JP2005101062A - High-voltage pulse generator and discharge-excited gas laser device having the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-voltage pulse generator enabling airflow heat-exchanged with a heated object comprising a main capacitor, and the like to be efficiently heat-exchanged with a radiator without generating any airdrifts. <P>SOLUTION: The heated objects 41, 42 of the main capacitor C0, or the like, a fan 20, and the radiator 21 are arranged at the side of a tank 2 in which a magnetic pulse compression circuit, or the like is installed. The airflow passing through the fan 20 and the radiator 21 reaches the heated objects 41, 42 for exchanging heat. After that, a circulating path for feeding back to the fan 20 and the radiator 21 is composed of the space between an outer surface on the side of the tank 2 and an inner surface on the side of an outer cover 4. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a high voltage pulse generator having a magnetic pulse compression circuit, and more particularly to cooling of the high voltage pulse generator. The present invention can be applied to a discharge excitation gas laser device.

  With the miniaturization and high integration of semiconductor integrated circuits, improvement in resolving power is demanded in the projection exposure apparatus for production. For this reason, the wavelength of the exposure light emitted from the exposure light source is being shortened, and a KrF excimer laser device having a wavelength of 248 nm from a conventional mercury lamp is used as a light source for semiconductor exposure. Further, as a next-generation light source for semiconductor exposure, gas laser devices that emit ultraviolet rays such as an ArF excimer laser device having a wavelength of 193 nm and a fluorine (F2) laser device having a wavelength of 157 nm are promising.

  In the KrF excimer laser device, a mixed gas composed of a rare gas such as fluorine (F2) gas, krypton (Kr) gas and neon (Ne) as a buffer gas, and in the ArF excimer laser device, fluorine (F2) gas, argon (Ar) gas and a mixed gas comprising a rare gas such as neon (Ne) as a buffer gas, and in a fluorine (F2) laser device, a fluorine (F2) gas and a rare gas such as helium (He) as a buffer gas By generating a discharge inside the laser chamber in which the laser gas that is a mixed gas is sealed at several hundred kPa, the laser gas that is a laser medium is excited.

  Inside the laser chamber, a pair of main discharge electrodes for exciting the laser gas are disposed facing each other at a predetermined distance in a direction perpendicular to the laser oscillation direction. A high voltage pulse is applied to the pair of main discharge electrodes from the high voltage pulse generator, and when the voltage applied between the main discharge electrodes reaches a certain value (breakdown voltage), the laser gas between the main discharge electrodes is broken down. The main discharge starts, and the laser medium is excited by the main discharge. Therefore, such an exposure gas laser apparatus performs pulse oscillation by repeating main discharge, and the emitted laser light becomes pulse light. At present, the repetition frequency of the laser pulse of the laser apparatus used for exposure is about 2 kHz. However, in recent years, a repetition frequency of 4 kHz or more has been demanded in order to increase throughput and decrease variations in exposure amount.

The high voltage pulse generator shown in FIGS. 7 and 8 includes a two-stage magnetic pulse compression circuit using three magnetic switches SR1, SR2 and SR3 each composed of a saturable reactor. The magnetic switch SR1 is for reducing switching loss in the solid-state switch SW which is a semiconductor switching element such as IGBT, and is also called magnetic assist. The first magnetic switch SR2 and the second magnetic switch SR3 constitute a two-stage magnetic pulse compression circuit.
7 is a circuit including a step-up transformer Tr1 in addition to the magnetic compression circuit, and FIG. 8 is an example including a reactor L1 for charging the main capacitor C0 instead of the step-up transformer without including the step-up transformer.
The circuit configuration and operation will be described below with reference to FIG. Note that the circuit of FIG. 8 has no operation of being boosted by the step-up transformer, and the other operations are the same as those of FIG.

  First, the voltage of the high voltage power supply CH is adjusted to a predetermined value Vin, and the main capacitor C0 is charged. At this time, the solid switch SW is turned off. When the charging of the main capacitor C0 is completed and the solid switch SW is turned on, the voltage applied to both ends of the solid switch SW is mainly applied to both ends of the magnetic switch SR1. When the time integration value of the charging voltage V0 of the main capacitor C0 applied to both ends of the magnetic switch SR1 reaches a limit value determined by the characteristics of the magnetic switch SR1, the magnetic switch SR1 is saturated and the magnetic switch enters, and the main capacitor C0, the magnetic switch A current flows through the loop of SR1, the primary side of the step-up transformer Tr1, and the solid switch SW. At the same time, a current flows through the secondary side of the step-up transformer Tr1 and the loop of the capacitor C1, and the charge stored in the main capacitor C0 is transferred to be charged in the capacitor C1.

Thereafter, when the time integral value of the voltage V1 in the capacitor C1 reaches a limit value determined by the characteristics of the magnetic switch SR2, the magnetic switch SR2 is saturated and the magnetic switch enters, and the capacitor C1, the capacitor C2, and the magnetic switch SR3 enter the loop. A current flows, and the charge stored in the capacitor C1 is transferred to charge the capacitor C2.
Thereafter, when the time integral value of the voltage V2 in the capacitor C2 reaches a limit value determined by the characteristics of the magnetic switch SR3, the magnetic switch SR3 is saturated and the magnetic switch is turned on, and the capacitors C2, the peaking capacitor Cp, and the magnetic switch SR3 A current flows through the loop, and the charge stored in the capacitor C2 is transferred to charge the peaking capacitor Cp.

  Corona discharge for preionization occurs on the outer peripheral surface of the dielectric tube 12 starting from the point where the dielectric tube 12 in which the first electrode 11 is inserted and the second electrode 13 are in contact with each other. As the charging of the capacitor Cp proceeds, the voltage Vp increases. When Vp reaches a predetermined voltage, corona discharge is generated on the surface of the dielectric tube 12 in the corona preionization part. By this corona discharge, ultraviolet rays 6 are generated on the surface of the dielectric tube 12, and the laser gas 2 which is a laser medium between the main discharge electrodes E1 and E2 is preionized. As shown in FIGS. 7 and 8, the preionization means comprising the first electrode 11, the dielectric tube 12, and the second electrode 13, and the main discharge electrodes E1 and E2 are provided in a laser chamber filled with a laser gas. 3 is installed.

As the charging of the peaking capacitor Cp further proceeds, the voltage Vp of the peaking capacitor Cp increases. When this voltage Vp reaches a certain value (breakdown voltage) Vb, the laser gas between the main discharge electrodes E1 and E2 is broken down. The main discharge starts, the laser medium is excited by this main discharge, and laser light is generated.
Thereafter, the voltage of the peaking capacitor Cp rapidly decreases due to main discharge, and eventually returns to the state before the start of charging.

Such a discharge operation is repeatedly performed by the switching operation of the solid switch SW, whereby pulse laser oscillation is performed. The switching operation of the solid switch SW is performed based on, for example, an external trigger signal.
Here, the pulse width of the current pulse flowing through each stage is set by setting the inductance of the capacity transfer type circuit of each stage composed of the magnetic switches SR2 and SR3 and the capacitors C1 and C2 to be smaller as it goes to the subsequent stage. The pulse compression operation is performed so as to be narrowed sequentially, and a strong discharge with a short pulse is realized between the main discharge electrodes E1 and E2.

5 and 6 show a configuration example of a conventional high voltage pulse generator (see, for example, Patent Document 1). FIG. 6 is a view of FIG. 5 viewed from the direction of the thick arrow.
Here, the three magnetic switches SR1, SR2, SR3, capacitors C1, C2, transformer TR1 in FIG. 7 and the three magnetic switches SR1, SR2, SR3, capacitors C1, C2 in FIG. Needs to be cooled.

These are usually installed in a tank 2 filled with an insulating refrigerant, for example insulating oil. The heating elements constituting the magnetic pulse compression circuit such as the magnetic switches SR1, SR2, SR3, capacitors C1, C2, and (transformer TR1) described above are in contact with the insulating refrigerant to exchange heat with the insulating refrigerant. To be cooled.
An insulating refrigerant cooling radiator (not shown) is installed in the tank 2. This insulating refrigerant cooling radiator is for exchanging heat with the insulating refrigerant heated by heat exchange with the heat generating element to cool the insulating refrigerant.

That is, by taking the above configuration, the natural convection of the insulating refrigerant occurs due to the temperature difference between the surroundings of the heating element and the radiator for cooling the insulating refrigerant, and heat exchange occurs between the heating element and the insulating refrigerant, The heating element is cooled. The insulating refrigerant heated by heat exchange is cooled by heat exchange with the insulating refrigerant cooling radiator.
In order to improve the cooling efficiency, a fan for forcibly convection of the insulating refrigerant may be installed in the tank 2.

Above the tank 2, a solid-state switch SW, a main capacitor C0, a drive circuit board for driving the solid-state switch SW not shown in FIGS. Etc. are arranged.
A current of several amperes flows through the solid switch SW, and the main capacitor is charged with a high voltage of 4 kV or higher, so that high heat is generated. On the other hand, the drive circuit power supply also generates heat during operation. The heating element 1 composed of the solid switch SW, the main capacitor C0, the driving circuit board, the driving circuit power source and the like is cooled by an air cooling means including a fan 20 and a radiator 21, for example, as shown in FIGS. The

The tank 2, the heat generating unit 1, and the air cooling means (fan 20, radiator 21) are covered with the outer cover 4. The outer cover 4 is, for example, a plate-like metal such as iron, and prevents high-frequency noise emitted from a magnetic pulse generation circuit or the like housed in the tank 2 from leaking to the outside.
The fan 20 and the radiator 21 are arranged at a position where a cold air flow generated by them hits the heat generating portion 1. When the air flow comes into contact with the heat generating portion 1, heat exchange is performed between the air flow and the heat generating portion 1, and as a result, the heat generating portion 1 is cooled.

The air flow heated and exchanged with the heating element 1 including the solid switch SW, the main capacitor C0, the driving circuit board, the driving circuit power source, and the like is guided to the radiator 21. And it is cooled by heat exchange with the radiator 21. Here, the radiator 21 is disposed downstream of the fan 20 in FIGS. 5 and 6, but may be disposed upstream of the fan 11.
JP 2003-124550 A

  In the cooling structure as described above, the following problems occur. First, the air flow heat-exchanged with the heat generating material composed of the solid switch SW, the main capacitor C0, the drive circuit board, the drive circuit power source and the like collides with the outer cover 4 and diffuses. A part of the diffused hot air does not reach the radiator 21. That is, not all of the air flow heated by heat exchange with the heat generating material 1 is heat exchanged with the radiator 21.

  In addition, the air blowing portions heated by heat exchange with the heat generating portion 1 are likely to be scattered inside the outer cover 4, and the heat exchange efficiency between the air in the outer cover 4 and the air cooling means is not good. For example, the solid switch SW is composed of a plurality of switches. As described above, when the number of the heat generating parts 1 is increased, there is a tendency that an airflow accumulation part passing through the heat generating part 1 exists. As a result, it is not always possible to supply all the air flow to the heat generating unit 1, and it becomes difficult to effectively cool the heat generating unit 1.

  Furthermore, when a part of the air flow heated after heat exchange stays in the puddle part, the problem that a puddle part will heat also generate | occur | produces.

  The present invention has been made in view of the circumstances as described above, and its problem is that an air flow that is heat-exchanged with a heating material including a solid switch, a main capacitor, a drive circuit board, a power supply for a drive circuit, and the like. It is an object of the present invention to provide a high voltage pulse generator capable of efficiently exchanging heat with a radiator without forming a spray pool.

In the present invention, the above problem is solved as follows.
(1) It includes a main capacitor, a switch and a magnetic compression circuit, or a magnetic compression circuit and a step-up transformer circuit. After the main capacitor is charged, the switch operates, and the charge of the main capacitor is transferred to the magnetic compression circuit to generate a high voltage. A high voltage pulse generator for generating a pulse, in which an insulating refrigerant is held, and a magnetic switch comprising a saturable reactor constituting a magnetic compression circuit, a magnetic switch comprising a capacitor or a saturable reactor, A tank in which a capacitor and a transformer are immersed in the insulating refrigerant and disposed inside; the main capacitor and the switch disposed outside the tank; and the tank, the main capacitor and the switch, In the high voltage pulse generator covered with a plate-shaped cover, the number of the high voltage pulse generator is smaller. At least a fan and a radiator for cooling the main condenser are provided. Inside the plate-shaped outer cover, an air flow passing through the fan and the radiator reaches at least the main condenser to exchange heat, and then A circulation path for returning to the fan and radiator is provided.

  (2) In (1), at least the main capacitor is arranged at the upper part of the tank, and the circulation path is provided at the first partition plate provided at the upper part of the tank and at the upper part of the main capacitor. The second partition plate and the space provided in the upper part of the second partition plate are configured.

  (3) In (1), at least the main capacitor is disposed on a side portion of the tank, and the circulation path is provided between the outer surface on the side surface of the tank and the inner surface on the side surface of the outer cover. It is composed by the space.

  (4) Here, in order to make the flow of the circulation path smooth, in (2) or (3), a wind control plate may be provided at a corner portion inside the outer cover.

  (5) The discharge excitation gas laser device includes the high voltage pulse generators (1), (2), (3), and (4).

  By adopting such a structure, the air flow sent from the fan and the radiator and heat-exchanged with the heat generating material comprising the solid switch SW, the main capacitor C0, the drive circuit board, the power supply for the drive circuit, etc. is generated inside the outer cover. Therefore, the heat exchange efficiency between the air flow heated by the heat generating portion and the air cooling means including the radiator and the fan 20 is improved.

In addition, since the circulation flow is formed, there is no blown-up portion of the air heated by exchanging the temperature with the heat generating portion, and there is no stagnation of the flow, and all the air flow that has passed through the radiator is guided to the heat generating portion. It becomes easy.
As described above, since there is no formation of the heated air accumulation part, the problem that the accumulation part is heated can be avoided.

Furthermore, even if the number of heat generating portions increases, it is easy to guide the air flow that has passed through the radiator to all the heat generating portions by installing them in the circulation path through which the air flow circulates.
In particular, when the circulation path is configured as a space formed by the outer peripheral portion on the side surface of the tank and the inner peripheral portion on the side surface of the outer cover, the high voltage pulse generator can be configured compactly.

  In addition, the flow of the circulating airflow becomes smoother by providing the wind control plate at the corner portion inside the outer cover facing the circulation path.

  The present invention is particularly useful for a high voltage pulse generator mounted on a discharge excitation gas laser device having a repetition frequency of 4 kHz or higher.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a diagram showing a first embodiment of a high-voltage pulse generator according to the present invention. In FIG. 1, the same reference numerals as those in FIGS. 5 and 6 denote the same components.

  A tank 2 is filled with an insulating refrigerant, for example, insulating oil. In this insulating oil, heat generating elements constituting magnetic pulse compression circuits such as magnetic switches SR1, SR2, SR3, capacitors C1, C2, and (transformer TR1) are accommodated. The magnetic pulse compression circuit accommodated in the tank 2 is connected to a peaking capacitor Cp and main discharge electrodes E1 and E2 (see FIGS. 7 and 8) in the laser chamber 3.

A fan 20, a radiator 21, and a heating element 1 are disposed on the upper portion of the tank 2. Here, the heating element 1 includes a solid-state switch SW, a main capacitor C0, a driving circuit board for driving the solid-state switch SW not shown in FIGS. 1 and 2, and a driving circuit for supplying power to the driving circuit. Power supply.
The tank 2, the fan 20, and the radiator 21 are surrounded by the outer cover 4. As described above, the outer cover 4 is made of, for example, an iron plate-like metal.

In this embodiment, a wind tunnel is provided in which the cooling air flow generated from the air cooling means including the fan 20 and the radiator 21 is circulated.
A first partition plate 31 is provided on the upper surface of the tank 2 so as to surround the tank 2. The space inside the outer cover 4 is divided into two by, for example, a plate-like lid member 35 that covers the first partition plate 31 and the upper surface of the tank 2. The first partition plate 31 may cover the entire upper portion of the lid member 35 on the upper surface portion of the tank 2.

  The fan 20, the radiator 21 and the heating element 1 are installed in the space on the upper surface side of the tank 2 in the divided space. In the fan 1, the radiator 21, and the heating element 1, the radiator 21 is disposed on the upstream side of the air flow blown from the fan 20, and the heating unit 1 is disposed on the downstream side. Here, the radiator 21 can also be installed on the downstream side of the air flow blown from the fan 20. However, in particular, by installing the radiator 21 on the upstream side of the air flow blown from the fan 20, the influence of the heat received by the fan 20 is reduced, so that the life of the fan 20 becomes long.

  The fan 20 may be a cross flow fan or a sirocco fan.

A second partition plate 32 is provided on the radiator 21, the fan 20, and the heating element 1 arranged as described above. The second partition plate 32 is installed so as to provide an upper space 50 above the radiator 21, the fan 20, and the heating element 1.
Here, the second partition plate 32 does not completely partition the upper space 50 from the space in which the radiator 21, the fan 20, and the heating element 1 are disposed. A wind tunnel that blows air from the fan 20 and passes through the radiator 21 passes through the heat generating material 1, then travels along the outer cover 4, passes through the upper space 50, and becomes a circulating flow that reaches the fan 20. It is for composition.
This wind tunnel is partitioned from the space below the upper surface portion of the tank 2 by the first partition plate 31 and the lid member 35 of the upper surface portion of the tank 2, so that the above-described circulation flow is the upper surface portion of the tank 2. It will not flow downward.

  With such a structure, the air flow heated by heat exchange with the heat generating material 1 does not diffuse inside the outer cover 4 even after colliding with the outer cover 4, and the radiator 21 and the fan 20 are circulated as a circulating flow. Therefore, the heat exchange efficiency between the air flow heated by the heat generating portion 1 (that is, the air in the outer cover 4) and the air cooling means including the radiator 21 and the fan 20 is improved.

  In addition, since the circulation flow is formed, there is almost no air blown-up portion that is heated by the temperature exchange with the heat generating portion 1, and there is almost no stagnation of the flow, and all the air flow that has passed through the radiator is transferred to the heat generating portion. It is easy to guide the wind.

  Furthermore, even if the number of the heat generating parts 1 increases, it is easy to guide all the air flow that has passed through the radiator 21 to all the heat generating parts 1 by installing them in the wind tunnel through which the air flow circulates. Become.

2 and 3 are diagrams showing Embodiment 2 of the high voltage pulse generator of the present invention. FIG. 3 is a cross-sectional view of FIG. 2 viewed from the direction of the arrow. Here, the same reference numerals as those in FIGS. 5 and 6 denote equivalent components.
The high voltage pulse generator of the second embodiment is different from that of the first embodiment in that the fan 20, the radiator 21, and the heat generating part are not arranged on the upper surface of the tank 2, but are arranged on the side surface of the tank 2. . In addition, the second embodiment shows an example in which a plurality of heat generating portions exist as described below, but can also be applied to a case where the heat generating portion is single.

Similar to the first embodiment, the tank 2 is filled with an insulating refrigerant, for example, insulating oil, and a heating element constituting a magnetic pulse compression circuit or the like is accommodated therein. The magnetic pulse compression circuit accommodated in the tank 2 is connected to a peaking capacitor Cp and main discharge electrodes E1 and E2 (see FIGS. 7 and 8) in the laser chamber 3. In addition, the cover member which covers the upper surface part of the tank 2 is abbreviate | omitted in FIG.
As shown in FIGS. 2 and 3, the radiator 21, the fan 20, the heating material 41, and the heating material 42 are disposed on the side surface side of the tank 2.
Here, the heating element 41 is, for example, a solid switch SW and a main capacitor C0, and the heating element 42 is a drive circuit board for driving the solid switch SW, a power supply for a drive circuit that supplies power to the drive circuit, or the like. is there.
The tank 2, the radiator 21, the fan 20, the heat generating material 41, and the heat generating material 42 are surrounded by the outer cover 4. As described above, the outer cover 4 is made of, for example, an iron plate-like metal.

  In the present embodiment, the radiator 21, the fan 20, and the heat generating materials 41 and 42 are arranged so that the space formed by the outer peripheral portion on the side surface of the tank 2 and the inner peripheral portion on the side surface of the outer cover 4 becomes a circulation path. is there. Here, the side surface side outer peripheral portion of the tank 2 and the side surface side inner peripheral portion of the outer cover 4 indicate surfaces on the left and right sides of the paper surface in FIG.

  The fan 20 is arrange | positioned in the said space so that it may blow in the direction which circulates through the said space. The radiator 21 is arranged upstream of the air flow blown from the fan 20, and the heat generating materials 41 and 42 are arranged downstream.

  As in the case of the first embodiment, the radiator 21 can be installed on the downstream side of the air flow blown from the fan 20 here. However, in particular, by installing the radiator 21 on the upstream side of the air flow blown from the fan 20, the influence of the heat received by the fan 20 is reduced, so that the life of the fan 20 becomes long.

  The fan 20 may be a cross flow fan or a sirocco fan.

  Here, the position of the heating element 42 may be the position of a wavy line shown in FIG. Further, the order of arranging the heating elements 41 and 42 may be reversed.

  By adopting such a structure, the air flow heated by heat exchange with the heat generating material 1 does not diffuse inside the outer cover 4 even after colliding with the outer cover 4, and the fan 20 and the radiator 21 are circulated as a circulating flow. Therefore, the heat exchange efficiency between the air flow heated by the heat generating portions 41 and 42 (that is, the air in the outer cover 4) and the air cooling means including the fan 20 and the radiator 21 is improved.

  Since the circulation flow is formed, there is no air stagnation part heated by exchanging temperatures with the heat generating parts 41 and 42, and there is no stagnation of the flow, and all the air flow that has passed through the radiator is guided to the heat generating part. Easy to do.

  Moreover, even if the number of heat generating parts increases (41, 42), the air flow that has passed through the radiator 21 can be guided to all the heat generating parts by installing them in the circulation path through which the air flow circulates. It becomes easy.

  Further, in this embodiment, the space formed by the outer peripheral portion of the side surface of the tank 2 and the inner peripheral portion of the side surface of the outer cover 4 is configured as an air flow circulation path. There is no need to provide a separate upper space, and the configuration can be made compact.

In the said Example 1, Example 2, when the thermal radiation from the tank 2 is large, as shown, for example in FIG. 4, you may provide the heat insulating material 60 in the tank 2 wall surface.
Moreover, in order to make the flow of the circulating air flow smoother, for example, as shown in FIG. 4, a wind control plate 34 and a partition plate 33 may be provided.
Furthermore, the direction of the air flow indicated by the arrows in FIGS.

It is a figure which shows the 1st Example of this invention. It is a figure which shows the 2nd Example of this invention. It is a figure which shows the 2nd Example of this invention. It is a figure explaining the modification of the 1st, 2nd Example of this invention. It is a figure which shows the structure of the conventional high voltage pulse generator. It is a figure which shows the structure of the conventional high voltage pulse generator. It is a figure which shows the structural example of a high voltage pulse generation circuit. It is a figure which shows the structural example of a high voltage pulse generation circuit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Heat generating material 2 Tank 3 Laser chamber 4 Outer cover 20 Fan 21 Radiator 31 Partition plate 32 Partition plate 33 Partition plate 34 Air control plate 35 Cover member 41 Heat generating material 42 Heat generating material 50 Upper space 60 Thermal insulation SR1 Magnetic switch SR2 Magnetic switch SR3 Magnetic switch SW Solid switch Tr1 Step-up transformer L1 Reactor CH High voltage power supply C0 Main capacitor C1 Capacitor C2 Capacitor Cp Peaking capacitor 11 First electrode 12 Dielectric tube 13 Second electrode E1 Main discharge electrode E2 Main discharge electrode

Claims (5)

Includes a main capacitor, switch and magnetic compression circuit or magnetic compression circuit and step-up transformer circuit. After the main capacitor is charged, the switch operates and the main capacitor charge is transferred to the magnetic compression circuit to generate a high voltage pulse. A magnetic switch, a capacitor, or a magnetic switch comprising a saturable reactor, in which an insulative refrigerant is retained, and constituting a magnetic compression circuit. Is immersed in the insulating refrigerant and disposed inside, the main capacitor and the switch disposed outside the tank, and the tank, the main capacitor, and the switch are formed in a plate-like outer shape. In the high voltage pulse generator covered with a cover,
The high voltage pulse generator further includes at least a fan and a radiator for cooling the main capacitor,
Inside the plate-like outer cover, a circulation path is provided in which the air flow that has passed through the fan and radiator reaches at least the main condenser to exchange heat, and then returns to the fan and radiator. A high voltage pulse generator characterized by the above. At least the main capacitor is located at the top of the tank,
The circulation path includes a first partition plate provided at an upper portion of the tank, a second partition plate provided at an upper portion of the main capacitor, and a space provided at an upper portion of the second partition plate. The high voltage pulse generator according to claim 1, comprising: At least the main capacitor is located on the side of the tank,
2. The high voltage pulse generator according to claim 1, wherein the circulation path is constituted by a space between a side surface-side outer surface of the tank and a side surface-side inner surface of the outer cover. 4. The high voltage pulse generator according to claim 2, wherein a wind control plate is provided at a corner portion inside the outer cover facing the circulation path in order to make the circulation path flow smoothly. .   A discharge excitation gas laser device comprising the high voltage pulse generator according to any one of claims 1 to 4.

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