp |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4424394B2 (en) * | 2007-08-31 | 2010-03-03 | ウシオ電機株式会社 | Excimer lamp |
| JP4946773B2 (en) * | 2007-10-11 | 2012-06-06 | ウシオ電機株式会社 | Excimer lamp |
| JP2009176546A (en) * | 2008-01-24 | 2009-08-06 | Ushio Inc | Rare gas fluorescent lamp |
| JP5083184B2 (en) * | 2008-11-26 | 2012-11-28 | ウシオ電機株式会社 | Excimer lamp device |
-
2011
- 2011-03-11 JP JP2011053798A patent/JP5376410B2/en active Active
- 2011-12-28 TW TW100149231A patent/TWI482196B/en active
-
2012
- 2012-02-06 KR KR1020120011741A patent/KR101464034B1/en active IP Right Grant
- 2012-03-09 CN CN201210061713.XA patent/CN102683163B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6614185B1 (en) * | 1999-06-07 | 2003-09-02 | Toshiba Lighting & Technology Corporation | Discharge tube with interior and exterior electrodes |
| CN1713337A (en) * | 2004-06-23 | 2005-12-28 | 豪雅冠得股份有限公司 | Excited quasi-molecular lampbulb |
| CN1815682A (en) * | 2005-02-02 | 2006-08-09 | 优志旺电机株式会社 | Rare gas fluorescent lamp |
| CN101847564A (en) * | 2009-03-23 | 2010-09-29 | 优志旺电机株式会社 | Excimer lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012190676A (en) | 2012-10-04 |
| TWI482196B (en) | 2015-04-21 |
| CN102683163A (en) | 2012-09-19 |
| TW201237925A (en) | 2012-09-16 |
| JP5376410B2 (en) | 2013-12-25 |
| KR20120104089A (en) | 2012-09-20 |
| KR101464034B1 (en) | 2014-11-20 |
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