CN103943536A - Light irradiation device - Google Patents
Light irradiation device Download PDFInfo
- Publication number
- CN103943536A CN103943536A CN201410007906.6A CN201410007906A CN103943536A CN 103943536 A CN103943536 A CN 103943536A CN 201410007906 A CN201410007906 A CN 201410007906A CN 103943536 A CN103943536 A CN 103943536A
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- China
- Prior art keywords
- electric field
- excimer lamp
- irradiation device
- light irradiation
- outer electrode
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- 230000005684 electric field Effects 0.000 claims abstract description 42
- 239000011261 inert gas Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 10
- 238000009423 ventilation Methods 0.000 claims description 10
- 230000005855 radiation Effects 0.000 abstract description 3
- 230000002159 abnormal effect Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 description 13
- 239000004020 conductor Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 230000000803 paradoxical effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- FHNFHKCVQCLJFQ-NJFSPNSNSA-N Xenon-133 Chemical compound [133Xe] FHNFHKCVQCLJFQ-NJFSPNSNSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010892 electric spark Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229940106670 xenon-133 Drugs 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02046—Dry cleaning only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
- H01J29/45—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen
- H01J29/458—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen pyroelectrical targets; targets for infrared or ultraviolet or X-ray radiations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
- H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/01—Generalised techniques
- H01J2209/017—Cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Epidemiology (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
The invention provides a light irradiation device which prevents abnormal discharge and damages on a wiring pattern of an object to be processed caused by the influence of an electric field formed between a pair of external electrodes. The light radiation device comprises an excimer lamp provided with a pair of external electrodes arranged on upper and lower outer surfaces of a luminescent tube, and a housing accommodating the excimer lamp and provided with an optical drawing opening at the bottom. In the pair of the external electrodes, the lower external electrode which is opposite the object to be processed is applied with a low voltage, and the upper external electrode is applied with a high voltage. The light irradiation device is characterized in that the optical drawing opening is provided with an electric field shielding member which is positioned between the high-voltage side external electrode and the object to be processed along the length direction of the excimer lamp, and the electric field shielding member is used for shielding the electric field formed between the high-voltage side external electrode and the low-voltage side external electrode.
Description
Technical field
The present invention relates to possess the light irradiation device of the Excimer lamp with outer electrode, relate in particular to for effects on surface and be formed with the light irradiation device that the handled object irradiation ultraviolet radiations such as the glass substrate of fine wiring pattern are processed.
Background technology
In the manufacturing process of semiconductor substrate, crystal liquid substrate etc., be that wafer, crystal liquid substrate are the method for the dirts such as the organic compound that adheres on the surface of the handled objects such as glass substrate as removing at semiconductor substrate, extensively utilize the ultraviolet thermal drying method that used.Especially having used in the vacuum ultraviolet method of cleaning based on ozone, active oxygen, used more efficiently and carried out clean light irradiation device with the short time, for example, known have a TOHKEMY 2010-125368 communique (patent documentation 1).
Fig. 3, the 4th, the summary pie graph of disclosed light irradiation device in patent documentation 1.
In light irradiation device 21, there is the inside of the metal lampshade 22 of light taking-up opening in the lower side of vertical, dispose as light source the Excimer lamp 23 of having enclosed the luminous gas such as xenon.Near the end face of lampshade 22, be provided with the inert gas supply pipe 24,24 for supplying with inert gas.
Described Excimer lamp 23 is configured in the vertical below in the folded space of this gas supply pipe 24,24, as the glass substrate W of handled object (workpiece) Excimer lamp 23 more below pass through.
Described Excimer lamp 23 possesses pair of external electrodes 26,27 on the outer surface up and down of discharge vessel 25, this pair of external electrodes 26,27 clips discharge space in discharge vessel 25 and arranged opposite, thereby the outer electrode 26 of top is applied in high voltage as high-field electrode performance function, thereby is applied in low-voltage as low-field electrode performance function with the outer electrode 27 of the opposed below of trap apparatus.And at least the outer electrode 27 of below is because mesh configuration etc. is set as transmitance.
In the time that said external electrode 26,27 is applied to high-frequency high-voltage, luminous at the quasi-molecule of the interior generation xenon-133 gas of discharge vessel 25, the ultraviolet ray that produces wavelength 172nm, the trap apparatus of irradiating the below that is positioned at shell 21 from the below of discharge vessel 25.
Trap apparatus is for example the glass substrate that liquid crystal panel is used, under the trap apparatus arrival Excimer lamp 23 of carrying by conveying roller etc. time, and the illuminated vacuum ultraviolet from this Excimer lamp 23.On the surface of trap apparatus, the active oxygen of ultraviolet ray and generation around etc. works, thereby organic substance is decomposed to be removed, and the trap apparatus after cleaning is taken out of the outside of shell 22.
In addition,, for doing one's utmost to suppress the object from the ultraviolet decay of lamp radiation, import and fill the inert gases such as nitrogen via gas supply pipe 24,24 to the inside of the shell 22 of accommodating Excimer lamp 23.
But, at glass substrate of liquid crystal panel etc. as described trap apparatus in the situation that, under the state of photo-irradiation treatment before being processed to liquid crystal panel use, carry out, therefore, as shown in Figure 4, W is upper for substrate (handled object), has the situation of having exposed from the teeth outwards the wiring pattern 30 forming with conductive material.In this case, in the time carrying out treatment substrate W with above-mentioned light irradiation device 21 by irradiation, there is sometimes the accidents such as this conductive material breakage.
For this damage, each inventor of the present invention scrutinizes, result has investigated thoroughly that the reason of this damage is: the high voltage applying by the outer electrode 26,27 to Excimer lamp 23, and formation electric field around lamp, and this electric field feeds through to trap apparatus.
With reference to Fig. 5, Fig. 6, this phenomenon is described.
Fig. 5 is the schematic diagram that represents the effect of the light irradiation device 21 that is equipped with Excimer lamp 23 in shell 22, and shell 22 forms with SUS plate, aluminium sheet, and below therein contains Excimer lamp 23.
26,27 of the pair of external electrodes arranging on the outer surface up and down of Excimer lamp 23, apply high-frequency high-voltage, but conventionally above Excimer lamp 23 outer electrode 26 apply high voltage, applying low-voltage with the opposed lower outer electrode 27 of trap apparatus.Therefore, form stronger electric field X in the upper surface side of Excimer lamp 23.
Also have Excimer lamp 23 and trap apparatus to be configured in the situation of approaching position, a part of this electric field X as shown in Figure 5, is formed as its equipotential line and reaches the position of the trap apparatus of the below of Excimer lamp 23.
Fig. 6 is the local amplification view that the Excimer lamp of the light irradiation device shown in Fig. 5 23 and workpiece W are cut off along the throughput direction of workpiece W.
The wiring pattern 30 of the conductive material forming in the trap apparatus such as glass substrate is various, recently the situation that forms fine wiring pattern is a lot, according to the configuration status of the conductive material on substrate, accept as shown in Figure by the caused electric field of the high voltage that is applied to Excimer lamp 23, between the conductive material of adjacency, produce potential difference by wiring pattern 30, paradoxical discharge Y occurs during this sometimes.
Consequently, can infer that conductive material produces electric spark and disperses and breakage.
Patent documentation 1: TOHKEMY 2010-125368 communique
Summary of the invention
The present invention is in view of the problem points of above-mentioned prior art, a kind of structure of light irradiation device is provided, this light irradiation device below be provided with light and take out the Excimer lamp that possesses pair of external electrodes on the outer surface up and down that is housed in discharge vessel in the shell of opening and form, can not make the impact of the electric field producing between upper and lower outer electrode feed through to handled object, can prevent the wiring pattern generation paradoxical discharge on handled object, can prevent wiring pattern breakage, reliability is high.
In order to solve above-mentioned problem, light irradiation device of the present invention, it is characterized in that, take out on opening at the light of described shell, between on high-tension side outer electrode and handled object and along the position of the length direction of described Excimer lamp, possess electric field curtain-shaped cover member, this electric field curtain-shaped cover member covers the electric field forming between on high-tension side outer electrode and the outer electrode of low-pressure side.
In addition, be characterised in that, described electric field curtain-shaped cover member is electrically connected with described shell, and via this earthing of casing.
In addition, be characterised in that, in described shell, to possess the gas feed unit of supplying with inert gas, described electric field curtain-shaped cover member possesses ventilation hole, and this ventilation hole makes described inert gas flow out towards described handled object.
By light irradiation device of the present invention, play following effect: there will not be the impact of the electric field that the high-frequency high-voltage because being applied to Excimer lamp forms between pair of external electrodes to feed through to the situation of handled object, so when being formed with the handled object of the wiring pattern being formed by conductive material processing on effects on surface, can between wiring pattern, there is not less desirable paradoxical discharge, the damage of the conductive material that forms wiring pattern can be prevented trouble before it happens yet.
Brief description of the drawings
Fig. 1 is the cutaway view of light irradiation device of the present invention.
Fig. 2 is the cutaway view of explanation effect of the present invention.
Fig. 3 is the cutaway view of light irradiation device in the past.
Fig. 4 is its a part of amplification stereogram.
Fig. 5 is the cutaway view that the effect of light irradiation device is in the past described.
Fig. 6 is its a part of amplification view.
Description of reference numerals
1 light irradiation device
2 shells
2a light takes out opening
3 Excimer lamps
4 inert gas supply pipes
5 discharge vessels
6 high-pressure side outer electrodes
7 low-pressure side outer electrodes
9 external power sources
10 electric field curtain-shaped cover members
11 light take out window
12 ventilation holes
W workpiece
X electric field
Y paradoxical discharge
Embodiment
Fig. 1 is the cutaway view that represents the formation of light irradiation device of the present invention.Light irradiation device 1 is equipped with Excimer lamp 3 in the inside of shell 2, trap apparatus is carried below Excimer lamp 3 by conveying mechanism, under by Excimer lamp 3 time, the for example vacuum ultraviolet of wavelength 172nm of the ultraviolet ray of radiating from this Excimer lamp 3 is irradiated to this trap apparatus, carries out surperficial thermal drying.
Near top part above in described shell 2, be provided with inert gas supply pipe 4,4, the inert gases such as nitrogen are imported into and are filled in shell 2, suppress the vacuum ultraviolet decay from lamp 2.
In addition, the lower end of described shell 2 is formed with from the light of Excimer lamp 3 and takes out opening 2a.
Excimer lamp 3 possesses the discharge vessel 5 that section is flattened rectangular shape, and in the inside of discharge vessel 5, the gas of having enclosed quasi-molecule electric discharge use using the enclosed volume specifying is as luminous gas.In the situation that using xenon as luminous gas, conventionally enclose 10～70kPa.
On the outer surface up and down of the discharge vessel 5 of this Excimer lamp 3, be provided with pair of external electrodes 6,7, at least with the outer electrode 7 of the opposed below of trap apparatus because mesh configuration etc. is set as light transmission.
Described outer electrode 6,7 is connected with external power source 9, is applied in high-frequency high-voltage taking the outer electrode 6 of the upside of Excimer lamp 3 as high-pressure side and with the outer electrode 7 of the opposed downside of trap apparatus as the mode of low-pressure side.
Light in the lower end of shell 2 takes out on opening 2a, is provided with electric field curtain-shaped cover member 10.This electric field curtain-shaped cover member 10 is made up of plate-shaped member, between the on high-tension side outer electrode 6 of Excimer lamp 3 and trap apparatus along the length direction setting of described Excimer lamp 3, this electric field curtain-shaped cover member 10 is set, to cover the electric field forming between the outer electrode 7 of described on high-tension side outer electrode 6 and described low-pressure side.
In this embodiment, described electric field curtain-shaped cover member 10 the lower face side of the discharge vessel 5 of Excimer lamp 3, with the side of discharge vessel 5 closely, along the length direction setting of discharge vessel 5.On this electric field curtain-shaped cover member 10, be formed with accordingly light with Excimer lamp 3 and take out window 11, take out window 11 from the emergent light of described Excimer lamp 3 from this light and irradiate to trap apparatus.
This electric field intercepting member 10 for being electrically connected, is grounding to ground via this shell 3, all the time in GND current potential with shell 2.
In addition, as shown in Figure 1, the in the situation that of being provided with inert gas supply pipe 4,4 on shell 2, also can ventilation hole 12 being set on described electric field curtain-shaped cover member 10 and blowing inert gas to trap apparatus.Now, need to be according to input electric power of Excimer lamp 3 etc., with size, the spacing of the degree set ventilation hole 12 that do not spilt via ventilation hole 12 by the caused electric field of this Excimer lamp 3.
Based on Fig. 2, effect of the present invention is described.In the time that 6,7 of the outer electrodes to Excimer lamp 3 apply high voltage, form electric field X at 6,7, above-mentioned electrode, but a part of electric field X covered and terminates in shell 2 by described electric field curtain-shaped cover member 10, can not feed through to trap apparatus side.Therefore, even be formed with the conductive materials such as wiring pattern on the surface of this trap apparatus, can between wiring pattern, not produce potential difference yet, can there is not abnormal electric discharge, so the damage of the conductive material that forms wiring pattern can be prevented trouble before it happens, can irradiate the ultraviolet ray of regulation the processing of expecting safely to trap apparatus.
In addition, for according to Excimer lamp 3 according to selecting the outgoing light wavelength from lamp with the relation of purposes, also can be made as the structure that is coated with fluorophor at the inner surface of discharge vessel 5.
Below, about light irradiation device involved in the present invention 1, illustrate concrete numerical value.
In Excimer lamp 3, the total length of discharge vessel 5 is 2100mm, and the length of Width is 42mm, and the length of short transverse is 15mm, and the wall thickness that forms the quartz glass of discharge vessel 5 is 2.5mm.
At this, the bend of four jiaos of discharge vessel 5 has radius of curvature R more than 1.5mm.
Be 2～3W/cm to the input load of Excimer lamp 3.
The total length of shell 2 is 2300mm, highly for 50mm, width are 150mm.
The flow of inert gas is that 300L/ divides.In the time being this flow, the oxygen concentration in shell 2 is about 0.5～3%.
Electric field shield 10 is plate bodys that material is made up of SUS, and the thickness of plate is 0.5～2mm.In addition, the size of the opening of central authorities (light takes out window 11) is for example 2100mm × 45mm.
And electric field curtain-shaped cover member 10 is about 15mm with the distance of on high-tension side outer electrode 6, be about 0～5mm with the distance of the outer electrode 7 of low-pressure side.
This electric field curtain-shaped cover member 10 for example forms with stamped metal (punching metal), and has the ventilation hole 12 being made up of the staggered circular hole forming (Japanese: thousand Birds shapes).About ventilation hole 12, if enumerate an example, the diameter in hole is 6mm, and center distance is 8mm, and aperture opening ratio is 51%, if enumerate another example, the diameter in hole is 1.5mm, and center distance is 2mm, and aperture opening ratio is similarly 51%.
As described above, in the present invention, the light of having accommodated the shell of Excimer lamp takes out on opening, between the on high-tension side outer electrode and handled object of described Excimer lamp, possesses the electric field curtain-shaped cover member that the electric field to forming covers between this on high-tension side outer electrode and the outer electrode of low-pressure side, a part for the electric field forming when having applied high-frequency high-voltage between pair of external electrodes thus is covered by described electric field curtain-shaped cover member, and can not involve processed side, can between the wiring pattern on handled object, not cause paradoxical discharge, can prevent the damage of wiring pattern.
Claims (3)
1. a light irradiation device, possesses:
Excimer lamp configures pair of external electrodes and forms on the outer surface up and down of luminous tube of having enclosed luminous gas; And
Shell, accommodate this Excimer lamp and below be provided with light take out opening,
In described pair of external electrodes, be applied in low-voltage with the outer electrode of the opposed below of handled object, the outer electrode of top is applied in high voltage,
This light irradiation device is characterised in that,
Take out on opening at the light of described shell, between described on high-tension side outer electrode and handled object and along the position of the length direction of described Excimer lamp, possess electric field curtain-shaped cover member, this electric field curtain-shaped cover member covers the electric field forming between described on high-tension side outer electrode and the outer electrode of described low-pressure side.
2. light irradiation device as claimed in claim 1, is characterized in that,
Described electric field curtain-shaped cover member is electrically connected with described shell, and via this earthing of casing.
3. light irradiation device as claimed in claim 1 or 2, is characterized in that,
In described shell, possess the gas feed unit of supplying with inert gas,
Described electric field curtain-shaped cover member possesses ventilation hole, and this ventilation hole makes described inert gas flow out towards described handled object.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013008064A JP5601551B2 (en) | 2013-01-21 | 2013-01-21 | Light irradiation device |
| JP2013-008064 | 2013-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103943536A true CN103943536A (en) | 2014-07-23 |
Family
ID=51191145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410007906.6A Pending CN103943536A (en) | 2013-01-21 | 2014-01-07 | Light irradiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5601551B2 (en) |
| KR (2) | KR101955042B1 (en) |
| CN (1) | CN103943536A (en) |
| TW (1) | TWI569300B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108687057A (en) * | 2017-04-06 | 2018-10-23 | 优志旺电机株式会社 | Light irradiation device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005050705A (en) * | 2003-07-29 | 2005-02-24 | Hamamatsu Photonics Kk | Static charge eliminator |
| CN101514783A (en) * | 2008-02-21 | 2009-08-26 | 株式会社Orc制作所 | Ultraviolet irradiation apparatus |
| JP2010015826A (en) * | 2008-07-03 | 2010-01-21 | Hamamatsu Photonics Kk | Flat mercury lamp, and light-emitting device |
| CN101740316A (en) * | 2008-11-26 | 2010-06-16 | 优志旺电机株式会社 | Quasi-molecule lamp apparatus |
-
2013
- 2013-01-21 JP JP2013008064A patent/JP5601551B2/en active Active
- 2013-11-14 TW TW102141386A patent/TWI569300B/en active
- 2013-12-23 KR KR1020130161553A patent/KR101955042B1/en active IP Right Grant
-
2014
- 2014-01-07 CN CN201410007906.6A patent/CN103943536A/en active Pending
-
2017
- 2017-08-24 KR KR1020170107362A patent/KR101955109B1/en active IP Right Grant
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005050705A (en) * | 2003-07-29 | 2005-02-24 | Hamamatsu Photonics Kk | Static charge eliminator |
| CN101514783A (en) * | 2008-02-21 | 2009-08-26 | 株式会社Orc制作所 | Ultraviolet irradiation apparatus |
| JP2010015826A (en) * | 2008-07-03 | 2010-01-21 | Hamamatsu Photonics Kk | Flat mercury lamp, and light-emitting device |
| CN101740316A (en) * | 2008-11-26 | 2010-06-16 | 优志旺电机株式会社 | Quasi-molecule lamp apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108687057A (en) * | 2017-04-06 | 2018-10-23 | 优志旺电机株式会社 | Light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101955109B1 (en) | 2019-03-06 |
| KR20140094437A (en) | 2014-07-30 |
| TW201432779A (en) | 2014-08-16 |
| JP2014139874A (en) | 2014-07-31 |
| KR101955042B1 (en) | 2019-03-06 |
| TWI569300B (en) | 2017-02-01 |
| JP5601551B2 (en) | 2014-10-08 |
| KR20170101860A (en) | 2017-09-06 |
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Application publication date: 20140723 |