TW201232601A - Dielectric barrier discharge lamp device - Google Patents
Dielectric barrier discharge lamp device Download PDFInfo
- Publication number
- TW201232601A TW201232601A TW100135276A TW100135276A TW201232601A TW 201232601 A TW201232601 A TW 201232601A TW 100135276 A TW100135276 A TW 100135276A TW 100135276 A TW100135276 A TW 100135276A TW 201232601 A TW201232601 A TW 201232601A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrode
- discharge
- vessel
- discharge vessel
- dielectric barrier
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Toxicology (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
Description
201232601 HUUJ /pif 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種介電質屏障（barrier)放電燈 (lamp )裝置。 【先前技術】 介電質屏障放電燈裝置包括多根介電質屏障放電燈， ”電質屏障放電燈裝置為用以對例如半導體晶圓 (wafer)、或液晶顯示裝置中所使用的玻璃（glass)基板 等進行光清洗。 作為先前的介電質屏障放電燈，例如雙重管構造的介 電質屏障放電燈（參照專利文獻丨）、與單管構 屏障放電燈(參照專利文獻2)已為人所知舞上 構造的介電質屏障放電㈣在_面設置有電極的玻璃管 設為!!管，且將在外周面設置有電極的玻璃料為外管， 上述早管構造的介電質屏障放電燈於角筒狀的玻璃管的大 致半周面設置有網狀（mesh)電極，且於相反側的半周面 設置有固體電極。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2〇〇3_257375號公報 [專利文獻2]日本專利特開2〇〇5_322632號公報 述專利文獻1以及專利文獻2所揭示的任 =障放電燈均t下的構造於在内部封入有放Ϊ 乱（gas)的玻心使—對電極成為一體，已將放電氣 201232601 40037pif 體填充至玻璃管内的狀態下，對玻璃管的端部進行焊接而 加以密封，然後，例如藉由蒸鍍或濺鍍（sputtering)來使 一對電極附著於上述玻璃管的表面，接著，將自連接器 (connector)導出的導線硬焊（brazing)至各電極，藉此 來製造上述燈。如此，不僅必須經由玻璃管的氣體（职§) 密封步驟，而且必須經由電極形成步驟以及導線安裝步 驟，因此，先前的介電質屏障放電燈必然非常昂貴。 又，每當將燈裝入至介電質屏障放電燈裝置時，不僅 ，個燈需要連接於電源裝置的配線構造，而且理所當然， 每個k亦需要固疋於裝置框架（frame)的安裝構造，因此， 燈裝置存在構造變得複雜的傾向。 【發明内容】 本發明是基於如上所述的情況而完成 的目的在於提供如下的介電質屏障放電燈裝置，該3質 ”燈裝置可將介電f屏障放電燈自身的構造予 化，並且亦可將燈裝置的構造予以簡化。 4 放電裝二’本發明是-種介電質屏障 C -P house) 開口且包含多孔狀的導電/ ^上歧罩的上述光照射 狀電極相對向的位置=裝電==述網 加至上述網狀電極與上述電極構件之間201232601 HUUJ /pif VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a dielectric barrier lamp device. [Prior Art] A dielectric barrier discharge lamp device includes a plurality of dielectric barrier discharge lamps, "the electric barrier discharge lamp device is used for, for example, a semiconductor wafer, or a glass used in a liquid crystal display device ( The light-cleaning of the substrate or the like. As a conventional dielectric barrier discharge lamp, for example, a dielectric barrier discharge lamp having a double tube structure (see Patent Document) and a single-tube barrier discharge lamp (see Patent Document 2) It is known that the dielectric barrier of the dance structure is discharged. (4) The glass tube provided with the electrode on the _ surface is set as a !! tube, and the glass frit having the electrode on the outer peripheral surface is an outer tube, and the above-mentioned early tube structure is introduced. The electric barrier discharge lamp is provided with a mesh electrode on a substantially semicircular surface of a rectangular tube-shaped glass tube, and a solid electrode is provided on a half-circumferential surface on the opposite side. [Prior Art] [Patent Document] [Patent Document 1] [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. 5-322632. Enclose The glass core of the gas is integrated, the counter electrode is integrated, and the discharge gas 201232601 40037pif body is filled into the glass tube, and the end portion of the glass tube is welded and sealed, and then, for example, by evaporation. Or sputtering to attach a pair of electrodes to the surface of the glass tube, and then brazing the wires led out from the connector to the respective electrodes, thereby manufacturing the above lamp. The step must be sealed via a glass tube gas, and must be via an electrode forming step and a wire mounting step, so the previous dielectric barrier discharge lamp must be very expensive. Also, whenever the lamp is loaded into the dielectric In the barrier discharge lamp device, not only the lamps need to be connected to the wiring structure of the power supply device, but of course, each k also needs to be fixed to the mounting structure of the device frame, and therefore, the lamp device tends to have a complicated structure. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances to provide a dielectric barrier discharge lamp device which is The lamp unit presupposes the construction of the dielectric f-barrier discharge lamp itself, and can also simplify the construction of the lamp unit. 4 discharge device 2' is a dielectric barrier C-P house) opening and including a porous conductive / ^ upper cover of the above-mentioned light-illuminating electrode relative position = power = = network added to Between the mesh electrode and the electrode member
5 S 201232601 ^υυο /pif 成為支持著上述放電容器。 於本發明中，利用網狀電極、電極構件、以及放電容 器保持構件來夾持將放電氣體封入至透光性的容器而成的 放電容器’藉此可獲得介電質屏障放電燈，因此，無需如 製造先前的燈時，藉由蒸鍍等的方法而於放電容器上形成 電極的步驟。 於本發明中’放電容器設為支持於網狀電極的構成， 因此’無需在照射有光的路徑上，設置網狀電極以外的用 以支持放電谷器的零件。因此，根據本發 電極以外的用以支持放電容器的零件的情形相=置= ，的透射率提高。而且，於設置有峨電極以外的用以支 時放零件的情形下，當放電的光中包含紫外線 變差題，即’上述零件會_卜線而 =i·根據本發明，由於可將如上所述的零件予以省略， 因此’可使燈的财久性提高。 而且’當將燈農入至本發明的介電質屏障 網狀電極、電極構件、以及放電容器保持構= =分別，於電源裝置即可。亦即，於本發^及^ 貝ί障放電燈裝置時’每個燈中亦無需連接 、電源裝置的配線構造或固定於燈罩的 i 亦可將燈裝置的構造予以簡化。 每 ^ 本發明亦可為以下的構成。 亦可包括多根上述放電容器，且上述網狀電極設置為 201232601 4UU3/pif 器接觸。若設為此種構成，則即便於包 放電容器的介電質屏障放觸置的情形時， 利用电極構件及放電容器保持構件、與多根放電容 多根放電容器，便可將上述多;放電 :，至上述”電質屏障放電燈裝置，因此，可將構造 γ化。此處’例如以與纽放電容器接觸的方式來設 網狀餘，藉此，可將·電極設為共用電極。 斑多：:=i?上述放電容器，且上述電極構件設置為 括ΐ =3,若設為此種構成，則即便於包 =夕根放電谷盗的介電質屏障放電燈裝置的情形時， =網狀電極 '多根放電容騎制的電極構件、以及放 t盗保持構件來夾持多根放電容器，便 3器;入至上述介電質屏障放電燈裝置，因此，；= :置i個電極構件，藉此，可將電極構件設為共用電= 口。在上述燈罩中，支持構件亦可設置於離開上述放電容 =位置’上述支持構件是與上述網狀電極的處於上述放 电容器相反側的面接觸而支持著上述網狀電極。 若放電容器與電極（網狀電極以及電極構件）的 觸區域增多’則當將電壓施加至電極時，電極與放電容器 ，間容易產生微小的放電（微濺鍍（micro sputtering))°， 可命有可旎會縮短，例如放電容器或電極因上述放電而 差’導致光透射率下降。然而，若設為如上所述的構成， 7 g·^· 201232601 -twrj / p： 置於離開放電容器的位置的支持構件支 ==:電舆:二%:_狀態良好= 透射率下降。料谷益或電極的劣化，並且可抑制光 於上述構成中，若沿著上述放 支，件’則可沿著長度方二整= 構件與二電二：::電極及電極兼容器保持 電極毅電容器保持構件亦可為-體的 若設為此種構成，則可使零件數 質屏障放電燈自身的構造予以簡化。 σ :"電 於上述構成中，若包括多根上毅電η，且上述電 極兼容器鋪構件設置為與多根上較電容器接觸，= 用網狀電極與電極兼容器保持構件來夹持規定數量的放電 容器之後’只要將網狀電極以及電極兼保持構件分別連接 於電源裝Ϊ ’便可將燈裝人至介電質屏障放電燈裝置。 亦即’於上述構成中，當將燈裝入至介電質屏障放電 燈裝置時’每個燈中亦無需連接於電源裝置的配線構造或 固定於燈罩的安裝構造，因此，亦可將燈襄置的構造予以 簡化。此處，例如以與多根放電容器接觸的方式來設置1 個電極兼容器保持構件’藉此，可將電極兼容器保持構件 設為共用的構件。 201232601 4，/pif 於上迷構成中，上述電極兼容器保持構件亦可包含如 該材料能夠反射上述放電容器内的 =ί=’並且在與上述放電容器接觸：二5 S 201232601 ^υυο /pif becomes the above-mentioned discharge capacitor. In the present invention, the dielectric electrode, the electrode member, and the discharge vessel holding member are used to sandwich a discharge vessel in which a discharge gas is sealed to a light-transmissive container, whereby a dielectric barrier discharge lamp can be obtained. There is no need to form an electrode on the discharge vessel by a method such as vapor deposition, as in the case of manufacturing a conventional lamp. In the present invention, the discharge vessel is configured to be supported by the mesh electrode. Therefore, it is not necessary to provide a member for supporting the discharge valley other than the mesh electrode on the path on which the light is irradiated. Therefore, according to the case of the component for supporting the discharge vessel other than the present electrode, the transmittance of the phase = set = is improved. Moreover, in the case where a part other than the ytterbium electrode is provided for supporting the time, the ultraviolet variability problem is included in the discharged light, that is, the above-mentioned parts may be lined up and i=according to the present invention, The parts described are omitted, so that the fuel economy of the lamp can be improved. Further, when the lamp is implanted into the dielectric barrier mesh electrode of the present invention, the electrode member, and the discharge vessel holding structure == respectively, it is sufficient for the power supply device. In other words, in the case of the present invention, the wiring structure of the power supply unit or the i fixed to the lamp cover can be simplified in each lamp. Each of the inventions may also have the following constitution. A plurality of the above discharge vessels may also be included, and the mesh electrode is set to be 201232601 4UU3/pif contact. According to this configuration, even when the dielectric barrier of the capacitor is placed in contact with each other, the electrode member, the discharge vessel holding member, and the plurality of discharge capacitors can be used in a plurality of discharge capacitors. Discharge: to the above-mentioned "electrical barrier discharge lamp device, therefore, the structure can be gamified. Here, for example, a mesh shape is provided in contact with the discharge capacitor, whereby the electrode can be shared. Electrode. Spot::=i? The above-mentioned discharge vessel, and the above-mentioned electrode member is set to ΐ=3, and if it is such a configuration, even if it is a dielectric barrier discharge lamp device of the package In the case, the = mesh electrode 'multiple discharge capacitors for the electrode member, and the tear holding member to hold the plurality of discharge capacitors, the device; into the dielectric barrier discharge lamp device, therefore; = : i is set as the electrode member, whereby the electrode member can be set as a common electric port. In the above lamp cover, the supporting member can also be disposed away from the discharge capacitor = position 'the support member is the mesh electrode On the opposite side of the above discharge vessel The above-mentioned mesh electrode is supported by the touch. If the contact area of the discharge vessel and the electrode (the mesh electrode and the electrode member is increased), when a voltage is applied to the electrode, a slight discharge is easily generated between the electrode and the discharge vessel (slightly splashed) Micro sputtering), which can be shortened, for example, the discharge capacitor or the electrode is poor due to the above discharge, resulting in a decrease in light transmittance. However, if it is set as described above, 7 g·^· 201232601 -twrj / p: Support member placed at a position away from the open capacitor ==: Electron: 2%: _ good condition = decreased transmittance. Deterioration of the material or electrode, and suppression of light in the above configuration, If along the above-mentioned release, the piece 'can be along the length of the square = the member and the second electric two::: electrode and electrode compatible device to maintain the electrode, the capacitor holding member can also be - body if this configuration, Therefore, the structure of the component digital barrier discharge lamp itself can be simplified. σ :"Electrical in the above configuration, if a plurality of upper electric η are included, and the above electrode compatible device is disposed in contact with a plurality of capacitors, use After the electrode and the electrode-compatible holder hold the member to hold a predetermined number of discharge vessels, the light can be attached to the dielectric barrier discharge lamp device by simply connecting the mesh electrode and the electrode-holding member to the power supply device. That is, in the above configuration, when the lamp is incorporated in the dielectric barrier discharge lamp device, the wiring structure connected to the power supply device or the mounting structure fixed to the lamp cover is not required in each lamp, and therefore, the lamp can also be used. The configuration of the dam is simplified. Here, for example, one electrode compliant holder holding member is provided in contact with a plurality of discharge vessels, whereby the electrode compliant holder holding member can be made a common member. 201232601 4,/ In the above configuration, the electrode compatibility maintaining member may further comprise, as the material, the reflection of the inside of the discharge vessel = ί = ' and in contact with the discharge vessel:
該反射面將來自上述放電容器内的光反 射至上述肩狀電極側D 為反所述的構成’則電極兼放容器保持構件作 能二可使經由網狀電極而照射出 將構造= = 反射板，可進—步 置 ==間設為低氧狀態或惰性氣體 一 生的光中，例如波長為172 nm的紫外線 紫外線不易梅中通過，因此，、光透 性氣=二如上所述的構成’則設為低氧狀態或惰 =體^的氣體被導人至燈罩的光照射開口部分的空 ===料較麵赵料以―述空間， 述電=二==呈圓筒狀’且於上 ，器的外周面構二接：== 二:=r器為圓筒狀的情形時，放電== 周面&者與電極兼容器保持構件接觸的接觸部所設置的 201232601 wuj /pix 凹相方式’酉&置於該凹勒，因此，放電容器不易偏移。 [發明的效果] 根據本發明，可提供如下的介電質屏障放電燈裝置， 該介電質屏障放電燈裝置可將介電質屏障放電燈自身的構 造予以簡化，並且亦可將燈裝置的構造予以簡化。 【實施方式】 <實施形態1> 根據圖1〜圖6來對本發明的實施形態丨進行說明。 圖1是自照射面側（下表面側）表示實施形態丨的介 電質屏障放電燈裝置1〇(以下亦稱為「燈裝置10」）的圖， 圖3是自與照射面側相反的上側表示燈裝置1〇的圖。圖2 是表示已自燈裝置10將下表面側的蓋13 (下蓋13)予以 拆除的狀態的底視圖’圖4是已將下蓋13予以拆除的狀態 的燈裴置10的側面圖。圖5是圖1的燈裝置10的X-X線 處的剖面圖’圖6是圖1的燈裝置1〇的Y-Y線處的剖面 圖，並且是圖5的Z-Z線的位置的剖面圖。 如圖1〜圖3所示，實施形態1的燈裝置10包括：具 有光照射開口 12的燈罩11、網狀電極30、放電容器32、 電極兼容器保持構件40、以及將放電用的電壓施加至網狀 電極30與電極兼容器保持構件40之間的電源裝置（未圖 示）。 於本實施形態中，燈罩11大致呈長方體狀’如圖1 所示’該燈罩11包括：光的照射面側（下側面）形成開口 的燈罩本體15、與配置於燈罩本體15的光照射開口 12的 201232601. hao /pif 下蓋13。 “下蓋13包含紹（aluminum)合金等的金屬材料 下盍13具有方形狀的下蓋開口部14，且呈框狀 二 螺？ 21螺合於下盍13的周緣’藉此將該下蓋u固 重豐於該下蓋13的上側的燈罩本體15，於方形狀叢 開口部14處’料情後述’但配置有包含多孔狀的導 的網狀電極30與支持著網狀電極3Q的支持構件3 ^ 電容器32照射出的光是經由網狀電極3〇而自上 口部14射出。 盍開 燈罩本體15包括：將放電容器32的周緣予以包圍的 框狀的部分16(框體部16)、與螺固於框體部16 的上蓋部20 (參照圖2、圖3)。 上蓋部20包含陶瓷（ceramic)或聚四氣乙烯（p〇iy TetraFlu⑽Ethylene ’ PTFE)等的絕緣性材料，該上蓋部 20的周緣部分藉由第2螺釘22的螺合而固定於框體 的上侧面。電極兼容器保持構件40的上側電極41 (詳情 後述）的一部分配置於上蓋部20的大致中央部的呈圓形地 被挖穿的部分2〇Α’氣體自設置於燈罩11的外部的氣^供 給源（未圖示）供給至設置於上側電極41的氣體供給孔 42。自氣體供給源供給氮氣等的將燈罩本體15内的光照射 開口部分的空間15S没為非氧狀態（惰性氣體環境）的氣 體。 框艨部16包含銘合金等的導電性的材料，於該框體部 16的下側面形成有第1螺釘孔16A’該第1螺釘孔16A是The reflecting surface reflects the light from the discharge vessel to the side of the shoulder electrode D, which is opposite to the configuration. The electrode and the container holding member can be made to emit light via the mesh electrode. The structure == reflection The plate can be placed in the low-oxygen state or in the light of the inert gas. For example, the ultraviolet ray having a wavelength of 172 nm is not easily passed through the plum. Therefore, the light-permeable gas = two is as described above. 'The gas that is set to low oxygen state or inertia = body ^ is guided to the light of the lampshade opening part of the lampshade ===Materials are compared with the surface to describe the space, and the electricity = two == is cylindrical" And above, the outer peripheral surface of the device is connected: == 2: When the r device is cylindrical, the discharge == the surface of the surface & the contact portion of the electrode compatible holding member is set to 201232601 wuj The /pix concave phase method '酉& is placed in this pit, so the discharge capacitor is not easily offset. [Effects of the Invention] According to the present invention, there can be provided a dielectric barrier discharge lamp device which can simplify the configuration of the dielectric barrier discharge lamp itself, and can also illuminate the lamp device The construction is simplified. [Embodiment] <Embodiment 1> Embodiments of the present invention will be described with reference to Figs. 1 to 6 . 1 is a view showing a dielectric barrier discharge lamp device 1 (hereinafter also referred to as "light device 10") of the embodiment 自 from the irradiation surface side (lower surface side), and FIG. 3 is opposite to the irradiation surface side. The upper side shows a diagram of the lamp unit 1〇. Fig. 2 is a bottom view showing a state in which the cover 13 (lower cover 13) on the lower surface side has been removed from the lamp unit 10. Fig. 4 is a side view of the lamp holder 10 in a state in which the lower cover 13 has been removed. Fig. 5 is a cross-sectional view taken along the line X-X of the lamp unit 10 of Fig. 1. Fig. 6 is a cross-sectional view taken along line Y-Y of the lamp unit 1 of Fig. 1, and is a cross-sectional view taken along line Z-Z of Fig. 5. As shown in FIGS. 1 to 3, the lamp device 10 of the first embodiment includes a globe 11 having a light irradiation opening 12, a mesh electrode 30, a discharge vessel 32, an electrode compatibility holder 40, and a voltage for discharging. A power supply device (not shown) between the mesh electrode 30 and the electrode compatible holding member 40. In the present embodiment, the globe 11 has a substantially rectangular parallelepiped shape. As shown in FIG. 1 , the globe 11 includes a shade body 15 having an opening on the light irradiation surface side (lower side surface) and a light irradiation opening disposed in the shade body 15 . 12 of 201232601. hao /pif under cover 13. "The lower cover 13 includes a metal material, such as a aluminum alloy, and the lower cover opening portion 14 having a square shape, and has a frame-like snail 21 screwed to the periphery of the lower jaw 13" u, the globe body 15 having a solid weight on the upper side of the lower cover 13 is described later in the square-shaped bundle opening portion 14 but is provided with a mesh electrode 30 including a porous guide and a mesh electrode 3Q. The support member 3 ^ the light emitted from the capacitor 32 is emitted from the upper mouth portion 14 via the mesh electrode 3A. The split cover body 15 includes a frame-like portion 16 (frame portion) that surrounds the periphery of the discharge vessel 32. 16) and an upper cover portion 20 (see FIGS. 2 and 3) screwed to the frame portion 16. The upper cover portion 20 includes an insulating material such as ceramic or polytetraethylene (p〇iy TetraFlu (10) Ethylene 'PTFE). The peripheral portion of the upper cover portion 20 is fixed to the upper side surface of the casing by the screwing of the second screw 22. A part of the upper electrode 41 (described later in detail) of the electrode compatible holding member 40 is disposed substantially at the center of the upper cover portion 20. Part of the circle that is dug through A gas supply source (not shown) outside the globe 11 is supplied to the gas supply hole 42 provided in the upper electrode 41. The space 15S for supplying light such as nitrogen gas to the opening of the shade body 15 from the gas supply source is not A gas in a non-oxygen state (inert gas atmosphere). The frame portion 16 includes a conductive material such as a metal alloy, and a first screw hole 16A' is formed on a lower surface of the frame portion 16. The first screw hole 16A is
11 S 201232601 對下蓋13的周緣進行固㈣第i螺釘21所螺合的 孔’於上述框體部16的上側面形成有螺釘孔（未圖示）， 該螺釘孔（未圖示）是對上蓋部2〇進行固定的第 22所螺合的螺釘孔。在框體部16中的配置於放電容器 的長度方向_部側（圖3中的左右的端部側）的部分， 形成有第1螺釘孔16A的外側的構件17 (外框構件 可自框體部本體18拆除。 ) ^將外框構件17固定於框體部本體18的螺釘構件u (第3螺釘23)能夠螺合於外框構件17的側面。於框 部本體18的安裝有外框構件17的部分19(内框部丨' = 側面形成有第3螺釘孔17A，該第3螺釘孔nA中插右 將外框構件17安裝於内框部19的第3螺釘23。又，如 4所示，於内框部19的側面，隔開可配置放電容器32 間隔而形成有多個支持構件插通孔19A，該支持 丢 孔19A可將支持構件31自側面方向插通。支持;二二 孔隱的-部分形成至内框部19的下_，但内框部^ 的下侧面的開口直徑被設定為小於支持構件3丨的口秤 得支持構件31不會自内框部19的下侧面脫落。卫 於本實施形態中，在上蓋部2〇與框體部16所包圍 空間中，自上蓋部2(H則起，依序配置有電極兼容器保持 件40、放電容器32、網狀電極3〇以及支持構件31。詳細 而言，放電容器32是以被電極兼容器保持構件4〇與網^ 電極30姨的狀態，收容於上蓋部2G與框體部16;斤 的空間。 囷 12 201232601 4UUJ/pif 的^本t形態中，網狀電極％是包含多孔狀的導電體 的板材’遠多孔狀的導電體例如 V電體 (SUS)、銅、以及鈹銅等的導電f u &、’不錄鋼 圭為二3 _以上。原因在於具有用以 電極的厚度更佳為。♦一上考== (press) 狀的值，且較佳為將上限設定為如等^ 生變形的值。例如，可將厚度設為0.3酿以下。等而發 於本實施形態中，1塊網狀電極3G是以與6根（多相） 32的外周面32A接觸的方式，設置為被上職) 電谷态32共用。於本實施形態中， 接觸的方式來設置丨塊網狀電極30，;=== 設為共用電極（c_n〇nelectrode)。糟此制狀電極30 Z電極30電性連接於電源|置的接地（earth)端 子（未圖示）侧。若將網狀電極3〇連接於接地端子，則可 使夂到光照射的被處理物與燈裝置1〇 使照射光的照度提高。 職離接近’伙而可 。對於支持著網狀電極3G的支持構件3卜沿著放電容 器32的長度方向延伸的扁平的棒狀雜的構件是剖面為 _的圓管。於放電容H 32⑽卿成的放電㈣奶 内’填充有介電質㈣放電贱體。於本實卿態的燈裝 置1〇中，不進打複雜的加卫而幾乎直接將通用的圓管用作11 S 201232601 The hole of the lower cover 13 is fixed to the upper end surface of the frame portion 16 by a screw hole (not shown). The screw hole (not shown) is The 22nd screw hole that is fixed to the upper cover 2〇. A member 17 on the outer side of the first screw hole 16A is formed in a portion of the frame portion 16 disposed on the longitudinal direction side portion (the left and right end portions side in FIG. 3) (the outer frame member can be framed) The body main body 18 is removed. The screw member u (the third screw 23) that fixes the outer frame member 17 to the frame body 18 can be screwed to the side surface of the outer frame member 17. A portion 19 of the frame main body 18 to which the outer frame member 17 is attached (the inner frame portion 丨' = a third screw hole 17A is formed on the side surface, and the outer frame member 17 is attached to the inner frame portion by inserting the right side into the third screw hole nA The third screw 23 of 19. Further, as shown in Fig. 4, a plurality of support member insertion holes 19A are formed on the side surface of the inner frame portion 19 so as to be spaced apart from each other by the arrangable discharge vessel 32. The support hole 19A can be supported. The member 31 is inserted from the side direction. The support is formed; the hidden portion of the second hole is formed to the lower portion of the inner frame portion 19, but the opening diameter of the lower side of the inner frame portion is set to be smaller than that of the support member 3丨. The support member 31 does not fall off from the lower side surface of the inner frame portion 19. In the present embodiment, in the space surrounded by the upper cover portion 2 and the frame portion 16, the upper cover portion 2 (from H is sequentially arranged) The electrode-compatible holder 40, the discharge vessel 32, the mesh electrode 3A, and the support member 31. In detail, the discharge vessel 32 is housed in the upper cover in a state in which the electrode-compatible holder holding member 4 is connected to the mesh electrode 30. Part 2G and frame part 16; space of jin. 囷12 201232601 4UUJ/pif ^ form of t, mesh electrode It is a plate material containing a porous electric conductor, a conductive material such as a V-electric body (SUS), copper, or beryllium copper, which is a porous material, and a non-recorded steel is two or more. The thickness of the electrode is preferably used. ♦ A value of the test == (press), and it is preferable to set the upper limit to a value such as a deformation. For example, the thickness can be set to 0.3 or less. In the present embodiment, one mesh electrode 3G is provided in contact with the outer peripheral surface 32A of six (multi-phase) 32, and is provided in the electric grid state 32. In the present embodiment, The contact meshing electrode 30 is set in a contact manner; === is set as a common electrode (c_n〇nelectrode). The manufacturing electrode 30 Z electrode 30 is electrically connected to the ground terminal of the power supply | When the mesh electrode 3 is connected to the ground terminal, the illuminance of the illuminating light can be improved by the object to be irradiated with the light and the lamp device 1 . The support member 3 of the mesh electrode 3G has a flat rod-like impurity extending along the longitudinal direction of the discharge vessel 32. The member is a circular tube with a section of _. The discharge (4) in the discharge of the discharge capacitor H 32 (10) is filled with a dielectric (four) discharge body. In the light device of the real state, the complex is not added. Wei and almost directly use the universal round tube
13 S 201232601 h-uuj /pif 放電容器32。 μ亦即’以包括排氣管（導管（tip tube))的方式，將 圓离形的原管（圓管）的兩端加工為前端變細的形狀，自 ‘苔將放電用氣體予以封入。接者，藉由進行封隔（tip off) 的密封加工來形成放電容器32。因此，與使用扁平的角筒 狀的放電容器32的構成相比較’可使加工負擔、成本（cost) 減少。 ^作為填充至放電容器32的介電質屏障放電用氣體，使 氬（Af)、及& (Kr)等的稀有氣體、以及氟 』、乳（(¾)等的_素氣體等。燈裝置1〇根據氣體的 種類而發出不同波長（172腹、222細、以及期咖等 =皮J匕的準分子（excimer)光。例如’為了對電子零件 行亦即’為了對附著於電子零件的有機化合物進 172 nm為中心波長的準分子光。因此， 二使用含錢（Xe) _體 =力並無_的限定，但通f以 的壓力來封人氣體。 kPa左右 電極兼容器保持構件4〇县伽# + + β 件，該電極兼容器保持構件4〇夢由菌奋〶32分開的構 上葚邱川糟由第4螺釘24而螺固於 2G。電極兼谷器保持構件* 該電極構件是以與6根（多根二極構件， 設置為被上述放電容器32續電以32接觸的方式， 為介電質屏障放電燈的電_發揮财電極3G 一併作 又電極兼合盗保持構件如亦具有與網狀電極如一 201232601 4UUJ /pif 併夾持著放電容n 32，亦即，保持 (放電容器保持構件的一例）。亦@考欲電容器32的功能 40是將電極構件盥放電容：。=二，電極兼容器保持構件 件。再者，於本實施形態中^加體化的構 電極兼容器保持構件=包持構件4〇。 性，且能夠反射放電容器32内的介電/屏2 細料。電極兼容器保持構件4〇包括屏=產= 侧面43A上㈣地形成有山部46與谷部％ ;以 = 的電極41，重疊於上述電極4 千板狀 構件师個電極41、電極43二=3容器保持 IT:1 1為上側電極41 ’配置於下側且在; 形成有山部46與谷部46的電極43設為下側電極43。 於士㈣極41的大財央部分形成錢體供給孔42 (第1氣體供給孔42)，該氣體供給孔42 (第j氣體供給 孔42)將自氣體供給源供給的氣體導入至燈罩本體15内。 上側電極41的形成有第1氣體供給孔42的部分，配置於 亡蓋部20的大致中央部的呈圓形地被挖穿的部分2〇a，自 氣體供給源供給的氣體導入至第丨氣體供給孔42。 於下側電極43的上側面（與上侧電極41接合的接合 面）形成有凹陷部44，於該凹陷部44中形成有第2氣體 供給孔45 ’該第2氣體供給孔45連通於下側電極43的下 側面43A的谷部46，且將自第1氣體供給孔42導入的氣 體導入至燈罩本體15内的光照射開口部分的空間15S。13 S 201232601 h-uuj /pif discharge capacitor 32. μ, that is, in a manner including an exhaust pipe (tip tube), the both ends of the round-shaped original pipe (round pipe) are processed into a tapered shape, and the gas is sealed from the moss. . The discharge vessel 32 is formed by performing a tip off sealing process. Therefore, compared with the configuration using the flat rectangular tube-shaped discharge vessel 32, the processing load and cost can be reduced. ^ As a dielectric barrier discharge gas filled in the discharge vessel 32, a rare gas such as argon (Af) or & (Kr), and a gas such as fluorine, milk ((3⁄4), etc.) are used. The device 1 emits excimer light of different wavelengths (172 belly, 222 fine, and period coffee, etc. according to the type of gas. For example, 'for the purpose of electronic parts, that is, for attaching to electronic parts The organic compound enters the excimer light with a center wavelength of 172 nm. Therefore, the use of the rich (Xe) _body = force is not limited, but the pressure is used to seal the gas at a pressure of kPa. The member 4〇县伽# + + β piece, the electrode compatible holding member 4 is a dream that is separated by the bacteria 32. The Qiuchuan is screwed to the 2G by the 4th screw 24. The electrode and the retaining member * The electrode member is made up of six electrodes (multiple two-pole members, which are arranged to be in contact with each other by the discharge vessel 32, and are electrically connected to the discharge barrier 32. The pirate retaining member also has a mesh electrode such as a 201232601 4UUJ /pif and is clamped The discharge capacitor n 32 is held, that is, held (an example of the discharge vessel holding member). Also, the function 40 of the capacitor 32 is to discharge the electrode member: 2.=2, the electrode compatible device holds the member. In the present embodiment, the electrode-accommodating member retaining member = the holding member 4 is formed and can reflect the dielectric/screen 2 fine material in the discharge vessel 32. The electrode-compatible holder holding member 4 includes a screen. =Production = The side portion 43A is formed with the mountain portion 46 and the valley portion %; the electrode 41 with the = is superposed on the electrode 4; the plate-shaped member member electrode 41, the electrode 43 = 3 container is kept IT: 1 1 is The upper electrode 41' is disposed on the lower side, and the electrode 43 in which the mountain portion 46 and the valley portion 46 are formed is referred to as the lower electrode 43. The large body portion of the Yushi (four) pole 41 forms a money supply hole 42 (the first gas) In the supply hole 42), the gas supply hole 42 (the jth gas supply hole 42) introduces the gas supplied from the gas supply source into the globe body 15. The portion of the upper electrode 41 where the first gas supply hole 42 is formed is disposed in the hole The portion 2〇a of the substantially central portion of the dead cover portion 20 that is circularly excavated, from the gas supply The gas supplied from the source is introduced into the second gas supply hole 42. The upper side surface (the joint surface joined to the upper electrode 41) of the lower electrode 43 is formed with a recessed portion 44, and the second gas supply is formed in the recessed portion 44. The second gas supply hole 45 communicates with the valley portion 46 of the lower side surface 43A of the lower electrode 43 and introduces the gas introduced from the first gas supply hole 42 into the space of the light irradiation opening portion in the globe body 15. 15S.
S 15 201232601 ^XJXJJ /pit 於下側電極43的下側面43A中，如圖5所示，在與 放，容器32接觸的接觸部48,即山部46的頂點處形成有 沿著放電容器32的外周面32A的形狀的弧狀的凹部48， 接觸部48的兩侧的傾斜面49被設為反射面49,該反射面 49將來自放電容器32内的光反射至網狀電極3〇側。 接著，對本實施形態的燈裝置10的組裝方法進行說 明。 11 首先’於上蓋部20的下側面43A將上側電極41與下 側電極43依序重疊，使第4螺釘24螺合’藉此來安^上 述電極41、電極43 (電極兼容器保持構件40)，並且^先 自框體部16將外框構件17予以拆除。接著，#由第之螺 釘22的螺合’將安裴有電極兼容器保持構件40的上蓋部 2 〇安裝於已，外框構件i 7，以拆除的狀態的框體部二 接者，若將放電容H 32配置於電極兼容器保持構件 40的下，電極43的山部46的頂點處所形成的凹部48，則 放電谷，32的外周面32A沿著弧狀的凹部配置。、 接著，以將電極兼容器保持構件40的凹部48中所配 ，的放電谷器32予以覆蓋的方式來配置網狀電極30，將 寺構件配置於上述網狀電極30的處於放電容器32 相反側的面30八。詳细而士，、凡#4兩〜 .,坪、、田而5，沿耆放電容器32的長度方 二: 31配置於各個相鄰的放電容器32之間。 31時，使支持構件31插通於支持構件插 持構件插通孔19A形成於框體部本體18 的内框°卩19的侧壁。此處，支持構件插通孔祖的-部 201232601 Ηυυο/pif 分形成至内框部19的下側面，但内框部19的下側面的開 口直徑被設定為小於支持構件31❸口徑，因此，支持構件 31不會自内框部19的下側面脫落。 接著，使第3螺釘23螺合於外框構件17的第3螺釘 孔17A，將外框構件17螺固於框體部本體18，將下芸、u ^疊純體部16，使第〗衡21螺合於上述下蓋i^周 ，错此來將下蓋13安裝於燈罩本體15的框體部Μ之 1持放(1=2)撕電極蝴極兼容刚懈 子，將接 =善將 =電極30連接於電源裝置的接地電極端 子之後持構件40連接於電源裝置的高電麼端 方式〜11顧裝置1G將賴絲至以上述 光昭射屏障放電喊生的趣由配置於 12的網狀電極3G而照射至被照射物。、 ί二對本實施形態的作用以及效果進行說明。 於本貝她形態中，利用網狀 構件40來夹持放電容器32，藉此# 益保持 電燈’上述放電容H 32是將放 二二質屏障放 而成，因此，盔需如下的牛驟體封至透光性的容器 :時，藉由蒸_二驟放電該= 驟。又，電極兼容器保持構件4G是—電極的步 保持構件與電極構件 =併具有作為放電容器 件具有保持放電容卷32的^構上述放電容器保持構 32的功此，因此可使零件數減少。因S 15 201232601 ^XJXJJ /pit In the lower side surface 43A of the lower electrode 43, as shown in FIG. 5, a contact portion 48 which is in contact with the container 32, that is, the apex of the mountain portion 46 is formed along the discharge vessel 32. An arcuate recess 48 having a shape of the outer peripheral surface 32A, and an inclined surface 49 on both sides of the contact portion 48 are provided as a reflecting surface 49 that reflects light from the inside of the discharge vessel 32 to the side of the mesh electrode 3 . Next, a method of assembling the lamp device 10 of the present embodiment will be described. 11 First, the upper electrode 41 and the lower electrode 43 are sequentially superposed on the lower side surface 43A of the upper lid portion 20, and the fourth screw 24 is screwed together to thereby form the electrode 41 and the electrode 43 (electrode compatible device holding member 40). And the outer frame member 17 is removed from the frame portion 16 first. Then, # is attached to the upper cover portion 2 of the electrode-compatible holder holding member 40 by the screwing of the second screw 22, and the outer frame member i7 is removed from the frame portion. The discharge capacitor H 32 is disposed under the electrode-compatible holder holding member 40, and the recess 48 formed at the apex of the mountain portion 46 of the electrode 43 is disposed along the arc-shaped recessed portion of the discharge valley 32. Next, the mesh electrode 30 is disposed so as to cover the discharge valley 32 provided in the concave portion 48 of the electrode-compatible holder holding member 40, and the temple member is disposed on the mesh electrode 30 opposite to the discharge vessel 32. Side face 30 eight. In detail, the squad, the #4 two 〜, 坪, 田, and 5, along the length of the discharge capacitor 32: 31 is disposed between each adjacent discharge vessel 32. At 31 o'clock, the support member 31 is inserted into the support member insertion member insertion hole 19A formed in the side wall of the inner frame 卩 19 of the frame body 18. Here, the portion of the support member insertion hole ancestors 201232601 Ηυυο/pif is formed to the lower side surface of the inner frame portion 19, but the opening diameter of the lower side surface of the inner frame portion 19 is set to be smaller than the diameter of the support member 31, and therefore, support The member 31 does not fall off from the lower side surface of the inner frame portion 19. Next, the third screw 23 is screwed to the third screw hole 17A of the outer frame member 17, and the outer frame member 17 is screwed to the frame body 18, and the lower body and the u body are folded. The balance 21 is screwed into the lower cover i^, and the lower cover 13 is attached to the frame body of the lamp cover body 15 to hold the 1 (2) 2 (2=2) tear electrode is compatible with the rigid body, and the connection is replaced. After the electrode 30 is connected to the ground electrode terminal of the power supply device, the holding member 40 is connected to the high-power terminal of the power supply device. 11 The device 1G arranges the wire to be discharged to the light-emitting barrier. The mesh electrode 3G is irradiated to the object to be irradiated. The effect and effect of this embodiment will be described. In the form of Benbe, the mesh member 40 is used to hold the discharge vessel 32, thereby keeping the electric light. The above discharge capacitance H 32 is formed by placing the second and second quality barriers. Therefore, the helmet needs the following The body is sealed to a light-transmissive container: when it is discharged by steaming _ two-shot. Further, the electrode-compatible holder holding member 4G is a step-holding member and an electrode member of the electrode = and has a function as the discharge vessel member having the above-described discharge vessel holding structure 32 for holding the discharge-capacitor coil 32, so that the number of parts can be reduced . because
201232601 此，根據本實施形態，可將介電質屏障放電 予以簡化。 且曰豸的構造 又 當將燈裝入至本實施形態的介電質屏障放電 置10時，利用網狀電極30與電極兼容器保持構件4〇 = ^ 持^個放電容器32之後，只要將網狀電極3G以 =201232601 Thus, according to the present embodiment, the dielectric barrier discharge can be simplified. Further, when the lamp is mounted in the dielectric barrier discharge device 10 of the present embodiment, the mesh electrode 30 and the electrode compatible device holding member 4 〇 = ^ hold the discharge vessel 32, as long as Mesh electrode 3G to =
谷器保持構件40分別連接於電源裝置即可。 D 亦即，於本實施形態中，當將燈裝入至介電質 ΐ 1〇時，每個燈中亦無需連接於電源裴置的配線構 j固疋於燈罩U的安裝構造，因此，亦可將燈裝置= 的構造予以簡化。 又’於本實施職中’不僅設置為使—個網狀電極 與夕根放電容器32接觸，而且設置為使多根放電容哭32 所共用的電極兼容器保持構件4〇與多根放電容器32 觸。因此，根據本實施形態，儘管介電質屏障放^燈裝置 匕括夕根放電谷器32，但只要利用多根放電容器μ戶 用的電極兼谷益保持構件40、與多根放電容器&所此 用的網狀電極30來夾持多根放電容器32，便^將上述多、 根放電容器32裝入至上述介電質屏障放電燈裴置1〇 此’可將構造予以簡化。 又，於本實施形態中，電極兼容器保持構件4〇包含如 下的材料’該材料能夠對放電容器32内的介電質屏障放電 ^產生的光進行反射，並且在與放電容器32接觸的接觸部 8的兩側具有反射面49 ’該反射面49將來自放電容32 内的光反射至網狀電極30側。 18 201232601 句ιυ /pif 因此 很撅奉貫施形態，電極兼放谷盗保持構件4〇 亦作為反射板而發揮功能，可使經由網狀電極3〇而照射出 的光的透射率提高’而且無需另外設置反射板，故而可將 構造予以簡化。 介電質屏障放電所產生的光中，例如波長為172 nm 的紫外線容易與氧結合，因此，該紫外線不易在空氣中通 過，光透射率有可能會下降。然而，根據本實施形態，於 ，極兼容器保持構件4〇中，設置有供給如下的氣體的第j 氣體供給孔42以及第2氣體供給孔45，上述氣體用以將 燈罩U的光照射開口部分的空間15S設為非氧狀態（惰 環境）’因此’將上述空間15S設為非氧狀態的氣 體被導人至上述空間15S，故而介電f屏障放電所產 光容易+通過上述空間15S，光透射率提高。 右放電容器32與電極（網狀電極3〇以及電極 =持，件40)的非接觸區域增多，則當將電壓施加至電極 因上間ϊ易產生放電’放電容器32或電極有可能會 態中，在從而使壽命縮短。然而，於本實施形 的位置，^絲’支持構件31設置於離開放電容器32 32相反^支持構件31是與網狀電極30的處於放電容器 大^= 观細而域著峨電極30，因此，^ =此由 不會被雜I據本只施形態，自放電容器32照射出的光 按觸狀怎良好，故而可防止放電容器The bar holder holding members 40 may be connected to the power supply device, respectively. That is, in the present embodiment, when the lamp is incorporated into the dielectric material, the wiring structure of the lamp housing U is not required to be attached to the lamp housing U. The construction of the lamp unit = can also be simplified. Further, in the present embodiment, the present invention is not only provided such that the mesh electrode is in contact with the shigen discharge vessel 32, but is also provided so that the plurality of discharge capacitors 32 are shared by the electrode compliant holding member 4 〇 and the plurality of discharge vessels 32 touches. Therefore, according to the present embodiment, although the dielectric barrier discharge lamp device includes the 根 放电 谷 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 32 The mesh electrode 30 used for holding the plurality of discharge vessels 32 can be used to simplify the structure by incorporating the above-mentioned multi-discharge capacitor 32 into the dielectric barrier discharge lamp. Further, in the present embodiment, the electrode-compatible holder holding member 4 includes a material which is capable of reflecting light generated by the dielectric barrier discharge in the discharge vessel 32 and in contact with the discharge vessel 32. Both sides of the portion 8 have a reflecting surface 49' which reflects the light from the discharge capacitor 32 to the side of the mesh electrode 30. 18 201232601 υιυ /pif Therefore, the electrode and the stalk holding member 4 also function as a reflector, and the transmittance of light irradiated through the mesh electrode 3〇 can be improved. There is no need to provide a separate reflector, so the construction can be simplified. Among the light generated by the dielectric barrier discharge, for example, ultraviolet rays having a wavelength of 172 nm are easily combined with oxygen, and therefore, the ultraviolet rays are not easily passed through the air, and the light transmittance may be lowered. According to the present embodiment, the pole-compatible holder holding member 4 is provided with a j-th gas supply hole 42 and a second gas supply hole 45 for supplying a gas for illuminating the opening of the cover U. Part of the space 15S is set to a non-oxygen state (idle environment). Therefore, a gas in which the space 15S is set to a non-oxygen state is guided to the space 15S, so that light generated by the dielectric f barrier discharge is easily + passed through the above space 15S. The light transmittance is improved. When the non-contact area of the right discharge capacitor 32 and the electrode (the mesh electrode 3〇 and the electrode=holding member 40) is increased, when a voltage is applied to the electrode, the discharge is easily generated due to the upper portion. The discharge vessel 32 or the electrode may be in a state. In this, the life is shortened. However, in the position of the present embodiment, the wire support member 31 is disposed opposite to the open capacitor 32 32. The support member 31 is larger than the discharge electrode 30 of the mesh electrode 30. , ^ = This is not caused by the impurity I, and the light emitted from the discharge capacitor 32 is good according to the contact, so that the discharge vessel can be prevented.
S 19S 19
201232601 -TW-Ϊ / l-F 32或電極3〇、 率的下降。 電極40的劣化，並且可確實地抑制光透射 於本實施形態中’沿著放電容11 32的長度方向的 個间置支持構件3卜因此，可沿著長度方向的整 if #放電容器32，從而可使網狀電極3〇及電極 兼谷3持構件4〇與放電容器32的接觸狀態更良好。 w ii:根據本實施形態，放電容器32呈圓筒狀，且於 容器保持構件4〇的接觸部48處形成有沿著放電 谷二的外周面32A的剖面為弧狀的凹部招，因此，即 便、田^電^ 32為圓筒狀時’放電容器32的外周面32A 者與電極兼iff保持構件⑽接觸的接觸部Μ所設置 ' 48的方式，配置於該凹部48内，故而放電容器μ ΓΛΐΐ ’藉此，可使放電容器32與電極兼容器保持構件 4〇的接觸狀fe良好’從而抑制光透射率的下降。 <實施形態2> 接者’根據圖7〜圖10來對本發明的實施形態2進行 說明。本實施形態與實施職！的不同點在於：不包括支 持構件31 ’以及電極兼容器保持構件&的下側面53a(下 側電極的下側面53A)的形狀與實施形態j不同。 施形態1相同的構成附上相同的符號^省略重複的說明。 圖7是自下側表示本實施形態的介電質屏障燈裝置％ 的圖，圖8是自上側表示燈裝置5〇的圖，圖9是圖7的 A-A線處的剖面圖，圖1()是圖7的邮線處的剖面圖。 於本實施形態中，-體地設置有框體部51，於上蓋部 20 pif 201232601 20f體部51所包圍的空間中，自上蓋部2〇 配置有電極兼容器保持構件52、9根放電容 序 狀電極30。 很敌逼今益32、以及網 =’於本實施形態中，電極兼容 電極53設為如下的構成，即， 的下側 面53A (下側的面53A) 板狀的電極53的一個 32 ^32A 56 =二;==:電―: 的凹部v * 再者’於下側電極53的相鄰 :Γ:156之間形成有第2氣體供給孔55 接者，對本實施形態的燈裝置 首先，於上蓋部20的下側面將去進仃說明。 電極53依序重疊，使第 電極41以及下側 的下側面，猎此來將電極兼容器 盍， 20的下側面。 行稱仵52文襄於上蓋部 接著’若9根放電容器32配 w 52的凹部，則放電宏 置於電極兼谷讀持構件 配置。 電谷"32的外周面似沿著弧狀的凹部 接著’以將電極兼容器保持 =32予以覆蓋的方式來配置網二極 二緣3。，使第1螺釘21螺合於下G 的周緣，错此來將下蓋13安裝於 ^13 之後，放電容器32被網狀雷極^ — 5的框體部51 罔狀電極30與電極兼容器保持構件201232601 -TW-Ϊ / l-F 32 or electrode 3〇, the rate of decline. Deterioration of the electrode 40, and it is possible to surely suppress transmission of light to the intervening support member 3 along the longitudinal direction of the discharge capacitor 11 32 in the present embodiment. Therefore, the entire if # discharge vessel 32 along the length direction can be Therefore, the contact state between the mesh electrode 3 and the electrode and the holding member 4 can be made better. w ii: According to the present embodiment, the discharge vessel 32 has a cylindrical shape, and a concave portion having an arcuate cross section along the outer circumferential surface 32A of the discharge valley 2 is formed at the contact portion 48 of the container holding member 4A. When the field electrode 32 is in a cylindrical shape, the outer peripheral surface 32A of the discharge vessel 32 is disposed in the recess 48 so that the contact portion 接触 in contact with the electrode and iff holding member (10) is disposed in the recess 48, so that the discharge vessel is disposed. μ ΓΛΐΐ ' Thereby, the contact shape fe of the discharge vessel 32 and the electrode-compatible holder holding member 4 良好 can be made good, thereby suppressing the decrease in light transmittance. <Embodiment 2> The second embodiment of the present invention will be described with reference to Figs. 7 to 10 . This embodiment and implementation! The difference is that the shape of the lower side surface 53a (the lower side surface 53A of the lower electrode) excluding the supporting member 31' and the electrode compatible holding member & is different from that of the embodiment j. The same configurations as those in the first embodiment are denoted by the same reference numerals, and the overlapping description will be omitted. 7 is a view showing a % of the dielectric barrier lamp device of the present embodiment from the lower side, FIG. 8 is a view showing the lamp device 5A from the upper side, and FIG. 9 is a cross-sectional view taken along line AA of FIG. 7, and FIG. Is a cross-sectional view of the postal line of Figure 7. In the present embodiment, the frame portion 51 is integrally provided, and in the space surrounded by the body portion 51 of the upper cover portion 20 pif 201232601 20f, the electrode compatible holding member 52 and the 9th discharge capacitor are disposed from the upper cover portion 2''. Sequential electrode 30. In the present embodiment, the electrode-compatible electrode 53 has a configuration in which the lower side surface 53A (lower surface 53A) is a 32^32A of the plate-shaped electrode 53. 56 = two; ==: electric--: recessed portion v* Further, in the vicinity of the lower electrode 53, a second gas supply hole 55 is formed between the Γ: 156, and the lamp device of the present embodiment first, The lower side of the upper cover portion 20 will be described. The electrodes 53 are sequentially superposed so that the first electrode 41 and the lower side of the lower side are hung to the lower side of the electrode compatible device. The row is referred to as the upper cover portion. Then, if the nine discharge capacitors 32 are provided with the recesses of the w 52, the discharge macro is placed in the electrode and valley read member. The outer peripheral surface of the electric valley "32 seems to be along the arcuate recess and then the net two poles 3 are arranged in such a manner that the electrode compatibility is kept at =32. The first screw 21 is screwed to the periphery of the lower G. Then, the lower cover 13 is attached to the ^13, and the discharge vessel 32 is mesh-compatible with the frame portion 51 of the mesh lightning electrode. Holder
S 21 201232601 52夾持（參照圖9以及圖i〇)。 接著，將網狀電極3〇連接於電 子，將電極兼容器保持構件52連接:J 極端 子之後，獲得本實麵㈣燈|置5(^、裝置的而電壓端 5。===^;:!態_置 電而產生的光，經由配置於光昭射電質屏障放 而照射至被照射物。I、、、射.η的網狀電極30 本實施形態的作用以及效果進行說明。 根據本貝施形態，由於無需安裝支持構件 因此，可提供構造更簡單的燈裝置50。 菜 <其他實施形態> ^發^祕定純據上述料叹圖式所 如下所述的實施形態亦包含於本發明的Ϊ ⑴於上述實施職巾，衫了包衫根放電容哭， 但亦可包括1根放電容器。 °° 竹妝述實施形態中，表示了包括剖面為圓形的圓 j狀=電容H，做電抑村為㈣騎面的形 電谷器或剖面為多角形的角筒狀的放電容器等。 (3)於上述實施形態中，表示了網狀電極設置 ，放電容器共用，但亦可針對每個放電容器而設置^ 極〇 右设為此種構成，則可部分地對網狀電極進行置換。S 21 201232601 52 is clamped (refer to Fig. 9 and Fig. i). Next, the mesh electrode 3〇 is connected to the electron, and the electrode compatible device holding member 52 is connected: after the J terminal, the real (four) lamp is set to 5 (^, the device and the voltage terminal 5 is ===^; The light generated by the power-on-state is irradiated to the object to be irradiated by being placed on the light-emitting electric barrier. The operation and effects of the mesh electrode 30 of the first embodiment are described. In the case of the Besch, since it is not necessary to mount the supporting member, it is possible to provide the lamp device 50 having a simpler structure. The dish <Other Embodiments> The method described below is also included in the embodiment described above. In the present invention, (1) in the above-mentioned implementation of the service towel, the shirt is covered with a capacitor, but it may also include a discharge vessel. °° In the embodiment of the bamboo makeup, a circular shape including a circular cross section is shown. = Capacitance H, the electric suppression village is (4) the electric grid type of the riding surface or the rectangular tube-shaped discharge vessel having a polygonal cross section. (3) In the above embodiment, the mesh electrode arrangement is shown, and the discharge vessel is shared. , but it can also be set for each discharge capacitor. In this configuration, the mesh electrode can be partially replaced.
S 22 201232601 Pif 1置上述實施形態中，表示了電極兼容11保持構件 但亦可針對每個放電容= 录态保持構件。若設為此種構成，則可部八仏 子電極兼容器保持構件進行置換。 77 包含二):上射表二了電極兼容器保持構件 •t 夠反射介電f屏障放f所產 <曰並不!放電容11接觸的接觸部的兩側具有反射面， 一、不限疋於此。電極兼容器保持構件可為 刀離“置反射板’亦可將反射膜接合於放電容器。 ^ 上述實施形齡，絲了電極兼容器保持構件 ==孔，但亦可為未形成有氣體供給孔的電極 上述實施形態中’表示了電極兼容器保持構件 权為重登有上側電極與下側電極的 = 持構件亦可包含-個構件。 电賴谷斋保 (8)於上述實施形態1中，表示了沿著放電料的县 ==個f域，將多根支持構件設置於各個相鄰的ί 電今态之間’但並不限定於此。例 端部的放電容器來設置支持構件。 、^者配置於 ⑼f述實施形態中，表示了電極兼容器保持構件 在與放電谷杰接觸的接觸部’形成有沿著放電容器 形狀的錄的凹部，但例如當放電容器為具有斜面的^ 狀的放電容器，且以扁平面來與電極兼容器保持構件接^ 23 5 201232601 時’亦可不形成凹部。 giLG)於上述實施形態中，絲了包括將電極構件與 放電谷㈣持構件μ—體㈣電極兼 極 構件亦可姐絲器倾構件賴。 ㈣ 【圖式簡單說明】 圖1，實施形態1的介電質屏障放電燈裝置的底視圖 圖2是已將具有光照射開口的下框部予以拆除的介電 質屏障放電燈襞置的底視圖 、 圖3是介電質屏障放電燈裝置的俯視圖 圖4是圖3的狀態的介電質屏障放電燈裝置的側面圖 圖5是圖1的χ-χ線處的剖面圖 圖6是圖1的γ-γ線處的剖面圖 圖7是實施形態2的介電質屏障放電燈裝置的底視圖 圖8是介電質屏障放電燈裝置的俯視圖 圖9是圖7的A-A線處的剖面圖 圖10是圖7的B-B線處的剖面圖 【主要元件符號說明】 10、50 :介電質屏障放電燈裝置（燈裝置） 11 :燈罩 12 :光照射開口 13 :下蓋 14 :下蓋開口部 15 :燈罩本體 15S :光照射開口部分的空間S 22 201232601 Pif 1 In the above embodiment, the electrode-compatible 11 holding member is shown, but it is also possible to use a discharge-capacitance = recording state holding member. According to this configuration, the octagonal electrode compatible device holding member can be replaced. 77 Included in the second part: the upper part of the table is the electrode compatible holding member • t is enough to reflect the dielectric f barrier and is produced by the f. 曰 No! The contact portion of the discharge capacitor 11 has a reflecting surface on both sides, Limited to this. The electrode compatible holding member may be a knife away from the "reflecting plate" or a reflective film may be joined to the discharge vessel. ^ The above-mentioned embodiment is formed, the electrode compatible holding member == hole, but the gas supply may not be formed. In the above-described embodiment, the electrode of the hole indicates that the electrode-compatible holder holding member has the upper electrode and the lower electrode. The holding member may include a member. The electric Laigu Zhaibao (8) is shown in the first embodiment. Along the county==f domain of the discharge material, a plurality of support members are disposed between the adjacent states, but the invention is not limited thereto. The discharge vessel at the end of the example is provided with a support member. In the embodiment described in (9), the electrode-compatible holder holding member is formed with a recessed portion along the shape of the discharge vessel in the contact portion 'contacting the discharge valley, but for example, when the discharge vessel has a beveled shape The discharge vessel is connected to the electrode compatible holding member with a flat surface. When the contact is made, the recess may not be formed. giLG. In the above embodiment, the wire member includes the electrode member and the discharge valley (4). The member μ-body (four) electrode and the pole member can also be used for the slanting member. (4) [Simple diagram of the drawing] FIG. 1 is a bottom view of the dielectric barrier discharge lamp device of Embodiment 1. FIG. FIG. 3 is a top view of the dielectric barrier discharge lamp device with the lower frame portion of the opening removed, FIG. 3 is a top view of the dielectric barrier discharge lamp device of FIG. Figure 5 is a cross-sectional view of the χ-χ line of Figure 1, Figure 6 is a cross-sectional view of the dielectric barrier discharge lamp device of Embodiment 2, Figure 8 is a dielectric view of the dielectric barrier discharge lamp device of Figure 2 FIG. 9 is a cross-sectional view taken along line AA of FIG. 7. FIG. 10 is a cross-sectional view taken along line BB of FIG. 7 [Description of main components] 10, 50: Dielectric barrier discharge lamp device (lamp) Device 11 : Lamp cover 12 : Light irradiation opening 13 : Lower cover 14 : Lower cover opening portion 15 : Lamp cover body 15S : Light illuminates the space of the opening portion
24 201232601. H-UUJ /pif 16 :框體部 16A :第1螺釘孔 17 :外框構件 17A :第3螺釘孔 18 :框體部本體 19 :内框部 19A :支持構件插通孔 20 上蓋部 20A :部分 21 第1螺釘 22 第2螺釘 23 第3螺釘 24 第4螺釘 30 網狀電極 30A :(網狀電極的）放電容器的相反側的面 31 :支持構件 32 :放電容器 32A :外周面 32S :放電空間 40、52 :電極兼容器保持構件（將放電容器保持構件 與電極構件予以一體化的構件） 41 :上侧電極 42 :第1氣體供給孔 43、53 :下側電極 5 25 201232601 43A、53A :下侧面 44 :凹陷部 45、55 :第2氣體供給孔 46 :山部/谷部 48、56 :接觸部（凹部） 49 :反射面/傾斜面 51 :框體部 57 :反射面 A-A、B-B、X-X、Y-Y、Z-Z :線 2624 201232601. H-UUJ /pif 16 : Frame body 16A : First screw hole 17 : Outer frame member 17A : Third screw hole 18 : Frame body 19 : Inner frame portion 19A : Support member insertion hole 20 Upper cover Part 20A: Part 21 First screw 22 Second screw 23 Third screw 24 Fourth screw 30 Mesh electrode 30A: Surface 31 on the opposite side of the discharge vessel (of the mesh electrode): Support member 32: The discharge vessel 32A: Peripheral Surface 32S: discharge space 40, 52: electrode compatible holding member (member in which the discharge vessel holding member and the electrode member are integrated) 41: upper electrode 42: first gas supply holes 43, 53: lower electrode 5 25 201232601 43A, 53A: lower side surface 44: recessed portions 45, 55: second gas supply hole 46: mountain portion/valley portion 48, 56: contact portion (recessed portion) 49: reflecting surface/inclined surface 51: frame portion 57: Reflecting surface AA, BB, XX, YY, ZZ: line 26
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010221257 | 2010-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201232601A true TW201232601A (en) | 2012-08-01 |
Family
ID=45893144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100135276A TW201232601A (en) | 2010-09-30 | 2011-09-29 | Dielectric barrier discharge lamp device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2012043705A1 (en) |
| KR (1) | KR20130123358A (en) |
| CN (1) | CN103081058A (en) |
| TW (1) | TW201232601A (en) |
| WO (1) | WO2012043705A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101448798B1 (en) * | 2014-05-26 | 2014-10-10 | 주식회사 원익큐엔씨 | Dielectric barrier discharge lamp having divisional electrode |
| JP7115036B2 (en) * | 2018-05-25 | 2022-08-09 | ウシオ電機株式会社 | excimer lamp |
| US20220409755A1 (en) * | 2019-10-07 | 2022-12-29 | Ushio Denki Kabushiki Kaisha | Ultraviolet irradiation device |
| CN112885704A (en) * | 2021-03-16 | 2021-06-01 | 江苏威克斯医疗科技有限公司 | Excimer germicidal lamp tube and preparation method thereof, germicidal lamp and assembly thereof |
| KR102585542B1 (en) * | 2021-06-07 | 2023-10-06 | 유니램 주식회사 | Light irradiation device |
| KR102585543B1 (en) * | 2021-06-07 | 2023-10-06 | 유니램 주식회사 | Eximer lamp and case, and light irradiation device having the same |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19651552A1 (en) * | 1996-12-11 | 1998-06-18 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Cold cathode for discharge lamps, discharge lamp with this cold cathode and mode of operation for this discharge lamp |
| JP2004097986A (en) * | 2002-09-11 | 2004-04-02 | Japan Storage Battery Co Ltd | Ultraviolet irradiation device |
| TWI258163B (en) * | 2004-04-07 | 2006-07-11 | Gs Yuasa Corp | Dielectric barrier electric discharge lamp |
| TWI321334B (en) * | 2006-09-28 | 2010-03-01 | Ind Tech Res Inst | Dielectric barrier discharge lamp |
| JP5118337B2 (en) * | 2006-11-30 | 2013-01-16 | アペックス株式会社 | Excimer vacuum ultraviolet light irradiation treatment equipment |
| JP5092808B2 (en) * | 2008-03-06 | 2012-12-05 | ウシオ電機株式会社 | Ultraviolet irradiation unit and ultraviolet irradiation treatment device |
-
2011
- 2011-09-29 JP JP2012536540A patent/JPWO2012043705A1/en not_active Withdrawn
- 2011-09-29 WO PCT/JP2011/072338 patent/WO2012043705A1/en active Application Filing
- 2011-09-29 CN CN2011800418619A patent/CN103081058A/en active Pending
- 2011-09-29 KR KR1020137000341A patent/KR20130123358A/en not_active Application Discontinuation
- 2011-09-29 TW TW100135276A patent/TW201232601A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN103081058A (en) | 2013-05-01 |
| KR20130123358A (en) | 2013-11-12 |
| WO2012043705A1 (en) | 2012-04-05 |
| JPWO2012043705A1 (en) | 2014-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW201232601A (en) | Dielectric barrier discharge lamp device | |
| US7446477B2 (en) | Dielectric barrier discharge lamp with electrodes in hexagonal arrangement | |
| KR101044720B1 (en) | High-pressure discharge lamp | |
| TW468197B (en) | High-pressure mercury lamp and high-pressure mercury lamp light emission device | |
| JP2005526361A (en) | Dielectric barrier discharge lamp with cap | |
| KR19980071167A (en) | Short Arc Mercury Lamp | |
| WO2013038859A1 (en) | Light emitting apparatus | |
| EP2239761A2 (en) | High-intensity discharge lamp and lighting device | |
| JP2011154876A (en) | High-pressure discharge lamp and lighting system | |
| US7635949B2 (en) | Compact high-pressure discharge lamp and method of manufacturing | |
| TW200832491A (en) | Ultraviolet discharge lamp | |
| CN1323052A (en) | Cleaning method and apparatus for discharge lamp light-transmission tube and discharge lamp | |
| CN101027748B (en) | Lamp with protective sleeve | |
| JP2002100323A (en) | High pressure discharge lamp and illumination device | |
| TWI374990B (en) | Lamp device and frame | |
| JPH09153343A (en) | Metal halide lamp, its lighting device and lighting system | |
| JP2010015825A (en) | Light emitting device | |
| JP2010177104A (en) | High-pressure discharge lamp, and lighting system | |
| CN102484036A (en) | Metal-vapor discharge lamp and illumination apparatus | |
| JPH10106495A (en) | High pressure discharge lamp, lighting device and lighting system | |
| TW201042705A (en) | Discharge lamp | |
| CN101790770A (en) | Cold cathode tube lamp, lighting device for display device, display device, and television receiving device | |
| JP2000182563A (en) | Ceramics electrode structural body, discharge lamp and lighting system | |
| JP2009054333A (en) | High-pressure discharge lamp and luminaire | |
| JPH11283577A (en) | High-pressure sodium lamp, high-pressure sodium lamp lighting device, and lighting system |