CN1783421A - Quasi molecular lamp device - Google Patents
Quasi molecular lamp device Download PDFInfo
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- CN1783421A CN1783421A CNA2005101286115A CN200510128611A CN1783421A CN 1783421 A CN1783421 A CN 1783421A CN A2005101286115 A CNA2005101286115 A CN A2005101286115A CN 200510128611 A CN200510128611 A CN 200510128611A CN 1783421 A CN1783421 A CN 1783421A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L9/00—Disinfection, sterilisation or deodorisation of air
- A61L9/015—Disinfection, sterilisation or deodorisation of air using gaseous or vaporous substances, e.g. ozone
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/025—Associated optical elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
- H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
- A61L2209/10—Apparatus features
- A61L2209/12—Lighting means
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
- A61L2209/20—Method-related aspects
- A61L2209/21—Use of chemical compounds for treating air or the like
- A61L2209/212—Use of ozone, e.g. generated by UV radiation or electrical discharge
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
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- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Physical Water Treatments (AREA)
Abstract
The invention provides an excimer lamp device capable of simplifying configuration by dispensing with a light take-out window sectioning a lamp house and an irradiated region to reduce a cost, preventing a power supply member located in the vicinity of a lamp end from being exposed to active oxygen to prevent oxidization, and reducing the deterioration of the member or generation of the damage. The excimer lamp device includes an excimer lamp for radiating ultraviolet light by discharge via a dielectric substance and the lamp house for storing the excimer lamp. An aperture for taking out the radiated light from the lamp is formed on the lamp house, and the internal space of the lamp house communicates with the internal space of a processing chamber where a substance to be processed is processed through the aperture. A power supply coupling is formed of the power supply member connected with at least one of ends of the excimer lamp. A partitioning member for partitioning a lamp end region having the power supply coupling formed and the internal space of the lamp house is provided inside the lamp house.
Description
Technical field
The present invention relates to a kind ofly to possess by dielectric discharge to come the Excimer lamp of emitting ultraviolet light and accommodate the Excimer lamp apparatus of the lampshade of this Excimer lamp.
Background technology
For example in the Excimer lamp apparatus that has loaded by Excimer lamp as can be known such as patent documentation 1 grade, will from Excimer lamp radiation, be mapped to the object being treated surface smaller or equal to the ultraviolet lighting of 200nm, by the ozone that the produces auxilliary mutually effect that multiplies each other with the ultraviolet light of transmission, the splash organic substance on object being treated surface of decomposition waits and cleans.
Fig. 8 represents the summary pie graph of this Excimer lamp apparatus, in lampshade 90 internal configurations Excimer lamp 91 is arranged, and is provided with opening and is provided with hermetically ultraviolet light is had radioparent smooth output window M below this lampshade 90.The process chamber 92 of handling object being treated W is formed at the bottom at Excimer lamp apparatus, and the space of the inner space of lampshade 90 and inner treatment chamber space P is divided airtightly by light output window M, and the radiating light that constitutes Excimer lamp 91 penetrates via light output window M.Possess not shown object being treated carrying mechanism in process chamber 92, the workpiece W of glass substrate etc. is by relevant carrying mechanism carrying.
From the ultraviolet light of Excimer lamp 91 radiation, using under the situation of xenon as discharge gas the light of emit wavelength 172nm.This short wavelength's ultraviolet light is taken out to the outside efficiently, so light output window M need have high transmittance to the ultraviolet ray below the 200nm, generally uses synthetic quartz glass.In addition, in lampshade 90, inert gases such as filling nitrogen are being kept the lower state of oxygen concentration in order to prevent the ultraviolet light loss.
In above-mentioned Excimer lamp apparatus, along with the maximization of the glass substrate of the liquid crystal indicator of object being treated, strong request can be carried out increase large-area processing, irradiated area.Therefore, the light output window that the quartz glass of being used by division lampshade and irradiated area constitutes also needs big parts, also needs to be used to fill the interior inert gas of lampshade in a large number, and causes the decline of expensiveization or the production efficiency of device.
From this viewpoint, proposed a kind of for cost degradation is not provided with the light output window, and make Excimer lamp adjacent with the irradiated area and the configuration device (with reference to patent documentation 2).
Patent documentation 1: Japanese kokai publication hei 11-138490 communique
Patent documentation 2: Japanese kokai publication hei 2004-113984 communique
Fig. 9 is in Excimer lamp apparatus shown in Figure 8, be not provided with divide lampshade with the light output window W of irradiated area simplified structure, realize an example of the device of cost degradation, be the sectional view that amplifies the end of representing Excimer lamp 91.
In the figure, Excimer lamp 91 arranged coaxial the outboard tube 912 and inside tube 913 of different-diameter, the discharge vessel 911 that possesses the general cylindrical shape shape that is closed of pipe both ends, on the outer peripheral face of outboard tube 912, dispose the netted lateral electrode 914 that constitutes by metal wire, on the inner peripheral surface of inside tube 913, dispose the medial electrode 915 that constitutes by metallic plate.The metallic plate of two semicircular cylinder shapes of medial electrode 915 combination and constituting, power supply terminal connect into medial electrode 915 in connect, and 93 be drawn out by going between.Be provided with power supply unit (not shown) on the top of lampshade 90, the plug 94 of 916 ends that go between is connected with socket 95 and constitutes connector.
In the Excimer lamp apparatus of Fig. 9, lampshade 90 inner with inner treatment chamber space P between be in the state that is connected, therefore the high-concentrated ozone that produces in the P of inner treatment chamber space flows to lampshade 90 inside, ozone is compared with reactive high active oxygen, the for example aerial half-life existed more than or equal to 12 hours, therefore flowed at lampshade 90 internal freedoms, in addition, the decomposition that causes by natural decomposition, light and heat and when reverting to oxygen, then generate active oxygen at this place.
Therefore, in the component parts of lampshade, the parts that are made of metal might be because of the effect oxidation of ozone with high concentration or reactive higher active oxygen, so implement anti-oxidant treatment on the metal part surface to metal parts.
Yet, on the joint face of the power supply part of the power supply terminal 96 of Excimer lamp 91 and the joint face of internal electrode 915 and the joint face of connector 94,95 etc., to be electrically connected and must to expose the metal surface in order to keep, and can't carry out anti-oxidant treatment.Therefore, when the effect owing to above-mentioned active oxygen makes the power supply part oxidation, then resistance value becomes big and generates heat, lead-in wire 93 broken strings, or power supply terminal 96 and connector 94,95 parts are corroded and the problem that can not take off.Even use under the situation of non-oxidizability metal materials such as nickel or nickel alloy, also generate high active oxygen and come oxidation, and produce the problems referred to above by reaction.
In addition, when the parts from oxidation splash the powder of oxide; Invade inner treatment chamber space P, might pollute workpiece W surface.
Also have, in above-mentioned Excimer lamp apparatus, inert gas is not filled in lampshade 90 inside, therefore, from the UV-irradiation lampshade 90 of Excimer lamp 91 radiation, at this lampshade 90 inside and oxygen reaction, can regenerate ozone and active oxygen, or ozone is decomposed and generates active oxygen.Owing to produce this phenomenon, impel the oxidation of power supply part, and carry out deterioration, breakage.
Summary of the invention
The present invention makes in view of above-mentioned item, its purpose is, a kind of Excimer lamp apparatus is provided, remove the light output window of dividing lampshade and irradiated area and the simplification device structure, can realize cost degradation, and avoid in active oxygen exposing near the power supply part that is disposed at the lamp end and prevent oxidation, and can reduce the deterioration of these parts and the generation of breakage.
The present invention is to achieve these goals, and a kind of Excimer lamp apparatus possesses: come the Excimer lamp of emitting ultraviolet light and accommodate the lampshade of this Excimer lamp by dielectric discharge; Be formed with the opening that takes out from the radiating light of above-mentioned lamp on lampshade, the lampshade inner space is connected by this opening with the inner treatment chamber space of handling object being treated; It is characterized in that, be connected with power supply part at least one side's of above-mentioned Excimer lamp end and form the power supply joint portion; In lampshade inside, be provided with and be formed with the lamp end regions of power supply joint portion and the partition member that separate the lampshade inner space.
In addition, it is characterized in that above-mentioned partition member has light-proofness to ultraviolet light.
In addition, it is characterized in that, be formed with the photomask of ultraviolet light in the end of the discharge vessel of above-mentioned Excimer lamp.
In addition, it is characterized in that,, be provided with the ozone decomposed substance in the inside of lamp end regions.
In addition, it is characterized in that possessing the gas supply mechanism of inflow or filling inert gas at the lamp end regions of above-mentioned lampshade.
In addition, it is characterized in that possessing the pressure that is used to detect in the above-mentioned lamp end regions and the pressure in the inner treatment chamber space or atmospheric pressure detecting mechanism, reach controlling organization; Above-mentioned controlling organization transmits control signal to gas supply mechanism, so that the pressure in the lamp end regions is all the time than pressure in the inner treatment chamber space or the high state of atmospheric pressure according to the detection signal from above-mentioned pressure detecting mechanism.
In addition, it is characterized in that possessing the pressure that is used to detect in the above-mentioned lamp end regions and the pressure the inner treatment chamber space in or atmospheric pressure detecting mechanism, reach controlling organization; Above-mentioned controlling organization is according to the detection signal from above-mentioned pressure detecting mechanism, and the pressure in the lamp end regions than under the high situation of the pressure in the inner treatment chamber space or atmospheric pressure, will be lighted the signal of above-mentioned Excimer lamp all the time, sends to lamp and lights power supply.
In addition, the object being treated that comes by the carrying mechanism carrying is shone the Excimer lamp apparatus of quasi-molecule light, it is characterized in that possessing the pressure that is used to detect in the above-mentioned lamp end regions and the pressure in the inner treatment chamber space or atmospheric pressure detecting mechanism, reach controlling organization; Above-mentioned controlling organization is according to the detection signal from above-mentioned pressure detecting mechanism, and the pressure in the lamp end regions than under the high situation of the pressure in the inner treatment chamber space or atmospheric pressure, can be carried the signal of object being treated all the time, send to above-mentioned carrying mechanism.
The invention effect
Can produce following effect according to this case invention.
(1) remove the light output window of dividing lampshade and irradiated area, and the simplification device structure can realize cost degradation.In addition, also can realize increasing irradiated area easily, so that can carry out more large-area processing.
(2) in the inside of lampshade, utilize partition member to be separated to form the end regions of the Excimer lamp of power supply joint portion, thereby, can avoid in the active oxygen that generates by ozone, exposing power supply part and oxidized situation near the high-concentrated ozone mobile restriction power supply joint portion of Excimer lamp end that the inner treatment chamber space produces.Therefore, can suppress the deterioration and the damaged generation of power supply part, and form the Excimer lamp apparatus of high reliability.
(3) in addition, partition member possesses light-proofness to ultraviolet light, thereby near can suppressing to be formed with the end of Excimer lamp of power supply joint portion from the UV-irradiation of Excimer lamp radiation, and can avoid forming ozone or active oxygen again at the lamp end regions.
(4) in addition, the lamp end regions inflow that is formed with the power supply joint portion, filling inert gas at lampshade can prevent positively that then ozone from flowing into this lamp end regions, and can avoid exposing power supply part with producing effect in the active oxygen that is generated by ozone.
Description of drawings
Fig. 1 is the figure of an execution mode of expression this case invention, the sectional view that blocks along the tube axial direction of lamp;
Fig. 2 is the figure of an execution mode of expression this case invention, the sectional view that blocks with the A-A ' among Fig. 1;
Fig. 3 is the figure of the structure of explanation Excimer lamp, (a) is the tube axial direction sectional view of lamp, (b) is perpendicular to the sectional view of the direction of tubular axis;
Fig. 4 (a) and Fig. 4 (b) are the ideographs of expression Excimer lamp apparatus summary;
Fig. 5 is the fluorescent tube direction of principal axis sectional view of the Excimer lamp apparatus of other execution modes of expression;
Fig. 6 is the fluorescent tube direction of principal axis sectional view of the Excimer lamp apparatus of another execution mode of expression;
Fig. 7 is the figure of the structure of indication lamp; (a) be the tube axial direction sectional view; (b) be perpendicular to the sectional view of the direction of tubular axis;
Fig. 8 is a key diagram of representing the structure of Excimer lamp apparatus in the past;
Fig. 9 is the figure of an example of expression Excimer lamp apparatus, amplifies the figure of the end of indication lamp power supply side.
Embodiment
Fig. 1 is an expression Excimer lamp apparatus of the present invention, amplifies the sectional view of indication lamp end; Fig. 2 figure is an A-A ' sectional view.This Excimer lamp apparatus 1 possesses: whole for the box lampshade 10 of rectangular shape, be configured to the Excimer lamp 20 adjacent with inner treatment chamber space P; This device 1 is arranged on process chamber 40 by pedestal 41.Process chamber 40 possesses not shown carrying mechanisms such as conveyer, moves into or take out of the workpiece W of glass substrate etc.In addition, be provided with the exhaust manifolds 42 that are used for discharge handling to the outside oxide that produces when the workpiece W etc. in the bottom of process chamber 40, on these process chamber 40 tops, being provided with can be to the gas supply port 43 of process chamber supply gas.
Be provided with opening below lampshade 10, via this opening, the inner space H of lampshade 10 is connected with inner treatment chamber space P.Shown in Fig. 2 figure, prepare a plurality of (for example 3) Excimer lamp 20, in lampshade 10, be configured to the fluorescent tube axle and be parallel to each other.When from Excimer lamp 20 emitting ultraviolet light, directly shine the surface of workpiece W smaller or equal to the ultraviolet light of 200nm, generate ozone with being present in the oxygen reaction in the P of inner treatment chamber space,, become and to implement predetermined processing on workpiece W surface by the auxilliary mutually effect that multiplies each other of ultraviolet light.
In Fig. 1, lampshade 10 possesses: the framework 11 that constitutes the lateral parts of shell; Cover the top board 12 of its upper opening; And preventing that ozone from passing through the partition member 13 of usefulness, this partition member disposes in the mode around end 20a, the 20b of the Excimer lamp 20 that comprises connector 27,28 parts.As shown in Figures 1 and 2, partition member 13 comprises: the side surface part 131 that Excimer lamp 20 runs through, and the bottom surface sections 132a that is provided with in the mode of stopping up the bottom in the both sides of the edge of lampshade 10 one; In lampshade 10, near the regional T the end of lamp (below, be called " lamp end regions T ") marks off from lampshade inner space H, constitutes to make the ozone that produces in inner treatment chamber space P and lampshade inner space H can directly not flow to lamp end regions T.In addition, be the zone that is formed with the power supply joint portion in this what is called " lamp end regions ", this power supply joint portion is included in the power supply part of lamp outer setting such as Excimer lamp 20 ends and connector 27,28.In addition, the end of Excimer lamp 20 is at least a portion of the part (non-illuminating part) that do not form discharge especially.
At this,, the structure of Excimer lamp 20 is described with reference to Fig. 3.Fig. 3 takes out the explanation sectional view that the Excimer lamp 20 represented among Fig. 1 is represented.The discharge vessel 21 of Excimer lamp 20 is outboard tube 211 and inside tube 212 arranged coaxial that diameter is different, and at the end face portion 213a of pipe, 213b forms the general cylindrical shape shape of sealing.Two of the medial electrode 22 combinations for example metallic plate of semicircular cylinder shape constitute, and are configured to be added on the inner peripheral surface of inside tube 212.Entire circumference on the outer peripheral face of outboard tube 211 disposes the netted lateral electrode 23 that is made of metal wire, and pair of electrodes 22,23 clips the dielectric layer that is made of discharge space S, inside tube 212 and outboard tube 211 and the phase arranged opposite thus.
As illustrated in fig. 1, in above-mentioned Excimer lamp 20, for example form cross section C type, by power supply terminal 24 that leaf spring became, from the inboard with the contact of pushing state and medial electrode and be connected, lead-in wire 26 becomes the state that is exported to the lamp outside with connecting lead-in wire rod 25 connections that are provided with relevant power supply terminal 24.Be provided with power supply unit (omit diagram) on the top of lampshade 10, plug 27 is connected with the socket 28 of power supply unit and constitutes connector.On the other hand, omitting illustrated lead-in wire is connected and ground connection with lateral electrode 23.In addition, on medial electrode 22, lateral electrode 23 and power supply terminal 24, except the contact site surface of power supply usefulness, be covered with SiO
2Or Al
2O
3Deng film and by anti-oxidant treatment,, also become the element that possesses sufficient oxidative resistance even be placed in the ozoniferous atmosphere.
In addition, in this Excimer lamp 20, to cover the end face portion 213a of discharge vessel 21 at least, the mode of 213b is provided with the photomask 29 that wavelength is had light-proofness smaller or equal to the ultraviolet light of 200nm.This photomask 29a, 29b prevent that in lampshade ultraviolet lighting is mapped to lamp end regions T, for example by TiO
2, CeO
2, formations such as ZnO, BN.This photomask 29a, 29b are provided with in the lamp end that forms the power supply joint part at least and get final product, and do not form and need not go up at the photomask (photomask 29b in the device at Fig. 1) of non-power supply joint part.
So form photomask 29a, discharge vessel 21 that sees through lamp and the ultraviolet light that incides lamp end regions T are carried out shading, prevent from lamp end regions T, to regenerate the situation of ozone.
This partition member 13 can be made of the metal of for example aluminium etc., pottery, glass etc., also can constitute by ultraviolet light being had radioparent parts.By this partition member 13 is set, can prevent the intrusion of the ozone in the lamp end regions T that is formed with the power supply joint portion.
At this, constitute under the situation of partition member 13 by the parts that ultraviolet light had light transmission, consider sometimes near the zone the ultraviolet lighting shot-light end of lamp 20 radiation, generate ozone and active oxygen with the oxygen reaction that is positioned at lamp end regions T sometimes.For fear of this situation, for example, if by ultraviolet light is constituted partition member with the parts that do not have permeability, then ultraviolet light can suitably be avoided producing ozone in above-mentioned lamp end regions by shading.Partition member under this situation is so long as get final product smaller or equal to the material that the ultraviolet light of 200nm has light-proofness wavelength.According to this structure, can prevent that ultraviolet light from seeing through the luminous tube of lamp and inciding the lamp end regions, thereby can prevent from this lamp end regions, to produce ozone, or this ozone decomposes and produces active oxygen or directly produce the situation of active oxygen from oxygen.Its result, the metal parts that can avoid constituting the power supply of lamp contacts with active oxygen and produces the such problem of corrosion.
In addition,, then can suppress near the illumination in lamp end and reduce if make the process chamber side surface of partition member 13, particularly side surface part 131 have reflection function, thus better.
By Fig. 1 and Fig. 2 as can be known, at the peristome 131a of side surface part 131, minim gap d is formed between edge of opening portion and the lamp 20.Discharge vessel 21 or partition member 13 heating in the lighting a lamp of Excimer lamp 20 and under the situation about expanding towards radial direction, this gap d absorbs this swell component.In addition, lampshade itself is also longer, thereby under the situation of lamp direction of principal axis thermal expansion, also deform (bending).Be used for can not applying bending force to Excimer lamp because of this distortion.Under the excessive situation of such gap d, the ozone that produces among the P of inner treatment chamber space flows to lamp end regions T easily, thereby preferably less in the scope that can absorb the thermal expansion component, the scope of 0.5-5mm for example, and the most desirable is the figure scope of 1～3mm.
Excimer lamp apparatus 1 according to said structure, prevent that the partition member 13 of ozone by usefulness from disposing in the mode around the end of the Excimer lamp 20 that comprises connector 27,28, and divided the end regions T of Excimer lamp 20, thereby can not flow to the end regions T of lamp immediately at the ozone that inner treatment chamber space P produces.Promptly, ozone can't freely pass through to lamp end regions T from inner treatment chamber space P, therefore, the situation of the metal parts of the power supply that constitutes lamp can be avoided in by the active oxygen of ozone decomposition/generation, exposing, and the corrosion of broken string, terminal and the connector part of the metal wire of lead division can be avoided.
In addition, come this case invention is described with reference to Fig. 1 and Fig. 4 (a).Fig. 4 (a) is the schematic diagram of expression Excimer lamp apparatus summary.
In Fig. 1, be provided with gas supply port 14 in framework 11, constitute by gas supply part and can flow into inert gas.As illustrated in fig. 4, gas supply part comprises electromagnetically operated valve 61 and gas supply source 62.The pressure in the lamp end regions T detects in pressure detecting mechanism 50.The pressure of inner treatment chamber space P detects in pressure detecting mechanism 51.This detected value is sent to control part 52.In control part 52, compare interior pressure of lamp end regions T and the pressure of inner treatment chamber space P, under the pressure condition with higher of inner treatment chamber space P, the control signal that can not light lamp sends to the power supply 66 etc. of lighting a lamp.In addition, output is used to stop the signal of object being treated carrying mechanism 67.And, to transmitting control signal, so that lamp end regions T pressure inside becomes for example more than or equal to atmospheric pressurized state with gas supply source 62 flow control divisions 61 that be connected, that constitute by electromagnetically operated valve or flow regulator etc.Flow control division 61 carries out switch or flow adjustment according to this control signal, supplies with, fills inert gas from gas supply part 60 to lamp end regions T.Under the pressure in the lamp end regions T becomes than the high situation of the pressure of inner treatment chamber space P, but the actuating signal and the signal that can light lamp of control part 52 output object being treated carrying mechanisms 67.When the pressure of inner treatment chamber space P approaches under the atmospheric situation, pressure detecting mechanism 51 also can measure the lampshade atmosphere outside and press.This is because under the situation of the pressure of detection inner treatment chamber space P, because the ozone of inner treatment chamber etc., existence damages the possibility of the durability of pressure detecting mechanism.
Replace pressure detecting mechanism 50,51, differential pressure switch be set just can make control circuit simply, this differential pressure switch have detect two pressure differentials and this differential pressure above the function of output signal under the situation of set point.
As among Fig. 1 with shown in the arrow, supply to the inert gas of lamp end regions T superfluously, flow out to lampshade inner space H with the gap d of lamp 20 by side surface part 131.In this embodiment, therefore inert gas can flow through the lamp end regions T of another side by in the inside tube of Excimer lamp 20, at both sides' end regions, can obtain same action effect to the stream of ozone.By flowing of this inert gas, positively stop the ozone that in the P of inner treatment chamber space, produces by the gap d of side surface part 131 with lamp 20.
From lamp and separate, have the effect of the oxygen concentration between reduction light source and workpiece, and can improve the arrival amount of light with the inert gas that spills between the side surface part.Particularly the end of lamp reduces the light quantity on the surface of the work easily owing to reduce from the light of tilted direction, reduces oxygen concentration and can handle uniformly.
In addition, in said apparatus, also can will handle gas by gas supply port 43 and import in the process chamber 40.For example Fig. 4 (b) is the schematic diagram that expression possesses the Excimer lamp apparatus summary of supplying with the gas supply mechanism of handling gas; Supply with processing gas by this gas supply part 63.In addition, in Fig. 4 (b), represent with same-sign and omit explanation for the structure identical with preceding figure Fig. 4 (a).When supply with handling gas in process chamber, therefore the pressure oscillation of inner treatment chamber space P is provided with pressure detecting mechanism 51 and detects the pressure of inner treatment chamber space P and control, and makes lamp end regions T side become pressure all the time than inner treatment chamber space P height.Particularly, the detection signal of the pressure of the detection signal of the pressure of lamp end regions T and inner treatment chamber space P is sent to control part 52 come comparison operation, with the control inert gas or the control signal of the flow of processing gas, send to the flow control division 61,64 that is connected with each gas supply source 62,65.So control so that lamp end regions T side becomes high pressure all the time, with above-mentioned same, become and positively suppresses the situation that ozone flows to lamp end regions T.Certainly, replace pressure detecting mechanism also can control flow control division 61,64, use differential pressure switch to remain the above differential pressure of certain value.
In addition, in optical cvd SiH at above so-called processing gas
4, the silicone based gas of TEOS etc. etc. are for example N in light cleans
2With O
2The mist of (for example oxygen concentration 2%) etc.
In addition, can use inert gas as above-mentioned processing gas.If make inert gas flow into inner treatment chamber space P, then reduce the oxygen concentration of the air atmosphere of inner treatment chamber, therefore suppress the absorption of the ultraviolet light of oxygen, and can improve disposal ability efficiently to workpiece W irradiating ultraviolet light.In addition, inert gas is a nitrogen for example.
This suitable processing gas except importing the gases from gas supply port 43, also can be provided with nozzle etc. and has directive property towards workpiece and come supply gas between lamp and lamp.
Refer again to the explanation that Fig. 1 carries out execution mode.Ground as shown in the drawing also can form ozone decomposed substance layer 15 in the part of framework 11 in the lamp end regions T and bottom surface sections 132.If the inner face at lamp end regions T is provided with oxygen decomposed substance layer 15, even then take place under the situation of ozone inflow lamp end regions T, ozone can not be decomposed on ozone decomposed substance surface yet and generate active oxygen, thereby can avoid the metal parts oxidation in the lamp end regions T.Ozone decomposed substance layer 15 can use for example MnO
2, CuO, TiO
2Deng oxide, or the metal of Pt, Pb etc. and the alloy that comprises.
Execution mode as shown in Figure 1 like that layeredly forms the situation of ozone decomposed substance, the powder of ozone decomposed substance is sneaked into solvent with suitable adhesive, coating formation paste forms membranaceous and is provided with, or select for example also can form under the situation of metal as the ozone decomposed substance by electroplating.
In addition, at this ozone decomposed substance steeped landform is formed in the framework inner face, except that this mode, the solid matter that also can be used as ball shape or honeycomb structure etc. disposes the ozone decomposed substance.
Fig. 5 is an expression fluorescent tube direction of principal axis sectional view other execution modes, Excimer lamp apparatus.In addition, omitted the diagram of process chamber part in the figure, to earlier drawings in the structure identical structure that illustrates, represent and omit explanation with same-sign.Be following example in this embodiment: two square end portions at Excimer lamp are formed with the power supply joint portion, and partition member is arranged on the both end sides of lamp, and replaces above-mentioned photomask 29, and the installing lamp socket carries out shading on lamp.
Lamp socket 30 for example is a ceramic, is installed as by the seal member on the outer peripheral face that is disposed at discharge vessel 31 and surrounds discharge vessel 21 ends.Medial electrode and feeding terminal construct, illustrated in fig. 1 identical with the front, in this embodiment, be formed with the power supply joint portion at the Excimer lamp two ends.With lead-in wire rod 25 lead-in wires that are connected 26, the thin tube part of the rear end by being arranged at lamp socket 30 is derived airtightly via seal member 31, and the inner space of the interior pipe portion 212 of lamp becomes airtight state.Partition member 13 is to be made of aluminium, and in this embodiment, side surface part is made of the first side surface part 131a, the second side surface part 131b; Length direction at lamp is configured to be set up in parallel two.In addition, bottom surface sections 132 disposes in the mode of stopping up between the first side surface part 131a and the framework 11.In addition, the front end of lamp socket 30 disposes in the mode with the second side surface part 131b butt, becomes fully by the state of shading by partition member 13 and lamp socket 30 from the radiating light of lamp.
According to this execution mode, by the first side surface part 131a and the second side surface part 131b, divided lamp end regions T, thereby the ozone of inner treatment chamber space or lampshade inner space H generation has been limited by lamp end regions T.And, in this embodiment, be formed with two side surface part and be in by the dual state that covers, can positively stop ozone to pass through lamp end regions T.In addition, from the ultraviolet light that lamp radiates,, in lamp end regions T, can avoid regenerating ozone because second side wall portion and lamp socket connect and quilt shading fully.
In addition, in this embodiment, inert gas might flow into lamp end regions T from the gas supply port 14 that is arranged on framework 11.Under this situation, flow to the gas of lamp end regions T superfluously, flow through the gap between the Excimer lamp 20 and the first side surface part 131a or the second side surface part 131b and penetrate to lampshade inner space H.
Fig. 6 is expression and the amplification sectional view of the device of above-mentioned execution mode inequality again; In the figure, only illustrate the end that is formed with the power supply joint part.The structure of the lamp of this execution mode with illustrate previously different, in a glass tube, dispose medial electrode, outside this glass tube, dispose lateral electrode.In the figure, 5 explanations of the basic structure of lampshade and prior figures is identical.That is, lampshade 10 comprises framework 11 and top board 12.In addition, be accommodated in the Excimer lamp 70 in this lampshade 10, its end regions T constitutes by preventing that ozone from separating by the partition member 13 of usefulness, and this partition member 13 comprises first, second side surface part 131a, 131b and bottom surface sections 132; And can not flow through the lamp end regions T of partition member 13 immediately at the ozone that inner treatment chamber space P produces.
In addition, be provided with opening and formed gas supply port 14 in framework 11, constituting can be from supplying with inert gas here.When lamp end regions T supplies with inert gas, keep lamp end regions T pressure inside, make pressure ratio inner treatment chamber space P inner high, inert gas is flow through in the P of inner treatment chamber space from the minim gap between the first side surface part 131a and the Excimer lamp 70, can suppress ozone with producing effect and be imported into lamp end regions T.
In this embodiment, between the first side surface part 131a and the first side surface part 131b, around light-blocking member 32 recessed luminaires, the ultraviolet light of coming in by the gap between above-mentioned side surface part 131 and the Excimer lamp 70 is carried out shading.In addition, in the territory, lateral areas, absence of discharge space of lamp, on the outer surface of discharge vessel 71, be provided with photomask 29.
Then, describe the structure of the lamp of Fig. 6 in detail.Fig. 7 is the sectional view of the structure of expression explanation Excimer lamp; (a) be the sectional view of tube axial direction; (b) be perpendicular to the sectional view of the direction of tubular axis.
Be connected with the metal forming 75 that constitutes by copper respectively at the two ends of medial electrode 73, in the clamping sealing 76 of the end that is formed at discharge vessel 71, bury this metal forming 75 underground, suspention internal electrode 73 in discharge vessel 71, and discharge vessel 71 is sealed.In the outer end of metal forming 75, welding has outside lead rod 77; And this outside lead rod 77 is fetched to discharge vessel 71 outsides.And, the 78th, be used to limit glass tube 74 moving of radial direction and from the inwall of discharge vessel 71 towards the outstanding pillar that forms of center position.
When between internal electrode 73 and outer electrode 72, applying voltage, produce discharge by discharge vessel 71 and glass tube 74, and the xenon in the excitation discharge space, the quasi-molecule light of generation and radiation wavelength 172nm.
As illustrated in fig. 6, power supply is connected by welding with an end of lead-in wire rod 77 with the end of lead-in wire 79.Plug 80 is inserted into the socket 81 of supply unit.
In this Excimer lamp 70, be provided with the dielectric layer that constitutes by glass tube 74 in the whole length direction of medial electrode 73 peripheries zone, therefore, the discharge that produces between medial electrode 73 and lateral electrode 72 is evenly adjusted at the length direction of lamp, can avoid discharges concentrates on a position of medial electrode 73 and crosses the situation of thermal cut, and can stably obtain uniform light output.And the structure of discharge vessel 71 is simple and can realize lightweight, also increases length easily.
In addition, use under the situation of this Excimer lamp 70, partition member 13 (particularly side surface part 131) disposes with the lamp adjacency, therefore preferably uses the insulating properties parts.Conductive materials such as use metal during the material of 131b, at the 73a of inner lead portion and the side surface part 131a of medial electrode 73, produce discharge as side surface part 131a between the 131b, might can't be discharged uniformly at the length direction of lamp.Therefore, preferably use the inorganic insulating material of pottery, glass etc., be in particular as aluminium oxide, shellfish is according to the such heat-resisting tempered glass of rex (login trade mark) glass.
More than, the Excimer lamp apparatus of the structure of Fig. 6 is also identical with the Excimer lamp apparatus that illustrates previously, the lamp end regions by demarcation strip and bottom surface portions every, therefore the ozone that can avoid the inner treatment chamber space to produce flows to the lamp end regions immediately, can avoid exposing in ozone or active oxygen the metal parts of the power supply that constitutes lamp.In addition, its result, the oxygen of the metal parts of the usefulness that can suppress effectively to power or the carrying out of corrosion.
In addition, when to when the ultraviolet light that lamp radiated carries out shading, also can avoid regenerating ozone or active oxygen by the oxygen that is present in the lamp end regions.
In addition, near the lamp end, form photomask, then also can prevent to see through the discharge vessel of lamp and the irradiation light end regions at the inboard luminous ultraviolet light of the length direction of discharge space at the outer surface of discharge vessel.
In addition, supply with at the lamp end regions, fill inert gas, the ozone that just can positively suppress the inner treatment chamber space flows to the lamp end regions.
More than, this case invention has been described, much less this case invention is not limited to said structure and can suitably changes.For example, the Excimer lamp structure is not limited to as above-mentioned Fig. 3, the structure of Fig. 7, and can suitably change.
Claims (8)
1. an Excimer lamp apparatus possesses: come the Excimer lamp of emitting ultraviolet light by dielectric discharge, and accommodate the lampshade of this Excimer lamp;
Be formed with the opening that takes out from the radiating light of above-mentioned lamp on lampshade, the lampshade inner space is connected by this opening with the inner treatment chamber space of handling object being treated; It is characterized in that,
Be connected with power supply part at least one side's of above-mentioned Excimer lamp end and form the power supply joint portion;
Be provided with and be formed with the lamp end regions of power supply joint portion and the partition member that separate the lampshade inner space in lampshade inside.
2. Excimer lamp apparatus as claimed in claim 1 is characterized in that above-mentioned partition member possesses light-proofness to ultraviolet light.
3. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized in that, is formed with the photomask of ultraviolet light in the end of the discharge vessel of above-mentioned Excimer lamp.
4. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized in that, in the inside of lamp end regions, is provided with the ozone decomposed substance.
5. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized in that, at the lamp end regions of above-mentioned lampshade, possesses the gas supply mechanism that flows into the filling inert gas.
6. Excimer lamp apparatus as claimed in claim 5 is characterized in that, possesses the pressure that is used to detect in the above-mentioned lamp end regions and the pressure in the inner treatment chamber space or atmospheric pressure detecting mechanism, reaches controlling organization;
Above-mentioned controlling organization transmits control signal to gas supply mechanism, so that the pressure in the lamp end regions is all the time than pressure in the inner treatment chamber space or the high state of atmospheric pressure according to the detection signal from above-mentioned pressure detecting mechanism.
7. Excimer lamp apparatus as claimed in claim 5 is characterized in that,
Possess the pressure that is used to detect in the above-mentioned lamp end regions and the pressure the inner treatment chamber space in or atmospheric pressure detecting mechanism, reach controlling organization;
Above-mentioned controlling organization is according to the detection signal from above-mentioned pressure detecting mechanism, and the pressure in the lamp end regions than under the high situation of the pressure in the inner treatment chamber space or atmospheric pressure, will be lighted the signal of above-mentioned Excimer lamp all the time, sends to lamp and lights power supply.
8. Excimer lamp apparatus as claimed in claim 5, the object being treated irradiation quasi-molecule light to coming by the carrying mechanism carrying is characterized in that,
Possess the pressure that is used to detect in the above-mentioned lamp end regions and the pressure the inner treatment chamber space in or atmospheric pressure detecting mechanism, reach controlling organization;
Above-mentioned controlling organization is according to the detection signal from above-mentioned pressure detecting mechanism, and the pressure in the lamp end regions than under the high situation of the pressure in the inner treatment chamber space or atmospheric pressure, can be carried the signal of object being treated all the time, send to above-mentioned carrying mechanism.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP337552/2004 | 2004-11-22 | ||
| JP2004337552A JP4453527B2 (en) | 2004-11-22 | 2004-11-22 | Excimer lamp device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1783421A true CN1783421A (en) | 2006-06-07 |
| CN100561662C CN100561662C (en) | 2009-11-18 |
Family
ID=36627246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101286115A Active CN100561662C (en) | 2004-11-22 | 2005-11-22 | Excimer lamp apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4453527B2 (en) |
| KR (1) | KR100891243B1 (en) |
| CN (1) | CN100561662C (en) |
| TW (1) | TW200618034A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101685759A (en) * | 2008-09-27 | 2010-03-31 | 优志旺电机株式会社 | Excimer lamp device |
| CN113367268A (en) * | 2021-03-18 | 2021-09-10 | 郑州圣华药物食品技术开发有限公司 | Pulsed ozone disinfection and washing food cabinet excited by xenon excimer light source |
| CN114068295A (en) * | 2020-08-03 | 2022-02-18 | 株式会社Quark科技 | Sterilizing lamp |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5146061B2 (en) * | 2008-04-10 | 2013-02-20 | ウシオ電機株式会社 | Excimer lamp and lamp unit equipped with the same |
| JP6301796B2 (en) * | 2014-09-24 | 2018-03-28 | 日本電子株式会社 | Organic compound removal equipment |
| JP7003431B2 (en) * | 2017-04-06 | 2022-01-20 | ウシオ電機株式会社 | Light irradiation device |
| JP6984206B2 (en) * | 2017-07-19 | 2021-12-17 | ウシオ電機株式会社 | Light irradiation device |
| IT202200014443A1 (en) * | 2022-07-08 | 2024-01-08 | Amen Enamuna | LAMP WITH INTEGRATED SANITIZATION SYSTEM. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001185089A (en) * | 1999-12-28 | 2001-07-06 | Quark Systems Co Ltd | Excimer irradiation device |
| JP2003144913A (en) * | 2001-11-13 | 2003-05-20 | Ushio Inc | Treatment apparatus using dielectric barrier discharge lamp and treatment method |
| TW200501194A (en) * | 2003-05-19 | 2005-01-01 | Ushio Electric Inc | Excimer lamp lighting device |
-
2004
- 2004-11-22 JP JP2004337552A patent/JP4453527B2/en not_active Expired - Fee Related
-
2005
- 2005-08-19 TW TW094128438A patent/TW200618034A/en not_active IP Right Cessation
- 2005-09-29 KR KR1020050090876A patent/KR100891243B1/en active IP Right Grant
- 2005-11-22 CN CNB2005101286115A patent/CN100561662C/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101685759A (en) * | 2008-09-27 | 2010-03-31 | 优志旺电机株式会社 | Excimer lamp device |
| CN101685759B (en) * | 2008-09-27 | 2013-03-27 | 优志旺电机株式会社 | Excimer lamp device |
| CN114068295A (en) * | 2020-08-03 | 2022-02-18 | 株式会社Quark科技 | Sterilizing lamp |
| CN113367268A (en) * | 2021-03-18 | 2021-09-10 | 郑州圣华药物食品技术开发有限公司 | Pulsed ozone disinfection and washing food cabinet excited by xenon excimer light source |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100561662C (en) | 2009-11-18 |
| JP4453527B2 (en) | 2010-04-21 |
| TWI365478B (en) | 2012-06-01 |
| JP2006147928A (en) | 2006-06-08 |
| KR20060056846A (en) | 2006-05-25 |
| TW200618034A (en) | 2006-06-01 |
| KR100891243B1 (en) | 2009-04-01 |
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