JP6232741B2 - Small ultraviolet irradiation device - Google Patents

Description

  The present invention relates to an ultraviolet irradiation device, and more particularly to a small ultraviolet irradiation device including an excimer lamp that emits excimer light.

Conventionally, excimer lamps have been developed in which a discharge vessel is filled with a discharge gas, and the discharge gas is excimer-emitted by dielectric barrier discharge. Applied.
Japanese Patent Application Laid-Open No. 2011-165540 (Patent Document 1) describes an ultraviolet irradiation device equipped with such an excimer lamp. A light source unit in which a plurality of excimer lamps are arranged in a casing, and the excimer lamp. A structure is shown in which an electrical component (transformer) for power supply is installed separated by a partition wall.
Such a partition part is provided in order to protect an electrical equipment part from the ultraviolet light radiated | emitted from a light source part, or the ozone produced | generated when ambient oxygen receives ultraviolet light.
In addition to the step-up transformer that turns on the excimer lamp, the electrical component is provided with a heat exchanger and a blower fan as cooling means for cooling the transformer.

In addition, the conventional ultraviolet irradiation device was intended for a large work such as a liquid crystal substrate, but in recent years, the field of application has expanded, and depending on the application, on the other hand, there is a small and simple ultraviolet irradiation device. Development is underway.
For example, in a small ultraviolet irradiation device described in Japanese Patent Application Laid-Open No. 2011-181535 (Patent Document 2), the inside of the casing is separated into a lamp storage chamber in which an excimer lamp is stored by a partition and a circuit chamber having an electrical component. This structure is shown, and a cleaning gas made of an inert gas is supplied to the lamp housing chamber via a gas supply pipe.

In the conventional structures described in Patent Literature 1 and Patent Literature 2, it is necessary to isolate the accommodation place of the electrical equipment portion from the light source portion in an airtight manner by a partition wall. This is because if a small amount of oxygen is present around the light source part, the oxygen receives ultraviolet light from the excimer lamp and ozone is generated, and the electrical part may be deteriorated by the ozone. Similarly, it is necessary to always shield the ultraviolet rays emitted from the light source unit so that ozone is not generated around the electrical unit.
However, such an airtight structure complicates the configuration of the apparatus and the manufacturing process. For example, when the light source unit and the electrical unit are electrically connected, it is necessary to perform wiring while ensuring the airtightness of each accommodation place, and the work is complicated and the structure is complicated.

JP 2011-165540 A JP 2011-181535 A

  In view of the above problems, the problem to be solved by the present invention is to prevent the electrical component from being irradiated with ultraviolet rays from the lamp without airtightly isolating the electrical component from the excimer lamp, and Compact ultraviolet rays with an internal structure that can cool down the equipment more easily and make it easier than before to cool the electrical equipment efficiently and protect the electrical equipment from ozone generated by ultraviolet rays emitted from the lamp. It is to provide an irradiation apparatus.

  In order to solve the above-described problems, in the small ultraviolet irradiation device according to the present invention, an excimer lamp and an electrical component that supplies power to the excimer lamp are disposed inside the housing, and a light emission window is formed in the housing. In the small ultraviolet irradiation apparatus, a partition wall is provided so as to abut against one side wall of the housing and to form a communication path between the other side wall, and the inside of the housing is electrically connected to the inside by the partition wall. A compartment is divided into a storage chamber and a lamp storage chamber, the electrical component storage chamber stores the electrical component, the lamp storage chamber stores the excimer lamp, and the partition wall in the electrical component storage chamber is contacted. By providing an intake port on the contact side and providing an exhaust port on the power supply line side in the lamp storage chamber, cooling air is introduced into the electrical component storage chamber from the intake port to cool the electrical component, and Lamp storage The ozone generated by the inner is characterized in that so as to discharge from the exhaust port.

A glass tube having both ends open is fitted around the excimer lamp.
Further, a glass window is provided at the light exit port.

  According to the small ultraviolet irradiation device of the present invention, the inside of the housing is partitioned by the partition wall into the electrical component storage chamber and the lamp storage chamber, and these storage chambers communicate with each other at one end of the partition wall. An intake port is provided at the end of the storage chamber on the non-communication side, and an exhaust port is provided on the power supply line side of the lamp storage chamber, that is, on the communication path side, so that cooling air can be supplied from the intake port to the electrical component storage chamber. Introduced to cool the electrical component, and ozone generated in the lamp housing chamber can be discharged from the exhaust port by the cooling air, thereby preventing the corrosion of the electrical component by ultraviolet rays and ozone. It is.

The disassembled perspective view of the small ultraviolet irradiation device of the present invention. Side sectional drawing (A) of the Example of this invention, and its XX arrow directional view (B). The YY arrow line view of FIG. The exploded perspective view of other examples. FIG. 5 is a diagram for explaining the action of cooling air in the embodiment of FIG. 4. In still another embodiment, (A) is a side sectional view and (B) is a view taken along the line XX. Embodiment of an exhaust port.

1 is an exploded perspective view of the upper wall of the small ultraviolet irradiation device 1 of the present invention. FIG. 2A is a side sectional view thereof, and FIG. FIG. 3 is a view taken in the direction of arrows YY in FIG.
In the small ultraviolet irradiation device 1 of the present invention, a partition wall 3 is provided inside the housing 2, and one end portion (abutting end portion) 3 a of the partition wall 3 is in contact with one side wall 2 a of the housing 2. A communication path 4 is formed between the other end (open end) 3b and the other side wall 2b. The casing 2 is partitioned into an electrical component storage chamber 5 and a lamp storage chamber 6 by the partition wall 3.
An electrical component 7 is stored in the electrical component storage chamber 5, and an excimer lamp 8 having a long arc tube 8 a is stored in the lamp storage chamber 6. At this time, the partition wall 3 extends over the entire length to the discharge region of the arc tube 8 a of the excimer lamp 8.
Further, as shown in FIGS. 1 and 2B, the excimer lamp 8 is supported by a lamp holder 9 in the lamp storage chamber 6.

Similarly, as shown in FIGS. 1 and 2B, a light exit 10 is formed in the upper wall 2c of the housing 2 corresponding to the excimer lamp 8 in the lamp storage chamber 6.
In addition, as shown in FIG. 3, an intake port 11 is provided in the side wall 2 a on the side where the partition wall 3 of the electrical component housing chamber 5 abuts, and the side wall 2 c on the lamp housing chamber 5 side is provided. An exhaust port 12 is provided on the communication path side 4.
In addition, air blowing means 13 is disposed at the air inlet 11 of the electrical equipment housing chamber 5, and the cooling air sucked into the electrical equipment housing room 5 by the air blowing means 13 is used for the partition wall 3 and the housing 2. It flows into the lamp storage chamber 6 through the communication passage 4 formed between the side wall 2b and the exhaust port 12 and is exhausted.
As shown in FIG. 3, the wiring 15 from the electrical component 7 to the excimer lamp 8 is laid using the communication path 4.

In the above configuration, the ultraviolet light from the excimer lamp 8 is shielded by the partition wall 3 and is not irradiated to the electrical component 7.
On the other hand, the cooling air is sucked into the electrical equipment storage chamber 5 from the air inlet 11 by the blower means 13 and flows into the communication path 4 while cooling the electrical equipment 7. The cooling air flows from the communication path 4 toward the lamp housing chamber 6 and is exhausted from the exhaust port 12 while cooling the wiring 15.
At this time, around the excimer lamp 8, ultraviolet rays act on oxygen in the atmosphere to generate ozone. However, since cooling air flows from the communication passage 4 toward the exhaust port 12, ozone flows into the lamp by this flow. Since the air is sucked from the periphery of 8 to the exhaust port 12 side and is exhausted to the outside from this, ozone does not act on the electrical body 7 in the electrical chamber 5 to deteriorate it.
In addition, since the intake port 11 and the exhaust port 12 are provided on the substantially opposite side of the housing 2, ozone exhausted from the exhaust port 12 is taken into the intake port 11 again and flows into the housing 2. I don't have to.

FIG. 4 shows another embodiment. In this embodiment, the excimer lamp 8 provided in the lamp housing chamber 6 is covered with a separate quartz glass tube 16 whose both ends are open. The glass tube 16 covers the entire arc tube 8 a of the excimer lamp 8, and in particular, one end portion on the side of the communication path 4 is exposed without being covered by the glass tube 16. preferable.
As a result, as shown in FIG. 5, the one end side of the arc tube 8a of the excimer lamp 8 is cooled to a low temperature by the cooling air, but the discharge region of the arc tube 8a is covered with the glass tube 16, so that heat is accumulated. It becomes hot. Thus, a temperature distribution is generated in the longitudinal direction of the arc tube 8a of the lamp 8. Ozone is generated inside the glass tube 16 by the ultraviolet rays from the excimer lamp 8, but because ozone flows to the low temperature side by thermal convection based on this temperature gradient, in addition to the suction action by the cooling air flow path, The heat convection due to this temperature gradient acts, and ozone is exhausted more effectively.

In the above embodiment, the inside of the housing 2 is partitioned into the electrical component housing chamber 5 and the lamp housing chamber 6 within the same plane by the partition wall 3, but other embodiments shown in FIGS. 6 (A) and 6 (B). Then, it is set as the structure divided to an up-down direction.
That is, the partition wall 3 is provided horizontally in the housing 2, and the lower part thereof is an electrical component housing chamber 5 and the upper part is a lamp housing chamber 6. Also in this case, the communication path 4 is formed between the open end 3 b of the partition wall 3 and the side wall 2 b of the housing 2, while the exhaust port 12 is formed in the upper wall 2 c of the housing 2. .
The excimer lamp 8 is supported on the partition wall 3 via a lamp holder 9.
Further, in this embodiment, a light exit 10 is formed in the upper wall 2c of the housing 2, and a quartz glass window member 17 is fitted into the light exit 10.

In any of the above embodiments, the intake port 11 is formed on the side wall 2a of the housing 2. However, the intake port 11 may be formed on the upper wall 2c, and the exhaust port 12 may be formed on the upper wall 2c or the side wall 2d. It may be formed in any one, and furthermore, the light exit 10 may be formed not on the upper wall 2c but on the side wall 2d.
Further, in embodiments other than the embodiment of FIG. 6, it is also possible to fit a separate quartz glass window member to the light exit 10.
Furthermore, although the air blowing means 13 is provided at the intake port 11, a structure may be adopted in which a suction means is provided on the exhaust port 12 side to introduce cooling air into the housing 2.

FIG. 7 shows some specific examples of the shapes of the intake port 11 and the exhaust port 12.
FIG. 7A shows an example of a single opening, FIG. 7B shows an example of a plurality of vertically long openings, and FIG. 7C shows an example of a plurality of small circular openings. Of course, the shape is not limited to this.

As described above, in the small ultraviolet irradiation device of the present invention, the inside of the housing is partitioned by the partition wall into the electric body storage chamber and the lamp storage chamber, and a communication path is formed between the housing at one end of the partition wall. Thus, the ultraviolet rays from the excimer lamp are not irradiated to the electric body, and the cooling air introduced into the electric body housing chamber from the intake port cools the electric body, and then the lamp passage from the communication path to the lamp housing room side. Since the ozone generated around the lamp in the lamp housing chamber is discharged from the exhaust port by the cooling air, ozone acts on the electrical component. There is nothing.
Further, by fitting the glass tube to the lamp, a temperature gradient is formed in the glass tube, and in addition to the suction action by the cooling air, the thermal convection action by the temperature gradient acts, and the ozone around the lamp Can be effectively exhausted from the exhaust port.
As described above, since the ventilation path of the intake port—electric component housing chamber—communication path—lamp housing chamber—exhaust port is configured by the partition wall in the housing, a compact and simple structure of a small ultraviolet irradiation device is realized. I was able to.

DESCRIPTION OF SYMBOLS 1 Small ultraviolet irradiation device 2 Housing | casing 2a, 2b, 2d Side wall 2c Upper wall 3 Partition wall 3a Contact end part 3b Open end part 4 Communication path 5 Electrical component storage chamber 6 Lamp storage chamber 7 Electrical component 8 Excimer lamp 8a Light emission tube DESCRIPTION OF SYMBOLS 9 Holder 10 Light emission port 11 Intake port 12 Exhaust port 13 Blower means 15 Wiring 16 Glass tube 17 Window member

Claims (3)

In a small ultraviolet irradiation device in which an excimer lamp and an electrical component that supplies power to the excimer lamp are disposed inside the housing, and a light emission port is formed in the housing.
Provided with a partition wall that shields ultraviolet rays so as to be in contact with one side wall of the housing and to form a communication path between the other side wall;
The inside of the housing is partitioned into an electrical component storage chamber and a lamp storage chamber by the partition wall, and the electrical component in the electrical component storage chamber and the excimer lamp in the lamp storage chamber are supplied via the communication path. Connect with wires,
An intake port is provided on the side where the partition wall abuts when viewed from the communication path in the electrical equipment storage chamber, and an exhaust port is provided on the communication path side in the lamp storage chamber;
Cooling air is introduced from the intake port into the electrical housing chamber to cool the electrical device, and ozone generated in the lamp housing chamber is discharged from the exhaust port. apparatus.
  The small ultraviolet irradiation device according to claim 1, wherein a glass tube having both ends opened is fitted around the excimer lamp. The small ultraviolet irradiation device according to claim 1, wherein a glass window is provided at the light exit port.

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