CN216528747U - Excimer lamp - Google Patents

Abstract

The utility model relates to the technical field of ultraviolet lamps, and discloses an excimer lamp which comprises a lamp tube, an inner electrode and an outer electrode, wherein the lamp tube comprises an outer tube and an inner tube, the inner tube is coaxially arranged in the outer tube, one end of the inner tube is a closed end, the other end of the inner tube is an open end, one end of the outer tube close to the closed end is closed, the other end of the outer tube and the open end are sealed in a melting mode, a closed sealing cavity is formed between the inner tube and the outer tube, dischargeable gas is filled in the sealing cavity, the outer electrode is sleeved on the outer side of the outer tube, the inner electrode is sleeved on the outer side of the inner tube, and the inner electrode is connected with an electrode lead wire extending out of the end of the outer tube. The utility model has good luminous effect and can avoid the influence of the electrode on the irradiated object arranged in the inner tube.

Description

Excimer lamp

Technical Field

The utility model relates to the technical field of ultraviolet lamps, in particular to an excimer lamp.

Background

Currently, ultraviolet germicidal lamps are generally low-mercury vapor discharge lamps, and the lamps contain harmful substances such as mercury and the like, so that the environment is easily polluted. The excimer lamp, also called far ultraviolet excimer lamp, is a medium discharge lamp, and utilizes high voltage and high frequency to make ionization bombardment on the rare gas with special spectral line in the lamp tube to emit ultraviolet ray with specific spectrum. Compared with a low-pressure mercury lamp, the excimer lamp has no harmful substances such as mercury and the like, has no pollution to the environment, and is widely applied to ultraviolet germicidal lamps. The prior excimer lamp is generally of a coaxial double-tube structure, electrodes are respectively arranged on an outer tube and in an inner tube, and the electrodes are arranged in the inner tube, so that an irradiated object placed in the inner tube can be influenced.

SUMMERY OF THE UTILITY MODEL

The technical problem to be solved by the utility model is to provide an excimer lamp which has good luminous effect and the inner electrode can not influence the irradiated object.

In order to achieve the purpose, the utility model provides an excimer lamp which comprises a lamp tube, an inner electrode and an outer electrode, wherein the lamp tube comprises an outer tube and an inner tube, the inner tube is coaxially arranged in the outer tube, one end of the inner tube is a closed end, the other end of the inner tube is an open end, one end of the outer tube close to the closed end is closed, the other end of the outer tube is sealed with the open end in a melting mode, namely, the other end of the outer tube is connected with the open end in a sealing mode, a closed sealing cavity is formed between the inner tube and the outer tube, dischargeable gas is filled in the sealing cavity, the outer electrode is sleeved on the outer side of the outer tube, the inner electrode is sleeved on the outer side of the inner tube, and the inner electrode is connected with an electrode lead extending out of the end of the outer tube.

In a preferred embodiment of the present invention, a pinch seal portion is disposed at an end of the outer tube near the closed end, and a fixing piece fixedly connected to the electrode lead is fixed in the pinch seal portion.

In a preferred embodiment of the present invention, two fixing pieces are provided, the two fixing pieces are respectively fixedly connected to the electrode lead, and the fixing pieces are connected to a power connection line extending out of the pinch seal portion.

In a preferred embodiment of the present invention, a reflective film is disposed on an outer side or an inner side of the outer electrode.

As a preferred aspect of the present invention, the outer electrode is one of a metal block, a metal sheet, a metal mesh, and a conductive film.

In a preferred embodiment of the present invention, the outer electrode is made of a light-reflecting material.

As a preferable embodiment of the present invention, the internal electrode is one of a metal block, a metal sheet, a metal mesh, and a conductive film.

In a preferred embodiment of the present invention, the fixing piece is made of molybdenum.

In a preferred embodiment of the present invention, the material of the internal electrode is tungsten or molybdenum.

As a preferable aspect of the present invention, the dischargeable gas is an excimer gas.

Compared with the prior art, the excimer lamp provided by the embodiment of the utility model has the beneficial effects that: compared with the excimer lamp with the inner electrode arranged in the inner tube, the inner electrode is arranged at the outer side of the inner tube, the space of the inner tube is not occupied, the irradiated object arranged in the inner tube is not influenced, the distance between the inner electrode and the outer electrode is shortened, the luminous effect of the lamp tube is better, and the electrode lead is arranged to facilitate the connection of the inner electrode and a power supply.

Drawings

FIG. 1 is a schematic diagram of the internal structure of an excimer lamp according to the present invention;

FIG. 2 is a sectional view A-A of FIG. 1;

in the figure, 1, a lamp tube; 11. an outer tube; 111. a pinch seal portion; 112. a fixing sheet; 113. a power connection line; 12. an inner tube; 13. sealing the cavity; 2. an inner electrode; 21. an electrode lead; 3. an outer electrode.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the utility model but are not intended to limit the scope of the utility model.

In the description of the present invention, it should be understood that the present invention adopts the orientations or positional relationships indicated by the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. based on the orientations or positional relationships shown in the drawings, only for convenience of description and simplification of description, but not for indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

As shown in fig. 1-2, an excimer lamp according to a preferred embodiment of the present invention includes a lamp tube 1, an inner electrode 2 and an outer electrode 3, where the lamp tube 1 includes an outer tube 11 and an inner tube 12, the inner tube 12 is coaxially disposed in the outer tube 11, one end of the inner tube 12 is a closed end, the other end of the inner tube 12 is an open end, one end of the outer tube 11 close to the closed end is closed, the other end of the outer tube 11 and the open end are sealed by fusing, so that a sealed cavity 13 is formed between the inner tube 12 and the outer tube 11, the sealed cavity 13 is filled with dischargeable gas, the outer electrode 3 is sleeved on the outer side of the outer tube 11, the inner electrode 2 is sleeved on the outer side of the inner tube 12, the inner electrode 2 is connected to an electrode lead 21 extending out of the end of the outer tube 11, that is, the electrode lead 21 extends out of the sealed cavity 13 from the sealed cavity 13, and the inner electrode 2 is connected to a power supply through the electrode lead 21.

The working principle of the utility model is as follows: the outer electrode 3 is sleeved on the outer side of the outer tube 11, the inner electrode 2 is sleeved on the outer side of the inner tube 12, when the outer electrode 3 and the inner electrode 2 are respectively connected with a power supply, dischargeable gas in a sealed cavity 13 between the inner tube 12 and the outer tube 11 is bombarded to generate electric arcs, so that ultraviolet light is emitted, an irradiated object arranged in the inner tube 12 can be irradiated by the ultraviolet light in a surrounding manner, all directions of the irradiated object can be irradiated by the ultraviolet light, and the illumination effect is uniform; compared with the excimer lamp with the inner electrode 2 arranged in the inner tube 12, the inner electrode 2 is arranged outside the inner tube 12, does not occupy the space of the inner tube 12, does not influence the irradiated object arranged in the inner tube 12, and shortens the distance between the inner electrode 2 and the outer electrode 3, so that the luminous effect of the lamp tube 1 is better.

Illustratively, a clamping seal portion 111 is arranged at one end of the outer tube 11 close to the closed end, a fixing plate 112 fixedly connected with the electrode lead 21 is fixed in the clamping seal portion 111, the clamping seal portion 111 plays a role of sealing, on the other hand, the fixing plate 112 is fixed in the clamping seal portion 111 through clamping seal, the fixing plate 112 is fixedly connected with the electrode lead 21, the electrode lead 21 is fixedly connected with the inner electrode 2, so that the inner electrode 2 is fixed, the inner electrode is prevented from being loosened and displaced to be separated from the outer side of the inner tube 12, the fixing plate 112 is connected with a power supply connecting wire 113 extending out of the clamping seal portion 111, so that the fixing plate 112 is connected with a power supply, and the inner electrode 2 is connected with the power supply.

In an exemplary embodiment, two fixing pieces 112 are provided, the two fixing pieces 112 are respectively fixedly connected to the electrode lead 21, and the inner electrode 2 is stably fixed to the outer side of the inner tube 12, in order to facilitate the two fixing pieces 112 to be respectively connected to a power source, the power source connecting wire 113 of the present embodiment is U-shaped, and both ends of the power source connecting wire 113 are respectively connected to the two fixing pieces 112.

Illustratively, the outer side of the outer electrode 3 is provided with a reflective film, the reflective film can reflect the light scattered from the lamp tube 1 to concentrate the light on the inner side of the lamp tube 1, so as to enhance the irradiation effect on the irradiated object in the inner tube 12, and the reflective film can be arranged on the inner side of the outer electrode 3, and is a conductive reflective film in order not to affect the conductive effect between the outer electrode 3 and the lamp tube 1.

Illustratively, the outer electrode 3 is one of a metal block, a metal sheet, a metal mesh and a conductive film, which can be electrically connected to a power supply, and the metal sheet, the metal mesh and the conductive film have small thicknesses, so that the whole excimer lamp can keep a small volume, and is convenient to use, carry and transport.

Illustratively, the outer electrode 3 is made of a light-reflecting material, and when the outer electrode 3 is a metal block, a metal sheet or a conductive film, the light-reflecting material can reflect light scattered from the outside of the lamp tube 1 back to the inside of the lamp tube 1 without additionally arranging a light-reflecting film.

Illustratively, the inner electrode 2 is one of a metal block, a metal sheet, a metal mesh and a conductive film, and can well cover the outer side of the inner tube 12, ultraviolet light emitted by the lamp tube 1 can penetrate through the inner electrode 2, for example, the inner electrode 2 is the metal mesh, and an ultraviolet light energy transparent grid, for example, the inner electrode 2 is the metal block or the metal sheet, can be provided with light holes, for example, the inner electrode 2 is the conductive film, and can be selected from a transparent conductive film.

Exemplarily, the fixing piece 112 is made of molybdenum, the lamp tube 1 is generally made of quartz glass, the melting point of molybdenum is high and is close to the expansion coefficient of quartz glass, and the fusion sealing between the molybdenum and the quartz glass can be realized; the material of the inner electrode 2 is tungsten or molybdenum, so as to prevent the inner electrode 2 from generating impurities during the electrifying operation, and the power connecting wire 113 and the electrode lead 21 are both made of tungsten or molybdenum.

Illustratively, the dischargeable gas is an excimer gas, such as helium, krypton, xenon, halogen gas, and the like, different gases are filled, the lamp tube 1 can generate ultraviolet light of different wave bands when emitting light, so as to meet the use requirements of different conditions, for example, when xenon is filled, the lamp tube 1 can generate ultraviolet light of 172nm wave band when emitting light, so that light cleaning and light modification in the semiconductor industry and the printing industry can be realized, the processing effect is good, and the speed is high.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.

Claims (10)

1. An excimer lamp, characterized in that: the discharge lamp comprises a lamp tube, an inner electrode and an outer electrode, wherein the lamp tube comprises an outer tube and an inner tube, the inner tube is coaxially arranged in the outer tube, one end of the inner tube is a closed end, the other end of the inner tube is an open end, one end of the outer tube close to the closed end is closed, the other end of the outer tube and the open end are sealed in a melting mode, a closed sealing cavity is formed between the inner tube and the outer tube, dischargeable gas is filled in the sealing cavity, the outer electrode is sleeved on the outer side of the outer tube, the inner electrode is sleeved on the outer side of the inner tube, and the inner electrode is connected with an electrode lead wire extending out of the end of the outer tube.

2. An excimer lamp as claimed in claim 1, wherein: the electrode lead wire is characterized in that one end of the outer tube, which is close to the closed end, is provided with a clamping and sealing part, a fixing piece fixedly connected with the electrode lead wire is fixed in the clamping and sealing part, and the fixing piece is connected with a power supply connecting wire extending out of the clamping and sealing part.

3. An excimer lamp as claimed in claim 2, wherein: the fixing pieces are two and are respectively fixedly connected with the electrode lead.

4. An excimer lamp as claimed in claim 1, wherein: and a reflective film is arranged on the outer side or the inner side of the outer electrode.

5. An excimer lamp as claimed in claim 1, wherein: the outer electrode is one of a metal block, a metal sheet, a metal mesh and a conductive film.

6. An excimer lamp as claimed in claim 4, wherein: the outer electrode is made of a light-reflecting material.

7. An excimer lamp as claimed in claim 1, wherein: the inner electrode is one of a metal block, a metal sheet, a metal mesh and a conductive film.

8. An excimer lamp as claimed in claim 2, wherein: the fixing piece is made of molybdenum.

9. An excimer lamp as claimed in claim 1, wherein: the inner electrode is made of tungsten or molybdenum.

10. An excimer lamp as claimed in claim 1, wherein: the dischargeable gas is an excimer gas.

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