CN1713337A - Excited quasi-molecular lampbulb - Google Patents
Excited quasi-molecular lampbulb Download PDFInfo
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- CN1713337A CN1713337A CN 200510079470 CN200510079470A CN1713337A CN 1713337 A CN1713337 A CN 1713337A CN 200510079470 CN200510079470 CN 200510079470 CN 200510079470 A CN200510079470 A CN 200510079470A CN 1713337 A CN1713337 A CN 1713337A
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Abstract
The invention provides an excimer lamp apparatus that has advanced start-up properties, in terms of start-up time and start-up stability, in the presence of voltage variations, without any trigger electrode, by arranging a pair of electrodes along the entire length of a discharge container. An ultra-violet emitter is arranged to irradiate discharge gas in the discharge container with ultra-violet light, and the excimer lamp is started up by means of exposure with ultra-violet light from the ultra-violet emitting unit.
Description
Technical field
The present invention relates to a kind of radiation ultraviolet ray so that for example cured resin or semiconductor wafer, the surface treatment of glass substrate lamp and/or the excited quasi-molecular lamp device of cleaning surfaces.
Background technology
In Japanese unexamined patent publication NO.2000-311658, disclose a kind of excited quasi-molecular lampbulb that is included in the excited quasi-molecular lamp device.
Excited quasi-molecular lampbulb is electrodeless discharge excited quasi-molecular lampbulb, it comprise wherein contain discharge gas and have around its outer felt around the discharge vessel of outer electrode.Have around its outer felt around the high degree of electrical insulated tube of internal electrode roughly insert in the discharge vessel in the central.Realize the excited quasi-molecular lampbulb illumination by will the high frequency from 1MHZ to 100MHZ being applied on the internal electrode to discharge via electric field.The high-insulation pipe has trigger electrode and has the internal electrode of two components that extend along the whole length of tube's axis.
Disclose excited quasi-molecular lampbulb with described structure in the paragraph (0013) of Japanese unexamined patent publication NO.2000-311658 because the overlap action of two discharge generation and can starting fast: a discharge is the discharge that forms between trigger electrode and outer electrode, and another discharge is the externally discharge between electrode and the internal electrode.
Therefore, in order to start fast by producing discharge, this excited quasi-molecular lampbulb must have the trigger electrode that separates with internal electrode.
Therefore, trigger electrode should wherein have the discharge space of container towards the outer electrode setting.Because the space that occupies of trigger electrode and avoid internal electrode and adjacent stria in trigger electrode between be not intended to the required spacing of discharging, the size of internal electrode is restricted, and can not therefore make it be difficult in discharge vessel, guarantee enough big region of discharge along the whole spatial placement of discharge vessel.
Summary of the invention
First purpose of the present invention is to provide a kind of excited quasi-molecular lamp device, and this device has the startability of improvement and described trigger electrode is not set.
Second purpose of the present invention is to provide a kind of excited quasi-molecular lamp device, under different condition, if for example be fed to voltage swing when fluctuation on the electrode, and if when particularly supply voltage reduces, this device has stable startability.
After further investigation, the present inventor finds that described problem can solve by a kind of excited quasi-molecular lamp device is provided, this device has actinolyte, reflector with ultraviolet irradiation in discharge vessel on the contained discharge gas, and by applying voltage to electrode from power supply, this actinolyte is with the ultraviolet irradiation discharge gas simultaneously.
In order to realize described purpose, the present invention carries out following description.
(1) excited quasi-molecular lampbulb comprises: the discharge space with filling discharge gas is so that produce the discharge vessel of excimers light, and the part of discharge vessel is transparent for the excimers light that shines from discharge space; The excited quasi-molecular lampbulb that has electrode and in discharge gas, discharge; Voltage is fed to the power supply on the electrode and arranges wherein so that the actinolyte on the discharge gas that ultraviolet irradiation is filled in the dielectric container, wherein ultraviolet irradiation on discharge gas the time, by being applied to, power supply is started excited quasi-molecular lampbulb on the electrode at actinolyte.
(2) the present invention can have a kind of excited quasi-molecular lampbulb, and excited quasi-molecular lampbulb has a pair of in the face of electrode at the outer surface separately of discharge vessel.
(3) the present invention also comprises the lamp housing that wherein holds excited quasi-molecular lampbulb and is positioned at ultraviolet (uv) transmission window on the lamp housing body wall part, wherein actinolyte be positioned at the emission of lamp housing outside and actinolyte ultraviolet ray by the ultraviolet (uv) transmission window, and irradiation discharge gas.
(4) the present invention also has the ultraviolet (uv) transmission window, and this window is positioned on the part of excited quasi-molecular lampbulb wall, and wherein the ultraviolet (uv) transmission window is passed through in the ultraviolet ray of actinolyte emission, and the irradiation discharge gas.
(5) preferably, in the present invention, thin layer is formed on the surface of ultraviolet (uv) transmission window, and this film stops the ultraviolet ray of the following wavelength of 200nm and the ultraviolet ray of the above wavelength of transmission 200nm.
(6) the present invention preferably includes the optical detection device of contained optical wavelength in the excimers light that is used for detecting the excited quasi-molecular lampbulb emission and is used for coming automatic disconnection to be applied to the voltage disconnecting apparatus of the voltage on the actinolyte according to the testing result of optical detection device.
(7) in the present invention, the quantity of actinolyte can be less than the quantity of excited quasi-molecular lampbulb.
Employing is according to above (1) or (2) described excited quasi-molecular lampbulb, when actinolyte irradiation discharge gas, by starting excited quasi-molecular lampbulb on the electrode that voltage is applied to excited quasi-molecular lampbulb.Therefore, be applied on the electrode of excited quasi-molecular lampbulb so that starting the situation of excited quasi-molecular lampbulb compares, can improve start-up time with voltage.For stablizing starting resistor, can improve 20% equally.
Term of the present invention " is stablized starting resistor " and is referred to according to excited quasi-molecular lampbulb of the present invention and begins discharge gas not to be exposed to 100% possibility emission excimers light the ultraviolet voltage that applies from actinolyte.
According to above (3) described the present invention, except the advantage that aspect (1) or (2) excited quasi-molecular lamp device provide, the present invention reduces the lamp housing volume and makes the configuration of actinolyte have bigger design flexibility, this is because actinolyte is placed on outside, and housing has the discharge space interior ultraviolet (uv) transmission window of ultraviolet (uv) transmission to the discharge vessel of encapsulation discharge gas.
According to above (4) described the present invention, except the advantage that aspect (1) or (2) excited quasi-molecular lamp device provide, the present invention reduces to comprise the size of the lamp housing of excited quasi-molecular lampbulb, and make the configuration of actinolyte have bigger design flexibility, this is because on the part of excited quasi-molecular lampbulb wall, excited quasi-molecular lampbulb has the discharge space interior ultraviolet (uv) transmission window of ultraviolet (uv) transmission to the discharge vessel of encapsulation discharge gas.
According to above (5) described the present invention, the present invention by aspect form film on the ultraviolet (uv) transmission window in (2), (3) or (4) described excited quasi-molecular lamp device and control transmission peak wavelength, and the light by the above wavelength of transmission 200nm and stop that the light of the following wavelength of 200nm prevents that the vacuum ultraviolet transmission is by the ultraviolet (uv) transmission window.
For example, xenon base excited quasi-molecular lampbulb emission center wavelength is the ultraviolet ray of 172nm.Have only treatment chamber by ultraviolet irradiation, this is because the film on the ultraviolet (uv) transmission window stops the ultraviolet ray (after this this light is called " vacuum ultraviolet ") that the 200nm wavelength is following.Then, ozone generating can be avoided, this situation can be occurred usually if vacuum ultraviolet is absorbed by the oxygen in the extraneous air via the ultraviolet (uv) transmission window.
According to above (6) described the present invention, compare with the excited quasi-molecular lamp device of actinolyte constant illumination wherein, the life-span of the actinolyte in aspect provided by the invention (1), (2), (3), (4) or (5) described excited quasi-molecular lamp device is longer, and this is because only actinolyte shines when applying the voltage cutoff device automatically and starting this device providing by the data of using optical detection device to detect.Checkout gear detect only from the part of the excimers light of excited quasi-molecular lampbulb emission.
According to above (7) described the present invention, the invention provides a kind of device that has than excited quasi-molecular lampbulb quantity actinolyte still less; Therefore, can reduce the quantity of actinolyte and the quantity that starts the power supply of actinolyte.
Description of drawings
Fig. 1 is the sectional view of first embodiment of the invention excited quasi-molecular lamp device;
Fig. 2 is the longitdinal cross-section diagram that is used for the excited quasi-molecular lampbulb of first embodiment of the invention excited quasi-molecular lamp device;
Fig. 3 is that the excited quasi-molecular lampbulb in the expression first embodiment of the invention excited quasi-molecular lamp device starts the characteristic curve that apply voltage of probability with respect to excited quasi-molecular lampbulb;
Fig. 4 is the sectional view according to the excited quasi-molecular lamp device of second embodiment of the invention;
Fig. 5 is along the sectional view according to the excited quasi-molecular lamp device longitudinal axis of third embodiment of the invention;
Fig. 6 is the block diagram according to the lighting controller of the excited quasi-molecular lamp device of third embodiment of the invention;
Fig. 7 is the time diagram of functional status in the lighting controller;
Fig. 8 is the sectional view according to the excited quasi-molecular lamp device of fourth embodiment of the invention;
Fig. 9 is the sectional view according to the excited quasi-molecular lamp device of fifth embodiment of the invention;
Figure 10 is the sectional view according to the excited quasi-molecular lamp device of sixth embodiment of the invention;
Figure 11 is the sectional view according to the excited quasi-molecular lamp device of seventh embodiment of the invention;
Figure 12 is the sectional view according to the excited quasi-molecular lamp device of eighth embodiment of the invention;
Figure 13 is the sectional view according to the excited quasi-molecular lamp device of ninth embodiment of the invention;
Figure 14 is the sectional view that has the excimers of cylinder form according to the present invention;
Figure 15 is the sectional view that has the excimers of general plane shape according to the present invention; And
Figure 16 is the sectional view according to the excited quasi-molecular lamp device of tenth embodiment of the invention.
Embodiment
Excited quasi-molecular lamp device of the present invention comprises having the wherein discharge vessel of the discharge space of the discharge gas of encapsulation generation excimers, and the part of discharge vessel is transparent for the excimers light from the emission of discharge air; Has the excited quasi-molecular lampbulb that in discharge gas, produces the electrode of discharge; The power supply of supply voltage to the electrode; And the actinolyte on the discharge gas that ultraviolet irradiation is filled in the discharge space.At actinolyte ultraviolet irradiation on discharge gas the time, by being applied to electrode from power supply, voltage is started excited quasi-molecular lampbulb.
Term " excited quasi-molecular lampbulb " is used for referring to the discharge lamp of emission high density excimers light here.For this excited quasi-molecular lampbulb, have many other titles, for example be mainly used in emission high power excimers light feature " high power radiator ", be mainly used in the dielectrically impeded discharge feature " dielectric barrier discharge lamp ", be mainly used in and do not have electrode in the discharge vessel (as described in term " electrodeless ") and high frequency voltage is applied to each outer lateral " electrodeless the discharge excited quasi-molecular lampbulb " of (as described in term " discharge ") this fact on lip-deep electrode that is placed on discharge vessel.In these files, we are generically and collectively referred to as " excited quasi-molecular lampbulb " with these lamps.
According to discharge condition suitably design voltage is fed to power supply on the excited quasi-molecular lampbulb electrode.In typical structure, be chosen in tens kilo hertzs under the frequency of tens megahertzes from several kilovolts to tens kilovolts output voltage.
Discharge gas is selected from a kind of rare gas in for example xenon, argon and the krypton, or the mist of described rare gas and chlorine.
The centre wavelength of excimers light depends on the discharge gas material.Be well known that if discharge and contain xenon, centre wavelength is 172nm; If discharge gas contains argon, centre wavelength is 126nm; If discharge gas contains krypton, centre wavelength is 146nm; If discharge gas contains argon and chlorine, centre wavelength is 175nm; If discharge gas contains xenon and chlorine, centre wavelength is 308nm; And if discharge gas contains krypton and chlorine, centre wavelength is 222nm.
For discharge vessel of the present invention, can use different shapes, as long as this shape is made airtight.This shape can be shape, box-like or the analogous shape of for example cylinder form, bicylindrical shape shape, general plane.
The dielectric material that forms discharge vessel must arrive the excimers transmittance outside effectively.The example of this material is quartz glass, sapphire or magnesium fluoride.
Be used for electrode of the present invention, considering that electrode is positioned on the position of light transmission region, therefore using to have to make excimers light pass through the electrode of the shape of electrode, for example grid or spiral-shaped electrode.
Being used for actinolyte of the present invention is the ultraviolet light source of emission.This reflector can be following light source, for example the ultraviolet lamp of main emission of low pressure mercury vapor lamp or backlight; The ultraviolet light-emitting diode of main emission; The perhaps for example main visible emitting of Halogen lamp LED and a small amount of additional ultraviolet lamp.
First embodiment
Fig. 1 represents the sectional view according to the excited quasi-molecular lamp device of first embodiment of the invention.Fig. 2 represents to be used for the longitdinal cross-section diagram of the excited quasi-molecular lampbulb 1 of this excited quasi-molecular lamp device.
Excited quasi-molecular lampbulb 1 has by quartz glass to be made and its length is the container 5 of 850nm.Inner tube 2, its overall diameter that its overall diameter is set is 23mm and its thickness and be 1.2mm in container 5 is that 35mm and its thickness are the exterior tube 3 of 1.2mm and are positioned at the airtight bicylindrical shape discharge space 4 that inner tube 2 and exterior tube 3 by arranged concentric form spaces.
Xenon as discharge gas is encapsulated in the discharge space 4, and its pressure is arranged to 500 holders.On the surface of ribbon stainless steel internal electrode 6 with round-shaped inner tube 2 along the discharge space outside of its surface arrangement in discharge vessel 5.The latticed outer electrode 7 that is formed by nickel-base alloy covers the outer surface of the exterior tube 3 in the discharge vessels 5.
High frequency electric source 8 be connected to form by internal electrode 6 and outer electrode 7 this on the electrode, and high frequency electric source 8 will be applied on internal electrode and the outer electrode 7 as the high frequency voltage of stablizing starting resistor (frequency is that 2MHz and voltage are 7.5KV p-p), and cause excited quasi-molecular lampbulb 1 to begin to launch the vacuum ultraviolet with 172nm centre wavelength.
Excited quasi-molecular lampbulb 1 is placed in the lamp housing, and lamp housing forms with air tight manner by loam cake 9, left side wall 10, right side wall 11, top excimers light-transmissive window 12, antetheca and rear wall.Preceding not shown in the accompanying drawings with rear wall.
Except excimers optical lens window 12, comprise that the parts of loam cake 9, left side wall 10, right side wall 11, antetheca and rear wall can be made by stainless steel, excimers light-transmissive window 12 can be made by quartz glass.Vacuum ultraviolet is positioned at the unshowned workpiece of treatment chamber via 12 irradiations of excimers light-transmissive window.Vertically arranging of the excited quasi-molecular lampbulb 1 of speculum 15 and 16 in the lamp housing around it, and the excimers light of excited quasi-molecular lampbulb 1 emission is directed to excimers light-transmissive window 12.
Ultraviolet (uv) transmission hole 17 (diameter 20mm) is being formed in the loam cake 9 on any position of outer electrode 7, outer electrode be arranged in its vertically on.Can be arranged in the ultraviolet (uv) transmission hole 17 with air tight manner by the ultraviolet (uv) transmission window 18 that quartz glass is made.
Comprise on the hafnium oxide and the surface of the plural layers 19 of the silica excited quasi-molecular lampbulb side that is formed on ultraviolet (uv) transmission window 18 alternately.The light of the above wavelength of this film 19 transmission 200nm, and stop the light that is equal to or less than the 200nm wavelength.
Low pressure mercury vapor lamp 20 as actinolyte is arranged on the ultraviolet (uv) transmission window 18, as shown in drawings.High frequency voltage is applied on the low pressure mercury vapor lamp 20 by high frequency lighting circuit 21, and low pressure mercury vapor lamp 20 begins to launch the light with 254nm peak wavelength.
High frequency lighting circuit 21 obtains high frequency via direct current from alternating current, and contains negative circuit so that produce high-frequency alternating current by direct current.Light cover 22 is around low pressure mercury vapor lamp 20 and to its protection.
Low pressure mercury vapor lamp 20 is encapsulated in the interior xenon of discharge space 4 of the excited quasi-molecular lampbulb 1 in the lamp housing via ultraviolet (uv) transmission window 18 irradiations that form film 19 it on by ultraviolet ray (centre wavelength is 254nm).
By or by the irradiation low pressure mercury vapor lamp 20 situation under, apply stable starting resistor (frequency is 2MHz, and voltage is 7.5kV p-p) and measure start-up time according to the excited quasi-molecular lampbulb 1 of first embodiment.This meter is illustrated in when illuminating low pressure mercury vapor lamp 20, and be about 100 microseconds start-up time, and when not illuminating low pressure mercury vapor lamp 20, be 30000 microseconds start-up time.When low pressure mercury vapor lamp 20 illuminates, significantly improved start-up time.
The chart that Fig. 3 represents to start probability with respect to applying voltage, its data change to from 5.0kVp-p (being lower than stable starting resistor (7.5kVp-p)) and stablize starting resistor and measure simultaneously and drive probability and obtain by applying voltage.In Fig. 3, draw the startup probability of excited quasi-molecular lampbulb 1.Each starts probability is to measure ten times mean value.Curve A represents not illuminate the startup probability nature of measuring under the situation of low pressure mercury vapor lamp 20.Curve B represents to illuminate the startup probability nature of measuring under the situation of low pressure mercury vapor lamp 20.
Curve A among Fig. 3 is illustrated in that excited quasi-molecular lampbulb 1 is not activated under the situation that does not illuminate low pressure mercury vapor lamp 20 under 5.4kVp-p, voltage on being applied to excited quasi-molecular lampbulb 1 is during greater than 5.4kVp-p, begin to occur starting, increase along with applying voltage, starting probability increases gradually, and the startup probability reaches 100% when applying voltage for 7.5kVp-p.
Fig. 3 curve B represents to illuminate that excited quasi-molecular lampbulb 1 is not activated under low pressure mercury vapor lamp 20 situations under 5.4kVp-p, identical with the situation that does not illuminate low pressure mercury vapor lamp 20, but compare with the situation that does not illuminate low pressure mercury vapor lamp 20, the increase that starts probability is more precipitous.In addition, the startup probability of excited quasi-molecular lampbulb 1 reaches 100% when applying voltage for 5.8kVp-p, and this voltage ratio 7.5kVp-p voltage is little by about 23%.
Therefore, we can confirm in the excited quasi-molecular lamp device according to first embodiment, under the situation that low pressure mercury vapor lamp 20 illuminates, excited quasi-molecular lampbulb 1 can be always with the voltage starting that applies than the stable starting resistor little 20% of traditional excited quasi-molecular lampbulb.
In traditional excimers modulated structure, applying under the situation of voltage fluctuation, stable starting resistor is tending towards being arranged on the higher relatively numerical value.Occur changing if apply voltage, the stable starting resistor of excited quasi-molecular lampbulb 1 can be designed to have lower numerical value.Therefore, can avoid being provided with higher relatively and accidental discharge that in conventional apparatus, often occur owing to stablizing starting resistor.
Low pressure mercury vapor lamp 20 is arranged in the outside according to the excited quasi-molecular lamp device of first embodiment.This can be chosen in how to arrange low pressure mercury vapor lamp 20 in this device more neatly, and compares with the situation that low pressure mercury vapor lamp 20 is arranged in the lamp housing outside, also makes vome of shell littler.
According to first embodiment, film 19 stops the light of the following wavelength of 200nm, and the light of the above wavelength of transmission 200nm.Therefore, because ultraviolet (uv) transmission window 18 stops this vacuum ultraviolet transmission, do not cause ozone to form from the vacuum ultraviolet of excited quasi-molecular lampbulb 1.
Second embodiment
Fig. 4 represents the sectional view according to the excited quasi-molecular lampbulb in the excited quasi-molecular lamp device of second embodiment of the invention.
Compare with first embodiment, be following 2 points according to the marked difference in the excited quasi-molecular lamp device of second embodiment: at first, the stable starting resistor of excited quasi-molecular lampbulb changes so that have the frequency of 2MHz and the voltage of 8.1kVp-p; And secondly, use Halogen lamp LED and be used to start the power circuit of Halogen lamp LED as actinolyte.Other structure is roughly identical with first embodiment, so the identical reference number that uses among first embodiment is used for describing these elements.
Halogen lamp LED 23 (power consumption 100W, rated voltage 12V) as actinolyte mainly reflects the light of its wavelength region may in visible and infra-red range, but the fraction of light falls into the interior 250nm of ultraviolet ray in the wave-length coverage of 380nm.For example, compare with the ultrared intensity of 900nm, the ultraviolet intensity of 380nm is about 5%.
The defective that Halogen lamp LED 23 has is to compare with the ultra-violet lamp of for example low pressure mercury vapor lamp, and ultraviolet intensity is lower; But as following description, Halogen lamp LED 23 illuminates before excited quasi-molecular lampbulb 1 begins emission, and after excited quasi-molecular lampbulb 1 started, Halogen lamp LED 23 was closed.Therefore, if lamp switches on and off repeatedly, compare with ultra-violet lamp, Halogen lamp LED 23 has advantage and is that turn-on time is fast.
The curved surface of this speculum 25 is designed so that it has at the luminous component 23a place of Halogen lamp LED 23 and has focus, and has second focus at the middle body 4a place of discharge space 4 inside of the excited quasi-molecular lampbulb 1 of the most close Halogen lamp LED 23; Therefore, focus on by speculum 25 reflections and in Halogen lamp LED 23 1 sides of the discharge space 4 of excited quasi-molecular lampbulb 1 from the ultraviolet ray of Halogen lamp LED 23 emission.
The power circuit that is used to illuminate Halogen lamp LED 23 comprises power supply 27 (dc voltage: 12V) and opened/closed switch 28, and be designed so that 28 closures (connection) when starting Halogen lamp LED 23 of opened/closed switch, and make the opened/closed switch open (disconnection) At All Other Times.
Although the ultraviolet quantity of emission is very little when starting Halogen lamp LED 23, as mentioned above, ultraviolet ray penetrates window 18 by the ultraviolet ray that is formed with film 19, and irradiation ultraviolet radiation converges near the middle body 4a in the discharge space 4 of the excited quasi-molecular lampbulb 1 on the focus the xenon.
In excited quasi-molecular lamp device according to second embodiment, passing through or do not passing through under the situation of irradiation Halogen lamp LED 23, applying stable starting resistor (frequency is 2MHz, and voltage is 8.1kVp-p) measures the start-up time according to the excited quasi-molecular lampbulb 1 of second embodiment.This meter is illustrated in when illuminating Halogen lamp LED 23, and be about 30 microseconds start-up time, and when not illuminating Halogen lamp LED 23, be 6960 microseconds start-up time.When xenon being exposed to a spot of ultraviolet ray and getting off to make that Halogen lamp LED 23 illuminates, significantly improved start-up time.
Change to from 5.0kVp-p (being lower than stable starting resistor (8.1kVp-p)) and stablize starting resistor and measure and drive probability by under the situation that illuminates or do not illuminate Halogen lamp LED 23, applying voltage with respect to the relation that applies voltage.Each starts probability is to measure ten times mean value.The characteristic of measuring illuminates Halogen lamp LED 23 and the described situation of first embodiment on xenon the time is identical with a small amount of ultraviolet irradiation with shown in Figure 3.
Therefore, we can confirm in the excited quasi-molecular lamp device according to second embodiment, under the situation that Halogen lamp LED 23 illuminates, excited quasi-molecular lampbulb 1 can be always with the voltage starting that applies than the stable starting resistor little 20% of traditional excited quasi-molecular lampbulb.
In the excited quasi-molecular lampbulb according to second embodiment, 23 of Halogen lamp LEDs illuminate when starting excited quasi-molecular lampbulb 1, and the life-span of Halogen lamp LED 23 will be longer.
The 3rd embodiment
Fig. 5 represents the vertical longitdinal cross-section diagram according to the excited quasi-molecular lampbulb of the excited quasi-molecular lamp device of third embodiment of the invention of the intercepting of axis along the longitudinal.In Fig. 5, express forming Fig. 1 or 4 unshowned antetheca 13 and rear walls 14.
Compare with second embodiment, be following content according to the main distinction of the excited quasi-molecular lamp device of the 3rd embodiment: the ultrared infrared transmitting filter 30 of transmission from excited quasi-molecular lampbulb 1 emission light is set; Be used as infrared detector so that detect ultrared silicon photoelectric diode 40 and the lighting controller 50 of control excited quasi-molecular lampbulb 1 and Halogen lamp LED 23 connections.Other structure is roughly the same with first and second embodiment, so the same reference numerals among first and second embodiment is used for describing these elements.
Fig. 6 represents the block diagram of lighting controller 50.When lamp connection signal 61 produces electric current 60 inputs so that when connecting excited quasi-molecular lampbulb 1 and Halogen lamp LED 23 from the lamp connection signal, illumination control circuit 51 in the lighting controller 50 produces Halogen lamp LED connection signal 52, and this signal 52 is outputed to opened/closed circuit 54.When Halogen lamp LED connection signal 52 arrived, opened/closed circuit 54 closures (connections) also were applied to 12V voltage on the Halogen lamp LED 23 from wherein contained power supply 59, and connection Halogen lamp LED 23.
Simultaneously, use comprising signal delay line with 61 inputs of lamp connection signal after a second, illumination control circuit 51 is also exported excited quasi-molecular lampbulb connection signal 53 to high frequency electric source 80, so that connection excited quasi-molecular lampbulb 1.Illuminating the time point in a second afterwards although term " second afterwards " refers to Halogen lamp LED 23, must not be a second, and it is to confirm that Halogen lamp LED 23 illuminates the required time.
Configuration for infrared transmitting filter 30 and silicon photoelectric diode 40, the light receiving part that covers Halogen lamp LEDs 23 and infrared transmitting filter 30 except light cover 22 is installed in the position in the hole 31, light detects hole 31 and is formed on any position in the loam cake 9 of lamp housing, so that guarantee that lamp housing is airtight, and the light receiving part of silicon photoelectric diode 40 is arranged on the infrared transmitting filter 30.
The ultraviolet ray of the centre wavelength of excited quasi-molecular lampbulb 1 main irradiation 172nm, as described in first embodiment, but except vacuum ultraviolet, excited quasi-molecular lampbulb 1 is gone back a small amount of infrared ray of irradiator wavelength between 800bm and 1000nm.
Infrared transmitting filter 30 is optical filters, its model is IR-76 (being made by HOYACORPORATION), receive the output of excimers light from excited quasi-molecular lampbulb 1, stop the light of the following wavelength of 760nm, and the light of transmission peak wavelength between 800nm and 1000nm.Silicon photoelectric diode 40 is sold with model S1336-44BQ (being made by Hamamatsu Photonics K.K).
Infrared ray by infrared transmitting filter 30 detects by silicon photoelectric diode 40, and then exports the photoelectric detecting signal 41 whether indication excited quasi-molecular lampbulb 1 is connected.
Reference voltage 56 is arranged to the threshold voltage of 3V so that judge the on-state of excited quasi-molecular lampbulb 1.Connect confirmation signal 58 and will appear at the situation that photoelectric detecting signal 41 is higher than the reference voltage that is actually 3V.
Adopt to connect confirmation signal 58, illumination control circuit 51 indication opened/closed circuit 54 are opened (disconnections), and power supply 59 is applied to the 12V voltage disconnection on this aspect, so that Halogen lamp LED 23 is closed.
Fig. 7 represents the timetable of lighting controller 50 operations.In this table, lamp connection signal 61, Halogen lamp LED connection signal 52, excited quasi-molecular lampbulb connection signal 53, photoelectric detecting signal 41 and connection confirmation signal 58 are as the logical signal with two states (effectively (5V) and invalid (0V)).
Be included in signal delay line in the illumination control circuit 51 in Fig. 7 Halogen lamp LED connection signal 52 and the guiding edge of excited quasi-molecular lampbulb connection signal 53 between produce the delay of an about second hand, but do not produce any time of delay with respect to the trailing edge of lamp connection signal 61.
If output " 0 " state in lamp connection signal 61, illumination control circuit 51 makes that the excited quasi-molecular lampbulb connection signal 53 of high frequency voltage 80 is " 0 " state equally, and then excited quasi-molecular lampbulb 1 is closed, as shown in Figure 7.
As mentioned above, in the excited quasi-molecular lamp device according to the 3rd embodiment, compare with the situation that Halogen lamp LED when excited quasi-molecular lampbulb 1 illuminates always illuminates, the life-span of Halogen lamp LED 23 prolongs more.Because the Halogen lamp LED according to the 3rd embodiment has the mechanism that will be applied to the voltage automatic disconnection on the Halogen lamp LED 23 in lighting controller 50, detect the photoelectric detecting signal 41 of the ultraviolet silicon photoelectric diode 40 in the light of excited quasi-molecular lampbulb 1 irradiation when coming comfortable excited quasi-molecular lampbulb 1 to illuminate, Halogen lamp LED 23 need excited quasi-molecular lampbulb 1 the startup stage illuminate.
The 4th embodiment
Fig. 8 represents the sectional view according to the excited quasi-molecular lamp device of fourth embodiment of the invention.Compare with first embodiment shown in Figure 1, be according to the difference of the excited quasi-molecular lampbulb of the 4th embodiment: low pressure mercury vapor lamp 20 is positioned at excimers light-transmissive window 12 outside of lamp housing and towards the one side; And therefore ultraviolet (uv) transmission window 18 and ultraviolet (uv) transmission hole 17 need be set in the loam cake 9 of first embodiment.Ultraviolet ray from low pressure mercury vapor lamp 20 shines on the xenon of filling in the discharge space 4 of excited quasi-molecular lampbulb 1 via the excimers light-transmissive window 12 in the lamp housing.
Therefore, measure and start-up time and the startup probability according to the excited quasi-molecular lampbulb 1 of the 4th embodiment that illuminate low pressure mercury vapor lamp 20 simultaneously has the advantage identical with first embodiment.
Another advantage of this embodiment is that the low pressure mercury vapor lamp of being convenient to repacking is connected on the excited quasi-molecular lamp device that is installed on the production line.
The 5th embodiment
Fig. 9 represents the sectional view according to the excited quasi-molecular lamp device of fifth embodiment of the invention.Compare with first embodiment shown in Figure 1, be according to the difference of the excited quasi-molecular lamp device of the 5th embodiment:
1) low pressure mercury vapor lamp 20 is placed in the housing; Therefore and 2) be not arranged on ultraviolet (uv) transmission hole 17 and ultraviolet (uv) transmission window 18 in the loam cake 9 of first embodiment.Low pressure mercury vapor lamp 20 is launched ultraviolet ray in lamp housing, and the xenon in the discharge space 4 of irradiation excited quasi-molecular lampbulb 1.
Experiment expression startup probability and start-up time when illuminating low pressure mercury vapor lamp 20, excited quasi-molecular lampbulb 1 has the advantage identical with the excited quasi-molecular lampbulb 1 of first embodiment.
The 6th embodiment
Figure 10 represents the sectional view according to the excited quasi-molecular lampbulb of sixth embodiment of the invention.Compare with second embodiment shown in Figure 4, be to focus on and be directed in the fiber bundle 29 that contains multiple beams of optical fiber in the fiber entry side from the ultraviolet ray of Halogen lamp LED 23 emissions according to the main distinction of the excited quasi-molecular lampbulb of the 6th embodiment.Then, in fiber the ultraviolet ray of transmission via the inside of the outlet side irradiation light housing of fibre bundle.Also shine the xenon of filling in the discharge space 4 of excited quasi-molecular lampbulb 1 from the ultraviolet ray of Halogen lamp LED 23 emissions.
Experiment expression startup probability and start-up time when illuminating Halogen lamp LED 23, have the advantage identical with second embodiment according to the excited quasi-molecular lamp device of the 6th embodiment.
The 7th embodiment
Figure 11 represents the sectional view according to the excited quasi-molecular lamp device of seventh embodiment of the invention.Compare with first embodiment of the invention shown in Figure 1, the main distinction is to have a plurality of excited quasi-molecular lampbulb 1a, 1b and 1c and a plurality of speculum 15a, 15b and the 15c that is positioned at lamp housing according to the excited quasi-molecular lamp device of the 7th embodiment.
In the 7th embodiment, from the ultraviolet ray 200 of low pressure mercury vapor lamp 20 via the ultraviolet (uv) transmission hole 17 that is positioned at loam cake 9 and the ultraviolet (uv) transmission hole 150 that is positioned at speculum 15b separately irradiation be encapsulated on the xenon of discharge space 4b of excited quasi-molecular lampbulb 1b.
By voltage is applied to that excited quasi-molecular lampbulb 1b goes up and simultaneously by the discharge gas from the ultraviolet ray 200 irradiation excited quasi-molecular lampbulb 1b of low pressure mercury vapor lamp 20 from high frequency electric source 8b, excited quasi-molecular lampbulb 1b begins with the probability irradiation identical with the excited quasi-molecular lampbulb 1 of first embodiment.
As mentioned above, in the 7th embodiment, only by ultraviolet ray 200 irradiation excited quasi-molecular lampbulb 1b (and not having excited quasi-molecular lampbulb 1a and 1c) from low pressure mercury vapor lamp 20.Irradiation contains light from the ultraviolet ray 210 of excited quasi-molecular lampbulb 1b, and comprises the xenon that contains among the discharge space 4a of other excited quasi-molecular lampbulb 1a of setting in the ultraviolet light 210 direct or indirect irradiation light housings and 1c and the 4c.
In this state, when high frequency electric source 8a and 8c are applied to voltage excited quasi-molecular lampbulb 1a and 1c and go up, improved the start-up time of excited quasi-molecular lampbulb 1a and 1c, even and supply voltage fluctuation, excited quasi-molecular lampbulb 1a and 1c also can stablize startup, and when low pressure mercury vapor lamp 20 shines excited quasi-molecular lampbulb 1b with ultraviolet ray 200, improved the startup probability of excited quasi-molecular lampbulb 1b.
The 8th embodiment
Difference between the 8th embodiment and the 7th embodiment is that lamp and lamp housing combine.In the 7th embodiment, a plurality of lamp 1a, 1b and 1c are arranged in the lamp housing.In the 8th embodiment, each lamp is contained in its oneself the lamp housing, as shown in figure 12.
Figure 12 represents to have towards two the lamp housing 120a of excimers light- transmissive window 12a and 12b and the excited quasi-molecular lamp device of 120b.The unshowned actually object that will handle inserts when being positioned at the treatment chamber 101 of locating between excimers light-transmissive window 12a and the 12b, and the both sides of object will be handled simultaneously.
Lighting mechanism according to the excited quasi-molecular lampbulb 1b of eighth embodiment of the invention is identical with the lamp of the 7th embodiment.Excited quasi-molecular lampbulb 1b goes up in the discharge space 4b that low pressure mercury vapor lamp 20 simultaneously shines ultraviolet ray 200 excited quasi-molecular lampbulb 1b and comes irradiates light 210 by voltage is applied to excited quasi-molecular lampbulb 1b from high frequency electric source 8b.
Excited quasi-molecular lampbulb 1b will contain ultraviolet light 210 via the excimers light-transmissive window 12b in the lamp housing 120b, treatment chamber 101 and the excimers light-transmissive window 12a in the lamp housing 102a of excimers light-transmissive window 12b and be radiated on the discharge space 4a.
In this case, by voltage is applied on the excited quasi-molecular lampbulb 1a from high frequency electric source 8a, similar with excited quasi-molecular lampbulb 1b by the situation that the light 200 from low pressure mercury vapor lamp 20 shines, excited quasi-molecular lampbulb 1a starts fast, even and being applied to voltage fluctuation on the electrode, excited quasi-molecular lampbulb 1a also can start reliably.
The 9th embodiment
In the excited quasi-molecular lamp device according to the 8th embodiment, providing wherein, light-transmissive window is arranged to towards the example of a plurality of excited quasi-molecular lampbulb 1a and 1b.But in having the excited quasi-molecular lamp device according to the 9th embodiment of a plurality of excited quasi-molecular lampbulbs, the excited quasi-molecular lampbulb transmission window has the configuration of other type.Figure 13 represents the excited quasi-molecular lampbulb according to the 9th embodiment, and wherein all excimers light-transmissive window of each excited quasi-molecular lampbulb are along identical planar alignment, so that towards identical direction.
Excited quasi-molecular lamp device shown in Figure 13 is an excited quasi-molecular lampbulb of handling in fact unshowned board, this object inserts from the opening 102 that is formed in the treatment chamber 100, and by bearing roller carrying by excimers light- transmissive window 12a and 12b, so that handle a side surface of board, thereby carry out cleaning surfaces or surface treatment.Two excimers light-transmissive window 12a and the 12b of lamp housing 120a and 120b are arranged in the same level, so that towards identical direction.
In the lamp device according to the 9th embodiment, low pressure mercury vapor lamp 20 shines ultraviolet ray 200 on the excited quasi-molecular lampbulb 1b, and then excited quasi-molecular lampbulb 1b irradiation contains ultraviolet light 210.By excited quasi-molecular lampbulb 1a being exposed to indirectly inwall 110 reflections that have in the treatment chamber 100 and the light that arrives the excimers that are positioned at other lamp housing 210 times, even the voltage fluctuation that is applied, excited quasi-molecular lampbulb 1a also can start fast and stably.
According to the 8th and the 9th embodiment, can obtain the startup advantage identical, and not need to be provided for a low pressure mercury vapor lamp of each lamp housing with first embodiment.
It is the two-tube discharge space of bicylindrical shape that these embodiment of described excited quasi-molecular lamp device have its shape, and has high frequency electric source on the outer surface separately of the discharge vessel on the discharge space distally in container and apply pair of electrodes on it.Shape according to discharge vessel of the present invention can be the general plane shape of cylindrical or box like, and electrode can be positioned at discharge vessel.
Figure 14 represents that its shape is is the vertical cross-section diagram of one type single columniform discharge vessel of the discharge vessel of non-bicylindrical shape pipe as its shape.
Make and fill xenon by quartz glass according to the discharge vessel 5 of Figure 14 as discharge gas.Paired electrode 69a and 69b are arranged on the outer surface of discharge vessel 5.Electrode 69a and 69b are aluminium strips, and it closely is connected on the discharge vessel, and high frequency voltage is applied on these electrodes from high frequency electric source 8.Except the band shape, the shape of these electrodes 69a and 69b can be film or mesh shape.For the material of these electrodes, they can be made by having the high corrosion resistance metal, for example stainless steel, monel metal (registered trade mark) or gold.
Figure 15 represents to have the sectional view of excited quasi-molecular lampbulb 1 of excited quasi-molecular lamp device of the shape of general plane, and the discharge vessel 5 that quartz glass is made has opposed facing two planomural 5a and 5b and is arranged in electrode 65a and 65b on the inner surface of wall 5a and 5b.These electrodes 65a and 65b cover the dielectric film of being made by silica 67, and discharge vessel 5 fillings are as the xenon of discharge gas.
The tenth embodiment
Figure 16 represents to have the vertical cross-section diagram of excited quasi-molecular lamp device of the box-like discharge vessel of ninth embodiment of the invention.The excited quasi-molecular lampbulb 1 that is used for the tenth embodiment has and comprises the excimers light-transmissive window 122 made by quartz glass and the box-like discharge vessel 5 of ceramic shell 121.Excited quasi-molecular lampbulb 1 also has a plurality of electrode 66c, 66d, 66e, 66f and the 66g that is arranged in the discharge vessel 5.Xenon is filled in the discharge vessel 5 as discharge gas.
A plurality of electrodes are made by the metal tape of the dielectric film 68 that the coating silica is made, and are divided into two polarity groups: one group comprises 66c, 66e and 66g, and another group comprises 66d and 66f; And their layouts that hockets; And therefore they form discharge space 4d, 4e, 4f and 4g.
In the tenth embodiment, actinolyte 20 shines ultraviolet ray 200 on discharge space 4d, 4e, 4f and the 4g via the ultraviolet (uv) transmission window 18 that is formed in the housing 121 that constitutes discharge vessel 5.In this case, high frequency electric source 8 applies on every group of electrode of voltage in the excited quasi-molecular lampbulb 1, and then excited quasi-molecular lampbulb 1 begins irradiation.
For the electrode position that is arranged in the discharge vessel, tenth embodiment of the invention is different from first to the 9th embodiment, but can obtain the advanced person's identical startability with these embodiment, the stable startup ability under applying the situation that voltage applying voltage fluctuation when very low particularly for example, and, can also obtain enough discharge spaces owing to there is not trigger electrode.
For lid 121 material, it can be the inorganic material of for example a plurality of composition glass or for example aluminium or stainless metal.
For discharge gas, we use the vacuum ultraviolet xenon of emission 172nm as discharge gas in the embodiment shown; But, in the present invention,, can use other gas of mentioning in the short-summary of the present invention as discharge gas according to required wavelength.
For actinolyte, working voltage mercury vapor lamp and Halogen lamp LED in described embodiment, but other light source of the semiconductor ultraviolet light-emitting diode of for example main irradiation ultraviolet radiation and ultra-violet lamp for example backlight also can be used as actinolyte.
Industrial applicibility
The invention provides a kind of excimers that do not have trigger electrode and have the improvement startability The lamp device, and provide a kind of under different condition (for example be applied to the voltage pulsation on the electrode, Particularly in supply voltage situation about reducing) have excimers of stable startability Lamp.
Claims (7)
1. an excited quasi-molecular lamp device comprises:
Have and fill discharge gas so that produce the discharge vessel of the discharge air of excimers light, the part of described discharge vessel is transparent for the described excimers light from described discharge space emission;
Has the excited quasi-molecular lampbulb that produces discharge in electrode and the described discharge gas in described discharge space;
Apply the power supply of voltage to the described electrode; And
Be arranged in the described excited quasi-molecular lamp device so that the actinolyte on the described discharge gas that ultraviolet irradiation is filled in the described discharge vessel;
Wherein ultraviolet irradiation to described discharge gas the time, by being applied to, voltage is started described excited quasi-molecular lampbulb on the described electrode at described actinolyte.
2. excited quasi-molecular lamp device as claimed in claim 1 is characterized in that, described excited quasi-molecular lampbulb has a pair of electrode of facing on the outer surface separately of described discharge vessel.
3. excited quasi-molecular lamp device as claimed in claim 1 or 2 is characterized in that, also comprises:
The lamp housing that wherein holds described excited quasi-molecular lampbulb; And
Be positioned at the ultraviolet (uv) transmission window on the described lamp housing body wall part;
Wherein said actinolyte is positioned at described lamp housing outside, and the ultraviolet ray of described actinolyte emission is by described ultraviolet (uv) transmission window and shine described discharge gas.
4. excited quasi-molecular lamp device as claimed in claim 1 or 2, it is characterized in that, also comprise the ultraviolet (uv) transmission window that is positioned on the described excited quasi-molecular lampbulb wall part, the ultraviolet ray of wherein said actinolyte emission is by described ultraviolet (uv) transmission window and shine described discharge gas.
5. as claim 3 or 4 described excited quasi-molecular lamp devices, it is characterized in that thin layer is formed on the surface of described ultraviolet (uv) transmission window, this film stops the ultraviolet ray and the above ultraviolet ray of transmission 200nm wavelength of the following wavelength of 200nm.
6. as each described excited quasi-molecular lamp device of claim 1-5, it is characterized in that, also comprise:
Be used for detecting the optical detection device of the contained light wavelength of excimers light of described excited quasi-molecular lampbulb emission; And
Be used for being applied to the voltage disconnecting apparatus of the voltage on the described actinolyte according to the automatic disconnection as a result of described optical detection device.
7. as each described excited quasi-molecular lamp device of claim 1-6, it is characterized in that, at least one actinolyte is set, and at least one excited quasi-molecular lampbulb is set, and the quantity of actinolyte is less than the quantity of excited quasi-molecular lampbulb.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004212298 | 2004-06-23 | ||
| JP212298/04 | 2004-06-23 | ||
| JP34978/05 | 2005-02-10 |
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| Publication Number | Publication Date |
|---|---|
| CN1713337A true CN1713337A (en) | 2005-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510079470 Pending CN1713337A (en) | 2004-06-23 | 2005-06-23 | Excited quasi-molecular lampbulb |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101685759A (en) * | 2008-09-27 | 2010-03-31 | 优志旺电机株式会社 | Excimer lamp device |
| CN102683163A (en) * | 2011-03-11 | 2012-09-19 | 优志旺电机株式会社 | Excimer lamp |
| CN104201090A (en) * | 2014-08-13 | 2014-12-10 | 苏州普京真空技术有限公司 | Vacuum electrodeless lamp |
| CN112673454A (en) * | 2019-08-05 | 2021-04-16 | 优志旺电机株式会社 | Ultraviolet irradiation device |
| CN114342042A (en) * | 2019-10-07 | 2022-04-12 | 优志旺电机株式会社 | Ultraviolet irradiation device |
-
2005
- 2005-06-23 CN CN 200510079470 patent/CN1713337A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101685759A (en) * | 2008-09-27 | 2010-03-31 | 优志旺电机株式会社 | Excimer lamp device |
| CN101685759B (en) * | 2008-09-27 | 2013-03-27 | 优志旺电机株式会社 | Excimer lamp device |
| CN102683163A (en) * | 2011-03-11 | 2012-09-19 | 优志旺电机株式会社 | Excimer lamp |
| CN102683163B (en) * | 2011-03-11 | 2015-12-09 | 优志旺电机株式会社 | Excimer lamp |
| CN104201090A (en) * | 2014-08-13 | 2014-12-10 | 苏州普京真空技术有限公司 | Vacuum electrodeless lamp |
| CN112673454A (en) * | 2019-08-05 | 2021-04-16 | 优志旺电机株式会社 | Ultraviolet irradiation device |
| CN112673454B (en) * | 2019-08-05 | 2024-03-01 | 优志旺电机株式会社 | Ultraviolet irradiation device |
| CN114342042A (en) * | 2019-10-07 | 2022-04-12 | 优志旺电机株式会社 | Ultraviolet irradiation device |
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Open date: 20051228 |