CN216528746U - Excimer lamp - Google Patents

Abstract

The utility model relates to the technical field of ultraviolet lamps, and discloses an excimer lamp which comprises a lamp tube, an outer electrode and an inner electrode, wherein two ends of the lamp tube are respectively provided with a clamping part for sealing the end part of the lamp tube, a conducting strip is fixed in the clamping part, a sealing cavity is formed in the lamp tube, dischargeable gas is filled in the sealing cavity, the outer electrode is sleeved on the outer side of the lamp tube, the inner electrode is arranged in the sealing cavity, two ends of the inner electrode are respectively and fixedly connected with the conducting strip, the conducting strip at one end is connected with a conducting lead extending out of the clamping part, a concave-convex part group is arranged on the tube wall of the lamp tube, the concave-convex part group comprises two concave-convex parts which are oppositely arranged, the concave-convex parts are concave towards the inner side of the lamp tube, and the two concave-convex parts of the same concave-convex part group are matched with each other for clamping the inner electrode. The utility model has simple structure, stable fixation of the inner electrode and good luminous effect.

Description

Excimer lamp

Technical Field

The utility model relates to the technical field of ultraviolet lamps, in particular to an excimer lamp.

Background

Currently, ultraviolet germicidal lamps are generally low-mercury vapor discharge lamps, and the lamps contain harmful substances such as mercury and the like, so that the environment is easily polluted. Excimer lamps, also known as far ultraviolet excimer lamps, are dielectric discharge lamps that emit ultraviolet light of a specific spectrum by ionizing and bombarding a rare gas of a specific spectral line in a lamp tube at high voltage and high frequency. Compared with a low-pressure mercury lamp, the excimer lamp has no harmful substances such as mercury and the like, has no pollution to the environment, and is widely applied to ultraviolet germicidal lamps. The existing excimer lamp is generally of a coaxial double-tube structure, the lamp tube is in a circular column shape, the outer electrode is arranged on the outer tube of the lamp tube, the inner electrode is arranged in the inner tube of the lamp tube, the structure is complex, and the manufacturing cost is high.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an excimer lamp with simple structure and good luminous effect.

In order to achieve the above object, the present invention provides an excimer lamp, which includes a lamp tube, an outer electrode and an inner electrode, wherein two ends of the lamp tube are respectively provided with a clamping part for sealing an end of the lamp tube, a conducting strip is fixed in the clamping part, a sealed cavity is formed inside the lamp tube, a dischargeable gas is filled in the sealed cavity, the outer electrode is sleeved outside the lamp tube, the inner electrode is arranged in the sealed cavity, two ends of the inner electrode are respectively and fixedly connected with the conducting strip, the conducting strip at one end is connected with a conducting lead extending out of the clamping part, a concave-convex part group is arranged on a tube wall of the lamp tube, the same concave-convex part group includes two concave-convex parts which are oppositely arranged, the concave-convex parts are concave towards the inner side of the lamp tube, and the two concave-convex parts of the concave-convex part group cooperate to clamp the inner electrode.

As a preferable aspect of the present invention, the width of the pinch seal portion is smaller than the width of the lamp tube, and two ends of the lamp tube are respectively provided with a contraction portion, and the contraction portions gradually contract in a direction from the end portion of the lamp tube to the pinch seal portion.

In a preferred embodiment of the present invention, the external electrode is bonded to and connected to an outer side of the concave-convex portion.

In a preferred embodiment of the present invention, the concave-convex portion group is provided in plurality, and the plurality of concave-convex portion groups are distributed along an axial direction of the lamp tube.

As a preferred embodiment of the present invention, the outer electrode is one of a metal block, a metal sheet, a metal mesh, and a conductive film.

In a preferred embodiment of the present invention, the inner electrode is curved.

In a preferred embodiment of the present invention, the conductive sheet is molybdenum.

In a preferred embodiment of the present invention, the material of the internal electrode is tungsten or molybdenum.

As a preferable aspect of the present invention, the dischargeable gas is an excimer gas.

Compared with the prior art, the excimer lamp provided by the embodiment of the utility model has the beneficial effects that: the inner electrode is directly arranged in the lamp tube, the structure is simple, the production cost is low, the discharge space in the lamp tube is large, and the luminous effect is good; the clamping and sealing part is arranged to play a role in sealing, and can fix the conducting strips, the conducting strips at two ends are respectively and fixedly connected with two ends of the inner electrode, so that the two ends of the inner electrode are fixed, the oppositely arranged concave-convex parts are matched with and clamp the inner electrode, so that the inner electrode is fixedly supported, and the inner electrode is stably arranged in the lamp tube; the arrangement of the conductive lead is convenient for the connection of the inner electrode and the power supply.

Drawings

FIG. 1 is a cross-sectional view of an excimer lamp provided by the present invention;

in the figure, 1, a lamp tube; 11. sealing the cavity; 12. a concave-convex portion; 13. a constriction; 2. an outer electrode; 3. an inner electrode; 4. a pinch seal portion; 5. a conductive sheet; 6. and a conductive lead.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the utility model but are not intended to limit the scope of the utility model.

In the description of the present invention, it should be understood that the present invention adopts the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. based on the orientations or positional relationships shown in the drawings, only for convenience of description and simplification of description, but not for indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

As shown in fig. 1, an excimer lamp according to a preferred embodiment of the present invention includes a lamp tube 1, an external electrode 2 and an internal electrode 3, wherein two ends of the lamp tube 1 are respectively provided with a pinch seal 4 for sealing an end of the lamp tube 1, a conductive sheet 5 is fixed in the pinch seal 4, a sealed cavity 11 is formed inside the lamp tube 1, the sealed cavity 11 is filled with dischargeable gas, the external electrode 2 is sleeved outside the lamp tube 1, the internal electrode 3 is arranged in the sealed cavity 11, two ends of the internal electrode 3 are respectively fixedly connected with the conductive sheet 5, the conductive sheet 5 at one end is connected with a conductive lead 6 extending out of the pinch seal 4, a tube wall of the lamp tube 1 is provided with a concave-convex portion group, the concave-convex portion group includes two concave-convex portions 12 arranged oppositely, the concave portion 12 is concave toward an inner side of the lamp tube 1, and the two concave-convex portions 12 of the same concave portion group cooperate to clamp the internal electrode 3.

The working principle of the utility model is as follows: after the outer electrode 2 and the inner electrode 3 are respectively connected with a power supply, the dischargeable gas in the sealed cavity 11 can be bombarded, so that electric arcs are generated between the outer electrode 2 and the inner electrode 3 to emit ultraviolet light.

The utility model is a single tube structure, the inner electrode 3 is directly arranged in the lamp tube 1, the structure is simple, and the production cost is low; the clamping and sealing part 4 plays a role in sealing, and can fix the conducting strips 5, the conducting strips 5 at two ends are respectively and fixedly connected with two ends of the inner electrode 3, so that the two ends of the inner electrode 3 are fixed, the concave-convex parts 12 arranged oppositely are matched with and clamp the inner electrode 3, so that the inner electrode 3 is fixedly supported, and the inner electrode 3 is stably arranged in the lamp tube 1; the conductive lead 6 is provided to facilitate connection of the inner electrode 3 to a power source.

Illustratively, the width of the pinch seal 4 is smaller than the width of the lamp tube 1, in this embodiment, the axial direction of the lamp tube 1 is the length direction thereof, generally, the lamp tube 1 is cylindrical, the width thereof is the diameter thereof, the two ends of the lamp tube 1 are respectively provided with a contraction portion 13, the contraction portions 13 gradually contract along the direction from the end of the lamp tube 1 to the pinch seal 4, the external electrode 2 is sleeved outside the contraction portions 13, therefore, the distance between the external electrode 2 and the internal electrode 3 on the contraction portions 13 is smaller than that of other portions, the potential difference between the external electrode 2 and the internal electrode 3 at the position is smaller, the dischargeable gas at the position is easy to bombard to generate discharge, and therefore, initial discharge can be generated at a lower voltage, and the excimer lamp can be started well.

Illustratively, the external electrode 2 is attached to the outer side of the concave-convex portion 12, and since the concave-convex portion 12 is concave toward the inner side of the lamp tube 1, the distance between the external electrode 2 and the internal electrode 3 at the concave-convex portion 12 is smaller than that at other portions, which contributes to the good starting of the excimer lamp.

Illustratively, the concave-convex portion group is provided in plurality, and the concave-convex portion group is distributed along the axial direction of the lamp tube 1, and the concave-convex portion group is matched with the convex-concave portion group to firmly fix the inner electrode 3.

Illustratively, the outer electrode 2 is one of a metal block, a metal sheet, a metal mesh and a conductive film, and the metal block, the metal sheet, the metal mesh and the conductive film can all realize conductive connection with a power supply.

Illustratively, the inner electrode 3 is curved, such as a spiral curve or a wave-shaped curve, in this embodiment, the inner electrode 3 is a wave-shaped metal wire, the metal wire has a smaller diameter, and the occupation of the space of the sealed cavity 11 is reduced, so that the lamp tube 1 has sufficient light-emitting space and a good light-emitting effect, and the curved inner electrode 3 may expand during the operation process because the linear electrode may cause the lamp tube to break.

Illustratively, the conducting strip 5 is molybdenum, the melting point of molybdenum is high, and the coefficient of expansion of the molybdenum is close to that of quartz glass, so that the fusing seal between the conducting strip and the quartz glass can be realized, the inner electrode 3 is made of tungsten or molybdenum, impurities generated during the electrifying work of the inner electrode 3 are prevented from being remained in the sealed cavity 11, and the conducting lead 6 is made of tungsten or molybdenum.

Illustratively, the dischargeable gas is an excimer gas, such as helium, krypton, xenon, halogen gas, and the like, different gases are filled, the lamp tube 1 can generate ultraviolet light with different wave bands when emitting light, so as to meet the use requirements of different conditions, for example, when xenon is filled, the lamp tube 1 can generate ultraviolet light with a wave band of 172nm when emitting light, so that light cleaning and light modification in the semiconductor industry and the printing industry can be realized, the treatment effect is good, and the speed is high.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.

Claims (9)

1. An excimer lamp, characterized in that: the lamp tube comprises a lamp tube, an outer electrode and an inner electrode, wherein two ends of the lamp tube are respectively provided with a clamping part for sealing the end part of the lamp tube, a conducting strip is fixed in the clamping part, a sealed cavity is formed in the lamp tube, dischargeable gas is filled in the sealed cavity, the outer electrode is sleeved on the outer side of the lamp tube, the inner electrode is arranged in the sealed cavity, two ends of the inner electrode are respectively fixedly connected with the conducting strip, one end of the conducting strip is connected with a conducting lead extending out of the clamping part, the tube wall of the lamp tube is provided with a concave-convex part group, the concave-convex part group comprises two concave-convex parts which are oppositely arranged, the concave-convex parts are concave towards the inner side of the lamp tube, and the concave-convex parts are matched with and clamp the inner electrode.

2. An excimer lamp as claimed in claim 1, wherein: the width of the clamping and sealing part is smaller than that of the lamp tube, two ends of the lamp tube are respectively provided with a contraction part, and the contraction parts gradually contract along the direction from the end part of the lamp tube to the clamping and sealing part.

3. An excimer lamp as claimed in claim 1, wherein: the external electrode is bonded to the outer side of the concave-convex portion.

4. An excimer lamp as claimed in claim 1, wherein: the concave-convex part groups are arranged in a plurality and are distributed along the axial direction of the lamp tube.

5. An excimer lamp as claimed in claim 1, wherein: the outer electrode is one of a metal block, a metal sheet, a metal mesh, and a conductive film.

6. An excimer lamp as claimed in claim 1, wherein: the inner electrode is bent.

7. An excimer lamp as claimed in claim 1, wherein: the conducting strip is molybdenum.

8. An excimer lamp as claimed in claim 1, wherein: the inner electrode is made of tungsten or molybdenum.

9. An excimer lamp as claimed in claim 1, wherein: the dischargeable gas is an excimer gas.

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