JP2016139462A - Excimer lamp device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent, in an excimer lamp and an excimer lamp device which comprises a lamp house for housing a power source for the excimer lamp, attraction of impurities to the excimer lamp and damage on a power source member due to ozone generated by an ultraviolet ray emitted from the excimer lamp.SOLUTION: An excimer lamp device comprises: a lamp housing chamber 6 in which an excimer lamp is housed; and a power source housing chamber 7 in which a power source is housed. Gas 11B flowing through the power source housing chamber passes through a communication part 10, flows out to the lamp housing chamber, and then discharged from an exhaust port 8 to the downstream side of the excimer lamp in the lamp housing chamber 6.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an excimer lamp device including an excimer lamp that radiates ultraviolet rays by a dielectric barrier discharge or a capacitively coupled high-frequency discharge via a dielectric, and a casing that houses a power source of the excimer lamp, and more particularly, by ultraviolet rays. The present invention relates to an ozone generator using an excimer lamp that generates ozone.

  Conventionally, an excimer lamp that emits excimer light from a discharge gas filled in an arc tube by dielectric barrier discharge has been developed. For example, Patent Document 1 describes an excimer lamp that includes an inner electrode inside an arc tube and an outer electrode outside the arc tube.

  An ozone generator that generates ozone by irradiating oxygen in the atmosphere with ultraviolet rays (for example, a wavelength of 172 nm) emitted by such an excimer lamp has been developed, and miniaturization and simplification are desired.

  For example, in Patent Document 2, a lamp storage chamber provided with an excimer lamp in a casing and an electrical component storage chamber provided with an electrical component for supplying power to the excimer lamp (a power supply member for lighting the excimer lamp) are separated by a partition wall. The structure is shown. The electrical component storage chamber and the lamp storage chamber communicate with each other through a communication path, and the wiring (feed line) from the electrical component to the excimer lamp is connected using the communication path. The electrical component storage chamber is provided with a blower fan and an intake port as cooling means for cooling the excimer lamp and the electrical component, and the feed line lamp storage chamber is provided with an exhaust port. Then, cooling air is introduced from the intake port into the electrical housing chamber to cool the electrical body, and the excimer lamp is cooled by the cooling air flowing through the communication path to the lamp housing chamber.

  In the excimer lamp device described in Patent Document 2, a substance such as foreign matter or impure gas (hereinafter referred to as an impurity) is generated from the power circuit member, and the impurity adheres to the excimer lamp when passing around the excimer lamp together with the cooling air. There is a fear. Further, the power supply member in the lamp housing chamber is exposed to ultraviolet rays emitted from the excimer lamp, so that impurities may be generated and may adhere to the excimer lamp when passing around the excimer lamp together with the cooling air. As described above, impurities adhere to the surface of the arc tube of the excimer lamp, resulting in problems such as a decrease in illuminance and a breakage of the arc tube. In particular, an excimer lamp having an outer electrode outside the arc tube has a problem that an abnormal discharge such as a spark occurs due to impurities coming into contact with the outer electrode, causing a problem that the outer electrode or the arc tube is damaged.

JP2013-073909A JP2014-103028

  In view of the above problems, the problem to be solved by the present invention is to efficiently cool the power supply and the lamp in the excimer lamp device, and to solve the problem of the excimer lamp caused by impurities generated from the power supply member and the power supply line. Another object of the present invention is to provide an excimer lamp device having a small and simple internal structure that can be prevented and that can prevent damage to a power source or a power supply line due to ozone.

  An excimer lamp device according to the present invention includes an excimer lamp, a lamp storage chamber in which the excimer lamp is stored, a power source for the excimer lamp, and a power supply storage chamber in which the power source is stored. The gas flowing through the lamp storage chamber is downstream of the excimer lamp in the lamp storage chamber, and exhausted from an exhaust port provided downstream of the excimer lamp in the lamp storage chamber.

  By having such a structure, the gas flowing out from the power supply chamber does not contact the excimer lamp, and impurities generated from the power supply member can be prevented from adhering to the excimer lamp.

  Furthermore, the excimer lamp device of the present invention has a communication path that communicates the space downstream of the excimer lamp in the lamp storage chamber and the space downstream of the power storage position of the power storage chamber.

  By having such a structure, the gas flowing out of the power storage chamber can be flowed into the lamp storage chamber without contacting the excimer lamp.

  Furthermore, in the excimer lamp device of the present invention, the power supply line connecting the power source and the excimer lamp connects the power source and the excimer lamp via the communication path.

  By having such a structure, the feeder is connected from the downstream side of the excimer lamp. Therefore, impurities generated from the power supply line are not attached to the excimer lamp. Even if ozone is generated around the excimer lamp, the power supply line is partially covered with a gas having a low ozone content flowing out from the power storage chamber, and the power supply line is damaged by contact of ozone with the power supply line. This can be suppressed.

  Furthermore, the excimer lamp device of the present invention has an air inlet and a partition wall that partially isolates the inside of the excimer lamp device into a power storage chamber and a lamp storage chamber, and the gas flowing into the excimer lamp device from the air inlet is The partition wall separates the gas flowing through the lamp storage chamber and the gas flowing through the power storage chamber. Since the gas flowing in the lamp storage chamber and the gas flowing in the power storage chamber are merged and then exhausted outside the excimer lamp device, there is no need to provide numerous intake / exhaust ports and intake / exhaust means. An excimer lamp device having the structure can be provided.

  Furthermore, the excimer lamp device of the present invention includes an intake port above the excimer lamp and an exhaust port below the excimer lamp. By having such a structure, it is possible to reliably exhaust impurities generated from a power source and a power supply line and ozone generated by ultraviolet rays.

  Furthermore, the present invention is suitable for an excimer lamp device intended to generate ozone by flowing a gas containing oxygen into the lamp housing chamber.

  According to the present invention, the excimer lamp can be prevented from malfunctioning due to impurities generated from the power supply member and the power supply line, and the power supply and the power supply line can be prevented from being damaged by ultraviolet light generated from the lamp and ozone generated by the ultraviolet light. In addition, an excimer lamp device having a simple internal structure can be provided.

Cross-sectional schematic diagram for explaining the internal structure of the embodiment Cross-sectional schematic diagram showing the flow of gas inside the lamp device according to the embodiment Cross-sectional schematic diagram for explaining the internal structure and gas flow of other embodiments

  FIG. 1 is a schematic cross-sectional view for explaining the internal structure of the embodiment of the present invention.

  An excimer lamp device (hereinafter referred to as a lamp device) shown in FIG. 1 includes an excimer lamp (hereinafter referred to as a lamp) 1 and a power source 2 for lighting the lamp.

An intake port 4 is provided in the housing back surface portion 3 </ b> A, an exhaust port 8 is provided in the housing front surface portion 3 </ b> B, and an intake means 4 </ b> A is provided adjacent to the intake port 4. Inside the housing 3, a power storage chamber 7 in which the power source 2 is disposed and a lamp storage chamber 6 having the lamp 1 are provided, and the power storage chamber 7 and the lamp storage chamber are partially separated by a partition wall 5. . The partition wall 5 is provided with a communication passage 10 that allows the lamp storage chamber 6 and the power storage chamber 7 to communicate with each other, and the lamp storage chamber 6 and the power storage chamber 7 are connected to each other at a flow dividing portion 9 on the inlet 4 side of the partition wall 5. Spatially connected. The lamp 1 and the power source 2 are electrically connected by a power supply line 12 that passes through the communication path 10. That is, the partition wall 5 separates the lamp storage chamber 6 and the power supply storage chamber 7 except for the flow dividing section 9 and the communication path 10.

  FIG. 2 is a schematic cross-sectional view showing a gas flow inside the lamp device according to the embodiment of the present invention.

  When electric power is supplied from the power source 2 through the feeder line 12 and the lamp 1 is turned on, the gas 11 flows into the housing 3 from the intake port 4 by the intake means 4A. The gas 11 that has flowed into the housing 3 is divided into a gas 11A that flows into the lamp storage chamber and a gas 11B that flows into the power storage chamber at the flow dividing section 9.

  The gas 11 </ b> A flowing into the lamp storage chamber 6 flows around the lamp 1 disposed in the lamp storage chamber 6 to cool the lamp 1 and is exhausted from the exhaust port 8 to the outside of the housing 3. If oxygen is present in the gas 11A, the ultraviolet rays and oxygen irradiated from the lamp 1 react to generate ozone around the lamp 1, and the ozone is exhausted from the exhaust port 8 to the outside of the housing 3 in the same manner as the gas 11A.

  The gas 11B flowing into the power storage chamber 7 cools the power source 2 by flowing around the power source 2 disposed in the power storage chamber 7, passes through the communication path 10, and exhausts with the lamp 1 in the lamp storage chamber 6. It flows out into the space between the ports 8 and is exhausted from the exhaust port 8 in the same manner as the gas 11A.

  The gas 11B flowing in the power storage chamber 7 in this way flows out to the space between the lamp 1 and the exhaust port 8 in the lamp storage chamber 6 via the communication path 10, so that the gas 11B flowing in the power storage chamber Is exhausted from the exhaust port 8 without contacting the lamp 1. This prevents impurities generated from the power source 2 from coming into contact with the lamp 1 together with the gas 11B.

The power supply line 12 penetrates the communication path 10 and is electrically connected to the lamp 1 and the power supply 2. In the lamp storage chamber 6, the power supply line 12 is connected to the lamp 1 on the upstream side of the gas 11 </ b> A. As a result, impurities generated when the power supply line 12 is exposed to ultraviolet rays are discharged from the exhaust port 8 together with the gas 11A (or the gas 11B) and do not contact the lamp 1.

If the power supply line 12 exists on the downstream side of the gas 11 </ b> A, when the gas 11 </ b> A contains oxygen, ozone generated around the lamp may come into contact with the power supply line 12, and the power supply line may be deteriorated. However, the power supply line 12 penetrates the communication path 10 and is connected to the lamp 1, so that the power supply line 12 is partially covered with the gas 11 </ b> B passing through the communication path 10 in the lamp storage chamber 6. The gas 11B does not flow around the lamp 1, and the contained ozone is less than the gas 11A. Thereby, contact of ozone, the feeder 12 and ozone is suppressed, and deterioration of the feeder 12 due to ozone is prevented.

  In the embodiment of the present invention, the housing back wall 3A is provided with the air inlet 4 and the housing front wall 3B is provided with the air outlet 8. However, the housing back wall 3A and the housing front wall 3B are For example, it may be a housing wall on either the upper, lower, left or right side. However, when ozone is generated using the atmosphere as the gas 11, ozone heavier than the atmosphere can be reliably exhausted from the exhaust port 8 by providing the housing front wall below the lamp 1.

  In the embodiment of the present invention, the intake means 4A is provided adjacent to the intake port 4, but the housing 3 only needs to have a blowing means capable of flowing gas as shown in FIG. For example, an exhaust unit (not shown) may be provided adjacent to the exhaust port 8. However, when ozone is generated in the housing 3, the exhaust means (not shown) may be oxidized and damaged by the generated ozone. Further, since there is a possibility that the exhaust means may be defective due to impurities generated from the power supply line 12, it is desirable to have the intake means 4A upstream from the lamp 1 lamp 1.

  As another embodiment of the present invention, as shown in FIG. 3, the partition wall 5 facing the flow dividing section 9 is provided with an auxiliary wall 5A along the housing rear wall 3A. The amount of the gas 11B flowing into the power storage chamber 7 can be limited by the auxiliary wall 5A. When the power source 2 is appropriately cooled, the gas 11B flowing into the power storage chamber 7 flows again into the flow dividing portion 9 and flows into the lamp storage chamber 6. Can be prevented.

  Provided is an excimer lamp device having a small and simplified internal structure that can prevent a lamp failure due to a foreign matter generated from a power supply member and suppress damage to the power supply member by ultraviolet rays generated from the lamp or ozone generated by the ultraviolet rays. can do.

DESCRIPTION OF SYMBOLS 1 Excimer lamp 2 Power supply 3 Housing | casing 3A Housing | casing back wall 3B Housing front wall 4 Intake port 4A Intake means 5 Bulkhead 6 Lamp storage chamber 7 Power supply storage chamber 8 Exhaust port 9 Dividing part 10 Communication path 11 From the intake port Inflowing gas 11A Gas 11B flowing into the lamp storage chamber 6 Power supply storage chamber 7 Gas flowing in 12 Power supply line

Claims (6)

A lamp storage room for storing excimer lamps;
In an excimer lamp device having a power storage chamber in which a power source is stored,
An exhaust port is provided downstream of the excimer lamp in the lamp storage chamber,
The gas flowing out of the power storage chamber is
On the downstream side of the excimer lamp in the lamp storage chamber,
Merges with the gas flowing through the lamp storage chamber,
Excimer lamp device exhausted from said exhaust port A communication path for communicating the lamp storage chamber and the power storage chamber;
The excimer lamp device according to claim 1, wherein the communication path is provided on the downstream side of the excimer lamp in the lamp storage chamber. By a power supply line penetrating the communication path,
The excimer lamp device according to claim 2, wherein electric power is supplied from the power source to the excimer lamp. The excimer lamp device includes an inlet,
A partition that partially isolates the inside of the excimer lamp device into the power storage chamber and the lamp storage chamber;
The gas flowing into the excimer lamp device from the intake port is
4. The excimer lamp device according to claim 1, wherein the excimer lamp device is divided into a gas flowing through the lamp storage chamber and a gas flowing through the power supply storage chamber by the partition wall. The excimer lamp device is
The intake port is provided above the excimer lamp,
The excimer lamp device according to claim 4, wherein the exhaust port is provided below the excimer lamp. An excimer lamp device according to claim 1,
The gas flowing through the lamp storage chamber is a gas containing oxygen,
An ozone generator using an excimer lamp, wherein ozone is generated by ultraviolet rays emitted from the excimer lamp

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