TW201123261A - Ultraviolet lamp and ultraviolet irradiating device - Google Patents

Abstract

An ultraviolet lamp includes a tubular discharge tube, characterized in a curved surface part and a planar part for transmitting ultraviolet on the outer wall of the discharge tube in opposite position. In addition, a surface of the curved surface part inside the discharge tube is a concave. A first electrode is installed on the curved surface part. A second electrode which is line-shaped is installed on the outside of the discharge tube in a manner extending along the lengthwise direction of the discharge tube. The second electrode is located near the central of the planar part. A discharge occurs between the first electrode and the second electrode. There is no other electrode installed on the planner part except the second electrode.

Description

20112326L VI. Description of the Invention: [Technical Field of Invention] The present invention relates to an ultraviolet lamp and an ultraviolet irradiation device. [Prior Art] As an ultraviolet lamp used in a cleaning device or the like for cleaning a glass substrate for a liquid crystal panel or the like, there is an excimer lamp having a double tube structure (refer to Japanese Patent Laid-Open Publication No. 2003-257375 Kaiping No. 9-97597). Further, as an ultraviolet lamp which is used in a cleaning device or the like, there is an ultraviolet lamp using a cylindrical discharge vessel (refer to Japanese Laid-Open Patent Publication No. 2003-197152). Further, as an ultraviolet lamp which is also used in a cleaning device or the like, an ultraviolet lamp using a square box type discharge vessel is known (refer to International Publication No. WO2004/025175 of the International Patent Application). However, in the double pipe structure disclosed in Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei 9-97597, the ultraviolet rays generated are emitted radially from the lamp in all directions. Therefore, ultraviolet rays radiated in the opposite direction to the object (product W) washed by the ultraviolet rays cannot be used for washing. In order to solve this problem, for example, as shown in FIG. 8, a reflecting plate 1〇1 is provided at the rear of the lamp 100 (opposite side of the product W side). Thus, the irradiation efficiency can be improved by guiding the light emitted rearward toward the product W side. Moreover, 'in order to prevent the ultraviolet rays from being absorbed by the oxygen around the lamp 100, the irradiation intensity is lowered." It is necessary to use a light box with a sealed structure in which 201123261 between the lamp 1〇〇 and the reflector 101 is sealed and sealed with nitrogen. When the light-emitting box 1Q3 is used in the case where the product is removed from the side of the product, the size of the entire device is increased, and the cost is also high. Moreover, the glass materials embedded in the reflecting plates ι ι and W 102 are deteriorated over time due to the influence of ultraviolet rays, and it is necessary to additionally maintain the members. The result 'creates an increase in operating costs. In the example disclosed in Japanese Laid-Open Patent Publication No. Hei No. 197152, a light reflecting cover (for reflecting light) is attached to a portion on the opposite side of the filament direction in the lamp-phase. By setting it as such, the above light box is not required. However, ultraviolet light is absorbed by oxygen in the air. Therefore, in order to irradiate the stronger ultraviolet rays to the product w, it is necessary to make the lamp as close as possible to the product W. However, in such an example, since the shape of the lamp is a cylindrical shape, the distance from the lamp to the product w is largely different depending on which direction the ultraviolet rays are emitted and from which position of the lamp. Therefore, no matter how close the lamp is to the product w, a part of the ultraviolet rays must arrive at the product W after passing a long distance in the air. As a result, the ratio of the ultraviolet ray absorbed by the oxygen gas is increased, so that the ultraviolet ray irradiation efficiency becomes problematic. In the example disclosed in the International Publication No. WO 〇 2〇〇4/〇25175 of the International Patent Application, the discharge vessel is of a square box type. In the discharge capacitor ^, a mesh electrode that transmits ultraviolet rays is provided on the lower surface, and an electrode that reflects ultraviolet rays is provided on the surface of the above table 201123261. In this example, since the electrode for reflecting ultraviolet rays is provided on the upper surface, the light box as described above is not required. Further, for convenience of explanation, in the six faces of the rectangular parallelepiped discharge vessel shown in FIG. 4 in WO2004/025175, the surface on which the ultraviolet reflective electrode (lb) is provided is referred to as an upper surface, and is provided with a permeable surface. The surface of the ultraviolet mesh electrode (lc) is set as the lower surface. Further, the surface having the larger area among the remaining four surfaces is referred to as the side surface. The surface having a small area is referred to as the front and rear surfaces. Further, in the center portion of the discharge vessel, the direction toward the upper surface is referred to as the upper direction, and the direction toward the lower surface is referred to as the lower direction, and the direction toward the side surface is referred to as the lateral direction. In the example of WO02004/025175, since the discharge vessel is of a square box type, the surface (lower surface) on the side of the product W becomes a flat surface. Therefore, when the lower surface of the lamp is brought close to the product W, the lower surface is uniformly adjacent to the product W regardless of the position of the lower surface. Therefore, the irradiation efficiency of ultraviolet rays can be improved as compared with the case of using a cylindrical lamp as described above. However, such a square box type lamp has a problem that it is easy to be broken as compared with a cylindrical lamp. In a discharge vessel of an ultraviolet lamp such as an excimer lamp, a gas is generally sealed at a pressure lower than atmospheric pressure when the lamp is turned off. Moreover, there is also an ultraviolet lamp in which the pressure inside the discharge vessel is higher than atmospheric pressure. Therefore, in the discharge vessel at the time of extinguishing and extinguishing, the pressure from the outside atmospheric pressure is received. Further, 'for the lamp', there is a case where the expansion force of the internal gas is received when lighting. When the square box type discharge vessel as described above is used, it is necessary to make the area of the upper surface of the electrode on which the ultraviolet ray is reflected and the lower surface of the mesh electrode provided with the ultraviolet ray transparent. Therefore, the atmospheric pressure of the 201123261 pressure or the expansion force of the internal gas on these surfaces is greater than that of the other surfaces. As a result, since the upper surface and the lower surface are subjected to a large pressure, a large force is applied to the side portions. As a result, the sides of the discharge vessel become easily broken. SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and an object thereof is to provide an ultraviolet lamp and an ultraviolet irradiation device which have a simple structure, can obtain sufficient irradiation efficiency, and are not easily broken by a discharge vessel. In the invention of the invention, there is provided an ultraviolet lamp comprising a discharge tube formed in a cylindrical shape, wherein the outer peripheral wall of the discharge tube has a curved surface portion at a position facing each other and is used for transmitting ultraviolet rays. The flat portion is formed by making the surface on the inner side of the discharge tube concave (see FIG. 2). a first electrode is disposed on the curved surface portion, and a second electrode extending in a longitudinal direction of the discharge tube is disposed outside the discharge tube, and the second electrode is disposed near a central portion of the flat portion, and is in the first electrode and the first electrode A main discharge is generated between the two electrodes, and electrodes other than the two electrodes are not provided on the flat portion (refer to FIG. 3). In the present invention, the upper direction of FIG. 2 is the upper direction of the discharge tube (that is, the direction in which the curved surface portion is located), and the lower direction of FIG. 2 is set. The downward direction of the discharge tube (that is, the direction in which the flat portion for transmitting ultraviolet rays is in the downward direction). The left-right direction of FIG. 2 is set as the side direction of a discharge tube. Further, the direction perpendicular to the paper surface in Fig. 2 is taken as the longitudinal direction of the discharge tube. The meaning of the "near the center portion of the flat portion" will be described with reference to the cross section of the discharge tube in Fig. 14 . The surface of the discharge tube formed on the outer wall surface of the discharge tube by the ultraviolet ray-transmissive portion 201 is referred to as a bottom side. In the case of 201123261, the straight line having the longest length of the portion accommodated in the discharge tube is a straight line WL. The two intersections of the straight line WL and the inner surface of the discharge tube are set to W1 and W2. Further, the center points of W1 and W2 are set to WC. At this time, two points of the point on the straight line WL, which is a distance from WC of 1/4 of WC and W1, are set to W3 and W4. In this case, "the vicinity of the center portion of the flat portion" corresponds to a portion between the straight surface of the discharge tube on the outer surface of the flat portion 2〇1 passing through W3 and perpendicular to the straight line WL, and the line passing through "4 and perpendicular to the straight line WL. That is, the above-mentioned "near the center portion of the flat portion" is a portion indicated by a thick line in the outer surface of the flat portion 201 of Fig. 14 . The above-mentioned "the first electrode is provided in the vicinity of the center portion of the flat portion" means that the center point of the cross section perpendicular to the longitudinal direction of the discharge tube on the second electrode is provided in the vicinity of the "central portion of the flat portion". According to the first invention, the outer peripheral wall of the discharge tube is provided with a flat portion for transmitting the ultraviolet rays. When the flat portion is brought close to the product w, since the flat portion is flat, the position of the flat portion is always close to the product w. ^ This is the time when the tube-shaped discharge capacitor is used to correct the amount of "the inevitable part of the ultraviolet light is passed through the air in a long distance and reaches the product W" to suppress. As a result, the irradiation efficiency of the rabbit outer line can be improved as compared with when a cylindrical lamp is used. Example phase = and 3 according to the first, the ratio of the previous box to the use of the box-type discharge vessel / the discharge tube is not easy to break the effect

In the tube, the surface wall opposite to the flat (four) that transmits ultraviolet rays, and the surface on the side of U 201123261 is a concave curved surface portion. Therefore, even if the discharge tube is subjected to atmospheric pressure = force or expansion force of the internal gas, the force is not concentrated on one portion and the knives are scattered. Therefore, the force generated when the rectangular parallelepiped discharge vessel shown in Fig. 4 of WO2004/025175 is concentrated on the side surface causes the side surface to be easily broken, and is suppressed in the present invention. Further, according to the first invention, a linear electrode extending in the longitudinal direction of the discharge tube is used as the second electrode for main discharge. As a result, the amount of ultraviolet rays blocked by the second spring electrode can be suppressed to be small. Further, since the electrode other than the second electrode is not provided on the flat portion, a lamp having a small amount of ultraviolet rays blocked by the electrode can be obtained. Further, according to the invention described above, the second electrode is provided in the vicinity of the central portion of the flat portion 201 except that the first electrode is provided along the curved surface portion 2〇5 which is formed as a concave surface on the inner surface of the discharge tube. With such a combination of the two electrodes, the distance from the second electrode is substantially uniform over a wide range of the first electrode. As a result, a discharge is generated in a wide range in the discharge tube, so that an effect of increasing the ultraviolet ray intensity can be obtained. Of course, "flat" in the "flat portion" of the first invention does not mean a #complete plane. Obviously, even if the flat portion is slightly inclined, the effect of the present invention can be obtained if it is sufficiently flat compared with the opposite concave surface. Further, the curved surface portion in the first invention is not necessarily constituted by only a curved surface. For example, as shown in FIG. 9, the curved surface portion facing the flat portion 2〇1 for transmitting ultraviolet rays may further include: two arc-shaped portions 203; and sandwiched between the two arc-shaped portions, and The width is narrower than the flat portion 202 of the flat portion 201 for transmitting ultraviolet rays. Obviously, the effect of the first invention can also be obtained in such a case. In such a case, the width of the flat portion 2〇2 included in the curved surface portion is 201123261 degrees, preferably 2/3 or less of the width of the flat portion 2〇1 for transmitting ultraviolet rays, and more preferably 1/3 or less. 2. It is more preferable that the width of the flat portion 202 equal to or smaller than 1/3 is equal to or larger than the width of the flat portion 2〇1 for transmitting ultraviolet rays, and is not included in the first invention of the present invention. In such a case, as in the case of using the square box type discharge capacitor H, since the opposing flat portions are subjected to the atmospheric pressure, the arcs on both sides of the flat portion 2q2 are also subjected to a strong force. As a result, the round orphan is easily broken. Therefore, the effect that the discharge tube is not easily broken in the first invention of the present invention cannot be obtained. Further, the curved surface portion in the first invention may include a plurality of flat portions 2〇4 having a width sufficiently smaller than that of the flat portion 2G1 for transmitting ultraviolet rays, as shown in Fig. 1A. Obviously, in such a case, the effect of the first invention can also be obtained. Among them, it is preferable that the curved surface portion in the first invention is constituted by a concave curved surface which does not include a flat portion. Thereby, the degree of discharge 0 can be further enhanced. Further, in the first invention, the curved surface portion is composed of a concave curved surface which does not include a flat cross section. Thereby, the discharge green can be particularly enhanced. The second invention of the invention is the ultraviolet lamp according to the invention, wherein the ultraviolet reflecting member is provided on the portion, and the ultraviolet reflecting member portion is wider than one of the side portions of the discharge tube to the other one, perpendicular to In the purple of the length of the discharge tube, the ultraviolet reflecting surface of the ultraviolet reflecting member on the upper side of the erbium; the point of the lower side of the eight side parts, which is perpendicular to the ultraviolet 201123261 line (four) and the sneak tube The side faces further downward toward the other side. The cross section of the discharge tube from the phase is the side portion of the second invention. The surface formed on the outer wall surface of the discharge tube and used for the inner side of the discharge tube of the stem portion 201 is referred to as a bottom side. The surface on the inner side of the curved surface portion 205 is two points apart, and the point farthest from the bottom side is the vertex Τ1, and the straight line of the bottom and the bottom is the reference line. (4) The intersection point between the scale and the bottom is set to the bottom point. A line orthogonal to the reference line passing through the center point of the vertex 底 and the bottom point 设为 is set as the center line. At this time, the two intersections of the outer surface of the discharge tube of the curved surface portion 2G5 and the center line are referred to as side portions S2. The above description is performed by using the cross section shown in FIG. 11, but actually, in the discharge tube, there is a length perpendicular to the direction of the paper surface of FIG. U, so the side portions are lines extending in the longitudinal direction of the discharge tube. . Further, the definition of the side portion is the same as in the invention other than the second invention. In the second invention, the "ultraviolet-reflecting member is formed to be wider along the curved surface portion and the entire range from the side to the other side of the discharge tube" means that the ultraviolet-ray reflecting member 206 exists at least along the edge. The entire surface of the curved portion 205 from one of the side portions S1 to the other side portion S2, and further, at least one of the two side portions, the ultraviolet reflecting member 2〇6 extends beyond the side portion and further extends to the lower direction . Fig. 12 is a cross-sectional view showing the discharge tube in the case of a comparative example in which the discharge tube is cylindrical. As shown in FIG. 12, in the cylindrical discharge tube 207, in order to suppress the release of ultraviolet rays from the side of the discharge tube, the ultraviolet reflection member 206 is extended to the side portion as in the 11th 201123261 invention of the present invention. SI is lower. In this case, the point A of the ultraviolet ray reflection member from the lower side S1 is perpendicular to the tangential plane of the reflection surface of the ultraviolet ray reflection member and toward the inside of the discharge tube (in FIG. 12, from the point A toward the discharge tube) The direction of the arrow in the interior becomes higher than the direction from the side portion S1 toward the side portion S2. In other words, the ultraviolet ray reflected by the ultraviolet ray reflecting member 206 on the lower side of the side portion S1 tends to advance in the upward direction rather than the downward direction. Therefore, in a part of the ultraviolet ray, the number of times of reflection in the discharge tube increases until the self-discharge tube is discharged toward the product W. Thus, when the number of reflections increases, the ultraviolet rays are weakened. As a result, there is a problem that the amount of ultraviolet rays irradiated to the product W becomes small. This case is also the same in the case of a square box type discharge vessel. In the box type discharge vessel, in order to suppress leakage of ultraviolet rays to the side, ultraviolet reflecting members are provided on both sides. In this case, a part of the ultraviolet rays reciprocate a plurality of times due to reflection between the opposite side faces. Ultraviolet light is attenuated before it is released toward the product W. Therefore, when a square box type discharge vessel is used, there is also a problem that the emitted ultraviolet light intensity is weak. In the second invention of the present invention, as shown in Fig. 11, at a point A which is lower than the portion of the one side portion S1, perpendicular to the tangential plane of the ultraviolet ray reflecting surface and toward the inside of the discharge tube (Fig. 11 + It is the arrow amount from the point A toward the inside of the discharge tube, and is more downward than the direction from the side 31 toward the other side S2. In other words, the ultraviolet rays reflected on the i-outer line reflection member 2G6 which is lower than the side portion S1 tend to be stronger in the upward direction than in the upward direction. Therefore, the ultraviolet rays are reduced until the number of times of reflection in the discharge tube becomes smaller from the time of 12 201123261, and the number of times is decreased. The 'fruit' can suppress the ultraviolet ray that is irradiated to the product w. The ultraviolet ray reflection member is formed along the curved surface portion and the entire range from the side portion to the other portion = two, and the ultraviolet ray reflection member 2 〇 6 must not be along The curved portion 2〇5 has one of the side portions S1 up to the other side portion S2. For example, there is a portion for measuring the ultraviolet rays on a part of the entire range from one side. The portion of the light transmission window may not be provided with an ultraviolet reflection structure. In this case, if the material line reflection member is as a whole, the entire range from the side si to the other side is illusory. In a substantially general aspect, the effect of the second invention can also be obtained. In the first invention, at all points of the portion of the ultraviolet reflecting surface in the ultraviolet reflecting member that is lower than one of the side portions, perpendicular to the ultraviolet reflection The tangential plane of the face and the direction toward the inside of the discharge tube do not need to be more downward than the direction from one side to the other side. Obviously, even if there is a point that does not satisfy such a condition, The condition of the second invention is satisfied in the larger part of the lower portion than the one of the side portions. The effect of the second invention is obtained. In Fig. 11, the 'ultraviolet reflecting member 206 is formed on the outer surface of the discharge tube 彳 - the present invention The second invention is not limited to such a case, and the ultraviolet ray reflecting member 206 may be formed on the inner surface of the discharge tube. 13 201123261 The third invention of the present invention is characterized in that the ultraviolet ray lamp according to the first invention is provided on the curved surface portion. The ultraviolet reflecting member, the ultraviolet reflecting member is formed to be wider along the curved portion and wider than the entire range from one side to the other side of the discharge tube, and the ultraviolet reflecting member is the first electrode for generating the main discharge, The main discharge is used to generate ultraviolet rays. For example, when aluminum or the like is fixed to the outer wall surface of the curved surface portion 205 to form the first electrode, the first electrode may be used as the ultraviolet reflection member 2〇6. When the electrode has a function as an ultraviolet reflecting member, the ultraviolet reflecting member 2〇6 is not required to be provided in addition to the first electrode. As a result, the manufacturing process and material cost can be reduced. Therefore, in the lamp of the comparative example using the square box type discharge vessel, in order to suppress the ultraviolet light from being discharged from the side of the discharge capacitor, the upper surface of the self-discharging capacitor is provided to have a side opposite to the side surfaces of the discharge tube. (d) the function of the first electrode of the member. In such a case, it is difficult to set the second electrode that forms a discharge with the first electrode to have a practical shape, and the distance from the first electrode is on any portion of the first electrode. As a result, the distance between the _ electrode and the second electrode differs depending on the portion of the first electrode. Therefore, the 'discharge hood between the first electrode and the second electrode is short at the electrode pitch. As a result, the discharge intensity is generated. In this regard, in the third invention of the present invention, a first electrode for generating a main discharge is provided on the curved surface portion, and the main discharge is used to generate ultraviolet rays. Therefore, it is placed on the curved surface of the user. The comparative example has a different read pattern, and is provided with a first electrode having a function as an ultraviolet reflecting member even in the side direction.

In the case of 20112326L, it is also easy to design a lamp in which the distance between the first electrode and the second electrode is substantially uniform (for example, refer to Fig. 2). In Fig. 2, the first electrode is formed on the outer surface of the discharge tube, but the third invention of the present invention is secreted in such a case that the first electrode is also formed on the inner surface of the discharge tube. According to a fourth aspect of the invention, in the ultraviolet lamp of the first aspect, the material of the discharge tube is quartz glass. 1 ',

In the lamp of the comparative example using the square box type discharge vessel, the amount of ultraviolet rays irradiated on the corner between the lower surface and the side surface of the inner surface of the discharge container was smaller than that of the surrounding portion. Quartz glass irradiation is known to cause changes in the molecular structure, and the amount of exposure is proportional to the degree of change. Therefore, when quartz glass is used in the material of the discharge tube, the degree of change in the molecular structure at the angle and its periphery will result in a non-glass result, which occurs in the discharge capacitance H, and (4) (4) is easily broken. According to a fourth aspect of the invention, the outer peripheral wall of the discharge tube is provided with a curved surface portion having a concave surface inside the discharge tube at a position facing the ultraviolet-transparent portion. By setting the discharge tube to such a shape, the amount of the outer line which is irradiated to the corners of both ends of the flat portion of the discharge tube_skin is not greatly different from that of the surrounding portion. As a result, the quartz glass is not easily deformed by the ultraviolet ray irradiation, so that the discharge tube is not easily broken. A fifth invention of the present invention is the ultraviolet lamp of the third aspect, wherein the first electrode is used for the ground connection, and the first electrode is disposed on the surface of the curved portion and the (four) of the discharge tube is disposed adjacent to the second portion of the high voltage electrode. 15 201123261 In the lamp of the prior art box type discharge vessel, both electrodes for inducing discharge were provided outside the discharge vessel for ease of manufacture and suppression of deterioration of the electrode due to the use of the lamp. When the lamp is turned on, a discharge is generated between one electrode (ground electrode) connected to the ground and an electrode (high voltage electrode) to which a high voltage is applied. At this time, if a high voltage electrode is used on the lower surface for transmitting ultraviolet rays, since the high voltage electrode is close to the product w, there is a problem that discharge occurs between the high voltage electrode and the product W depending on the type of the product w. Therefore, it is necessary to use a ground electrode for the lower surface for transmitting ultraviolet rays and a high voltage electrode for the upper surface. In the lamp of the comparative example using such a square box type discharge vessel, in order to suppress the discharge of the ultraviolet light from the side direction of the discharge capacitor, the upper surface of the discharge capacitor is provided with a function as an ultraviolet reflection member across the side surfaces of both sides. High voltage electrode. In this case, the portion of the high voltage electrode on the side of the discharge capacitor is close to the product W. As a result, depending on the kind of the product w, there is a problem that the discharge between the voltage electrode and the product w is liable to occur. In the fifth invention of the present invention, the first electrode is provided on the outer surface of the curved portion of the discharge tube. Therefore, the first electrode can be easily manufactured, and deterioration of the first electrode due to use of the lamp can be suppressed. Further, in the fifth invention, the first electrode is used for the ground connection. Therefore, although the first electrode is disposed on the outer surface of the curved portion of the discharge tube, no discharge is generated from the first electrode toward the product w. Further, in the fifth invention, the second electrode for connecting the high voltage is provided inside the discharge tube, so that the discharge from the second electrode to the product w is also obtained. In the case of using the conventional cylindrical discharge tube, it is assumed that the first electrode δ is placed on the outer surface of the curved surface portion of the discharge tube for pressure. In this case, since the discharge tube is cylindrical, the first electrode is not close to the vicinity of the product w. Therefore, with regard to the cylindrical discharge tube, even when the first electrode is provided on the outer surface of the curved surface portion of the discharge tube for connecting a high voltage, there is almost no problem in discharge between the first electrode and the product w. Therefore, the fifth invention of the present invention can solve the problems unique to the case where a flat portion for transmitting ultraviolet rays exists in the discharge tube. According to a sixth aspect of the invention, the ultraviolet lamp of the first aspect of the invention is characterized in that the first electrode is provided on the curved surface portion, and the first electrode is formed along the curved surface portion and from one side of the discharge tube to The entire range from the other side is wider, the inside of the discharge tube is provided with a linear second electrode extending in the longitudinal direction of the discharge tube, and the second electrode is disposed near the center portion of the flat portion and at the first electrode and the second A main discharge is generated between the electrodes. The meaning of the "near the center portion of the flat portion" in the sixth invention will be described with reference to the cross section of the discharge tube in Fig. 13 . The surface on the inner side of the discharge tube of the flat portion 201 for transmitting ultraviolet rays formed on the outer wall surface of the discharge tube is referred to as a bottom side. At this time, a straight line having the longest length of the portion of the straight line parallel to the bottom side and housed in the discharge tube is defined as a straight line WL. The two intersections of the straight line WL and the inner surface of the discharge tube are set to W1 and W2. Further, the center point of W1 and W2 is WC. At this time, two points of the point on the straight line WL and the distance from the WC are 1/4 of the distance between WC and W1, and W3 and W4 are set. At this time, "the vicinity of the center portion of the flat portion" is limited to a straight line passing through W3 and perpendicular to the straight line WL, and a straight line passing through W4 and perpendicular to the straight line 17 201123261 WL. Further, the curved portion 2〇5 + formed on the outer wall surface of the discharge tube and the point on the inner side of the discharge tube which is the farthest from the base are set as the apex T. A straight line passing through the vertex τ and orthogonal to the bottom side is used as a reference line. Set the intersection of the baseline and the bottom edge as the bottom point B. A straight line passing through the center point of the vertex τ and the bottom point B in a straight line parallel to the bottom side is defined as a straight line Hc. At this time, "the vicinity of the center portion of the flat portion" is limited between the straight line Hc and the bottom side. In other words, the "near the center portion of the flat portion" in the sixth invention is the inside of the square disclosed in the discharge tube of Fig. 13. In the invention, "the second electrode is provided in the vicinity of the center portion of the flat portion" means that the center point of the cross section perpendicular to the longitudinal direction of the discharge tube of the second electrode is provided in the vicinity of the "center portion of the flat portion". According to the sixth invention, a wire-shaped electrode is used as the second electrode. Therefore, it is not necessary to use the mesh electrode used on the ultraviolet ray transmitting surface of the discharge vessel of the conventional square box type ultraviolet lamp as the second electrode. As a result, the amount of ultraviolet rays blocked by the second electrode can be suppressed to be small. Further, according to the sixth invention, the first electrode is provided except for the curved surface portion 205 which is concave on the surface on the inner side of the discharge tube, and the second electrode is provided in the vicinity of the central portion of the flat portion 201. With such a combination of the two electrodes, the distance from the second electrode is substantially uniform over a wide range of the first electrode. As a result, a discharge is generated in a wide range in the discharge tube, so that the ultraviolet intensity is enhanced. According to a seventh aspect of the present invention, in the ultraviolet lamp of the sixth aspect, the first electrode has a substantially arc-shaped cross section, and is located at each of the off-horizontal positions of the first electrode and the section 18 201123261 = A linear second electrode extending in the direction of the discharge is provided. The "equal distance" in the seventh invention is not only the distance completion. Although the distance is slightly different as the actual μ flute L ^ discharge, the second: the substantially whole of the electrode is generated: according to the seventh invention, the substantially whole field of the electric tube (10) from the first electrode can be made wider. Production of new electricity. As a result, the effect that the ultraviolet ray intensity becomes stronger is obtained. According to an eighth aspect of the present invention, in the ultraviolet lamp of the first aspect of the invention, the first electrode is provided on the curved surface portion, and the second electrode is disposed in the longitudinal direction of the discharge tube in the longitudinal direction of the discharge tube. A main discharge is generated between the first electrode and the electrode, and a pole is provided on the flat portion, and an auxiliary discharge is generated between the second electrode and the auxiliary electrode (refer to Fig. 4). Here, the auxiliary electrode functions to cause discharge (domain electric power) between the first electrode and the first electrode, and to stabilize the main discharge. That is, first, a discharge (auxiliary discharge) is caused between the second electrode and the auxiliary electrode. By the charged particles or metastable atoms or ions or even photons generated by the discharge, the applied voltage necessary for generating and rotating the main discharge is lowered, and as a result, the voltage at the start of lighting can be lowered. And the discharge plasma at the time of lighting can be stabilized. Further, in order to increase the output of such a lamp, it is desirable to increase the amount of the enclosed gas. However, when designed in this way, the discharge becomes unstable (the pressure of the enclosed gas is approximately the same as the increase of the electrode spacing when the applied voltage is constant). However, in the eighth invention, the charged particles or metastable atoms or ions or even photons generated by the auxiliary discharge can be supplied to the main discharge space in the same manner and effectively, so that the discharge gas existing in the main discharge space The ionization coefficient (i〇nizati〇n coefficient) increases. As a result, since the main discharge space is in a state of being easily discharged, the stability of the discharge can be ensured without increasing the applied voltage. According to an eighth aspect of the invention, the auxiliary electrode is provided between the second electrode provided inside the discharge tube and the auxiliary electrode provided on the flat portion, and is provided on the second electrode provided inside the discharge tube and on the curved surface portion. The main discharge is performed between the first Φ poles. With such a configuration, the main discharge can be efficiently induced by the auxiliary discharge and a wide main discharge region can be secured in the discharge tube. According to a ninth aspect of the present invention, in the ultraviolet lamp of the first aspect of the present invention, the first electrode is provided on the curved surface portion, and the second electrode extending in the longitudinal direction of the discharge tube is provided inside the discharge tube. The second electrode is disposed in the vicinity of the central portion of the flat portion, and a main discharge is generated between the first electrode and the second electrode, and an electrode other than the second electrode is not disposed on the flat portion. The meaning of "the second electrode is provided in the vicinity of the center portion of the stem portion" in the ninth invention is the same as that in the sixth invention. The "electrode other than the second electrode is not provided on the flat portion" in the ninth invention does not mean that the second electrode must be provided on the flat portion. The second electrode may be disposed on the flat portion or may be apart from the flat portion and may be inside the discharge tube. According to the ninth invention, a linear electrode extending in the longitudinal direction of the discharge tube is used as the second electrode for main discharge. As a result, the amount of ultraviolet rays blocked by the second electrode can be suppressed to be small. Further, since the electrode other than the second electrode is not provided on the flat portion, a lamp having a small amount of ultraviolet rays blocked by the electrode can be obtained. Further, according to the ninth aspect of the invention, the second electrode is provided in the vicinity of the center portion of the flat portion 201 except that the first electrode is provided along the curved surface portion 205 which is formed as a concave surface on the inner side of the discharge tube. With a combination of the two electrodes as such, the distance from the second electrode is substantially uniform over a wide range of the first electrode. As a result, a discharge is generated in a wide range in the discharge tube, so that an effect of increasing the ultraviolet ray intensity can be obtained. According to an eleventh aspect of the present invention, in the ultraviolet lamp of the first aspect of the present invention, the first electrode is provided on the outer surface of the curved surface portion, and the outer surface of the curved surface portion is not disposed near the boundary between the flat portion and the curved portion There is a first electrode (for example, see Fig. 3). According to the eleventh aspect of the invention, since the first electrode is not provided in the vicinity of the boundary between the flat portion and the curved surface portion, the distance between the first electrode and the product w becomes longer. Therefore, even when the first electrode is used as an electrode for connecting a high voltage, it is possible to obtain an effect that it is difficult to generate a discharge between the first electrode and the product. According to a twelfth aspect of the invention, in the ultraviolet lamp of the eighth aspect of the invention, the auxiliary electrode is disposed in the entire length direction of the discharge tube. As the discharge tube used in the ultraviolet irradiation device, a discharge tube having a long length in the longitudinal direction is usually used. In the longer discharge tube, the auxiliary electrode is provided only at the end which is deviated from the longitudinal direction of the ultraviolet ray irradiation portion. In such a situation, by the auxiliary discharge generated at the end of the discharge tube when the lamp is lit,

S 21 201123261 = production = electric particles, etc. Due to the charged particles or the like, the auxiliary electrode is discharged, and the main discharge is generated at a position far from the lion electrode, whereby the entire discharge tube generates a discharge. However, in such a situation, it is far from the electrode that is divorced, and there is no effect of stabilizing the discharge when lighting. This is the case or spark discharge. As a result, there arises a problem that the uniformity (dlummance) is lowered or the instability of the treatment is caused. In this regard, the twelfth fortune of the present invention, the auxiliary electrode is disposed over the entire length of the discharge tube

up. Therefore, the charged particles and the like which are generated by the auxiliary discharge are uniformly divided into the entire inside of the discharge tube. As a result, the effect of stabilizing the main discharge can be obtained. Further, the entire longitudinal direction in the twelfth invention means substantially the entire length of a portion where discharge occurs in the discharge tube. For example, the first and second electrodes are not provided on the end of the discharge tube, so that when no discharge is generated, the time division, even if the auxiliary electrode is not provided on the portion, is equivalent to the second invention; . In this case, it is a matter of course to take into consideration the purpose of setting the auxiliary electrode. Μ [Embodiment]

<First Embodiment> Hereinafter, the present invention will be described in detail with reference to Figs. 1 and 2 . 8. Fig. 1 is a side sectional view showing the excimer lamp holder of the embodiment, and Fig. 2 is a cross-sectional view showing a surface perpendicular to the longitudinal direction of the discharge tube. The excimer lamp is provided with a discharge tube 2. The discharge tube 2 is a double structure 22 201123261, that is, the outer tube portion 3 is formed of quartz glass and is inserted into the outer tube portion 4 a inner tube portion 4, and the outer tube portion 3 is similarly formed. The curved surface portion 5 having a shape in which a portion of the circular arc is polished so that the outer circumference wall is arched in the long cylinder; and the curved portion is connected. In other words, the flat portion 6 having a flat plate shape is provided. The curved portion is curved in the 5A of both ends of the flat arc. On the other hand, the corner portion to which the inner tube portion J C is joined is cylindrical, and is disposed inside the flat portion 6 to be smaller than the circle of the outer tube portion 3. Outer tube part 3 and inner tube part two == direction =

The discharge space 7 surrounded by the sections 3 and 4 is filled with a gas for two S, and for example, a rail gas or an argon gas can be used. Used as a gas for discharge. ^ H and other such lamps are usually provided with a - counter electrode ". Among the counter-electrodes, the first electrode 8 is provided with a curved surface portion fixed to the outer tube portion 3, and the second material is reflected from the vitreous material, and it is preferable to use a mass. As such a material, for example, the center of the electrode 8 can be used to be wider along the entire surface of the curved portion 5 and from the outer tube portion L: the side portion to the other side portion. In the cross section of the ultraviolet lamp in the longitudinal direction of the discharge tube 2, the side of the ultraviolet reflecting surface of the first electrode 8 is more than one side == perpendicular to the tangent plane of the ultraviolet reflecting surface and oriented toward the direction of the input = 4 The direction from one of the side portions toward the other side portion is further toward 23 201123261 and the end edge portion 8A of the first electrode 8 and the side end curved surface 1 of the flat portion 6 are flat from the flat surface of the flat portion 6 The f-curve having a curvature: the boundary position of the shift: is provided with the vacancy in which the first electrode 8 is absent, and the 'first electrode 8' of the S is provided on the face 5. The face 5 is disposed more than the flat=joining position. The value of the back is set. On the other hand, the second electrode 9 of the pair of the first electric wires 4* includes a recording line which is inserted into the inside of the inner tube portion 4 and has a full length thereof. Here, the second electrode 9 is disposed at a position equidistant from each point on the first electrode 8. This is the end of the electrodes 1 and 9 to which the wires 1 and 11 are connected, and the other ends of the lG and U are connected to the AC power supply unit 12. The effect r★' indicates that the action of the present embodiment and the first shot 1 configured as described above are provided in the ultraviolet ray device (not shown) with the flat portion 6 side as the exit surface. In other words, the excimer lamp i is, for example, in the irradiation chamber, and the tilting belt portion of the product of the riding county is placed downward (the product is installed. The square is irradiated with ultraviolet rays to the product W. The excimer lamp line m is on the product w. At this time, the ultraviolet ray pattern generated in the discharge tube, which is indicated by a broken line arrow, is purple which is advanced in the direction of the flat portion 6, and is directly emitted toward the product w through the flat portion 6. The other side "the ultraviolet light that has proceeded in the direction of the curved surface portion 5 is reflected by the first electrode 8, and is self-flattening. (5 6 side is emitted toward the product w. 24 201123261 After the irradiation is completed, the product w is transported from the irradiation chamber by the transfer belt and As described above, according to the present embodiment, the flat portion 6 and the curved surface portion 5 are provided on the outer tube portion $ of the discharge tube 2, and the first electrode 8 is provided on the curved surface portion 5. When the excimer lamp having such a configuration is irradiated, since the exit surface side is a flat surface, the entire exit surface is equidistant from the product W. Therefore, the loss of ultraviolet rays absorbed by oxygen can be suppressed even in the atmosphere. To the minimum, the entire surface of the product w can be uniformly irradiated. Further, when the first electrode 8 is formed of a material having a high reflectance of ultraviolet rays such as aluminum, the first electrode 8 serves as a direction. The ultraviolet ray emitted from the side of the curved surface portion 5 is reflected by the reflecting plate that is concentrated on the side of the flat portion 6 (the emitting surface side). Thus, it is possible to condense the ultraviolet ray on the emitting surface side without separately providing a reflecting plate. Further, the irradiation efficiency is improved by the simple structure. Further, the first electrode 8 is provided at an interval from the side edge 6A of the flat portion 6. Here, when the edge portion 8A of the first electrode 8 reaches the irradiation φ plane (flat In the portion 6), for example, when the product W is electrically conductive and there is a potential difference between the product W and the first electrode 8, the discharge may be caused between the product w and the edge portion 8A of the first electrode 8. However, this is caused. In the embodiment, it is assumed that the end edge portion 8A of the first electrode 8 is located at a position further away from the irradiation surface. Therefore, it is possible to prevent the discharge from occurring between the product and the product W. Further, the discharge tube 2 is provided with the outer tube portion 3 and The double pipe structure of the inner tube portion 4 and the second electrode 9 are formed inside the inner tube portion 4. According to the configuration, the electrode is not present on the flat portion 6 (exit surface), so that even if the electricity 25 201123261 is extremely oxidized, Deterioration does not contaminate the product w by the particles generated by such deterioration. In the present embodiment, the second electrode 9 is a linear electrode formed of a metal wire. According to such a configuration, around the linear electrode The electric field strength becomes high. Electric field strength At a higher point, the velocity distribution of the electrons shifts toward the high energy side and the ionization probability of the discharge gas (i〇nizati〇n pr〇babiHty) becomes higher, so the ionization coefficient becomes larger. That is, the use of such an unequal electric field is used. In the discharge method, the vicinity of the linear electrode is in a state of being particularly easy to discharge. Therefore, even if there is a slight unevenness in the distance between the electrodes in the longitudinal direction of the discharge tube 2, it is difficult to cause discharge unevenness. The uniformity of the discharge is compared with the previous lamp which is affected by a certain degree of area and the influence of the unevenness of the distance between the electrodes (for example, the thickness of the dielectric * or the curvature or unevenness of the flat plate). Further, the shielding of the emitted light due to the second electrode 9 can be reduced as much as possible, so that the light extraction efficiency is good. Further, the first embodiment has the following structure, that is, the first invention, the second invention, the seventh invention, the fourth invention, the sixth invention, and the seventh invention of the present invention disclosed in "Send, Uncover" The ninth invention and the effect of the invention are disclosed in the first embodiment as disclosed in the first embodiment. <Second Embodiment> π@ Hereinafter, a second embodiment of the present invention will be described with reference to Fig. 3 . The knives of this implementation are 2 〇 and the first! The main difference of the embodiment is that, in 26 201123261, the electric tube 21 is a single-tube structure, and a cross-sectional view of the second electrode (four) placed on the flat 3 on the service god. The discharge tube 21 is polished by a quartz _ 呷 呷 而 而 而 而 而 而 “ “ “ “ “ “ 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长 细长2 = χ and the curved surface portion 22 of the two discharge tubes 21 that connect the both end edges of the arc of the curved surface portion 22, and the first electrode 24 is provided in the same manner as in the first embodiment. The second electrode 25 is provided with (four) the second electrode 25 in the longitudinal direction of the discharge (four) 21, and the second electrode is disposed in the center of the width direction (lateral direction) of the flat portion 23. The electrodes 24, ^ When the other end of the wire is connected to the AC power supply 2g, as in the first embodiment, the second side is placed on the ultraviolet ray side. At this time, due to the exit surface side, the entire exit surface and the product | _ 社 一 ' atmosphere can also absorb ultraviolet light by oxygen: loss from the two most knot: limit =

仃 irradiation, and further, the entire product can be uniformly performed. In this embodiment, the second electrode 25 is disposed on the outer surface of the flat portion t tube. At this time, the second electrode 25 can be formed to shape the electrode 25 Roughness is the minimum necessary and can be minimized. 27 201123261 The occlusion of the outgoing light. Further, by arranging the second electrode 25 at the center position in the width direction (lateral direction) of the flat portion 23, unevenness in the irradiation intensity in the width direction of the irradiation surface can be avoided. Furthermore, the second embodiment corresponds to the first invention, the second invention, the third invention, the fourth invention, the seventh invention, and the tenth invention of the present invention disclosed in the "Disclosure of the Invention". The eleventh invention. Therefore, the effects disclosed in the "disclosure of the invention" as an effect obtained by the inventions are also obtained in the second embodiment.

<Third Embodiment> Hereinafter, a third embodiment of the present invention will be described with reference to Figs. 4 to 6 . The excimer lamp 3A of the present embodiment is mainly different from the second embodiment in that an auxiliary electrode 39 is provided on the outer wall of the flat portion 35. Fig. 4 is a cross-sectional view showing the excimer lamp 30 of the present embodiment. The sub-lamp 30 includes a discharge tube 31 <) The discharge tube 31 is a double tube structure including the outer tube portion 32 formed of quartz glass and the inner tube portion 33 as in the i-th embodiment. It is also formed by quartz glass to form the inside of the outer tube portion 32.驭

In the same manner as the first embodiment, the yr rhyme 32 has a shape in which the outer circumference of the arc is partially polished, and the flat plate 4, that is, the curved surface portion 34 having the arch shape, and the % of the curved surface portion are connected. ^ The flat flat portion 35 at both end edges, and the curved surface portion 34 and the corner portion 34A of the flat portion 3^ are curved. On the other hand, the inner tube portion 33 is also cylindrical in shape smaller than the outer tube portion 32 in the same manner as the embodiment, and is provided with the width direction of the inner wall surface of the flat portion 35 (the side direction of the discharge tube 31: 28 201123261 tube portion) 32 and the inner tube portion 33 are joined to each other at both ends, and the discharge space 36 surrounded by L 33 is filled with a discharge electrode 37': in the same manner as in the first embodiment, a pair of electric LJ is provided. The electrode 37 includes an aluminum film fixed to the curved surface portion of the outer tube portion 32. On the other hand, the second electrode 38 is formed of a nickel wire and the i-th embodiment, and the code of the in-part f portion 33 is The other end of the line 137=38 on the ground 37, 38 is connected to the AC power supply unit. On the outer side of the outer tube portion of the 35, the auxiliary electrode 39 is slanted across the entire surface. In the fourth embodiment, the auxiliary electrode 39 is formed in a mesh shape so that the light emitted from the inner side of the discharge tube 31 is not trapped as much as possible. The auxiliary ^=39 is disposed in the entire length direction of the discharge tube 31. The reason is that, thereby, the entire length of the discharge tube 31 can be The discharge " f 3〇 when using an excimer lamp so, similarly to the first embodiment Shang form the flat portion 35 side toward the side of the green product is placed w ultraviolet irradiation device shown), and irradiated. When a high-frequency voltage is applied between the first electrode 37 and the second electrode 38 of the auxiliary electrode 39 by the high-frequency power source, 'first, near the second electrode %', a discharge is caused between the second electrode and the auxiliary electrode 39. Then, the 放电 discharge is spread along the plate-facing side of the flat portion 35 (auxiliary discharge; see Fig. 5 201123261 Fig. 5). Thereafter, a main discharge is also caused between the first electrode 37 and the second electrode 38, and the discharge is developed in the entire discharge space 36 (see Fig. 6). Further, when the actual excimer lamp 30 is used, since a high-frequency AC voltage is usually applied, it is difficult to visually confirm that the auxiliary discharge and the main discharge are caused stepwise. However, by observing the discharge current of the auxiliary discharge and the main discharge by using an oscilloscope, the staged generation of the auxiliary discharge and the main discharge as described above can be confirmed. At the crucible, the auxiliary electrode 39 is disposed relative to the second electrode 38

The first electrode 37 is at a closer distance, so that an auxiliary discharge is first caused between the second electrode 38 and the auxiliary electrode %. The voltage used to generate the main discharge between the first = electrode 37 and the second electrode 38 is lowered by the charged particles or metastable atoms or ions or even photons generated by the discharge. The result is that the voltage at which the excimer lamp 30 starts to light is lowered, and the discharge can be stabilized. The pressure on the lamp is expected to obtain a high output to increase the stability of the enclosed gas. When designing, the discharge is usually not made.

Electric 'pole|^== gas pressure and increase in the case of applying voltage mosquitoes - 檨H has a roughly _ effect). However, in the present embodiment, the charged particles or metastable generated by the atomic auxiliary discharge in the state cause the main discharge L and even the photons to be supplied into the main discharge space, so that the ionization coefficient of the discharge gas existing in the crucible may be used. increase. When the voltage is applied between the applied voltages, the discharge is green, so that it is not necessary to increase the voltage to ensure the stability of the discharge. 30 201123261 2 The ultraviolet rays that are emitted by the discharge (indicated by the dotted arrows in the figure) are irradiated toward the product W directly through the mesh of the flat portion % auxiliary electrode 39. On the other hand, the ultraviolet rays which are advanced in the direction of the curved surface 34 are reflected by the first electrode 37, and the side of the crotch portion 35 is emitted toward the product w. As described above, according to the present embodiment, it is possible to reduce the discharge stability at the time of starting the lighting of the lamp. Further, it is more preferable that the second electrode 38 is located between the first electrode 37 and the auxiliary electrode 39 and is close to the auxiliary electrode 39. Preferably, the inner tube portion of the second electrode 38 is housed as in the present embodiment. 33 is substantially adhered to the inner wall surface of the flat portion 35. However, the second electrode 38 does not have to be disposed as described above. When the first electrode 38 is disposed at a position where a voltage is applied, an auxiliary discharge is caused between the second electrode 38 and the auxiliary electrode 39, and then a main discharge is caused between the first electrode 37 and the second electrode 38. Then it can achieve the purpose of the invention. In other words, the method of causing the discharge between the second electrode 38 and the auxiliary electrode 39 to be caused between the first electrode 37 and the second electrode 38 is more effective, and the second electrode 38 can be disposed as follows. In the position, that is, the shortest distance between the first electrode 37 and the second electrode 38 is La, and when the shortest distance between the electrode 39 and the second electrode 38 is Lb, the relationship of La > Lb is satisfied. In the present embodiment, as in the first embodiment, the flat portion 35 is a surface for light transmission and a surface on the exit surface is flat. Therefore, 31 201123261 The distance between the entire exit surface and the product w is equal, so that even in the atmosphere, the ultraviolet light can be minimized by the loss of oxygen. Further, the entire surface of the product W can be uniformly irradiated. Further, since the first electrode 37 is formed of a material that can reflect ultraviolet rays, the first electrode 37 reflects and diffuses the ultraviolet rays emitted toward the curved surface portion 34 side. The role of the reflector on the flat portion % side (the exit surface side). Then, the auxiliary electrode 39 provided on the flat portion 35 is formed in a mesh shape so as not to block the emitted light. According to the configuration of the first embodiment, the ultraviolet ray is concentrated on the emission surface side without separately providing a reflector, so that the irradiation efficiency can be improved with a simple configuration. Further, the third embodiment has the following structure, that is, The invention of the invention, the second invention, the third invention, the fourth invention, the fifth invention, the sixth invention, the seventh invention, the eighth invention, the tenth invention, and the invention disclosed in the "Disclosure of the Invention" Twelfth invention. Therefore, the effects disclosed in the "disclosure of the invention" as an effect obtained by the inventions are obtained in the third embodiment. EXAMPLES Example of Confirming Irradiation Efficiency of Ultraviolet Light 1. Production of Lamp C Example 1> An excimer lamp having the same structure as that of the first embodiment was produced. Aluminum is vapor-deposited on the tubular tube having the same shape as that of the outer tube portion 3 of the first embodiment so as to substantially cover the outer side of the curved portion. In addition, the cylindrical tube is made of σ-formed quartz (SUp_F31〇 manufactured by Shin-Etsu Co., Ltd.), ^ 201123261 half = Γ 6 sub-job, the curvature of the outer peripheral surface of the curved surface (4) and the flat portion of the flat (four) _ the outer peripheral surface of the arc The curvature nucleus is 5 mm. The electric current is about 4 faces and the wall thickness is about. .8mm synthetic stone; the internal insertion has a diameter of about! Mm nickel wire. In the electron tube ^^ = put = until, the outline is as follows: C # t Μ 二 U * pressure electrode, and the entire Sir of the high frequency voltage tube of 3 G kHz is applied to discharge it. The discharge-ground was generated in the electron <Comparative Example 1> On the other hand, for comparison, a conventional lamp having a double tube structure was produced. A web electrode (opening ratio) was formed by the side of the outer peripheral surface of the outer tube having an outer diameter of 32 mm. The inner σρ of the electronic organ is provided with the same synthetic quartz tube as that of the above embodiment, and the recording line is inserted into the inside thereof. The gas is sealed in the electron tube as a discharge gas until the "g" is turned into a ground electrode, and the recording line is called a surface pressure electrode', and a high-frequency voltage of 30 kHz (peak voltage of 8 kV) is applied thereto. 2. Discharge. 2. Lighting test in the atmosphere without using an illuminating device. The lamp of the embodiment and the comparative example was scanned in the horizontal direction at a speed of 3 m/min using a uv sensor at a position 3 mm directly below the lamp. As a result of the comparison of the cumulative amount of light, the lamp of the example was approximately three times as large as the lamp of the comparative example, and it was confirmed that the ultraviolet ray can be efficiently irradiated onto the object to be irradiated. 33 201123261 [Example of confirming the effect of the auxiliary electrode] <Example 2> An excimer lamp having the same structure as that of the third embodiment was produced. A nickel film (outer electrode) having a length of 1000 mm and a thickness of 0.2 mm was fixed to the outer tube portion 32 of the third embodiment. The tubular tube of the same shape covers the outer surface of the curved surface portion. The tubular tube is made of synthetic quartz (SUPRASIL_F31〇 manufactured by Shin-Etsu Co., Ltd.) with a wall thickness of 2 mm and a length of the tube. 1100 mm, the radius of curvature of the outer peripheral surface of the curved surface portion is 16 mm, and the radius of curvature of the outer peripheral surface of the arc portion of the curved portion where the curved surface portion and the flat portion are joined is 5 mm. The inner portion of the electron tube is arranged with an outer diameter of about 5 Mm, synthetic quartz tube with an inner diameter of about 2 mm, and a nickel wire with a diameter of about 18 mm inserted inside the quartz tube (the inner electrode and the width of the tubular tube are fixed at 22 coffee, length a sus mesh plate (auxiliary electrode) of G.2 mm thick.,: It is made to cover the flat surface of the flat (four) outer surface. From the central axis to the fixed surface of the tang, __ is ^^ in the electron tube Sealed into a chaotic gas as a discharge gas until the stone, the recording film and the mesh plate are used as the grounding electrode, and the roughly rectangular high-light electrode is applied to the old one. If the electric bunker is gradually increased, the peak is discharged. Auxiliary discharge is generated on the inner wall surface of the stalk, and the flat side electrode (recording line)-outer side electrode when the hair is at 2kV (the film is j5.5kV), the main discharge does not hinder the auxiliary discharge 曰 main discharge. Minimum applied electricity (four) 5.5 kv. In the case of comparison, 34 201123261 was produced by testing the same lamp as in Example 2 except that no mesh plate (auxiliary electrode) was used, and if no voltage of about 1 〇 kV was applied, In the lamp provided with the auxiliary electrode, the main discharge can be generated with a voltage applied to about one-half of the lamp in which the auxiliary electrode is not provided. Further, in the lamp of the second embodiment, When the peak voltage after the start of lighting is fixed to 5.5 kV and the discharge stability is investigated, spark-like discharge or uneven discharge is not generated, and stable discharge can be achieved after starting lighting. On the other hand, when the same experiment was carried out in a lamp in which the auxiliary electrode was not provided, a spark was generated and uneven discharge occurred. <Other Embodiments> The technical scope of the present invention is not limited to the above-described embodiments, and for example, the following disclosure is also included in the technical scope of the present invention. (1) In the above embodiments, the first electrode 8 and the edge of the flat portion 6 are provided with a gap therebetween. However, for example, the product is non-metal or the like, and there is no possibility of discharge between the product and the electric power. The entire surface of the curved portion can also be covered by one of the electrodes Φ. (2) In the second embodiment, the second electrode 25 is formed in a thin line shape. For example, the second electrode may be formed in a mesh shape across the entire flat portion, or may be formed in a stripe shape in which a plurality of thin metal foils are arranged side by side. /3) In the first embodiment, the discharge tube 2 is a double tube structure including the outer tube portion 3 and the inner tube portion 4, and the second electrode 9 is provided inside the inner tube portion 4, but the present invention is not limited thereto. In such a situation. For example, as in the excimer lamp 40 shown in FIG. 7, the discharge tube 41 35 201123261 is configured to have a single tube structure with the second embodiment, and == is housed in the inner tube portion, and In the third embodiment, the rod-shaped second electrode is coated with an insulating film and then placed in the discharge (4). In the third embodiment, the following structure may be used. That is, it is not stored in the inner tube portion, but is disposed directly in the discharge tube without shielding. In this case, it is preferable that the second electrode is substantially close to the flat surface of the flat portion in the tube, but the second The electrode can be disposed as follows in the case of the third embodiment, that is, when a voltage is applied between the electrodes, 'an auxiliary discharge is caused between the second electrode and the auxiliary electrode, and thereafter between the second electrode and the first electrode. (5) In the above-described embodiments, the connection portion between the flat portion and the curved surface portion is a surface having curvature and f-curve, but may be locally connected via a flat surface. In the third embodiment, the flat portion 35 is set to allow light However, in the case where the first electrode 37 is formed into a mesh shape or a thin line shape, for example, a shape in which light can be transmitted can be emitted from the curved surface side, the above embodiment can be used in the case of an excimer lamp. However, the present invention is not limited to finding an excimer lamp reading type, and the village is an ultraviolet lamp other than an excimer lamp such as a nuclear lamp. The present application is based on a patent application filed on July 29, 2005 (the special wish) 2005-221143) and the patent application filed on February 8th, 2006 (Special Wish 2006-031051), these contents are incorporated into this application in the form of ^ 36 201123261. [Simplified illustration Fig. 1 is a side cross-sectional view of the excimer lamp of the first embodiment. Fig. 2 is a cross-sectional view of the excimer lamp of the first embodiment. Fig. 3 is a cross-sectional view of the excimer lamp of the second embodiment. Fig. 5 is a cross-sectional view showing a state in which an auxiliary discharge is caused on the inner surface of the flat portion in the excimer lamp of the third embodiment. Fig. 6 is a cross-sectional view showing the third embodiment. In the excimer lamp, in addition to the auxiliary discharge at the first electrode Fig. 7 is a cross-sectional view of an excimer lamp according to another embodiment. Fig. 8 is a cross-sectional view of a light box in which a prior excimer lamp is housed. Fig. 9 is a view of the present invention. Fig. 10 is a cross-sectional view showing an example of a discharge tube of the ultraviolet lamp of the present invention. Fig. 11 is a view showing a side portion of a discharge tube of the ultraviolet lamp of the present invention. A cross-sectional view of the ultraviolet lamp in the comparative example of the cylindrical discharge tube. Fig. 13 is a view showing "the vicinity of the center portion of the flat portion" in the sixth invention of the present invention. Fig. 14 is a view showing "the vicinity of the center portion of the flat portion" in the tenth invention of the present invention. [Description of main component symbols] 1, 20, 30, 40: excimer lamp 37 201123261 2, 21, 3b 41: discharge tube 3, 32: outer tube portion 4, 33: inner tube portion 5, 22, 34, 205 : curved surface portions 5A, 34A: corner portions 6, 23, 35, 202, 204: flat portion 6A: side end edges 7, 36: discharge spaces 8, 24, 37: first electrode 8A: end edge portions 9, 25, 38, 42: second electrode 10, 11: lead 12: AC power supply device 39: auxiliary electrode 100: lamp 101: reflector 102: window portion 103 for emitting ultraviolet rays: light box 201 · flat portion for transmitting ultraviolet rays 203: arc-shaped portion 206: ultraviolet reflecting member 207: cylindrical discharge tube A, W3, W4: point B: bottom point 38 201123261 HC, WL: straight line La, Lb: distance S Bu S2: side portion T: vertex W : Product Wl, W2: intersection WC: center point

Claims (1)

201123261 VII. Patent application scope: 1. An ultraviolet lamp comprising a discharge tube formed in a cylindrical shape, characterized in that the outer peripheral wall of the discharge tube includes a curved surface portion at a position opposite to each other and is used for transmitting ultraviolet rays. The flat portion is formed by forming a surface of the inner surface of the discharge tube to be concave, wherein the curved surface portion is provided with a first electrode, and the outer surface of the discharge tube is provided with an extension a linear second electrode in the longitudinal direction of the discharge tube, wherein the second electrode is provided in the vicinity of the center portion of the flat portion, and a main discharge is generated between the first electrode and the second electrode, and the portion is not provided An electrode other than the two electrodes. 2. The wire lamp according to claim 1, wherein the curved surface portion is provided with an ultraviolet reflecting member, and the discharge cattle are formed along the curved surface portion and from the side of the above-mentioned ίί: The entire range from the other side is more perpendicular to the discharge camp 4i, and the line of the ultraviolet reflecting member is a point of the portion of the cross section of the ultraviolet lamp that is lower than the side portion, and the surface is in the The ultraviolet light lamp of the first aspect of the invention is directed to the above-mentioned other side from the tangential plane of the above-mentioned light-receiving technique and perpendicular to the ultraviolet ray. The curved surface portion is provided with an ultraviolet reflecting member, and the ultraviolet reflecting member is formed to be wider along the curved surface portion and from the one side portion to the other side portion of the discharge tube, and the ultraviolet reflection is The member is a first electrode for generating a main discharge, and the main discharge is used to generate ultraviolet rays. 4. The ultraviolet lamp according to the above-mentioned claim, wherein The material of the discharge tube is a quartz glass. The wire lamp according to claim 1, wherein the outer surface of the curved surface portion is provided with a ^ The ultraviolet lamp of the first aspect of the invention, wherein the ultraviolet lamp is an excimer lamp. 'Using the ultraviolet lamp as described in any of the items in the application. 41