KR101728980B1 - Apparatus for intense pulsed light sintering - Google Patents

Abstract

The present invention provides a light sintering apparatus. The light sintering apparatus comprises: a first curve unit arranged on an upper side of a left of a position of a light emitting unit to emit light to an object to be treated and formed in a convex shape upwards to reflect the light emitted from the light emitting unit towards the object to be treated; a second curve unit arranged on an upper side of a right of the position of the light emitting unit and formed in a convex shape upwards to reflect the light emitted from the light emitting unit towards the object to be treated; a first reflection wall extended downwards from a left end of the first curve unit while forming a curve; and a second reflection wall extended downwards from a right end of the second curve unit while forming a curve. A chord of the first curve unit and a chord of the second curve unit are positioned on an identical line. A right end of the first curve unit and a left end of the second curve unit form a contact point. A line extending a cross sectional center of the light emitting unit from the contact point in a longitudinal direction can be perpendicular to a substrate on which the object to be treated is formed.

Description

[0001] APPARATUS FOR INTENSE PULSED LIGHT SINTERING [0002]

The present invention relates to a light sintering apparatus, and more particularly to a light sintering apparatus for improving the uniformity of light emitted from a light sintering apparatus.

Recently, various electronic devices such as smart devices, OLEDs, and solar cells are being developed as electronic and information communication technologies are developed. Printing electronic technology is utilized to produce electronic devices for use in such electronic devices.

Printed electronics technology is a technology to produce functional electronic devices with desired functions by printing functional ink with conductivity, insulation and semiconductivity on plastic, film, paper, glass and substrate through industrial printing process technique. Such printing electronic technology can be applied to various materials by printing, and it enables mass production, large area and simplification of processes through the manufacturing process different from the existing electronic industry.

The printing electronics process consists of three steps: printing, drying and sintering. At this time, the sintering process has a great influence on the performance of the product. Sintering is a process that has significant value in the next generation of technology by making nanoparticles dissolve to form functional thin films in solid form. Typical sintering processes are heat sintering, microwave sintering, laser sintering and so on. Since the conventional heat sintering process is carried out in a high-temperature vacuum chamber environment, it is difficult to apply to a flexible substrate susceptible to heat, and other sintering methods require a long process time and complicated steps, .

In order to solve such a problem, a light sintering technique has been developed as disclosed in the patent documents of the following prior art documents. The optical sintering technique can dissolve the nanoparticles by propagating the white light generated from the xenon lamp, so that the functional thin film can be produced much faster and in a larger quantity than the conventional method using heat.

However, the conventional photo-sintering equipment is only capable of local sintering, resulting in poor uniformity of sintering and difficulty in application to a large-area substrate.

Accordingly, there is an urgent need for a solution to the problems of the conventional optical sintering equipment.

Korean Patent Publication No. 2014-0094789

SUMMARY OF THE INVENTION It is an object of the present invention to provide a light sintering apparatus with improved light uniformity.

It is another object of the present invention to provide a light sintering apparatus suitable for a roll-to-roll process.

The technical problem to be solved by the present invention is not limited to the above.

In order to solve the above technical problems, the present invention provides a light sintering apparatus.

A light sintering apparatus according to an embodiment of the present invention is a light sintering apparatus that is disposed at a left upper side of a position where a light emitting unit that emits light as a material to be processed is provided and convex upward, A second bending section disposed on an upper right side of a position where the light emitting section is provided and having a convex upward shape and reflecting the light emitted from the light emitting section in the direction of the object to be processed, And a second reflecting wall which is curved at a right end of the second curved portion and extends downward, wherein the string of the first curved portion and the string of the second curved portion are curved at a left end of the first curved portion, Wherein the right end of the first curve portion and the left end of the second curve portion form a contact point, Ray (line) extending in the direction of the center section may be orthogonal with respect to the object to be treated.

The reflecting wall of at least one of the first reflecting wall and the second reflecting wall of the light sintering apparatus according to an embodiment of the present invention is arranged so that the reflecting wall of the light sintering apparatus, Can have a curve.

According to an embodiment of the present invention, the first reflecting wall and the second reflecting wall may be symmetrical with respect to a line extending from a center of a longitudinal section of the light emitting portion at the contact point.

The curvature of the reflective wall of at least one of the first reflective wall and the second reflective wall of the light sintering apparatus according to an exemplary embodiment of the present invention may decrease toward the substrate on which the object is formed.

In the light sintering apparatus according to an embodiment of the present invention, in the roll to roll process, the moving direction of the object to be processed is the direction of the second reflecting wall from the first reflecting wall, When the center of the substrate is positioned below the contact point, the first reflecting wall can be opened more outwardly with respect to the substrate on which the object to be processed is formed than the second reflecting wall.

In the light sintering apparatus according to an embodiment of the present invention, in the roll-to-roll process, when the moving direction of the article to be processed is the direction of the second reflecting wall from the first reflecting wall, May be lower than the reflectance of the second reflecting wall.

The first bend portion of the light sintering apparatus according to an embodiment of the present invention is symmetrical with respect to the center of the first bend portion and the second bend portion is symmetrical with respect to the center of the second bend portion. .

The light emitting unit of the light sintering apparatus according to an embodiment of the present invention may be a xenon lamp, and the xenon lamp may be disposed in a downward direction at a contact formed by the right end of the first curve and the left end of the second curve. have.

According to an embodiment of the present invention, there is provided a light emitting device comprising: a light emitting device that is disposed at a left upper side of a position where a light emitting portion that emits light to a material to be processed is provided, A second bending portion disposed on an upper right side of the position where the light emitting portion is provided and having a convex upward shape and reflecting the light emitted from the light emitting portion in the direction of the object to be processed, And a second reflective wall curved at a right end of the second curved portion and extending downward, wherein a right end of the first curved portion and a left end of the second curved portion are connected to a contact point And a line extending from the contact point in the longitudinal direction of the light emitting unit may form a vertical line with respect to the object to be processed.

The line extending from the center of the cross section in the longitudinal direction of the light emitting section to the contact point between the first curve section and the second curve section forms a perpendicular to the object to be processed so that the light emitted from the light emitting section can be irradiated with a high uniformity have.

The first reflection wall and the second reflection wall have a curved shape and extend downward, thereby providing an effect of further improving the light uniformity emitted from the light emitting portion.

 The effects of the present invention are not limited to those described above and can be understood more clearly by the following description.

1 is an exploded perspective view of a light sintering apparatus according to a first embodiment of the present invention.
2 is a cross-sectional view taken along line A-A 'of FIG. 1 for explaining a reflector according to a first embodiment of the present invention.
3 is a flowchart illustrating a method of forming a conductive film using the light sintering apparatus according to the first embodiment of the present invention.
4 is a cross-sectional view corresponding to line A-A 'of FIG. 1 for illustrating a reflective wall according to a second embodiment of the present invention.
5 is a view for explaining a roll-to-roll conductive film forming method using the light sintering apparatus according to the second embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In this specification, when an element is referred to as being on another element, it may be directly formed on another element, or a third element may be interposed therebetween. Further, in the drawings, the shapes and thicknesses of regions are exaggerated for an effective description of the technical content.

Also, while the terms first, second, third, etc. in the various embodiments of the present disclosure are used to describe various components, these components should not be limited by these terms. These terms have only been used to distinguish one component from another. Thus, what is referred to as a first component in any one embodiment may be referred to as a second component in another embodiment. Each embodiment described and exemplified herein also includes its complementary embodiment. Also, in this specification, 'and / or' are used to include at least one of the front and rear components.

The singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It is also to be understood that the terms such as " comprises "or" having "are intended to specify the presence of stated features, integers, Should not be understood to exclude the presence or addition of one or more other elements, elements, or combinations thereof. Also, in this specification, the term "connection " is used to include both indirectly connecting and directly connecting a plurality of components.

Also, in this specification, the expression "same, vertical, and symmetric" is a concept including not only completely identical, vertically, symmetric but also substantially the same, vertical, and symmetrical case. In this specification, the expression "same, vertical, and symmetric" includes not only the case where the design values are the same, the vertical and the symmetry but also the case where the design is the same, vertical and symmetrical on the product.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

1 is an exploded perspective view of a light sintering apparatus according to a first embodiment of the present invention.

1, the light sintering apparatus according to the first embodiment of the present invention includes a reflection sheath 30 and a reflection wall 40 for reflecting light emitted from the light emitting portion 10 toward the target 1, . ≪ / RTI > Further, the light sintering apparatus according to an embodiment of the present invention may further include a housing 70 positioned outside the reflection gutters 30 and the reflection walls 40.

The material 1 to be processed according to an embodiment of the present invention may be a material to be photo-sintered, such as fine metal particles and precursors patterned on a plastic film, a paper, a glass, a substrate S or the like. For example, the object 1 to be processed may contain not only metals such as copper, iron, molybdenum, nickel, aluminum, gold and platinum, but also ceramics such as titanium oxide, lithium cobalt oxide and silicon oxide. The object 1 to be treated may be nano- or micro-sized, in which case the surface area ratio of the particles becomes large, and high light absorption can be provided. In addition, for example, the object 1 to be processed is a metal nano ink printed on a substrate S, and may be formed as an electrode of an electronic device such as a solar cell, a semiconductor, a display, etc. through a drying and sintering step. However, the object to be treated 1 is not limited to the metal nano ink forming the electrodes.

At this time, the light sintering apparatus according to an embodiment of the present invention may further include a fixing unit 50 for fixing the substrate S on which the article 1 is printed. The fixing unit 50 fixes the object 1 between the pair of reflective walls 40 and fixes the object 1 at a predetermined distance from the lowermost end of the reflective wall 40, The object to be processed 1 can be disposed downwardly. For example, the fixing unit 50 may be fixed while the object 1 to be processed is undergoing sintering, and the object 1 may be moved in a roll-to- So as to be sintered.

The light emitting unit 10 is configured to emit light for photo-sintering the object 1. For example, the light emitting unit 10 may be a xenon lamp. The Xenon lamp is a lamp which emits light by discharge occurring in the xenon gas, and can generate the extreme ultraviolet light having the light spectrum of a wide wavelength band of 60 nm to 2.5 mm, thereby sintering the object 1 to be processed.

According to one embodiment, the light emitting unit 10 may be replaced with an ultraviolet lamp or an infrared lamp. For example, an infrared lamp may be mounted on the light emitting portion 10 to dry the object 10, and then the object 10 to be dried may be sintered by mounting a xenon lamp on the light emitting portion 10 can do.

The reflector 30 and the reflecting wall 40 may be configured to reflect the light emitted from the light emitting unit 10 toward the object 1. [ Details of the reflector 30 and the reflecting wall 40 will be described later with reference to FIG.

The housing 70 may cover at least one of the reflector 30 and the reflective wall 40. The housing 70 surrounds the upper surface of the reflector 30 and the outer surface of the reflective wall 40 to protect the reflector 30 and the reflective wall 40 from external impacts.

The light sintering apparatus according to the first embodiment of the present invention may further include an optical filter 60. Here, the optical filter 60 can function as an optical element that selectively transmits or blocks a component having a specific wavelength band in the light. The optical filter 60 is disposed below the light emitting portion 10 and can control the wavelength band of the light emitted from the light emitting portion 10 toward the object 1. [ At this time, the optical filter 60 can be fixed by the reflective wall 40. For example, a sliding groove is formed on the inner surface of each of the pair of reflective walls 40 to slide the optical filter 60, And can be detachably attached. However, the optical filter 60 does not necessarily have to be fixed to the reflection wall 40, or slidably attached to or detached from the reflection wall 40.

The light sintering apparatus according to the first embodiment of the present invention has been described above. 2, the reflector 30 and the reflecting wall 40 of the light sintering apparatus according to the first embodiment of the present invention will be described in detail.

2 is a cross-sectional view taken along line A-A 'of FIG. 1 for explaining a reflector according to a first embodiment of the present invention. Hereinafter, a light sintering apparatus according to a first embodiment of the present invention will be described with reference to FIG. For convenience of explanation, the optical filter 60 is not shown.

2, the reflector 30 and the reflecting wall 40 of the light sintering apparatus according to the first embodiment of the present invention are arranged such that light emitted from the light emitting unit 10 described above is incident on the object 1 It is possible to provide the reflecting surface so as to be uniformly reflected on the surface.

To this end, the reflector 30 may include a first curved portion 33a and a second curved portion 33b.

The first bend section 33a is disposed on the left upper side of the position where the light emitting section 10 that emits light to the object 1 to be processed is provided and has a convex upward shape (+ y direction) The reflected light can be reflected toward the object 1 to be processed. In addition, the first curve portion 33a may be symmetrical with respect to the center a2 of the first curve portion 33a.

The second curved portion 33b is disposed on the upper right side of the position where the light emitting portion 10 that emits light to the object 1 to be processed is provided and has an upward convex shape (+ y direction) The reflected light can be reflected toward the object 1 to be processed. The second bend section 33b may be symmetrical with respect to the center b2 of the second bend section 33b.

At this time, the string a1 of the first curve portion 33a and the string b1 of the second curve portion 33b may be on the same line.

The right end of the first curve portion 33a and the left end of the second curve portion 33b form a contact point and a line extending from the contact point in the longitudinal direction of the light emitting portion 10, c: hereinafter referred to as a center line) may be perpendicular to the substrate on which the object to be processed is formed.

According to one embodiment, the light emitting unit 10 may be disposed at a predetermined distance L 1 below a contact point between the right end of the first curve portion 33 a and the left end of the second curve portion 33 b .

In addition, the first curve portion 33a and the second curve portion 33b may be symmetrical with respect to the center line c.

The first bend section 33a and the second bend section 33b of the reflector 30 may be formed of any one of a variety of metals such as gold, silver, aluminum and iron and a nonmetal material such as ceramic and alumina, . At this time, the reflector 30 itself is not necessarily made of such a material, and a mixture of any one or more of these materials may be coated on the lower surface of the reflector 30.

Thus, the reflector 30 including the first bend section 33a and the second bend section 33b is configured such that the light emitted from the light emitting section 10 is incident on the surface S of the substrate S on which the object 1 is formed The reflective surface can be provided so as to reach uniform intensity.

In the case where the light emitting portion is disposed under the reflector of the single arc shape unlike the reflector according to the first embodiment of the present invention, light emitted from the light emitting portion directly to the surface of the object to be processed, The light irradiated onto the surface of the treated product is superimposed. Accordingly, in the prior art, there is a problem that the intensity of light at the central portion of the object appears higher than the peripheral portion of the object to be processed.

However, as in the first embodiment of the present invention, since the light emitting portion 10 is located below the contact point where the first curve portion 33a and the second curve portion 33b are in contact with each other, The intensity of light emitted to the surface of the object 1 to be processed can be reduced. Thus, according to the first embodiment of the present invention, it is possible to provide an effect that the intensity of light at the central portion of the object to be processed and the intensity of light at the peripheral portion of the object to be processed become uniform.

The light sintering apparatus according to the first embodiment of the present invention further includes a reflection wall 40 for reflecting the light emitted from the light emitting unit 10 to the surface of the object 1, The wall 40 has a first reflective wall 40a curved at a left end of the first curved portion 33a and a second reflective wall 40b curved at a right end of the second curved portion 33b, And a wall 40b.

At this time, at least one of the reflecting walls of the first reflecting wall 40a and the second reflecting wall 40b is curved so as to extend outward with respect to the to-be- Shape. For example, the first reflective wall 40a and the second reflective wall 40 may be symmetrical with respect to a line extending from the contact point to the longitudinal center of the light emitting portion. Thus, the lower end portions of the first reflecting wall 40a and the second reflecting wall 40b can be spaced apart from each other by a predetermined distance, for example, L2 distance in the x-axis direction .

According to one embodiment, the curvature of the reflecting wall of at least one of the first reflecting wall 40a and the second reflecting wall 40b may decrease toward the object 1 to be processed. As a result, the shape of the curve can be made closer to a straight line from one end of the first reflecting wall 40a in the direction of the first bending portion 33a to one end in the direction of the object 1 to be processed. Likewise, the shape of the curve from the one end in the direction of the second curved portion 33b of the second reflecting wall 40b toward one end in the direction of the article to be treated 1 can be approximated to a straight line.

Since the first reflecting wall 40a and the second reflecting wall 40b are curved and extend downward, the light emitted from the light emitting unit 10 is uniformly distributed to the surface of the object 1 As shown in FIG.

The first reflective wall 40a and the second reflective wall 40b constituting the reflective wall 40 may be formed of any one or two or more of metals such as gold, silver, aluminum, and iron and nonmetal materials such as ceramic and alumina Or more can be mixed and manufactured. At this time, the reflecting wall 40 itself is not necessarily made of such a material, and a mixture of any one or more of these materials may be coated on the lower surface of the reflecting wall 40. [

If the first reflection wall 40a and the second reflection wall 40b have a straight line structure, there is a problem that the intensity of light at a peripheral portion of the substrate S is higher than the central portion and the end portion .

However, when the first reflecting wall 40a and the second reflecting wall 40b are curved and have a downwardly extending structure as in the first embodiment of the present invention, Light which causes non-uniformity between the separation distance L2 is released. Therefore, the reflecting wall according to the first embodiment of the present invention improves the surface light uniformity of the object 1 to be processed.

According to the structural features of the reflector 30 and the reflecting wall 40 according to the first embodiment of the present invention as described above, the light sintering apparatus according to the first embodiment of the present invention has the structure as shown in the lower part of FIG. 2 It is possible to provide light of uniform intensity over the entire surface of the object to be processed.

Also, the reflector 30 according to an embodiment of the present invention may further include a first auxiliary curved portion and a second auxiliary curved portion in order to improve the uniformity of light directed to the object to be processed.

The auxiliary curved portions are concavely recessed upward from the lower surface of the reflector 30 as in the main curved portions 33a and 34b and are formed in a curved shape and one end thereof is in contact with the other end of the main curved portions 33a and 33b . More specifically, the first auxiliary curved portion extends upwardly from the left end of the first main folded portion 33a so as to be convex upward, and the second auxiliary curved portion is convex upward at the right end of the second main folded portion 33b You can extend it.

According to an embodiment, the first main bend portion 33a and the first auxiliary bend portion may be symmetrical to the second main bend portion 33b and the second auxiliary bend portion with respect to the center line c.

The light-emitting portion may be positioned below the first sub-curve portion and the second sub-curve portion. At this time, the first sub-curved portion and the second sub-curved portion may be positioned to surround at least a part of the light emitting portion.

The light emitting units located below the first sub-curvature portion and the second sub-curvature portion may be symmetrical with respect to the center line c.

The reflector and the reflecting wall according to the first embodiment of the present invention have been described above. Hereinafter, a conductive film forming method using the light sintering apparatus according to the first embodiment of the present invention will be described with reference to FIG.

3 is a flowchart illustrating a method of forming a conductive film using the light sintering apparatus according to the first embodiment of the present invention.

Referring to FIG. 3, a method of forming a conductive film using a light sintering apparatus according to a first embodiment of the present invention includes a step S100 of printing a metal nano ink as an object to be processed and a step S200 of sintering with a xenon lamp . Each step will be described in detail below.

In step S100 of printing the metal nano ink, the metal nano ink may be printed on the substrate and patterned. For example, the substrate may be plastic, film, paper, glass, or the like.

In the sintering step S200 by the Xenon lamp, the patterned metal nano ink can be sintered. For example, the Xenon lamp may be provided in the light emitting unit 10 to emit white light. In this case, the sintering through the irradiation of white light may be performed by a single pulse sintering process for irradiating a single pulse, a multi pulse sintering process for irradiating the energy of white light into multiple pulses, or a two-step sintering process 2 step) sintering.

According to one embodiment, the metal nano ink printed in step S100 may be dried before being photo-sintered in step S200. For this, an infrared lamp is mounted on the light emitting portion 10 to dry the object to be processed, and the Xenon lamp is mounted on the light emitting portion 10 to sinter the dried object to be processed.

Thus, the light irradiated from the xenon lamp in step S200 is reflected to the surface of the object to be treated by being reflected by the reflection gutters 30 and the reflection wall 40 described above, so that uniform light is irradiated onto the surface of the object.

Therefore, according to the light sintering apparatus and the conductive film forming method using the same according to the first embodiment of the present invention, it is possible to provide a high sintering uniformity, and thus it is possible to provide a large area sintering.

The conductive film forming method using the light sintering apparatus according to the first embodiment of the present invention has been described above with reference to FIG. Hereinafter, a light sintering apparatus according to a second embodiment of the present invention will be described.

According to a second embodiment of the present invention to be described below, there is provided a light sintering apparatus that takes into consideration process conditions such that, when a material to be processed is processed by a roll-to-roll process, the sintering process proceeds while the object to be processed is continuously moved . In the following description of the second embodiment of the present invention, the description of the parts overlapping with those of the first embodiment described above will be omitted, and a description will be given mainly of the different configurations.

4 is a cross-sectional view corresponding to line A-A 'of FIG. 1 for illustrating a reflective wall according to a second embodiment of the present invention. For convenience of explanation, the optical filter 60 is not shown.

The light sintering apparatus according to the second embodiment of the present invention will be described mainly with respect to the reflective wall portion of the light sintering apparatus according to the first embodiment of the present invention.

Referring to FIG. 4, at least one of the reflecting walls of the first reflecting wall 40a and the second reflecting wall 40b according to the second embodiment of the present invention is arranged in such a manner that, And may have a curved shape that flares outward with respect to the body 1. At this time, in the roll-to-roll process, when the moving direction of the article 1 is from the first reflecting wall 40a to the second reflecting wall 40b, the first reflecting wall 40a The second reflecting wall 40b can be more open to the substrate S than the second reflecting wall 40b. The distance L3 in the x-axis direction between the lower end of the first reflecting wall 40a and the left end of the substrate S is larger than the distance L3 between the lower end of the second reflecting wall 40b and the right end of the substrate S. [ May be longer than the distance L2 in the x-axis direction. In other words, when the center of the substrate in the longitudinal direction (x-axis direction) is located below the contact formed by the first curved portion 33a and the second curved portion 33b, the curvature of each reflective wall is longer .

The intensity of the light emitted from the light emitting portion 10 is lower than the intensity of the light reflected from the left end portion of the substrate S because the lower end portion of the first reflecting wall 40a is further extended outward than the lower end portion of the second reflecting wall 40b. And becomes higher toward the right end of the substrate S.

As a result, the intensity of the light at the entrance of the light sintering apparatus becomes weaker than the intensity of the light of the exit sphere, so that the light sintering can be progressively performed according to the movement of the substrate. Effects of the roll-to-roll process of the light sintering apparatus according to the second embodiment of the present invention will be described with reference to Fig.

5 is a view for explaining a roll-to-roll conductive film forming method using the light sintering apparatus according to the second embodiment of the present invention.

5, when the article 1 is sintered in the roll-to-roll process, the substrate S on which the article 1 (not shown in FIG. 5) is printed is moved to the lower end of the first reflective wall 40a Thereby advancing to the lower end of the second reflecting wall 40b.

The substrate S on which the object 1 is printed is exposed to low intensity light when it enters the light sintering apparatus through the lower end of the first reflecting wall 40a, The light is gradually exposed to light having a high intensity.

If light having a strong intensity is irradiated from the time when the substrate S on which the object 1 to be processed is printed enters the inside of the light sintering apparatus through the lower end of the first reflecting wall 40a, A problem may arise that the binder that has been deteriorated is broken.

However, as in the second embodiment of the present invention, when the substrate S having the object 1 printed thereon enters the inside of the light sintering apparatus through the lower end of the first reflecting wall 40a, It is possible to provide an effect that stable light sintering is possible when light of strong intensity is irradiated as the substrate S moves in the x-axis direction in a state where the binder is removed.

The light sintering apparatus according to the first and second embodiments of the present invention has been described above. As described above, the light sintering apparatus according to the first embodiment of the present invention can provide high sintering uniformity, and the light sintering apparatus according to the second embodiment of the present invention can improve the light sintering stability in the roll- Can be improved.

In the description of the second embodiment of the present invention, the first reflection wall is configured to spread outward beyond the second reflection wall to weaken the light intensity at the substrate entrance, but alternatively, the first reflection wall and the second reflection wall It is needless to say that the configuration is the same as that of the first embodiment and the first reflection wall surface is configured to have a reflectance lower than that of the second reflection wall, so that the light intensity at the substrate entrance can be weakened.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the invention.

1: object to be processed 10:
30: reflector 33a: first bend
33b: 2nd bend section 40: reflecting wall
40a: first reflecting wall 40b: second reflecting wall
50: fixing part 60: optical filter
70: housing S: substrate
C: Center line

Claims (8)

A first bending portion disposed at a left upper side of a position where a light emitting portion that emits light as an object to be processed is provided and which has a convex upward shape and reflects light emitted from the light emitting portion toward the object to be processed;
A second bending portion disposed on an upper right side of a position where the light emitting portion is provided and having a convex upward shape and reflecting the light emitted from the light emitting portion toward the object to be processed;
A first reflecting wall curved at a left end of the first curve portion and extending downward; And
And a second reflecting wall curved at a right end of the second curved portion and extending downward,
Wherein the first curved portion and the second curved portion are located on the same line, and the right end of the first curved portion and the left end of the second curved portion form a contact, And a line extending from the center is perpendicular to the substrate on which the object to be processed is formed. The method according to claim 1,
Wherein at least one of the reflecting walls of the first reflecting wall and the second reflecting wall has a curved line extending outward with respect to the substrate on which the object to be processed is formed as going toward the object to be processed. 3. The method of claim 2,
Wherein the first reflecting wall and the second reflecting wall are symmetrical with respect to each other with reference to a line extending from a center of the lengthwise end face of the light emitting portion at the contact point. The method according to claim 1,
Wherein the reflective wall of at least one of the first reflective wall and the second reflective wall has a curvature decreasing toward the substrate in which the object to be processed is formed. The method according to claim 1,
In the roll-to-roll process, when the moving direction of the object to be processed is the direction of the second reflecting wall from the first reflecting wall and the center of the substrate on which the object to be processed is formed is located below the contact, And the one reflection wall flares outwardly with respect to the substrate on which the object to be processed is formed than the second reflection wall. The method according to claim 1,
In the roll-to-roll process, the reflectance of the first reflecting wall is lower than that of the second reflecting wall when the moving direction of the object to be processed is the direction of the second reflecting wall from the first reflecting wall. The method according to claim 1,
Wherein the first curved portion is symmetrical with respect to the center of the first curved portion, and the second curved portion is symmetrical with respect to the center of the second curved portion. The method according to claim 1,
Wherein the light emitting unit is a xenon lamp and the xenon lamp is disposed in a downward direction at a contact formed by the right end of the first curve and the left end of the second curve.

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