TW200501194A - Excimer lamp lighting device - Google Patents

Excimer lamp lighting device

Info

Publication number
TW200501194A
TW200501194A TW093113851A TW93113851A TW200501194A TW 200501194 A TW200501194 A TW 200501194A TW 093113851 A TW093113851 A TW 093113851A TW 93113851 A TW93113851 A TW 93113851A TW 200501194 A TW200501194 A TW 200501194A
Authority
TW
Taiwan
Prior art keywords
excimer
power source
electric power
discharge
excimer lamp
Prior art date
Application number
TW093113851A
Other languages
Chinese (zh)
Inventor
Nobuyuki Hishinuma
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200501194A publication Critical patent/TW200501194A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/265—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/265—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps
    • H01J9/266—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
    • H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
    • H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning In General (AREA)

Abstract

The present invention provides an excimer lamp capable of using the reaction treatment of the excimer lamp to adequately prevent the reaction products from being adhered to the discharge capacitor, and a lighting device thereof. An excimer lamp lighting device includes: an excimer lamp 10 comprising a discharge electrode 2 mounted on the outside of a discharge container filled with a dielectric material of a discharge gas, and a discharge electrode 3 mounted inside the discharge container 1; an excimer lighting power source 7 for supplying an electric power to the two electrodes of the excimer lamp 10; a heater electric power source 8 electrically connected to one end or two ends of the discharge electrodes; and a controlling part 11 for controlling the excimer lighting electric power source 7 and the heater electric power source 8; which is characterized in that: the controlling part 11 uses the heater electric power source 8 to increase the temperature of the discharge container to a specified temperature, and the excimer lighting electric power source 7 is driven to perform an excimer lighting.
TW093113851A 2003-05-19 2004-05-17 Excimer lamp lighting device TW200501194A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003140403 2003-05-19

Publications (1)

Publication Number Publication Date
TW200501194A true TW200501194A (en) 2005-01-01

Family

ID=37378166

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093113851A TW200501194A (en) 2003-05-19 2004-05-17 Excimer lamp lighting device

Country Status (2)

Country Link
KR (1) KR100849802B1 (en)
TW (1) TW200501194A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4453527B2 (en) * 2004-11-22 2010-04-21 ウシオ電機株式会社 Excimer lamp device
JP4595556B2 (en) * 2005-01-20 2010-12-08 ウシオ電機株式会社 UV irradiation equipment
JP5304354B2 (en) * 2009-03-16 2013-10-02 ウシオ電機株式会社 Excimer lamp
JP5471514B2 (en) * 2010-01-28 2014-04-16 ウシオ電機株式会社 Light processing equipment
WO2022002381A1 (en) * 2020-07-01 2022-01-06 Applied Materials, Inc. Apparatus for processing a substrate, lamp heater, and method for operating an apparatus
US11752228B2 (en) 2020-08-24 2023-09-12 Lumenlabs Llc Highly efficient UV C bulb with multifaceted filter
US20220059338A1 (en) * 2020-08-24 2022-02-24 Sportsbeams Lighting, Inc. Cartridge based uv c sterilization system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002175781A (en) * 2000-09-28 2002-06-21 Harison Toshiba Lighting Corp Discharge lamp and ultraviolet ray irradiating device
JP3893942B2 (en) * 2001-10-30 2007-03-14 ウシオ電機株式会社 UV irradiation equipment

Also Published As

Publication number Publication date
KR20040100998A (en) 2004-12-02
KR100849802B1 (en) 2008-07-31

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