CN101685759B - Excimer lamp device - Google Patents
Excimer lamp device Download PDFInfo
- Publication number
- CN101685759B CN101685759B CN2009101786237A CN200910178623A CN101685759B CN 101685759 B CN101685759 B CN 101685759B CN 2009101786237 A CN2009101786237 A CN 2009101786237A CN 200910178623 A CN200910178623 A CN 200910178623A CN 101685759 B CN101685759 B CN 101685759B
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- excimer lamp
- mentioned
- basket
- arc chamber
- rotation roller
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/34—Double-wall vessels or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
- H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
- H05B41/2806—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without electrodes in the vessel, e.g. surface discharge lamps, electrodeless discharge lamps
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Cleaning In General (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides an excimer lamp device having a move-limiting member for suppressing the curve of the excimer lamp, which can keep even ultraviolet irradiation for the irradiated object, and simultaneously prevent the particle from the electrode part of the discharge chamber from falling off. The excimer lamp device includes a metallic basket body (2) and an excimer lamp (3), wherein the excimer lamp (3) separated from the basket body (2) is held under the basket body (2), an electrode part (32) is arranged outside the discharge chamber (31), the inner surface of the basket body of the discharge chamber (31) is provided with an ultraviolet reflection film for enabling the ultraviolet ray from the excimer lamp (3) to irradiate the object (7). The excimer lamp device is characterized in that one end of the discharge chamber (31) is fixed on the basket body (2), the other end is movably held on the basket body (2) in the length direction, and between the basket body (2) and the excimer lamp (3) under the basket body (2), a move-limiting member (5) for limiting the upward movement of the excimer lamp (3) relative to the basket body (2) is arranged, and the move-limiting member (5) is provided with a rotatable roller (51) that is rotatably arranged in the length direction of the excimer lamp (3).
Description
Technical field
The present invention relates to Excimer lamp apparatus, especially relate to the Excimer lamp apparatus that is used in ultraviolet treatment with irradiation.
Background technology
Now, such as in the operation of the glass substrate by ultraviolet ray irradiation cleaning fluid LCD panel etc., use the Excimer lamp apparatus that possesses the following vacuum ultraviolet Excimer lamp of radiation wavelength 200nm.Be used in the Excimer lamp of this kind Excimer lamp apparatus, such as the record at patent documentation 1, for expeditiously radiation ultraviolet ray, with the ultraviolet reflecting film of silicon dioxide granule as main body, the arc chamber that is formed on respect to the shone thing horizontal arrangement radiates ultraviolet one side for shone thing, namely is formed at the arc chamber inner face that penetrates the one side of direction side except light.
Yet, for the Excimer lamp that possesses ultraviolet reflecting film above in arc chamber, the ultraviolet ray that generates is completely cut off by ultraviolet reflecting film and arrives the discharge locular wall of top, but below the discharge locular wall illuminated increased from above the ultraviolet ray of catoptrical brute force of ultraviolet reflecting film.Usually, Excimer lamp is supported on the two ends of its long side direction, and section is not supported in the central.
Therefore, along with through lighting a lamp the time, below the discharge locular wall, the light that namely consists of arc chamber penetrates the glass of the wall of direction side, time dependent ground stores and results from vacuum ultraviolet irradiation and the ultraviolet distortion of generation.Its result has confirmed the impact owing to this ultraviolet ray distortion, and the glass that light penetrates the direction side mainly shrinks to long side direction, and arc chamber is whole, and is crooked towards the direction convex ground that is formed with ultraviolet reflecting film.Shown in the ideograph of Fig. 5, dotted line is the crooked Excimer lamp 102 before in convex ground, and solid line is to the crooked Excimer lamp 102 in arrow direction convex ground.
If Excimer lamp 102 is crooked upward, then at both end sides and the central portion of Excimer lamp 102, shone thing is that the workpiece face of liquid crystal glass base etc. is not identical with the distance of 102 of Excimer lamps.If the workpiece face is not identical with the distance of 102 of Excimer lamps, then irradiation intensity is different according to the position on the workpiece face, and can't carry out uniform UV treatment, and the workpiece after processing produces defective situation certainly.So, at the central portion of Excimer lamp 102 the mechanically mobile restriction member of moving-limiting need to be set, in order to avoid Excimer lamp is crooked upward.
Fig. 6 is the figure of the state of the direction of expression from the basket 101 of Excimer lamp apparatus 100 to the Excimer lamp 102 mobile restriction member 103 that projects square material shape, Fig. 6 (a) is all summary pie graphs of expression Excimer lamp apparatus 100, and Fig. 6 (b) is the C-C profile of presentation graphs 6 (a).
As shown in these figures, these mobile restriction member 103 1 ends are fixed on basket 101, and the other end is connected to the electrode part 104 on the arc chamber 105 of Excimer lamp 102, suppress Excimer lamp 102 bending upward.But the basket 101 that supports Excimer lamp 102 is metal-mades, thereby when lamp is lit a lamp, wait and can heat up by the radiation heat from Excimer lamp 102, and temperature reduces after lamp is turned off the light, and therefore produces dilation.Mobile restriction member 103 is contacted with the metal-made mesh electrode 104 of Excimer lamp 102, typically consisted of with ceramic material with insulating component, thereby the dilation by basket 101 so that the position that is connected to mesh electrode 104 is when pushing down mesh electrode 104, about rub.Its result produces metal powder, and this metal powder to drop down onto object being treated 105 be the workpiece face, or by conductive paste formed printing by the situation about printing electrode of burning till under, then print electrode and rubbed and peel off and might produce the problem that drops down onto workpiece face etc.
Patent documentation 1: TOHKEMY 2008-66095 communique
Summary of the invention
The objective of the invention is in view of the above problems point, a kind of Excimer lamp apparatus is provided, have: metal basket; And Excimer lamp, described Excimer lamp separates with basket and is held in the lower side of basket, is equipped with electrode part in the outside of arc chamber, possesses ultraviolet reflecting film in the inner face part of arc chamber; The mobile restriction member that possesses the bending that suppresses Excimer lamp is kept uniform ultraviolet ray irradiation for shone thing, prevents simultaneously the Excimer lamp apparatus that the particle from the electrode part that is formed at the arc chamber outside falls.
The present invention is in order to solve above-mentioned problem, to adopt following scheme.
The 1st scheme is a kind of Excimer lamp apparatus, has: metal basket; And Excimer lamp, described Excimer lamp and this basket are held in the lower side of this basket discretely, outside at the arc chamber that extends to short side direction and long side direction is equipped with electrode part, possesses ultraviolet reflecting film at the above-mentioned basket side inner face of above-mentioned arc chamber; This Excimer lamp apparatus will be radiated at from the ultraviolet ray that this Excimer lamp radiates on the object being treated, it is characterized by: a square end section of above-mentioned arc chamber is fixed and remains in above-mentioned basket, the opposing party's end is moved at long side direction and is held in freely above-mentioned basket, possess the mobile restriction member that the above-mentioned Excimer lamp of restriction is moved upward with respect to above-mentioned basket at above-mentioned basket and between the above-mentioned Excimer lamp below this basket, this mobile restriction member possesses the rotation roller of the long side direction of rotatably being located at above-mentioned Excimer lamp.
The 2nd scheme is in the 1st scheme, it is characterized by, and above-mentioned mobile restriction body has: section is the matrix of the roughly コ shape opened to above-mentioned Excimer lamp side; Be located at the peristome of the roughly コ shape of this matrix, coming off of preventing that above-mentioned rotation roller from coming off prevents member; And be held under this comes off the state that prevents member in matched in clearance, only can be connected to the peristome bottom surface of roughly コ shape of above-mentioned matrix and the above-mentioned rotation roller that above-mentioned Excimer lamp ground arranges.
The 3rd scheme is in the 1st scheme or the 2nd scheme, it is characterized by: the side face of above-mentioned rotation roller is coated with glaze and consists of through burning till.
The 4th scheme is in arbitrary scheme of the 1st scheme to the 3 schemes, it is characterized by, it is flat rectangular tubular that above-mentioned arc chamber forms the section of being separated by upper wall and lower wall and four sidewalls, in this arc chamber inclosure the quasi-molecule luminous gas is arranged, above-mentioned ultraviolet reflecting film as principal component, is formed with relative above-mentioned electrode part in upper wall outside and the lower wall outside of above-mentioned arc chamber with silicon dioxide.
According to scheme 1 described invention, can suppress the bending of Excimer lamp, can keep uniform ultraviolet ray irradiation for shone thing, and can prevent from falling from the particle of the electrode part of Excimer lamp.
According to scheme 2 described inventions, but be located between matrix and the Excimer lamp rotation roller butt, thereby when the rotation roller is connected to electrode part, then for the displacement of the long side direction of the Excimer lamp that results from the relativity between basket and the Excimer lamp, because the rotation roller is rotated, Excimer lamp crooked suppressed kept uniform ultraviolet ray irradiation for shone thing, can positively prevent from simultaneously falling from the particle of the electrode part of Excimer lamp.
According to scheme 3 described inventions, owing to being coated with glaze, burns till the side face at the rotation roller, thereby when rotation roller rotation, can reduce the friction of peristome bottom surface and rotation roller, and can further prevent from falling from the particle of the electrode part of Excimer lamp.
According to scheme 4 described inventions, described Excimer lamp section is the flattened rectangular tubulose, inner face at arc chamber forms with the ultraviolet reflecting film of silicon dioxide as principal component, and be formed with relative electrode part in upper wall outside and the lower wall outside of arc chamber, in described Excimer lamp, can suppress the bending of Excimer lamp, keep uniform ultraviolet ray irradiation for shone thing, and can prevent from falling from the particle of the electrode part of Excimer lamp.
Description of drawings
Fig. 1 is the front view that the summary of expression Excimer lamp apparatus 1 of the present invention consists of.
Fig. 2 is the A-A profile of presentation graphs 1.
Fig. 3 is the figure of formation that expression is used in the Excimer lamp 3 of Excimer lamp apparatus 1 of the present invention.
Fig. 4 is expression assembling when being arranged at the mobile restriction body 5 of basket 2 and 3 of Excimer lamps, takes out rotation roller 51 and comes off when preventing member 52, and assembles when finishing mobile restriction body 5 stereogram of formation separately.
Fig. 5 be expression convex ground crooked before with the represented Excimer lamp 102 of dotted line and use to the figure of the represented Excimer lamp of the crooked solid line in arrow direction convex ground.
Fig. 6 is the figure of the state of the direction of expression from the basket 101 of Excimer lamp apparatus 100 to the Excimer lamp 102 mobile restriction member 103 that projects square material shape.
Symbol description
1: Excimer lamp apparatus; 2: basket; 3: Excimer lamp; 31: arc chamber; 311: upper wall;
312: lower wall; 313: sidewall; 32: electrode part; 33: ultraviolet reflecting film; 4: lamp socket;
41: the lamp support spring; 5: the mobile restriction body; 51: the rotation roller; 52: coming off prevents member;
53: matrix; 54: peristome; 55: fixed screw; 56: the peristome bottom.
Embodiment
Use Fig. 1 to Fig. 4 to describe one embodiment of the present invention.
Fig. 1 is the front view that the summary of the Excimer lamp apparatus 1 that relates to of invention of expression present embodiment consists of, and Fig. 2 is the A-A profile of presentation graphs 1.
As shown in the drawing, Excimer lamp 3 separates with basket 2 and by the maintenance that is fixed of lamp socket 4, one square end sections, the opposing party end keeps with institutes such as lamp support springs 41 in order to move freely at long side direction in the lower side of metal basket 2.In addition, 3 of basket 2 and Excimer lamps, be provided with by insulating component in the substantial middle section of Excimer lamp 3 and formed, to possess to the mobile restriction body 5 of the rotation roller 51 of the long side direction rotation of Excimer lamp 3, so that Excimer lamp 3 is crooked upward.
Fig. 3 is the figure of formation that expression is used in the Excimer lamp 3 of Excimer lamp apparatus 1 of the present invention, and Fig. 3 (a) is the stereogram of all formations of expression Excimer lamp 3, and Fig. 3 (b) is the B-B profile of expression Excimer lamp 3.
As shown in these figures, Excimer lamp 3 has the arc chamber (Discharge Chamber) 31 that has long side direction and short side direction take upper wall 311 and lower wall 312 and 313 separations of four sidewalls, section as flat rectangular tubular.In arc chamber 31 interior inclosures the quasi-molecule luminous gas is arranged, and be formed with the ultraviolet reflecting film 33 of silicon dioxide as principal component at least basket 2 side inner faces except the light emitting surface of arc chamber 31.In upper wall 311 outsides and lower wall 312 outsides of arc chamber 31, have with respect to grid electrode section 32 form as burning till the electrode that conductive paste becomes.
In addition, electrode part 32 is not limited to grid electrode, and the same ground can form electrode and get final product.In addition, the shape of Excimer lamp is that the Excimer lamp of dual pipe form also can except the tetragonal Excimer lamp of as shown in Figure 3 section rectangular shape.
The stereogram of the formation when Fig. 4 (a) is the assembling of the expression mobile restriction body 5 of being located at 3 of basket 2 and Excimer lamps, Fig. 4 (b) is the expression rotation roller 51 that take out to consist of mobile restriction body 5 and prevent that from matrix 53 set the coming off that come off the stereogram of member 52, Fig. 4 (c) from being the stereogram of the formation of expression mobile restriction body 5 assemblings when finishing in order to prevent from rotating roller 51.
As shown in these figures, mobile restriction body 5 has: its section forms to the matrix 53 of the roughly コ shape of Excimer lamp 3 sides; And prevent that with fixing the coming off of screw 55 that are fixed member 52 from running through the peristome 54 of matrix 53 and making the state of matched in clearance, possesses the side face with preset width, to the rotation roller 51 of lamp length direction rotation, be configured as from basket 2 times outstanding towards the direction of Excimer lamp 3.More particularly, coming off prevents that member 52 is disposed at the hollow space of the rotation roller 51 of hollow circular ring shape, and rotation roller 51 is arranged to only can be connected to the peristome bottom surface 56 and Excimer lamp 3 of the roughly コ shape of matrix 53.Rotation roller 51 is in the member that consists of mobile restriction body 5, unique parts that are connected to the electrode part 32 on the arc chamber 31 that is provided in Excimer lamp 3, when rotation roller 51 is connected to electrode part 32, for the displacement of the lamp length direction of the relativity of generation between arc chamber 31 and basket 2, rotation roller 51 is rotated.
In addition, at the side face that rotates at least roller 51 of mobile restriction body 5, coating glaze and being burnt till.Burn till glaze by coating, the surface of rotation roller 51 is become branch to cover by the nature of glass and becomes level and smooth.So, with the rotation roller 51 the uncoated situation that has glaze to burn till of side face compare, rotation roller 51 is contacted with other member of formation of mobile restriction body 5, or when being connected to the electrode part 32 of Excimer lamp 3, consist of possibility that the powder of the pottery of rotation roller 51 produces as particle still less.In addition, the composition of glaze is given an example, and as Main Ingredients and Appearance, contains the alkali metal of sodium, potassium, calcium, magnesium etc., the oxide of alkaline-earth metal with silicon dioxide, aluminium oxide, contains the transition metal of trace.In addition, the material as the rotation roller is not defined to steatite, and is just passable such as the pottery that the mechanicalness intensity such as aluminium oxide or silicon nitride or boron nitride are strong.
When 1 mobile restriction body 5 is set, then preferred near the lamp length direction is positioned at the substantial middle of Excimer lamp 3, but when a plurality of mobile restriction body 5 is set, appropriate intervals then is set is disposed at 5 of each mobile restriction bodies.
Below, the Excimer lamp apparatus that possesses the mobile restriction body with rotation roller of the present invention with do not have in the Excimer lamp apparatus of mobile restriction body of rotation roller possessing of prior art, be directed to that particle from the electrode part on Excimer lamp apparatus surface has or not or the comparative experiments of whether peeling off is illustrated.
Be used in the Excimer lamp of comparative experiments, (1) arc chamber is quartz glass, and luminous gas is xenon-133 gas, and shape is long side direction total length 160cm, short side direction 4cm, and height 1.5cm, and electrode is the electrode that burns till of gold, thickness of electrode is 10 μ m.Ultraviolet reflecting film is that composition is the hybrid films of silicon dioxide 90%+ aluminium oxide 10%, and thickness is 30 μ m, is formed at above the arc chamber inner face long side direction and side (with reference to patent documentation 1).Input when (2) lighting a lamp is input power 400W.(3) material of the rotation roller of mobile restriction body is steatite system, and has burnt till glaze in the side face coating.
With making mobile restriction body of the present invention be connected to the formation of Excimer lamp, in the moment of the 3000 hours time of lighting a lamp through accumulative total, confirm whether to have peeling off or particle occurs due to the friction of electrode.Its result, and the peeling off or particle of complete generating electrodes unconfirmed.In addition, do not have the bending of Excimer lamp, and be maintained at originally height from the height of processed object plane yet.That is, can keep uniform ultraviolet ray irradiation for processed object plane as can be known.
On the one hand, as a comparative example, Excimer lamp is to use the thing identical with the present inventor, with the formation that only pushes not have the mobile restriction member that rotates roller, lighting a lamp moment of 3000 hours time through accumulative total, confirming whether to have peeling off or particle occurs due to the friction of electrode.Its result although can prevent the bending of Excimer lamp, can see that the particle of thinking due to the peeling off of electrode occurs.
Claims (5)
1. an Excimer lamp apparatus has: metal basket; And Excimer lamp, described Excimer lamp and this basket are held in the lower side of this basket discretely, are equipped with electrode part in the outside of the arc chamber with short side direction and long side direction, possess ultraviolet reflecting film at the above-mentioned basket side inner face of above-mentioned arc chamber; This Excimer lamp apparatus will be radiated on the object being treated from the ultraviolet ray that this Excimer lamp radiates, and it is characterized by:
One square end section of above-mentioned arc chamber is fixed and remains in above-mentioned basket, the opposing party's end is moved at the long side direction of above-mentioned arc chamber and is held in freely above-mentioned basket, possess the mobile restriction body that the above-mentioned Excimer lamp of restriction is moved upward with respect to above-mentioned basket at above-mentioned basket and between the above-mentioned Excimer lamp below this basket, this mobile restriction body possesses the rotation roller of the long side direction of rotatably being located at above-mentioned Excimer lamp.
2. Excimer lamp apparatus as claimed in claim 1 is characterized by:
Above-mentioned mobile restriction body has: section is the matrix of the roughly コ shape opened to above-mentioned Excimer lamp side; Be located at the peristome of the roughly コ shape of this matrix, coming off of preventing that above-mentioned rotation roller from coming off prevents member; And be held under this comes off the state that prevents member in matched in clearance, only can be connected to the peristome bottom surface of roughly コ shape of above-mentioned matrix and the above-mentioned rotation roller that above-mentioned Excimer lamp ground arranges.
3. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized by:
The side face of above-mentioned rotation roller is coated with glaze and consists of through burning till.
4. Excimer lamp apparatus as claimed in claim 1 or 2 is characterized by:
It is flat rectangular tubular that above-mentioned arc chamber forms the section of being separated by upper wall and lower wall and four sidewalls, in this arc chamber inclosure the quasi-molecule luminous gas is arranged, above-mentioned ultraviolet reflecting film as principal component, is formed with relative above-mentioned electrode part in upper wall outside and the lower wall outside of above-mentioned arc chamber with silicon dioxide.
5. Excimer lamp apparatus as claimed in claim 3 is characterized by:
It is flat rectangular tubular that above-mentioned arc chamber forms the section of being separated by upper wall and lower wall and four sidewalls, in this arc chamber inclosure the quasi-molecule luminous gas is arranged, above-mentioned ultraviolet reflecting film as principal component, is formed with relative above-mentioned electrode part in upper wall outside and the lower wall outside of above-mentioned arc chamber with silicon dioxide.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008249335A JP5233551B2 (en) | 2008-09-27 | 2008-09-27 | Excimer lamp device |
| JP249335/2008 | 2008-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101685759A CN101685759A (en) | 2010-03-31 |
| CN101685759B true CN101685759B (en) | 2013-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101786237A Active CN101685759B (en) | 2008-09-27 | 2009-09-24 | Excimer lamp device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5233551B2 (en) |
| KR (1) | KR101252900B1 (en) |
| CN (1) | CN101685759B (en) |
| TW (1) | TWI435370B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5633354B2 (en) * | 2010-12-13 | 2014-12-03 | ウシオ電機株式会社 | Excimer lamp and excimer light irradiation device |
| JP5861987B2 (en) * | 2012-03-14 | 2016-02-16 | ウシオ電機株式会社 | Excimer light irradiation equipment |
| JP5601546B2 (en) * | 2012-10-17 | 2014-10-08 | ウシオ電機株式会社 | Excimer light irradiation equipment |
| JP6086227B2 (en) * | 2013-03-25 | 2017-03-01 | ウシオ電機株式会社 | Excimer light irradiation equipment |
| JP2021150057A (en) | 2020-03-17 | 2021-09-27 | ウシオ電機株式会社 | Ultraviolet emitting device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1682074A (en) * | 2002-09-11 | 2005-10-12 | 日本电池株式会社 | UV-ray irradiator |
| CN1713337A (en) * | 2004-06-23 | 2005-12-28 | 豪雅冠得股份有限公司 | Excited quasi-molecular lampbulb |
| CN1783421A (en) * | 2004-11-22 | 2006-06-07 | 优志旺电机株式会社 | Quasi molecular lamp device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001155684A (en) * | 1999-11-29 | 2001-06-08 | Hoya Schott Kk | Dielectric barrier excimer lamp |
| JP2004119942A (en) * | 2002-09-30 | 2004-04-15 | Japan Storage Battery Co Ltd | Ultraviolet irradiation device |
| JP4110010B2 (en) * | 2003-02-24 | 2008-07-02 | 株式会社リコー | Fixing apparatus and image forming apparatus |
| JP4461707B2 (en) * | 2003-05-06 | 2010-05-12 | ウシオ電機株式会社 | Excimer lamp |
| JP4483290B2 (en) * | 2003-12-26 | 2010-06-16 | 株式会社ジーエス・ユアサコーポレーション | Excimer lamp irradiation device |
| JP2005222905A (en) * | 2004-02-09 | 2005-08-18 | Japan Storage Battery Co Ltd | Excimer lamp |
| JP2007042293A (en) * | 2005-07-29 | 2007-02-15 | Harison Toshiba Lighting Corp | Ultraviolet-ray irradiation device |
| JP4230491B2 (en) * | 2006-03-28 | 2009-02-25 | 株式会社オーク製作所 | Long lamp vessel |
| JP4962376B2 (en) * | 2008-03-26 | 2012-06-27 | ウシオ電機株式会社 | Ultraviolet irradiation treatment method and ultraviolet irradiation treatment apparatus |
-
2008
- 2008-09-27 JP JP2008249335A patent/JP5233551B2/en active Active
-
2009
- 2009-08-13 TW TW098127275A patent/TWI435370B/en active
- 2009-08-31 KR KR1020090081434A patent/KR101252900B1/en active IP Right Grant
- 2009-09-24 CN CN2009101786237A patent/CN101685759B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1682074A (en) * | 2002-09-11 | 2005-10-12 | 日本电池株式会社 | UV-ray irradiator |
| CN1713337A (en) * | 2004-06-23 | 2005-12-28 | 豪雅冠得股份有限公司 | Excited quasi-molecular lampbulb |
| CN1783421A (en) * | 2004-11-22 | 2006-06-07 | 优志旺电机株式会社 | Quasi molecular lamp device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101252900B1 (en) | 2013-04-09 |
| JP2010080351A (en) | 2010-04-08 |
| KR20100035676A (en) | 2010-04-06 |
| JP5233551B2 (en) | 2013-07-10 |
| CN101685759A (en) | 2010-03-31 |
| TWI435370B (en) | 2014-04-21 |
| TW201013741A (en) | 2010-04-01 |
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