JP2005050705A - Static charge eliminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static charge eliminator capable of exerting high electromagnetic irradiation noise prevention effect by effectively shielding electromagnetic irradiation noise. <P>SOLUTION: The static charge eliminator R1 has a lamp part 1 provided with light-emitting devices 2A to 2D. The light-emitting device 2 has a dielectric barrier discharge lamp 21 and an external tube 22. Vacuum ultraviolet ray is irradiated from the dielectric barrier discharge lamp 21, and a metal mesh 31 for shielding the electromagnetic irradiation noise irradiated from the dielectric barrier discharge lamp 21 is arranged on the external tube 22. The vacuum ultraviolet ray irradiated from the light-emitting devices 2A to 2D of the lamp part 1 is irradiated on an object from which static electricity is to be eliminated 5 put on an irradiation stand 4 arranged under the lamp part 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a static eliminator that includes a dielectric barrier discharge lamp that forms excimer molecules by dielectric barrier discharge and radiates ultraviolet rays emitted from the excimer molecules, and neutralizes an object to be neutralized by the ultraviolet rays.

2. Description of the Related Art Conventionally, a static eliminator (static eliminator) is used as a device for removing static electricity generated on a precision substrate such as a semiconductor or a liquid crystal in a manufacturing process of a semiconductor or a display. As a conventional static eliminator, for example, there is a static eliminator disclosed in JP-A-9-69478. This static eliminator is equipped with an ultraviolet lamp that irradiates an object to which static electricity is to be removed with ultraviolet rays, and is provided with a grounded conductive member at a position close to the surface of the envelope of the ultraviolet lamp. . By providing such a grounded conductive member, static electricity can be sufficiently removed.
Japanese Patent Laid-Open No. 9-69478

  By the way, with this type of static eliminator, it is of course necessary to sufficiently remove static electricity. However, radiation noise caused by the lighting of an ultraviolet lamp may cause damage to semiconductor devices and malfunction of peripheral precision equipment. There is. For this reason, what reduced electromagnetic radiation noise as much as possible is required.

  However, in the static eliminator disclosed in the above-mentioned Patent Document 1, no particular countermeasure has been taken with respect to the removal of electromagnetic radiation noise caused by turning on the ultraviolet lamp.

  Therefore, an object of the present invention is to provide a static eliminator that can effectively shield electromagnetic radiation noise caused by lighting of an ultraviolet lamp and exhibit a high effect of preventing electromagnetic radiation noise.

  A static eliminator according to the present invention that has solved the above-described problems includes a tubular discharge vessel, an internal electrode provided in the discharge vessel, and an external electrode provided on the outer periphery of the discharge vessel, and provides ultraviolet light. A dielectric barrier discharge lamp for irradiating and a static elimination target portion for disposing a static elimination target to be eliminated by ultraviolet rays emitted from the dielectric barrier discharge lamp. A partition member that partitions the object to be neutralized is disposed, and the partition member has a light transmission portion made of a light transmissive material that transmits ultraviolet rays, and is grounded to the partition member. A metal mesh is provided.

  In the static eliminator according to the present invention, a partition member is disposed between the dielectric barrier discharge lamp and the static elimination object, and a metal mesh grounded to the partition member is provided. Since the grounded metal mesh effectively shields electromagnetic radiation noise radiated from the dielectric barrier discharge lamp, the noise prevention effect can be enhanced. The tubular discharge vessel here may be, for example, a single tube or a double tube as long as it is tubular.

  Here, it is preferable that the metal mesh is disposed on the dielectric barrier discharge lamp side of the partition member. As described above, since the metal mesh is provided on the inner side of the outer tube, the metal mesh can be prevented from being exposed to the outside, so that the metal mesh can be prevented from being damaged.

  Further, it is preferable that a cooling gas circulation port through which a cooling gas for cooling the dielectric barrier discharge lamp flows is provided. Thus, the dielectric barrier discharge lamp can be easily cooled by forming the cooling gas flow port through which the cooling gas flows.

  Furthermore, it is preferable that the static elimination target portion is in a reduced pressure mode. Since the charge removal target portion is depressurized, the work can be easily performed when performing charge removal under reduced pressure using vacuum ultraviolet rays radiated from the dielectric barrier discharge lamp.

  Furthermore, it is preferable that the charge removal target portion has an inert gas atmosphere. When the static elimination target part is an inert gas atmosphere such as nitrogen gas or argon gas, it is possible to supply a sufficient source of ions for static elimination of the static elimination target, as well as oxidation on the static elimination target surface, etc. Undesirable reaction due to can be prevented.

  ADVANTAGE OF THE INVENTION According to this invention, the static elimination apparatus which can effectively shield the electromagnetic radiation noise produced by lighting of an ultraviolet lamp and can exhibit the high electromagnetic radiation noise prevention effect can be provided.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol shall be used for the same element and the overlapping description is abbreviate | omitted.

  FIG. 1 is a partially cutaway side view of a lamp portion of a static eliminator according to a first embodiment of the present invention, and FIG. 2 is a bottom plan view of the static eliminator according to the first embodiment.

  As shown in FIG. 1, the static eliminator R1 according to the present embodiment includes a lamp unit 1, and as shown in FIG. 2A to 2D are provided. Each of these light emitting devices 2A to 2D has an elongated tubular shape, is arranged so as to be parallel to each other, and is attached to a housing frame 3 made of a metal material. These light emitting devices 2A to 2D all have the same structure, and the structure will be described with reference to FIGS. As shown in FIGS. 3 and 4, the light emitting device 2 includes a dielectric barrier discharge lamp 21 and an outer tube 22 serving as a partition member of the present invention. As shown in FIG. 5, the dielectric barrier discharge lamp 21 includes an elongated tubular light transmissive discharge vessel (hereinafter referred to as “discharge vessel”) 23. The discharge vessel 23 is a glass bulb made of a cylindrical glass material having an outer diameter of 10 mm, an inner diameter of 8 mm (wall thickness of 1 mm), and a length of 400 mm. Inside the discharge vessel 23, an internal electrode 24 made of a long material is provided. Here, the long material is a so-called elongate member whose length in the orthogonal direction is short with respect to the length in the longitudinal direction, and includes, for example, a wire material, a bar material, a tube material, or an elongate plate material. A shape etc. are not ask | required.

  The internal electrode 24 is a solid metal wire made of tungsten, for example, and is provided through the discharge vessel 23 in the longitudinal direction. A coil portion 24 </ b> A is formed on one end side of the internal electrode 24. The coil portion 24A applies tension to the internal electrode 24 in the length direction. Metal foils 25, 25 made of molybdenum foil containing molybdenum are connected to both ends of the internal electrode 24. The metal foil 25 is a plate-like body having a horizontally long rectangular surface, and both end portions of the internal electrode 24 are connected to the central portion in the height direction on the surface on one end side thereof, for example, by welding.

  Further, both end portions in the longitudinal direction of the discharge vessel 23 are pinch-sealed to form pinch seal portions 26 and 26, respectively, and the inside of the discharge vessel 23 is sealed. Metal foils 25 and 25 are respectively disposed inside the pinch seal portions 26 and 26, and the metal foils 25 and 25 are connected to both ends of the internal electrode 24 by the pinch seal portions 26 and 26. Furthermore, lead wires 27 and 27 made of, for example, molybdenum wires are connected to the center in the height direction on the surfaces on the other end side of the metal foils 25 and 25, for example, by welding. In the present embodiment, these lead wires 27 are each welded to the same surface as the surface to which the internal electrode 24 is connected, but may be welded to different surfaces.

  An outer electrode 28 made of a seamless metal mesh is provided on the outer peripheral portion of the discharge vessel 23 over the entire area in the circumferential direction. In addition, an exhaust pipe 29 that is cut off after the excimer discharge gas is sealed in the discharge vessel 23 is formed on the other end side of the discharge vessel 23. The external electrode 28 is disposed between the vicinity of the sealed exhaust pipe 29 and the position where no discharge is generated in the vicinity of the tungsten coil portion 24A.

  Further, an AC power supply 30 is connected to each of the internal electrode 24 and the external electrode 28, and an AC current is supplied from the AC power supply 30. The external electrode 28 is connected to the ground potential.

  The discharge vessel 23 is filled with a rare gas mixed gas containing xenon as a main discharge gas, and an AC current having a frequency of about 65 kHz and Vp-p to 3 kV is supplied from the AC power supply 30 between the external electrode 28 and the internal electrode 24. Is applied to discharge the discharge gas, and vacuum ultraviolet rays are emitted.

  The outer tube 22 is a transparent material that transmits vacuum ultraviolet light as light emitted from the dielectric barrier discharge lamp 21. The outer tube 22 is made of, for example, synthetic quartz and has, for example, an elongated tubular shape having an outer diameter of 25 mm and an inner diameter of 22 mm (wall thickness: 1.5 mm). Further, a metal mesh 31 for shielding electromagnetic radiation noise radiated from the dielectric barrier discharge lamp 21 or the lighting wiring is provided on the inner surface of the outer tube 22 over the entire circumference. The metal mesh 31 is provided not only in the radiation region of the dielectric barrier discharge lamp 21 (the range in which the external electrode 28 is provided) but also in the range covering the entire dielectric barrier discharge lamp 21. Since the metal mesh 31 is a mesh, almost the entire outer tube 22 can be used as a light transmission part.

  A dielectric barrier discharge lamp 21 is accommodated in the outer tube 22, and dielectric barrier discharge lamp holding members 32, 32 are provided at both inner ends of the outer tube 22, respectively. Both ends of the lamp 21 are held and fixed. Further, caps 34 and 34 made of a metal material are attached to both ends of the outer tube 22, and the inside of the outer tube 22 is hermetically sealed by these caps 34 and 34. The bases 34 and 34 are provided so as to be in contact with the metal mesh 31, and the bases 34 and 34 and the metal mesh 31 are electrically connected.

  The external electrode fitting 33 is connected to the external electrode 28 in the dielectric barrier discharge lamp 21, and the external electrode 28 and the base 34 in the dielectric barrier discharge lamp 21 are connected via the external electrode fitting 33. . Further, since the base 34 and the metal mesh 31 are electrically connected, the metal mesh 31 and the base 34 are grounded to the ground potential through the external electrode fitting 33 and the external electrode 28.

  The base 34 is formed with a cooling gas flow port 35 that serves as a flow port when cooling gas for cooling the dielectric barrier discharge lamp 21 flows into and out of the outer tube 22, and a connection terminal 36. As the cooling gas circulated from the cooling gas circulation port 35 to the inside of the outer tube 22, for example, nitrogen gas that hardly absorbs vacuum ultraviolet rays radiated from the dielectric barrier discharge lamp 21 is used. Further, a lighting wiring 37 of the dielectric barrier discharge lamp 21 is connected to the connection terminal 36.

  The housing frame 3 includes four side plates 11 to 14 and a top plate 15 and has a vertically long and substantially rectangular parallelepiped shape. The light emitting devices 2 </ b> A to 2 </ b> D are juxtaposed along the long direction sandwiched between the short side plates 11 and 13 in the housing frame 3, and can irradiate vacuum ultraviolet rays over a wide range.

  As shown in FIGS. 1 and 2, each of the light emitting devices 2 </ b> A to 2 </ b> D is attached with a base 34 fixed to the side plates 11 and 13 of the housing frame 3. As shown in FIG. 1, an irradiation stand 4 indicated by a virtual line is provided below the lamp unit 1, and the top of the irradiation stand 4 serves as a charge removal target portion. 5 is placed, and the static elimination object 5 is arranged in the static elimination target part.

  In the static elimination apparatus R1 which concerns on this embodiment which has the above structure, the static elimination object 5 mounted on the irradiation stand 4 is static-eliminated with the ultraviolet-ray irradiated from the lamp part 1. FIG. At this time, a metal mesh 31 is provided on the outer tube 22 of the light emitting devices 2 </ b> A to 2 </ b> D in the lamp unit 1. The metal mesh 31 effectively shields electromagnetic radiation noise generated by the light emitting devices 2A to 2D. Therefore, the effect of preventing noise radiated from the lamp unit 1 can be enhanced. A specific noise prevention effect will be described later.

  In the light emitting device 2 used in the static eliminator R <b> 1 according to this embodiment, the metal mesh 31 is provided on the inner surface of the outer tube 22. For this reason, since the metal mesh 31 can be prevented from being exposed to the outside, damage to the metal mesh 31 can be prevented. Further, even if the metal mesh 31 is broken, the broken object can be prevented from entering the static elimination target part, so that a state in which foreign matter does not enter the static elimination target part can be maintained. Further, in the light emitting device 2, a cooling gas circulation port 35 is formed in the base 34 so that the cooling gas can be easily introduced into the outer tube 22. Therefore, the dielectric barrier discharge lamp 21 can be easily cooled. Further, in the light emitting device 2, since the base 34 is provided at the end of the outer tube 22, the dielectric barrier discharge lamp 21 can be reliably and easily fixed to the outer tube 22, and the dielectric The shielding effect of electromagnetic radiation noise can be enhanced with respect to the major axis direction of the barrier discharge lamp 21. Furthermore, since the metal mesh 31 is connected to the external electrode 28 in the dielectric barrier discharge lamp 21 via the base 34 and is grounded to the earth potential via the external electrode 28, the metal mesh 31 is easily grounded. Can be made.

  Moreover, various dielectric barrier discharge lamps can be used for the static eliminator according to the present embodiment. Next, various modifications of the dielectric barrier discharge lamp that can be used here will be described in order.

  FIG. 6 is a side view of a light emitting device according to a first modification of the present invention. As shown in FIG. 6, the light emitting device MR <b> 1 according to the modification is different from the light emitting device 2 shown in FIG. 3 in the form of the outer tube. The outer tube 38 in the light emitting device MR1 according to the present modification is made of synthetic quartz, which is a transparent material that transmits vacuum ultraviolet rays. The outer tube 38 is open at one end side and closed at the other end side, and a base 34 is attached to the open one end side. The other end is sealed with the outer tube 38 itself.

  A dielectric barrier discharge lamp 21 similar to that in the first embodiment is accommodated in the outer tube 38. In addition, dielectric barrier discharge lamp holding members 32 and 32 are provided in the vicinity of both end portions inside the outer tube 38, respectively, and hold and fix the dielectric barrier discharge lamp 21. The base 34 is provided with an external electrode fitting 33, and the external electrode 28 (FIG. 5) in the dielectric barrier discharge lamp 21 and the base 34 are electrically connected. In addition, the base 34 is provided with a connection terminal 36 to which a cooling gas circulation port 35 and a lighting wiring 37 when the cooling gas flows into the outer tube 38 are connected.

  Furthermore, a metal mesh 31 for shielding electromagnetic radiation noise radiated from the dielectric barrier discharge lamp 21 or the lighting wiring is provided on the inner surface of the outer tube 38 over the entire circumference. The metal mesh 31 is provided in a region including the entire region connecting the dielectric barrier discharge lamp holding members 32 and 32, and not only the radiation region of the dielectric barrier discharge lamp 21 but also the dielectric barrier discharge lamp 21. It is provided in a range that covers the whole. The metal mesh 31 on the other end side of the outer tube 38 is closed so as to cover the dielectric barrier discharge lamp holding member 32. Since the metal mesh 31 is a mesh, almost the entire outer tube 38 can be used as a light transmission portion.

  The metal mesh 31 is provided at a position in contact with the base 34 and is connected to the external electrode 28 of the dielectric barrier discharge lamp 21 via the base 34 and the external electrode fitting 33. Then, by connecting the external electrode 28 to the ground potential, the metal mesh 31 is connected to the ground potential.

  In such a light emitting device MR1 according to this modification, a metal mesh 31 is provided on the outer tube 38. The metal mesh 31 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamp 21. Therefore, even if this light emitting device MR1 is used in the lamp portion shown in FIG. 1, the effect of preventing noise emitted from the lamp portion can be enhanced. Further, against electromagnetic radiation noise in the major axis direction of the dielectric barrier discharge lamp 21 on the other end side where the outer tube 38 is closed, the dielectric barrier discharge lamp holding member 32 is covered with the metal mesh 31 and closed. Electromagnetic radiation noise can be shielded.

  Next, a light emitting device according to a second modification will be described. FIG. 7 is a side view of a light emitting device according to a second modification, and FIG. 8 is a cross-sectional view taken along line BB of FIG. As shown in FIGS. 7 and 8, the light emitting device MR <b> 2 according to this modification is different from the first embodiment in that the metal mesh 31 is provided over the entire circumference of the outer tube 22. A reflecting member 39 made of a metal material and a metal mesh 31 are provided. The reflecting member 39 is disposed along the inner side of the outer tube 22 and is provided so as to cover a part slightly below the upper half of the outer tube 22. The reflecting member 39 has a circular arc shape in cross section, and the lower side opens as a light transmission part. It is provided as such. The reflecting member 39 is made of, for example, aluminum, and increases the radiation intensity of the vacuum ultraviolet rays emitted from the dielectric barrier discharge lamp 21 and gives directionality to the emitted light. The vacuum ultraviolet rays emitted from the dielectric barrier discharge lamp 21 or reflected by the reflecting member 39 are emitted from an opened portion formed on the lower side of the reflecting member 39.

  A metal mesh 31 is provided at a position corresponding to an opening formed on the inner side of the outer tube 22 below the reflecting member 39. The metal mesh 31 is in contact with the reflecting member 39 and is disposed over the entire opening formed on the lower side of the reflecting member 39. The metal mesh 31 is connected to the base 34 and connected to the ground potential via the external electrode fitting 33 and the external electrode 28 formed on the dielectric barrier discharge lamp 21.

  In the light emitting device MR2 according to the present modification having the above-described configuration, the reflecting member 39 is provided, and vacuum ultraviolet rays are irradiated from an opening formed on the lower side of the reflecting member 39. The action of the reflecting member 39 can increase the radiation intensity and provide directionality. Further, a metal mesh 31 is provided at the opening where the vacuum ultraviolet rays are emitted. Since the metal mesh 31 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamp 21, the noise prevention effect can be enhanced.

  Also, a different embodiment of the dielectric barrier discharge lamp can be used. Examples thereof will be described below. FIG. 9 is a side view of a dielectric barrier discharge lamp according to a first modification. As shown in FIG. 9, the dielectric barrier discharge lamp ML <b> 1 according to this modification is different from the dielectric barrier discharge lamp 21 in the configuration of the internal electrodes. A dielectric barrier discharge lamp ML1 shown in FIG. 9 includes a discharge vessel 23, and an internal electrode 41 is provided inside the discharge vessel 23.

  The internal electrode 41 has a main body 42 made of, for example, a tungsten wire extending from the other end of the discharge vessel 23 to a position near one end. A sleeve 43 made of, for example, a Ni sleeve is attached to one end side of the main body 42, and a tension holding wire 44 is connected to the sleeve 43. Thus, the sleeve 43 connects the main body portion 42 and the tension holding wire 44. The tension holding wire 44 includes a coil portion and a straight portion. The coil portion has a biasing force that biases in the pulling direction.

  Further, the other end portion side of the main body portion 42 and the straight portion of the tension holding wire 44 are fixed to metal foils 25 and 25 provided at both end portions of the discharge vessel 23, respectively. The main body 42 is tensioned inside the discharge vessel 23 by the urging force of the coil portion in the tension holding wire 44. A dielectric barrier discharge lamp ML1 having an internal electrode in which the main body portion 42 and the tension holding wire 44 are disconnected and connected by a sleeve 43 can be used. The dielectric barrier discharge lamp ML1 can be used for any of the outer tubes 22 in the light emitting devices 2, MR1 and MR2.

  Furthermore, instead of the dielectric barrier discharge lamp 21 shown in FIG. 5, a dielectric barrier discharge lamp ML2 shown in FIG. 10 can be used as a second modification. This dielectric barrier discharge lamp ML2 has an external electrode 45 made of an aluminum vapor deposition film, instead of the seamless metal net used in the first embodiment. The outer electrode 45 is located at 120 ° on both sides of the outer periphery between the vicinity of the exhaust pipe 29 and a position where the discharge pipe 29 is not formed near the coil portion 24A of the internal electrode 24. Formed in the range.

  In such a dielectric barrier discharge lamp ML2, the external electrode 45 also functions as a reflecting mirror, and light is emitted from the lower side of the discharge vessel 23. Since no discharge is generated on the wall surface of the discharge vessel 23 where the lower light is emitted, deterioration of the discharge vessel particularly at the position where the light is emitted can be made difficult to occur. Furthermore, when the dielectric barrier discharge lamp ML2 is accommodated in the outer tube 22 shown in FIG. 3, the metal mesh 31 is also present at a position that does not contribute to the discharge in the dielectric barrier discharge lamp ML2. Therefore, the radiation noise in the light radiation direction can be suitably reduced.

  Next, a light emitting device according to a third modification will be described. 11 is a side view of the light emitting device according to the third modification, FIG. 12 is a cross-sectional view taken along the line CC of FIG. 11, and FIG. 13A is a dielectric barrier used in the light emitting device according to the third modification. The partially broken side view of a discharge lamp, (b) is the front view.

  As shown in FIGS. 11 to 13, the light emitting device MR <b> 3 according to this embodiment includes a dielectric barrier discharge lamp 50 and an outer tube 51. As shown in FIG. 12, the dielectric barrier discharge lamp 50 is a so-called double tube lamp including a light emitting inner tube 52 and a light emitting outer tube 53 made of two synthetic quartz having different diameters. The light emitting inner tube 52 and the light emitting outer tube 53 are arranged coaxially with each other, and the dielectric barrier discharge lamp 50 is formed in a hollow cylindrical shape. On the inner side surface of the light emitting inner tube 52, an internal electrode 54 made of a light-transmitting metal net is provided over the entire width direction of the dielectric barrier discharge lamp 50. An outer electrode 55 that also serves as a reflective film formed by aluminum vapor deposition is provided on the outer surface of the light emitting outer tube 53. Further, both end portions of the light emitting inner tube 52 and the light emitting outer tube 53 are sealed, and an excimer discharge gas is provided between one end of the light emitting outer tube 53 between the light emitting inner tube 52 and the light emitting outer tube 53. The sealing part 56 cut off after sealing is formed. An AC power source 57 is connected to the internal electrode 54 and the external electrode 55, and an AC current is supplied from the AC power source 57. The external electrode 55 is connected to the ground potential.

  A metal mesh 31 is provided on the inner surface of the outer tube 51. In addition, caps 58 and 58 made of a metal material are attached to both ends of the outer tube 51, and the inside of the outer tube 51 is hermetically sealed by these caps 58 and 58. The base 58 is provided with a dielectric barrier discharge lamp mounting portion 59, and the dielectric barrier discharge lamp 50 is mounted and held on these dielectric barrier discharge lamp mounting portions 59, 59. The metal mesh 31 is in contact with the caps 58, 58, and the cap 58 is electrically connected to the external electrode 55 in the dielectric barrier discharge lamp 50. Thus, the metal mesh 31 is connected to the ground potential via the base 58 and the external electrode 55. Further, the base 58 on one end side of the outer pipe 51 is formed with a cooling gas circulation port 35 and a connection terminal 36 that serve as a circulation port when the cooling gas flows into and out of the outer pipe 51. The lighting wiring 37 of the dielectric barrier discharge lamp 50 is connected to 36.

  Even when a dielectric barrier discharge lamp that is a double-tube type lamp is used, such as the dielectric barrier discharge lamp according to the present embodiment, the metal mesh 31 is formed on the outer tube 51 to form a metal. Since the mesh 31 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamp 50, the noise prevention effect can be enhanced. Since the metal mesh 31 is a mesh, almost the entire outer tube 51 can be used as a light transmission portion.

  FIG. 14 shows a modification of the dielectric barrier discharge lamp made of a double tube lamp. Shown in FIG. 14A is a partially broken side view of a dielectric barrier discharge lamp according to a third modification, and FIG. 14B is a front view thereof. As shown in FIG. 14, the dielectric barrier discharge lamp ML3 according to this aspect is different from the dielectric barrier discharge lamp 50 shown in FIG. 13 in the aspects of the internal electrode and the external electrode. The dielectric barrier discharge lamp ML3 includes a light emitting inner tube 62 and a light emitting outer tube 63, both of which are arranged coaxially, and the dielectric barrier discharge lamp ML3 is formed in a hollow cylindrical shape. On the inner side surface of the light emitting inner tube 62, an internal electrode 64 serving also as a light reflecting film formed by aluminum vapor deposition is provided over the entire width direction of the dielectric barrier discharge lamp ML3. Further, an outer electrode 65 made of a light-transmitting metal net is provided on the outer surface of the light emitting outer tube 63. Both ends of the light emitting inner tube 62 and the light emitting outer tube 63 are sealed, and an excimer discharge gas is sealed between the light emitting inner tube 62 and the light emitting outer tube 63 at one end of the light emitting outer tube 63. After that, a sealed portion 66 that is cut off is formed. An AC power supply 67 is connected to the internal electrode 64 and the external electrode 65, and an AC current is supplied from the AC power supply 67. The external electrode 65 is connected to the ground potential.

  Thus, even if the internal electrode is aluminum-deposited and the external electrode is a double tube lamp made of a metal mesh, it is accommodated in the outer tube 51 shown in FIG. 11 and the metal mesh 31 is formed in the outer tube 51. As a result, the metal mesh 31 effectively shields electromagnetic radiation noise emitted by the dielectric barrier discharge lamp ML3, so that the noise prevention effect can be enhanced. When housing the dielectric barrier discharge lamp ML3 in the outer tube 51, the base 58 is connected to the external electrode 65 in the dielectric barrier discharge lamp ML3 in order to ground the metal mesh 31.

  In addition, as a dielectric barrier discharge lamp that can be suitably shielded by electromagnetic radiation noise by the action of the metal mesh 31 by being housed in the outer tube 22 shown in FIG. The thing of the aspect of can be used. These dielectric barrier discharge lamps will be described below.

  FIG. 15A is a side view of a dielectric barrier discharge lamp according to a fourth modification, and FIG. 15B is a sectional view taken along the line DD in FIG. As shown in FIG. 15, the dielectric barrier discharge lamp ML <b> 4 according to this aspect is different from the dielectric barrier discharge lamp 21 in the aspect of the internal electrodes. The dielectric barrier discharge lamp ML4 according to this aspect includes a discharge vessel 23, and an internal electrode 71 is provided inside the discharge vessel 23. The internal electrode 71 is disposed along the longitudinal direction of the discharge vessel 23, is formed as a coil-shaped connecting portion 72 at the center thereof, and both end portions are formed as linear portions 73 and 74.

  The coil-shaped connecting portion 72 has a biasing force with respect to the pulling direction. Pinch seal portions 26 and 26 are respectively formed at both ends of the discharge vessel 23, and metal foils 25 and 25 are provided on the pinch seal portions 26 and 26. The linear portions 73 and 74 in the internal electrode 71 are fixedly attached to the metal foils 25 and 25 provided on the pinch seal portions 26 and 26, respectively. Further, the internal electrode 71 is arranged in a tensioned state in the discharge vessel 23 by the urging force of the central connecting portion 72. Further, lead wires 27 and 27 are connected to the metal foils 25 and 25, respectively.

  Further, the internal electrode 71 includes a separation electrode portion 75 that contributes directly to discharge. The spaced apart electrode portions 75 are arranged at a predetermined pitch in the longitudinal direction of the discharge vessel 23 at substantially equal intervals, close to the inner wall surface of the discharge vessel 23, for example, in a range of 3 mm or less. Thus, the discharge starting voltage is lowered by disposing the separated electrode portion 75 at a position close to the inner wall surface of the discharge vessel 23. These spaced electrode portions 75 are supported on the coiled coupling portion 72 of the internal electrode 71 by the separated electrode support portion 76. Then, the current that has passed through the connecting portion 72 and the linear portion 73 is supplied to the separation electrode portion 75 via the separation electrode support portion 76.

  An outer electrode 28 made of a seamless metal net is provided on the outer peripheral portion of the discharge vessel 23, and an exhaust pipe 29 is provided at a position away from the outer electrode 28. Further, the internal electrode 71 and the external electrode 28 are each connected to an AC power supply 30 and supplied with an AC power supply. The external electrode 28 is connected to the ground potential. The discharge state between the internal electrode 71 and the external electrode 28 is a creeping discharge inside the discharge vessel 23 around the respective separated electrode portions 75. The dielectric barrier discharge lamp ML4 having such a configuration can be used.

  Further, as a fifth modification, a dielectric barrier discharge lamp shown in FIG. 16 can be used. FIG. 16A is a side view of a dielectric barrier discharge lamp according to a fifth modification, and FIG. 16B is a cross-sectional view taken along line EE in FIG. As shown in FIG. 14, the dielectric barrier discharge lamp ML5 according to the present embodiment includes a discharge vessel 23, and the inside of the discharge vessel is an interior used for the dielectric barrier discharge lamp ML4 of the embodiment shown in FIG. An internal electrode 77 similar to the electrode is provided. The internal electrode 77 includes a coil-shaped connecting portion 78 having an urging force in the tensile direction, and linear portions 79 and 80 formed on both sides thereof. Pinch seal portions 26, 26 are formed at both ends of the discharge vessel 23. The pinch seal portions 26, 26 are provided with metal foils 25, 25, and internal electrodes are provided on these metal foils 25, 25, respectively. The linear portions 79 and 80 formed at both ends of 77 are fixed.

  Further, the internal electrode 77 includes a separation electrode portion 81 that directly contributes to discharge and a separation electrode support portion 82 that supports the separation electrode portion 81. An external electrode 83 made of an aluminum vapor deposition film formed by aluminum vapor deposition is provided at a position corresponding to the separated electrode portion 81 of the internal electrode 77 on the outer surface of the discharge vessel 23. In addition, an exhaust pipe 29 is provided at a position away from the external electrode 83, and an alternating current is supplied to the external electrode 83 and the internal electrode 77 from an alternating current power source (not shown). The external electrode 83 is connected to the ground potential. The dielectric barrier discharge lamp ML5 having such a configuration can also be used.

  Next, a dielectric barrier discharge lamp according to a sixth modification will be described. FIG. 17A is a side view of a dielectric barrier discharge lamp according to a sixth modification, and FIG. 17B is a sectional view taken along line FF in FIG. As shown in FIG. 17, the dielectric barrier discharge lamp ML6 according to this aspect includes a discharge vessel 23, and an internal electrode 84 similar to the internal electrode of the aspect shown in FIG. Is provided. The internal electrode 84 includes a central coil-shaped portion 85 and linear portions 86 and 87 provided on both ends of the coil-shaped portion 85. Pinch seal portions 26 and 26 are formed at both ends of the discharge vessel 23, and metal foils 25 and 25 are provided on the pinch seal portions 26 and 26. Linear portions 86 and 87 in the internal electrode 84 are fixed and connected to the metal foils 25 and 25, respectively. Further, the internal electrode 84 includes a separation electrode portion 88 and a separation electrode support portion 89.

  An external electrode 90 made of a coiled metal wire wound around the discharge vessel 23 is provided at a position corresponding to the coil-like portion 85 of the internal electrode 84 in the discharge vessel 23. The discharge vessel 23 is provided with an exhaust pipe 29. A dielectric barrier discharge lamp ML6 having such a configuration can also be provided.

  Subsequently, a dielectric barrier discharge lamp according to a seventh modification will be described. FIG. 18A is a side view of a dielectric barrier discharge lamp according to a seventh modification, and FIG. 18B is a sectional view taken along line GG in FIG. As shown in FIG. 18, the dielectric barrier discharge lamp ML <b> 7 according to this aspect includes a discharge vessel 23, and an internal electrode 91 is provided inside the discharge vessel 23. The internal electrode 91 has a coil-shaped portion 92 in which a portion corresponding to the separated electrode portion of the internal electrode in the dielectric barrier discharge lamp shown in FIGS. 15 to 17 is formed in a coil shape. The coil-shaped portion 92 has a coil shape formed along the vicinity of the inner surface of the discharge vessel 23. Linear portions 93 and 94 are formed at both ends of the coil-shaped portion 92, and are fixed to metal foils 25 and 25 provided on pinch seal portions 26 and 26 formed at both ends of the discharge vessel 23, respectively. Being connected. In addition, an external electrode 28 made of a seamless metal mesh is provided at a position corresponding to the position where the coiled portion 92 of the internal electrode 91 is formed in the discharge vessel 23. Further, the discharge vessel 23 is provided with an exhaust pipe 29. The dielectric barrier discharge lamp ML7 having such a configuration can also be used.

  Next, a static eliminator according to a second embodiment of the present invention will be described. Since the static eliminator according to the present embodiment is different from the first embodiment in the configuration of the lamp unit, the lamp unit will be mainly described.

  19 is a lower plan view of the lamp unit in the static eliminator according to the second embodiment of the present invention, FIG. 20 is a cross-sectional view taken along the line HH of FIG. 19, and FIG. 21 is a partition member removed from the lamp unit. FIG.

  As shown in FIGS. 19 to 21, the lamp unit 100 in the static eliminator according to the present embodiment includes a housing frame 101 made of a metal material. The housing frame 101 includes a plurality of housing frames 101 in the present embodiment. Dielectric barrier discharge lamps 102A to 102F are attached. A positioning member 103 for positioning the dielectric barrier discharge lamps 102 </ b> A to 102 </ b> F with respect to the housing frame 101 is attached to one end side of the housing frame 101. As the dielectric barrier discharge lamps 102A to 102F, the dielectric barrier discharge lamp ML2 shown in FIG. 10 is used.

  A plurality of long grooves are formed in the positioning member 103, and the pinch seal portions 26 (FIG. 10) of the dielectric barrier discharge lamps 102A to 102F are fitted into the long grooves, respectively. Six long grooves are formed in the positioning member 103, and dielectric barrier discharge lamps 102A to 102F are fitted in the respective long grooves.

  The casing frame 101 is provided with conductive lamp holders 104 that hold the dielectric barrier discharge lamps 102A to 102F, respectively. These lamp holders 104 are provided with elastic gripping claws, and grip both ends of the dielectric barrier discharge lamps 102A to 102F by the elastic force of the gripping claws. The lamp holder 104 is in contact with the external electrode 28 (FIG. 10) of the dielectric barrier discharge lamps 102A to 102F. The dielectric barrier discharge lamps 102 </ b> A to 102 </ b> F are attached to the housing frame 101 by being held by the lamp holder 104 and supported by the positioning member 103.

  The housing frame 101 is grounded to the ground potential, and the lamp holder 104 is connected to the housing frame 101. Thus, the external electrodes 28 in the dielectric barrier discharge lamps 102A to 102F are grounded to the ground potential via the housing frame 101 and the lamp holder 104.

  Further, the housing frame 101 includes a side plate 101A, a top plate 101B, and a bottom plate 101C, and an opening 101D is formed at the center of the bottom plate 101C. The top plate 101B of the housing frame 101 is provided with a radiator 105 made of a metal material, and the radiator 105 is in contact with the first heat conduction plate 106 made of a metal material. The first heat conductive plate 106 is in contact with a second heat conductive plate 107 made of a metal material that is in contact with the dielectric barrier discharge lamps 102A to 102F. Thus, the heat of the dielectric barrier discharge lamps 102A to 102F is conducted to the radiator 105 through the heat conducting plates 106 and 107, and is radiated by the radiator 105.

  Further, the side plate 101A of the housing frame 101 is formed with an inert gas inlet 108 through which an inert gas that is a cooling gas flows into the housing frame 101 and an inert gas outlet 109 through which the inert gas is discharged. Has been. In addition, the opening 101D formed in the bottom plate 101C of the housing frame 101 is covered with a light irradiation window 110 serving as a light transmission portion of the partition member of the present invention. A space surrounded by the casing frame 101, the radiator 105, and the light irradiation window 110 is vacuum ultraviolet rays radiated from the dielectric barrier discharge lamps 102A to 102F through the inert gas inlet 108 and the inert gas outlet 109. Purged with nitrogen gas which is difficult to absorb. The nitrogen gas purge also serves to cool the dielectric barrier discharge lamps 102A to 102F.

  A metal mesh fixture 111 is provided on the bottom plate 101C of the housing frame 101, and the metal mesh fixture 111 covers the entire surface of the opening 101D in the housing frame 101 to be a light transmission portion. A light irradiation window 110 is provided. The light irradiation window 110 is formed of, for example, synthetic quartz, which is a light transmissive material that transmits ultraviolet rays emitted from the dielectric barrier discharge lamps 102A to 102F. The light irradiation window 110 is provided with a metal mesh 112 for shielding electromagnetic radiation noise radiated from the dielectric barrier discharge lamps 102A to 102F or the lighting wiring. The metal mesh 112 is electrically connected to the housing frame 101 via the metal mesh fixture 111 and is grounded to the earth potential.

  In the static eliminator according to the present embodiment having the above-described configuration, the static eliminator is neutralized by radiating ultraviolet rays to the static eliminator placed on the irradiation table (not shown) disposed below the lamp unit 100. . At this time, a metal mesh 112 is provided in the light irradiation window 110 of the casing frame 101 in the lamp unit 100. The metal mesh 112 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamps 102A to 102F. Therefore, the effect of preventing noise emitted from the lamp unit 100 can be enhanced.

  Moreover, since the metal mesh 112 that shields electromagnetic radiation noise is provided in the light irradiation window 110, the noise prevention effect can be enhanced without providing an outer tube that covers the dielectric barrier discharge lamp.

  Next, a static eliminator according to a third embodiment of the present invention will be described. Since the static eliminator according to the present embodiment is different from the first embodiment in the configuration of the lamp unit, the lamp unit will be mainly described.

  FIG. 22 is a lower plan view of the lamp portion in the static eliminator according to the third embodiment of the present invention, and FIG. 23 is a partially broken front sectional view thereof. As shown in FIGS. 22 and 23, the lamp unit 120 in the static eliminator according to the present embodiment includes a housing frame 121 made of a metal material. The housing frame 121 includes a plurality of housing frames 121 in the present embodiment. Dielectric barrier discharge lamps 122A to 122D are attached. In this embodiment, the dielectric barrier discharge lamp 50 shown in FIG. 13 is used as the dielectric barrier discharge lamps 122A to 122D.

  The housing frame 121 has a side plate 121A and a bottom plate 121B. The upper part surrounded by the side plate 121A is open, and an opening 121C is formed at the center of the bottom plate 121B. A cooling block 123 made of a metal material is provided at the upper opening position surrounded by the side plate 121A, and the cooling block 123 closes the upper opening. Four cutout grooves having a semicircular cross section are formed on the lower surface of the cooling block 123, and the dielectric barrier discharge lamps 122A to 122D are fitted in contact with the cutout grooves, respectively. When the dielectric barrier discharge lamps 122A to 122D come into contact with the cooling block 123, the dielectric barrier discharge lamps 122A to 122D are cooled by the cooling block 123.

  Further, the side plate 121A of the housing frame 121 is formed with an inert gas inlet 124 through which an inert gas that is a cooling gas flows into the housing frame 121 and an inert gas outlet 125 through which the inert gas is discharged. Has been. The opening 121 </ b> C formed in the bottom plate 121 </ b> B of the housing frame 121 is covered with the light irradiation window 126. The space surrounded by the casing frame 121, the cooling block 123, and the light irradiation window 126 is vacuum ultraviolet rays radiated from the dielectric barrier discharge lamps 122A to 122D through the inert gas inlet 124 and the inert gas outlet 125. Purged with nitrogen gas which is difficult to absorb. The nitrogen gas purge also serves to cool the dielectric barrier discharge lamps 122A to 122D.

  A metal mesh fixture 127 is provided on the bottom plate 121 </ b> B of the housing frame 121. The metal mesh fixture 127 covers the entire surface of the opening 121 </ b> C in the housing frame 121 and serves as a light transmission portion. A light irradiation window 126 is provided. The light irradiation window 126 is formed of, for example, synthetic quartz, which is a light transmissive material that transmits ultraviolet rays emitted from the dielectric barrier discharge lamps 122A to 122D. The light irradiation window 126 is provided with a metal mesh 128 for shielding electromagnetic radiation noise radiated from the dielectric barrier discharge lamps 122A to 122D or the lighting wiring. The metal mesh 128 is electrically connected to the housing frame 121 via a metal mesh fixture 127 and is grounded to an earth potential.

  In the static eliminator according to the present embodiment having the above configuration, the static eliminator is neutralized by radiating ultraviolet rays to the static eliminator placed on the irradiation table (not shown) disposed below the lamp unit 120. . At this time, a metal mesh 128 is provided in the light irradiation window 126 of the housing frame 121 in the lamp unit 120. The metal mesh 128 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamps 122A to 122D. Therefore, the effect of preventing noise emitted from the lamp unit 120 can be enhanced.

  In addition, since the metal mesh 128 that shields electromagnetic radiation noise is provided in the casing frame light irradiation window 126, the noise prevention effect can be enhanced without providing an outer tube that covers the dielectric barrier discharge lamp. Furthermore, since the cooling block 123 is provided in the housing frame 121, the entire lamp unit 120 including the housing frame 121 can be reduced in size.

  Subsequently, a fourth embodiment of the present invention will be described. FIG. 24 is a front sectional view of a static eliminator according to a fourth embodiment of the present invention, FIG. 25 is a side sectional view thereof, and FIG. 26 is a front sectional view of a lamp portion thereof. As shown in FIGS. 24 and 25, the static eliminator R2 according to the present embodiment includes a housing frame 131 made of a hollow metal material having a substantially cubic shape. A lamp portion 132 is disposed at a position slightly above the center in the height direction in the hollow portion of the housing frame 131. Further, as shown in FIG. 26, as the lamp unit 132 used in the static eliminator R2 in the present embodiment, a light emitting device having a mode in which the dielectric barrier discharge lamp ML2 shown in FIG. 10 is accommodated in the outer tube 22 shown in FIG. It is used. The dielectric barrier discharge lamp ML2 has a discharge vessel 23, an internal electrode 24 is provided inside the discharge vessel 23, and an external electrode 45 is provided outside the discharge vessel 23. The external electrode 45 is formed of an aluminum vapor deposition film covering a range of approximately 240 ° on the upper side of the discharge vessel 23, and a slit-like opening is formed below. The ultraviolet rays irradiated from the dielectric barrier discharge lamp ML2 are spread over a range of about 120 ° from the slit-shaped opening.

  Further, an attachment flange 133 for attaching the lamp portion 132 is attached to one side plate of the housing frame 131, and a fixture 134 is attached to the opposite side plate of the housing frame 131. The lamp portion 132 is fixed and supported by the mounting flange 133 and the fixture 134. From the mounting flange 133, the base 34 in the lamp portion 132 protrudes to the outside of the housing frame 131, and the cooling gas flow port 35 and the connection terminal 36 are disposed outside the housing frame 131.

  Further, an inert gas introduction port 135 is formed on the side plate of the housing frame 131, and an inert gas discharge port 136 is formed on the bottom plate of the housing frame 131. From the inert gas inlet 135, an inert gas, which is an ion generation source for discharging the object to be discharged, is introduced. The inert gas discharge port 136 is connected to the exhaust pump 137, and the inert gas in the housing frame 131 is discharged through the inert gas discharge port 136 by operating the exhaust pump 137. The inside of the housing frame 131 is depressurized with a desired inert gas. The inside of the housing frame 131 is maintained in an airtight state at positions excluding the inert gas inlet 135 and the inert gas outlet 136.

  Further, an irradiation stand 138 is provided in the irradiation range of the ultraviolet rays emitted from the lamp unit 132 in the housing frame 131, and the top of the irradiation stand 138 becomes a charge removal target portion, and the charge removal target is placed on the irradiation stand 138. The object 139 is placed, and the charge removal object 139 is placed in the charge removal object portion.

  In the static eliminator R2 according to the present embodiment having the above-described configuration, the static eliminator 139 is removed by radiating ultraviolet rays to the static eliminator 139 placed on the irradiation table 138 disposed below the lamp unit 132. Remove static electricity. At this time, a metal mesh 31 is provided on the outer tube 22 in the lamp portion 132. The metal mesh 31 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamp ML2. Therefore, the effect of preventing noise emitted from the lamp unit 132 can be enhanced.

  In addition, by operating the exhaust pump 137, the inside of the housing frame 131 can be in a reduced pressure state. Therefore, it is effective for static elimination under reduced pressure using vacuum ultraviolet rays radiated from the lamp unit 132 (dielectric barrier discharge lamp ML2). At that time, an inert gas such as nitrogen gas or argon gas is introduced from an inert gas inlet as an ion generation source, and the inside of the casing frame 131 is made an inert gas decompression atmosphere, thereby effectively charging the charged object. It can be neutralized.

  Next, a fifth embodiment of the present invention will be described. FIG. 27 is a side sectional view of the static eliminator according to the fifth embodiment of the present invention. As shown in FIG. 27, the static eliminator R3 according to the present embodiment includes a tunnel housing 141 made of a metal material. A lamp portion 142 is provided at an upper position in the tunnel housing 141. In the present embodiment, as in the fourth embodiment, as the lamp portion 142, the dielectric barrier discharge lamp ML2 shown in FIG. 10 is housed in the outer tube 22 shown in FIG. 3 as a dielectric barrier discharge lamp. Used.

  In addition, an inert gas inlet 143 for introducing an inert gas is formed in the upper frame of the tunnel casing 141, and an inert gas outlet for discharging the inert gas is formed in the lower frame. 144 is formed. An exhaust pump 145 is connected to the inert gas discharge port 144. By operating the exhaust pump 145, the inside of the tunnel housing 141 can be in a reduced pressure state.

  Further, a transport conveyor 146 that moves in the longitudinal direction of the tunnel casing 141 is provided on the lower surface of the tunnel casing 141. On the conveyor 146, irradiation tables 147 are placed at substantially equal intervals apart from each other in the moving direction. On the irradiation table 147, a charge removal object 148 is mounted. The transfer conveyor 146 is disposed within the irradiation range of the vacuum ultraviolet rays irradiated from the lamp unit 142, and the static elimination object 148 placed on the irradiation table 147 transferred by the transfer conveyor 146 includes the lamp unit 142. Irradiated vacuum ultraviolet rays are irradiated.

  In the static eliminator R3 according to the present embodiment having the above-described configuration, the static eliminator 148 is removed by radiating ultraviolet rays to the static eliminator 148 placed on the irradiation table 147 disposed below the lamp unit 142. Remove static electricity. At this time, a metal mesh 31 is provided on the outer tube 22 in the lamp portion 142. The metal mesh 31 effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamp ML2. Therefore, the effect of preventing noise irradiated from the lamp unit 142 (dielectric barrier discharge lamp ML2) can be enhanced.

  In addition, by operating the exhaust pump 145, the inside of the tunnel housing 141 can be in a reduced pressure state. Therefore, it is effective for static elimination under reduced pressure using vacuum ultraviolet rays radiated from the dielectric barrier discharge lamp ML2. Furthermore, the static elimination apparatus R3 which concerns on this embodiment has the conveyance conveyor 146, and the irradiation stand 147 and the static elimination target object 148 are conveyed by the conveyance conveyor 146. FIG. For this reason, a plurality of static elimination objects 148 can be eliminated statically.

  Next, a sixth embodiment of the present invention will be described. FIG. 28 is a side sectional view of a static eliminator according to the sixth embodiment of the present invention. As shown in FIG. 28, the static eliminator R4 according to this embodiment includes a tunnel casing 151 made of a metal material. An opening 151A is formed in the upper frame of the tunnel casing 151, and a lamp portion 152 is provided above the opening 151A. The lamp unit 152 includes a casing 152A made of a metal material, and a dielectric barrier discharge lamp ML2 shown in FIG. 10 is disposed inside the casing 152A. An opening is formed in the bottom plate of the housing 152A, and a light irradiation window 152B that is a light transmitting portion is provided so as to close the opening. A metal mesh 152C is attached to the inside of the housing 152A in the light irradiation window 152B.

  In addition, an inert gas inlet 153 for introducing an inert gas is formed in the upper frame of the tunnel casing 151, and an inert gas outlet for discharging the inert gas is formed in the lower frame. 154 is formed. An exhaust pump 155 is connected to the inert gas discharge port 154, and by operating the exhaust pump 155, the inside of the tunnel housing 151 can be in a reduced pressure state.

  Further, a transport conveyor 156 that moves in the longitudinal direction of the tunnel casing 151 is provided on the lower surface of the tunnel casing 151. On the conveyor 156, irradiation tables 157 are placed at almost equal intervals apart from each other in the moving direction, and a charge removal object 158 is placed on the irradiation table 157. The transfer conveyor 156 is disposed within the irradiation range of the vacuum ultraviolet rays irradiated from the lamp unit 152, and the static elimination object 158 placed on the irradiation table 157 transferred by the transfer conveyor 156 includes the lamp unit 152. Irradiated vacuum ultraviolet rays are irradiated.

  The static eliminator R4 according to the present embodiment having the above configuration radiates ultraviolet rays to the static eliminator 158 placed on the irradiation table 157 arranged below the lamp unit 152, as in the fifth embodiment. As a result, the charge removal object 158 is discharged. At this time, a grounded metal mesh 152 </ b> C is provided in the light irradiation window 152 </ b> B of the lamp unit 152. The metal mesh 152C effectively shields electromagnetic radiation noise generated by the dielectric barrier discharge lamp ML2. Therefore, the effect of preventing noise emitted from the lamp unit 152 (dielectric barrier discharge lamp ML2) can be enhanced.

  In addition, by operating the exhaust pump 155, the inside of the tunnel housing 151 can be in a reduced pressure state. Therefore, it is effective for static elimination under reduced pressure using vacuum ultraviolet rays radiated from the dielectric barrier discharge lamp ML2. Furthermore, since the irradiation stand 157 and the static elimination object 148 are conveyed by the conveyance conveyor 156, the several static elimination object 158 can be static-eliminated continuously.

  The result of verifying the effect of the electromagnetic radiation noise shielding means proposed in the present invention is shown below. In this experiment, the dielectric barrier discharge lamp ML2 of the type shown in FIG. 10 was arranged in the outer tube shown in FIG. 3 described in the first embodiment, and the electromagnetic noise electric field intensity radiated from the unit was examined. . The evaluation was performed by examining the correlation between the distance between the lamp and the electric field probe and the electric field intensity detected by the electric field probe (relative intensity). Further, as the first conventional example, the dielectric barrier discharge lamp 21 shown in FIG. 5 which is composed only of a dielectric barrier discharge lamp without an outer tube and whose external electrode is grounded is used. As a second conventional example, a dielectric barrier discharge lamp ML2 shown in FIG. 10 in which an aluminum vapor deposition film is formed as an external electrode is used. The result is shown in FIG.

  In FIG. 29, the first conventional example is indicated by a one-dot chain line, and the second conventional example is indicated by a broken line. The example of the present invention is shown by a solid line. As can be seen from FIG. 29, in the dielectric barrier discharge lamps according to the first conventional example and the second conventional example, electromagnetic radiation noise was not sufficiently shielded. On the other hand, in the dielectric barrier discharge lamp in which the metal net that does not contribute to the discharge is used as the electromagnetic radiation noise shielding means as in the present invention example, the noise is effectively shielded. From the above results, it was found that the dielectric barrier discharge lamp according to the present invention exhibits a very high noise shielding effect as compared with the conventional dielectric barrier discharge lamp.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made. For example, in the static eliminator according to the fourth to sixth embodiments, only one lamp unit is used. However, a lamp unit having a plurality of dielectric barrier discharge lamps may be provided.

  The electromagnetic radiation noise according to the present invention can also be applied to a cleaning device and a reforming device for the surface of an organic object such as glass, a semiconductor substrate, or plastic, which are also considered to be affected by the electromagnetic radiation noise.

It is a partially broken side view of the lamp portion of the static eliminator according to the first embodiment. It is a lower side top view of the lamp | ramp part of the static elimination apparatus which concerns on 1st Embodiment. It is a side view of a dielectric barrier discharge lamp. It is the sectional view on the AA line of FIG. It is a side view of a dielectric barrier discharge lamp. It is a side view of the light-emitting device concerning the 1st modification. It is a side view of the light-emitting device which concerns on a 2nd modification. It is the BB sectional view taken on the line of FIG. It is a side view of the dielectric barrier discharge lamp which concerns on a 1st modification. It is a side view of the dielectric barrier discharge lamp which concerns on a 2nd modification. It is a side view of the light-emitting device which concerns on a 3rd modification. It is CC sectional view taken on the line of FIG. (A) is the partially broken side view of the dielectric barrier discharge lamp used for the light-emitting device which concerns on a 3rd modification, (b) is the front view. (A) is a partially broken side view of a dielectric barrier discharge lamp according to a third modification, and (b) is a front view thereof. (A) is a side view of the dielectric barrier discharge lamp which concerns on a 4th modification, (b) is the DD sectional view taken on the line of (a). (A) is a side view of a dielectric barrier discharge lamp according to a fifth modification, and (b) is a cross-sectional view taken along line EE of (a). (A) is a side view of the dielectric barrier discharge lamp which concerns on a 6th modification, (b) is the FF sectional view taken on the line of (a). (A) is a side view of a dielectric barrier discharge lamp according to a seventh modification, and (b) is a cross-sectional view taken along the line GG of (a). It is a lower side top view of a lamp part in a static eliminator concerning a 2nd embodiment. It is the HH sectional view taken on the line of FIG. It is a lower side top view in the state where the partition member was removed from the lamp part. It is a lower side top view of a lamp part in a static eliminator concerning a 3rd embodiment. It is a partial fracture front sectional view of a lamp part in a static eliminator concerning a 3rd embodiment. It is a front sectional view of a static eliminator according to a fourth embodiment. It is a sectional side view of the static elimination apparatus which concerns on 4th Embodiment. It is a front sectional view of the lamp portion of the static eliminator according to the fourth embodiment. It is a sectional side view of the static elimination apparatus which concerns on 5th Embodiment. It is a sectional side view of the static elimination apparatus which concerns on 6th Embodiment. It is a graph which shows the measurement result by experiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,100,120,132,142,152 ... Lamp part, 2 (2A-2D), 102A-102F, 122A-122D, MR1-MR3 ... Light-emitting device, 3,101,121,131 ... Housing frame, 4 , 138, 147, 157 ... irradiation table, 5, 139, 148, 158 ... neutralization object, 11-14 ... side plate, 15 ... top plate, 21, 50, ML1-ML7 ... dielectric barrier discharge lamp, 22, 38 51 ... Outer tube, 23 ... Discharge vessel, 24, 54, 64, 71, 77, 84, 91 ... Internal electrode, 25 ... Metal foil, 26 ... Pinch seal part, 27 ... Lead wire, 28, 45, 55, 65, 83, 90 ... external electrode, 29 ... exhaust pipe, 30, 57, 67 ... AC power supply, 31, 112, 128, 152C ... metal mesh, 32 ... dielectric barrier discharge lamp holding member, 33 ... external electrode gold , 34, 58, base, 35, cooling gas flow port, 36, connection terminal, 37, wiring for lighting, 39, reflecting member, 41, internal electrode, 42, main body, 43, sleeve, 44, tension holding wire, 52, 62 ... luminous inner tube, 53, 63 ... luminous outer tube, 56, 66 ... sealing portion, 59 ... dielectric barrier discharge lamp mounting portion, 72, 78 ... connecting portion, 73, 74, 79, 80, 86 , 87, 93, 94 ... linear portion, 75, 81, 88 ... spaced electrode portion, 76, 82, 89 ... spaced electrode support portion, 85, 92 ... coiled portion, 101A, 121A ... side plate, 101B ... top plate , 101C, 121B ... bottom plate, 101D, 121C ... opening, 103 ... positioning member, 104 ... lamp holder, 105 ... radiator, 106 ... first heat conduction plate, 107 ... second heat conduction plate, 108, 124, 135, 143, 153 ... Not good 110, 125, 136, 144, 154 ... inert gas outlet, 110, 126, 152B ... light irradiation window, 111, 127 ... metal mesh fixture, 123 ... cooling block, 133 ... flange for mounting 134, 155, 155 ... exhaust pump, 141, 151 ... tunnel housing, 146, 156 ... transport conveyor, 151A ... opening, 152A ... housing, R1-R4 ... static eliminator.

Claims (5)

A tubular discharge vessel, an internal electrode provided in the discharge vessel, and an external electrode provided on the outer periphery of the discharge vessel, and having a dielectric barrier discharge lamp for irradiating ultraviolet rays,
A static elimination target portion for disposing a static elimination target to be eliminated by ultraviolet rays emitted from the dielectric barrier discharge lamp;
A partition member is disposed to partition between the dielectric barrier discharge lamp and a charge removal object disposed in the charge removal target portion;
The partition member has a light transmission part made of a light transmissive material that transmits ultraviolet rays,
A static eliminator, wherein the partition member is provided with a grounded metal mesh.   The static eliminator according to claim 1, wherein the metal mesh is disposed on the dielectric barrier discharge lamp side of the partition member.   The static elimination apparatus of Claim 1 or Claim 2 with which the cooling gas distribution port through which the cooling gas which cools the said dielectric barrier discharge lamp distribute | circulates is provided.   The static elimination apparatus of any one of Claims 1-3 in which the said static elimination object part is pressure-reduced. The static elimination apparatus according to claim 1, wherein the static elimination target portion is an inert gas atmosphere.

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