JP6545964B2 - Excimer lamp device - Google Patents

Description

  The present invention relates to an excimer lamp apparatus provided with a housing that accommodates an excimer lamp that emits ultraviolet light by dielectric barrier discharge through a dielectric or capacitively coupled high frequency discharge, and a power supply of the excimer lamp, and in particular, by ultraviolet light The present invention relates to an ozone generator using an excimer lamp that generates ozone.

  Heretofore, an excimer lamp has been developed which causes a discharge gas filled in an arc tube to emit light by dielectric barrier discharge. For example, Patent Document 1 describes an excimer lamp provided with an inner electrode inside a light emitting tube and an outer electrode outside the light emitting tube.

  An ozone generation apparatus has been developed which generates ozone by irradiating the oxygen in the atmosphere with ultraviolet light (for example, a wavelength of 172 nm) emitted by such an excimer lamp, and there is a demand for downsizing and simplification.

  For example, in Patent Document 2, a lamp storage room provided with an excimer lamp in a housing and an electric body storage room provided with an electrical part (power source member for lighting the excimer lamp) for supplying power to the excimer lamp are separated by a partition wall. Structure is shown. The electrical component storage chamber and the lamp storage chamber are in communication with each other by a communication passage, and the wiring (electric power supply line) from the electrical component to the excimer lamp is connected using the communication passage. The electrical component storage chamber is provided with a blower fan and an intake port as cooling means for cooling the excimer lamp and the electrical component, and the power supply line lamp storage chamber is provided with an exhaust port. Then, a cooling air is introduced into the electrical component storage chamber from the air intake port to cool the electrical component, and the excimer lamp is cooled by the cooling air flowing through the communication passage to the lamp storage chamber.

  In the excimer lamp device described in Patent Document 2, substances such as foreign matter and impurity gas (hereinafter referred to as impurities) are generated from the power supply circuit member, and the impurities adhere to the excimer lamp when passing around the excimer lamp with the cooling air. There is a fear. In addition, when the member of the feeder in the lamp storage chamber is exposed to the ultraviolet light emitted from the excimer lamp, impurities may be generated and may adhere to the excimer lamp when passing around the excimer lamp with the cooling air. As described above, when the impurity adheres to the surface of the light emitting tube of the excimer lamp, there is a problem that the illuminance is lowered or the light emitting tube is damaged. In particular, an excimer lamp having an outer electrode outside the light emitting tube has a problem that an abnormal discharge such as a spark occurs due to impurities coming into contact with the outer electrode, resulting in a problem that the outer electrode or the light emitting tube is damaged.

JP 2013-073909 JP 2014-103028

  In view of the above problems, in the excimer lamp device, the problem to be solved by the present invention is to cool the power source and the lamp efficiently, and to solve the problem of the excimer lamp caused by the impurities generated from the power source member and the feeder. It is an object of the present invention to provide an excimer lamp device having a small and simple internal structure that can be prevented and also that the power source and the feeder can be prevented from being damaged by ozone.

  The excimer lamp apparatus according to the present invention has an excimer lamp, a lamp storage room for storing the excimer lamp, a power supply for the excimer lamp, and a power storage room for storing the power, and the gas flowing out of the power storage room is In the lamp storage room, the gas flows through the lamp storage room on the downstream side of the excimer lamp and merges with the gas flowing in the lamp storage room, and is exhausted from an exhaust port provided downstream of the excimer lamp on the lamp storage room.

  By having such a structure, it is possible to prevent the gas flowing out of the power supply storage chamber from contacting the excimer lamp and preventing the impurity generated from the power supply member from adhering to the excimer lamp.

  Furthermore, the excimer lamp device of the present invention has a communication passage for communicating the space on the downstream side of the excimer lamp in the lamp storage room with the space on the downstream side of the power storage position of the power storage room.

  With such a structure, the gas flowing out of the power supply storage chamber can be made to flow into the lamp storage chamber without contacting the excimer lamp.

  Further, in the excimer lamp device of the present invention, a feeder connecting the power source and the excimer lamp connects the power source and the excimer lamp through the communication path.

  With such a structure, the feeder is connected from the downstream side of the excimer lamp. Therefore, the impurities generated from the feed line do not adhere to the excimer lamp. Also, even if ozone is generated around the excimer lamp, the feed line is partially covered by the gas with a low content of ozone flowing out from the power storage room, and the feed line is damaged by contact with ozone. Can be suppressed.

  Furthermore, the excimer lamp device of the present invention has an intake port, and a partition that partially isolates the inside of the excimer lamp device into a power storage room and a lamp storage room, and the gas flowing into the excimer lamp system from the intake port is The partition wall divides the gas flowing through the lamp storage chamber into the gas flowing through the power storage chamber. Since the gas flowing in the lamp storage chamber and the gas flowing in the power storage chamber merge and then are exhausted to the outside of the excimer lamp apparatus, there is no need to provide a large number of intake and exhaust ports and intake and exhaust means; An excimer lamp device having a structure can be provided.

  Furthermore, the excimer lamp device of the present invention is provided with an intake port above the excimer lamp and an exhaust port below the excimer lamp. By having such a structure, it is possible to reliably exhaust the impurities generated from the power supply or the power supply line and the ozone generated by the ultraviolet light.

  Furthermore, the present invention is suitable for an excimer lamp device for generating ozone by flowing an oxygen-containing gas into the lamp storage chamber.

  According to the present invention, it is possible to prevent a failure of the excimer lamp due to impurities generated from the power supply member and the feeder, and to prevent damage to the power supply and the feeder due to ultraviolet light generated from the lamp or ozone generated due to the ultraviolet light. And, it becomes possible to provide an excimer lamp device with a simple internal structure.

Cross-sectional schematic diagram for demonstrating the internal structure of embodiment A schematic cross-sectional view showing the flow of gas inside the lamp device which is the embodiment The cross-sectional schematic diagram for demonstrating the internal structure of other embodiment, and the flow of gas.

  FIG. 1 is a schematic cross-sectional view for explaining the internal structure of the embodiment of the present invention.

  The excimer lamp device (hereinafter referred to as a lamp device) shown in FIG. 1 includes an excimer lamp (hereinafter referred to as a lamp) 1 and a power source 2 for lighting the lamp in a housing 3.

The air intake port 4 is provided on the case back surface 3A, the air exhaust port 8 is provided on the case front surface 3B, and the air intake means 4A is provided adjacent to the air intake port 4. The inside of the housing 3 is provided with a power storage room 7 for disposing the power supply 2 and a lamp storage room 6 having the lamp 1, and the power storage room 7 and the lamp storage room are partially isolated by the partition wall 5. . The partition wall 5 is provided with a communication passage 10 for connecting the lamp storage chamber 6 and the power source storage chamber 7, and the lamp storage chamber 6 and the power source storage chamber 7 are provided in the dividing portion 9 which is the suction port 4 side of the partition 5. It is connected spatially. The lamp 1 and the power source 2 are electrically connected by a feed line 12 penetrating the communication passage 10. That is, the partition wall 5 isolates the lamp storage chamber 6 and the power supply storage chamber 7 excluding the flow dividing portion 9 and the communication passage 10.

  FIG. 2 is a schematic cross-sectional view showing the flow of gas inside the lamp device which is an embodiment of the present invention.

  When electric power is supplied from the power source 2 through the feed line 12 and the lamp 1 is lit, the gas 11 flows into the inside of the housing 3 from the intake port 4 by the intake means 4A. The gas 11 which has flowed into the housing 3 is divided by the flow dividing portion 9 into the gas 11A which flows into the lamp storage chamber and the gas 11B which flows into the power storage chamber.

  The gas 11A flowing into the lamp storage room 6 cools the lamp 1 by flowing around the lamp 1 disposed in the lamp storage room 6, and is exhausted to the outside of the housing 3 through the exhaust port 8. When oxygen is present in the gas 11A, the ultraviolet rays emitted from the lamp 1 react with oxygen to generate ozone around the lamp 1, and the ozone is exhausted to the outside of the housing 3 from the exhaust port 8 as with the gas 11A.

  The gas 11B having flowed into the power storage chamber 7 cools the power supply 2 by flowing around the power supply 2 disposed in the power storage chamber 7, passes through the communication passage 10, and discharges the lamp 1 and the exhaust of the lamp storage chamber 6. It flows out into the space between the port 8 and is exhausted from the exhaust port 8 like the gas 11A.

  As described above, the gas 11B flowing through the power supply storage room 7 flows out to the space between the lamp 1 and the exhaust port 8 of the lamp storage room 6 via the communication passage 10, whereby the gas 11B flows through the power supply storage room Are exhausted from the exhaust port 8 without contacting the lamp 1. Thereby, the impurity generated from the power source 2 is prevented from coming into contact with the lamp 1 together with the gas 11B.

The feed line 12 penetrates the communication passage 10 and is electrically connected to the lamp 1 and the power supply 2. The lamp storage chamber 6 is connected to the lamp 1 on the upstream side of the gas 11 </ b> A. As a result, the impurities generated by the feed line 12 being exposed to the ultraviolet light are discharged from the exhaust port 8 together with the gas 11A (or the gas 11B) and do not come in contact with the lamp 1.

If the feed line 12 exists on the downstream side of the gas 11A, the feed line 12 may contact ozone generated around the lamp when oxygen is contained in the gas 11A, and the feed line may be degraded. However, the feed line 12 penetrates the communication passage 10 and is connected to the lamp 1 so that the lamp storage chamber 6 is partially covered by the gas 11B which similarly passes through the communication passage 10. The gas 11B does not flow around the lamp 1, and the contained ozone is less than the gas 11A. As a result, the contact between the ozone, the feed line 12 and the ozone is suppressed, and the deterioration of the feed line 12 due to the ozone is prevented.

  In the embodiment of the present invention, the air intake port 4 is provided in the case back wall 3A, and the air exhaust port 8 is provided in the case front wall 3B, but the case back wall 3A and the case front wall 3B For example, it may be an enclosure wall on either side of up, down, left, and right. However, when ozone is generated using the atmosphere for the gas 11, ozone heavier than the atmosphere can be reliably exhausted from the exhaust port 8 by providing the housing front wall below the lamp 1.

  In the embodiment of the present invention, the suction means 4A is provided adjacent to the suction port 4, but the housing 3 may have a blower which can flow a gas as shown in FIG. For example, an exhaust means (not shown) may be provided adjacent to the exhaust port 8. However, when ozone is generated in the housing 3, the generated ozone may oxidize and damage the exhaust means (not shown). Further, since there is a possibility that the exhausting means may have a problem due to the impurities generated from the feed line 12, it is desirable to have the intake means 4A upstream of the lamp 1 lamp 1.

  As another embodiment of the present invention, as shown in FIG. 3, the partition wall 5 facing the flow dividing portion 9 is provided with an auxiliary wall 5A along the housing rear wall 3A. The amount of the gas 11B flowing into the power supply storage chamber 7 can be limited by the auxiliary wall 5A, and when the power supply 2 is properly cooled, the gas 11B flowing into the power supply storage chamber 7 reflows into the diverting portion 9 and flows into the lamp storage chamber 6 It can prevent that it does.

  An excimer lamp apparatus having a miniaturized and simplified internal structure capable of preventing a lamp failure due to foreign matter generated from a power supply member, and suppressing damage to the power supply member due to ultraviolet light generated from the lamp and ozone generated due to ultraviolet light can do.

Reference Signs List 1 excimer lamp 2 power supply 3 housing 3A housing back wall 3B housing front wall 4 intake port 4A intake means 5 partition wall 6 lamp storage room 7 power storage room 8 exhaust port 9 diverting part 10 communication passage 11 from intake port inside housing Inflowing gas 11 A Gas flowing into the lamp storage chamber 6 11 B Power supply storage chamber 7 Flowing gas 12 Power feed line

Claims (5)

A lamp storage room in which the excimer lamp is stored,
A power storage room in which the power is stored ,
In an excimer lamp device having a partition that partially isolates the power supply storage room and the lamp storage room ,
An inlet for introducing a gas into the excimer lamp device;
An exhaust port is provided than on the downstream side the excimer lamp of the lamp housing chamber,
The gas flowing in from the air inlet is
The gas is divided by the partition into a gas flowing through the lamp storage chamber and a gas flowing through the power storage chamber,
The gas flowing out of the power storage room is
On the downstream side of the excimer lamp from the lamp storage room,
Merge with the gas flowing in the lamp storage room,
Excimer lamp device characterized in that the exhaust gas is exhausted from the exhaust port It has a communicating path which makes the above-mentioned lamp storage room and the above-mentioned power storage room connect, and
The excimer lamp device according to claim 1, wherein the communication passage is provided downstream of the excimer lamp of the lamp storage chamber. The feed line passing through the communication passage
3. The excimer lamp apparatus according to claim 2, wherein power is supplied to the excimer lamp from the power supply. The excimer lamp device is
Providing the intake port above the excimer lamp;
Excimer lamp apparatus according to claim 1, characterized in that a said exhaust port below the excimer lamp An excimer lamp device according to any one of claims 1 to 4 , wherein
The gas flowing through the lamp storage chamber is a gas containing oxygen,
Ozone generator using excimer lamp characterized in that ozone is generated by ultraviolet rays emitted by the excimer lamp

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