JPS6190481A - Pulse laser oscillator - Google Patents
Pulse laser oscillatorInfo
- Publication number
- JPS6190481A JPS6190481A JP21283884A JP21283884A JPS6190481A JP S6190481 A JPS6190481 A JP S6190481A JP 21283884 A JP21283884 A JP 21283884A JP 21283884 A JP21283884 A JP 21283884A JP S6190481 A JPS6190481 A JP S6190481A
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- Prior art keywords
- electrode
- main
- ionization
- discharge
- main electrode
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、横方向励起型パルスレーザ発振器の改良に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a laterally pumped pulsed laser oscillator.
第４図は従来この種のものとして代表的な横方向励起型
パルスレーザで、時にエキシマレーザ（例えばＡｒＦ、
ＫｒＦ、 ＸｅＦｌＸｅｌ） 、窒素レーザ等で良く
使われる装置の１例を示す縦断面図、第５図は第４図を
ｖ−ｖ線より見た横断面図である。Figure 4 shows a typical horizontally pumped pulsed laser of this type, sometimes an excimer laser (e.g. ArF,
5 is a vertical cross-sectional view showing an example of a device commonly used in KrF, XeFlXel), nitrogen lasers, etc. FIG. 5 is a cross-sectional view of FIG. 4 taken along the v-v line.
図において、（１）は第１の主電極すなわちこの例では
両極、（２）は両極（１）の背面に設置され、両極（１
）の基板とレーザ筐体の一部を兼ねる絶縁性［極基板、
（３）は両極１υと対向する第２の主電極すなわちこの
例では陽極、（４）は導電性の電極基板、（５ａ）は両
極（１）の近くに配置され、絶縁性電極基板（２）に一
端が埋設された第１の予備電離電極、（５ｄ）は陽極（
３）と電気的譬こ接続され、第１の予備電離電極（５ａ
）と対向する第２の予備電離電極、（７）は絶縁性電極
基板（２）を介して両極（１）と反対側に設置され、主
電極（１）、（３）に並列接続されたピーキングコンデ
ンサー、（６）は両極（１）とコンデンサー（３）を接
続する主放電回路導電板、（８）は主放電によってレー
ザが励起される放電励起部、（９）は放電励起部（８）
を主放電に先立って予備電離する紫外光、α１は紫外光
（９）を発生する予備電離ギャップ、＠はレーザ発振光
軸、＠はレーザガス流を示す矢印、（至）はレーザガス
を冷却する熱交換器、ａ◆はレーザガスを循環するブロ
ワ−１（ハ）はレーザガスの循環系を構成するガスダク
ト、αＱはレーザガスを封入するレーザ巨木αηはピー
キングコンデンサー（７）（ζパルス充電するメインコ
ンデンサー、（ト）はメインコンデンサー〇７）を充電
する高圧電源、ＯｎはメインコンデンサーＱカの充電路
を形成する充電用インダクタンス、翰はレーザをスイッ
チングするスイッチング素玉例えばギャップスイッチ、
サイラドロス半導体素子等）、０］）はスイッチング素
子（ホ）に流れるピーク電流を制限し、かつピーキング
コンデンサー（７）に対して均等に電荷を充電するイン
ダクタンス、（イ）は全反射鏡、（至）は部分反射鏡、
弼はレーザ光を示す矢印である。In the figure, (1) is the first main electrode, that is, both poles in this example, (2) is installed on the back side of the pole (1), and
) and also serve as part of the laser casing.
(3) is the second main electrode facing both poles 1υ, that is, the anode in this example, (4) is a conductive electrode substrate, and (5a) is placed near both poles (1), and is an insulating electrode substrate (2 ), (5d) is the anode (
3) and is electrically connected to the first pre-ionization electrode (5a
), the second pre-ionization electrode (7) was installed on the opposite side of both poles (1) via the insulating electrode substrate (2), and was connected in parallel to the main electrodes (1) and (3). The peaking capacitor, (6) is the main discharge circuit conductive plate that connects both poles (1) and the capacitor (3), (8) is the discharge excitation part where the laser is excited by the main discharge, and (9) is the discharge excitation part (8). )
is the ultraviolet light that pre-ionizes before the main discharge, α1 is the pre-ionization gap that generates the ultraviolet light (9), @ is the laser oscillation optical axis, @ is the arrow indicating the laser gas flow, (to) is the heat that cools the laser gas exchanger, a◆ is the blower that circulates the laser gas, 1 (c) is the gas duct that constitutes the laser gas circulation system, αQ is the laser giant tree that seals the laser gas, αη is the peaking capacitor (7) (ζ main capacitor for pulse charging, ( g) is a high-voltage power supply that charges the main capacitor 〇7), On is the charging inductance that forms the charging path for the main capacitor Q, and the wire is the switching element that switches the laser, such as a gap switch,
Cyradros semiconductor device, etc.), 0]) is an inductance that limits the peak current flowing through the switching element (e) and evenly charges the peaking capacitor (7), (a) is a total reflection mirror, ) is a partially reflective mirror,
弼 is an arrow indicating the laser beam.
次に動作について説明する。Next, the operation will be explained.
１例としてＫｒＦレーザの場合について説明する。As an example, the case of a KrF laser will be explained.
レーザ筐体αＱに封入され、ガスダクト（至）、ブロワ
−Ｑ４、熱交換器（転）からなるガス循環系により、冷
却されたＫｖとＦ２とＨｅ（またわＡｒかＮｅ）からな
るレーザガス（２）が、蔭ｆＭ１１３と陽極（３）の間
に矢印（２）の方向から流し込まれる。The laser gas (2), which is enclosed in the laser housing αQ and consists of Kv, F2, and He (also Ar or Ne), is cooled by a gas circulation system consisting of a gas duct (toward), a blower Q4, and a heat exchanger (toward). ) is poured between the shade fM113 and the anode (3) from the direction of the arrow (2).
高圧電源（ト）により、メインコンデンサーｃＡｆ）が
所定の電圧で充電される。The main capacitor cAf) is charged with a predetermined voltage by the high voltage power supply (g).
スイッチング素子（１）がＯＮされると、メインコンデ
ンサー〇ηに蓄えられた電荷が、インダクタンス２１）
、予備電離電極（６ａ）、 （５ｂ）、予備電離ギャッ
プα（１，ｌ！ｔＭ基板（４ンを通じて、ピーキングコ
ンデンサー（７）をパルス充電する。When the switching element (1) is turned on, the charge stored in the main capacitor 〇η is transferred to the inductance 21)
, preionization electrodes (6a), (5b), preionization gap α (1, l!tM substrate (4), and pulse charging the peaking capacitor (7).
その際、予備電離ギヤツブ叫はアーク放電で接続され、
紫外光（９）を発生する。At that time, the pre-ionization gear ring is connected by arc discharge,
Generates ultraviolet light (9).
これＥζより、両極（１）の近傍、ならびに放電励起部
（８）の全域に亘り、レーザガス（２）が弱電離状態（
電子密度ｎｏ＝１０’ 〜１０’（ｊＱ／ｄ ）となる
。Due to this Eζ, the laser gas (2) is in a weakly ionized state (
The electron density no=10' to 10' (jQ/d).
ピーキングコンデンサー（７）の充電により、両極（１
）と陽極（３）の間の電圧が放電開始電圧に達すると、
ピーキングコンデンサー（７）に蓄えられた電荷は、予
備電離ギャップ＋ＩＱ 、予備電離電極（５ａ）＊ （
５ｂ）を通じて一気に両極１１）、陽極（３）間に流れ
、放電励起部（８）にパルス放電が形成される。By charging the peaking capacitor (7), both poles (1
) and the anode (3) reaches the discharge starting voltage,
The charge stored in the peaking capacitor (7) is the pre-ionization gap + IQ, the pre-ionization electrode (5a)* (
5b), it flows between the two electrodes 11) and the anode (3) at once, and a pulsed discharge is formed in the discharge excitation part (8).
これは、あらかじめ放電励起部（８）が紫外光（９）に
よって均一な予備電離状態にされているたべ均一なグロ
ー放電となる。This results in an entirely uniform glow discharge in which the discharge excitation part (8) is brought into a uniform preliminary ionization state by the ultraviolet light (9) in advance.
この放電により形成された放電励起部（８）では励起状
態のＫｒＦが生成され、反転分布が形成される。In the discharge excitation part (8) formed by this discharge, KrF in an excited state is generated, and a population inversion is formed.
放電励起部（８）を挾み対向配置した全反射鏡（イ）と
部分反射鏡に）から成る光共振器により、レーザ発振が
生じ、部分反射鏡−からレーザビーム（ハ）が出射する
。Laser oscillation is generated by an optical resonator consisting of a total reflection mirror (A) and a partial reflection mirror (A) and a partial reflection mirror (A), which are arranged opposite to each other with the discharge excitation part (8) in between, and a laser beam (C) is emitted from the partial reflection mirror (A).
ところで、エキシマレーザにおいては、逆転分布を形成
するエキシマ分子（例えばＫｒＦ＊、 Ｘｅ −１
＊）の寿命が数ｎｓ〜数士ｎｓと極めて短がい。By the way, in an excimer laser, excimer molecules that form an inverted population (for example, KrF*, Xe -1
*) has an extremely short lifespan of several ns to several ns.
そのため、レーザの高出力化、高効率化を実現するため
には、極めて立ち上がりが速く（例えば数ｎｓ）、ピー
クパワーの高い（例えば数醍冶）電力投入が必要である
。Therefore, in order to achieve high output and high efficiency of the laser, it is necessary to input power with an extremely fast rise time (for example, several ns) and a high peak power (for example, several seconds).
この条件は多分に主放電回路（第１図の例では、予備電
離電極（５ａ）ｊ （５ｂ）、ピーキングコンデンサー
（７）、主放電回路導電板（６）、両極（１）、陽極（
３）、陽極基板（４）が形成する回路）の浮遊のインダ
クタンスで決まり、これを小さく押えること、具体的に
は先の主放電回路の断面積をできるだけ小さくすること
が重要である。This condition probably applies to the main discharge circuit (in the example shown in Figure 1, the pre-ionization electrodes (5a)j (5b), the peaking capacitor (7), the main discharge circuit conductive plate (6), both poles (1), and the anode (
3) It is determined by the floating inductance of the circuit formed by the anode substrate (4), and it is important to keep it small, specifically to make the cross-sectional area of the main discharge circuit as small as possible.
このため、放電励起部（８）に予備電離電極（Ｓａ）ｔ
（５ｂ）をなるべく近づけるのが望ましい。For this reason, the pre-ionization electrode (Sa)t is provided in the discharge excitation part (8).
It is desirable to make (5b) as close as possible.
しかしながら、従来の装置の構成では、予備電離電極（
５ａ）、 （５ｂ）を放電励起部（８）に近づけると、
両極（１）と第１の予備電離電極（５ａ）の間で絶縁性
電極基板（２）表面またはレーザガス（２）中を媒介と
じて放電が起こり、主電極＋１） 、 （３）間におい
ては放電が行なわれないという問題点があったつ
また、予備電離ギャップ（１０の位置も同じ理由により
放電励起部（８）に近づけられず、十分な予備電離効果
を発揮できないという問題点があった。However, in the conventional device configuration, the pre-ionization electrode (
When 5a) and (5b) are brought close to the discharge excitation part (8),
A discharge occurs between the two electrodes (1) and the first pre-ionization electrode (5a) via the surface of the insulating electrode substrate (2) or in the laser gas (2), and between the main electrodes +1) and (3). There was a problem that discharge was not carried out, and there was also a problem that the position of the pre-ionization gap (10) could not be brought close to the discharge excitation part (8) for the same reason, and a sufficient pre-ionization effect could not be exerted.
この発明は上記のような問題点を解決するためになされ
たもので、高出力で高効率、なおかつ出力の安定したパ
ルスレーザ発振器を得ることを目的としている。This invention was made to solve the above-mentioned problems, and aims to provide a pulsed laser oscillator with high output, high efficiency, and stable output.
この発明に係るパルスレーザ発振器は、絶縁性電極基板
に連設され、第１の主電極と第１の予備電離電極の間の
放電を防止する絶縁壁を備えたものである。The pulse laser oscillator according to the present invention includes an insulating wall that is connected to an insulating electrode substrate and prevents discharge between the first main electrode and the first pre-ionization electrode.
この発明における絶縁壁は、第１の主電極と第１の予備
電離電極の間の放電を防止するので、予備電離電極と予
備電離ギャップの位置的な自由間は非常に増加し、主放
電回路の浮遊のインダクタンスを小さくできると共に予
備電離効果をも高めることができる。The insulating wall in this invention prevents the discharge between the first main electrode and the first preionization electrode, so the positional freedom between the preionization electrode and the preionization gap increases greatly, and the main discharge circuit The floating inductance can be reduced and the pre-ionization effect can also be enhanced.
以下、この発明の一実施例を図をもとに説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第１図はこの発明の一実施例の主要部を示す縦断面図、
第２図は第１図をｌ−１線より見た平面図である。FIG. 1 is a longitudinal sectional view showing the main parts of an embodiment of the present invention;
FIG. 2 is a plan view of FIG. 1 taken along line 1-1.
図において、（ホ）は絶縁性電極基板（２）に連設され
、第１の主電極（１）と第１の予備電離電極（５ａ）の
間に設けられた絶縁壁すなわち電極用絶縁壁であり、こ
の例では第１の主電極（１）はこの絶縁壁（至）によっ
て囲まれている。In the figure, (e) is an insulating wall connected to the insulating electrode substrate (2) and provided between the first main electrode (1) and the first pre-ionization electrode (5a), that is, an electrode insulating wall. In this example, the first main electrode (1) is surrounded by this insulating wall.
次に動作について、従来例との相違点にポイントを置い
て説明する。Next, the operation will be explained, focusing on the differences from the conventional example.
予備電離ギャップｕ０と放電励起部（８）が近接してい
る場合、絶縁性電極基板（２）の表面またはレーザガス
を媒介として、第１の主電極（１）と第１の予備電離電
極（５ａ）の間で放電が起ころうとするが、電極用絶縁
壁（２）があるためこれを防止することができる。When the pre-ionization gap u0 and the discharge excitation part (8) are close to each other, the first main electrode (1) and the first pre-ionization electrode (5a ), but this can be prevented due to the presence of the electrode insulating wall (2).
したがって、予備電離電極（５ａ）、 （５ｂ）を放電
励起部（８）に近づけることが可能となり、主放電回路
の浮遊のインダクタンスを減らすことができる。Therefore, it is possible to bring the pre-ionization electrodes (5a) and (5b) close to the discharge excitation part (8), and the floating inductance of the main discharge circuit can be reduced.
また同時に、予備電離ギャップＱＯの位置も最適化する
ことができる。At the same time, the position of the preionization gap QO can also be optimized.
これらの作用により、高出力で高効率、なおかつ出力の
安定したパルスレーザ発振器を実現できる。These effects make it possible to realize a pulsed laser oscillator with high output, high efficiency, and stable output.
なお、電極用絶縁壁（ハ）の高さは、レーザガス流への
影響、絶縁壁としての有効な作用という観点から、第１
の主電極面＋１）とほぼ等しい高さにするのが望ましい
。Note that the height of the electrode insulating wall (c) is determined from the viewpoint of the influence on the laser gas flow and the effective action as an insulating wall.
It is desirable that the height be approximately equal to the main electrode surface +1).
また、上記実施例では電極用絶縁壁（２）によって第１
の主電極（１）の側面を囲った場合について説明したが
、予備電離電極（５ａ）＃ （５ｂ）の配置によっては
、第１の主電極（１）と第１の予備電離電極（５ａ）の
間にのみ電極用絶縁壁（ホ）を設けても上記実施例と同
様の効果を奏する。In addition, in the above embodiment, the first electrode insulating wall (2)
Although the case where the side of the main electrode (1) is surrounded is explained, depending on the arrangement of the pre-ionization electrode (5a) # (5b), the first main electrode (1) and the first pre-ionization electrode (5a) Even if an electrode insulating wall (e) is provided only between the electrodes, the same effect as in the above embodiment can be obtained.
第８図はこの発明の他の実施例の主要部を示す縦断面図
である。FIG. 8 is a longitudinal sectional view showing the main parts of another embodiment of the invention.
図において、（２６）は絶縁性電極基板（２））こ連設
され、主放電回路導電板（６）とコンデンサー（７）の
間に設けられた絶縁壁すなわちコンデンサー用絶縁壁で
あり、レーザガス雰囲気外での第１の電極（１）と第１
の予備電離電極（５ａ）の間の絶縁破壊を防止すること
ができる。In the figure, (26) is an insulating wall that is connected to the insulating electrode substrate (2) and is provided between the main discharge circuit conductive plate (6) and the capacitor (7). The first electrode (1) and the first electrode outside the atmosphere
dielectric breakdown between the pre-ionization electrodes (5a) can be prevented.
これにより、ピーキングコンデンサー（７）の設定位置
に自由度が与えられ、主放電回路に浮遊するインダクタ
ンスをより小さくすることが可能となり、この発明の効
果を一層高めることができる。This provides flexibility in the setting position of the peaking capacitor (7), making it possible to further reduce the inductance floating in the main discharge circuit, and further enhancing the effects of the present invention.
なお、この実施例では電極用絶縁壁（２）とコンデンサ
用絶縁壁Ｇ２６）とを併設した場合について説明したが
、コンデンサ用絶縁壁（２６）のみを備えた場合でも上
記実施例と同様の効果が得られる。In this example, the case where the electrode insulating wall (2) and the capacitor insulating wall G26) are provided together is explained, but even if only the capacitor insulating wall (26) is provided, the same effect as in the above example can be obtained. is obtained.
なお、上記実施例ではエキシマレーザ媒質を用いた場合
について説明したが、Ｆ 、 Ｎ、 、 ＨＦ、ＣＤ。In the above embodiment, the case where an excimer laser medium was used was explained, but F, N, HF, CD.
レーザ等、他のレーザ媒質を用いた場合にも適用できる
のは言うまでもない。Needless to say, the present invention can also be applied to cases where other laser media such as lasers are used.
また、上記実施例では、工業的に有用な、１秒間に数百
回から数千回に亘ってレーザ発振を行なう、ガス流のあ
る装置について説明したが、ガス流のない装置に本発明
を適用しても同様の効果が得られることはいうまでもな
い。In addition, in the above embodiment, an industrially useful device with a gas flow that performs laser oscillation several hundred to several thousand times per second was described, but the present invention can be applied to a device without a gas flow. It goes without saying that the same effect can be obtained even if applied.
以上のように、この発明によれば、第１の主電極と第１
の予備電離電極の間に絶縁性電極基板ｌこ連設された絶
縁壁を備えたので、第１の主電極と第１の予備電離電極
間の放電を防止でき、高出力で高効率、なおかつ出力が
安定したパルスレーザ発振器が得られる効果がある。As described above, according to the present invention, the first main electrode and the first
Since the insulating wall connected to the insulating electrode substrate is provided between the pre-ionization electrodes, it is possible to prevent discharge between the first main electrode and the first pre-ionization electrode, resulting in high output and high efficiency. This has the effect of providing a pulsed laser oscillator with stable output.
第１図はこの発明の一実施例によるパルスレーザ発振器
の要部を示す縦断面図、第２図は第１図をト■線方向か
ら見た平面図、第８図はこの発明の他の実施例１ζよる
パルスレーザ発振器の要部を示す縦断面図、第４図は従
来のパルスレーザ発振器を示す縦断面図、第５図は第４
図のＶ−ｖ線横断面図である。
図において、（１）は第１の主電極、（２）は絶縁性電
極基板、（３）は第２の主電極、（５ａ）は第１の予備
電離電極、（５ｂ）は第２の予備電離電極、（６）は主
放電回路導電板、（７）はコンデンサー、（至）、（（
６）は絶縁壁、である。
なお、各図中同一符号は同一または担当部分を示すもの
とする。FIG. 1 is a longitudinal sectional view showing the main parts of a pulsed laser oscillator according to an embodiment of the present invention, FIG. 2 is a plan view of FIG. FIG. 4 is a vertical cross-sectional view showing the main parts of a pulsed laser oscillator according to Example 1ζ, FIG. 4 is a vertical cross-sectional view showing a conventional pulsed laser oscillator, and FIG.
It is a cross-sectional view taken along the line V-v in the figure. In the figure, (1) is the first main electrode, (2) is the insulating electrode substrate, (3) is the second main electrode, (5a) is the first pre-ionization electrode, and (5b) is the second Pre-ionization electrode, (6) is the main discharge circuit conductive plate, (7) is the capacitor, (to), ((
6) is an insulating wall. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (4)
２の主電極と、第１の主電極の背面に存在する絶縁性電
極基板と、この絶縁性電極基板を介して第１の主電極と
反対側に設置され、上記主電極に並列接続されたコンデ
ンサーと、上記主電極の近くに配置され、上記絶縁性電
極基板に一端が理設された一個以上の第１の予備電離電
極と、第２の主電極と電気的に接続され、第１の予備電
離電極と対向し、かつ第１の予備電離電極と共に上記主
電極と上記コンデンサーによつて形成される回路の一部
をなす一個以上の第２の予備電離電極と、上記コンデン
サーにパルス的に充電する回路とを備え、上記コンデン
サーに充電された電荷の放出により、上記主電極間にパ
ルス状の放電を生成し、光共振器からレーザ光を出射さ
せるように構成するパルスレーザ発振器において、上記
絶縁性電極基板に連設され、第１の主電極と第１の予備
電離電極の間の放電を防止する絶縁壁を有することを特
徴とするパルスレーザ発振器。(1) First and second main electrodes disposed facing each other in the laser gas, an insulating electrode substrate present on the back surface of the first main electrode, and a first a capacitor installed on the opposite side of the main electrode and connected in parallel to the main electrode; and one or more first pre-ionization electrodes placed near the main electrode and having one end disposed on the insulating electrode substrate. is electrically connected to the second main electrode, faces the first pre-ionization electrode, and forms part of a circuit formed by the main electrode and the capacitor together with the first pre-ionization electrode. It includes one or more second pre-ionization electrodes and a circuit that charges the capacitor in a pulsed manner, and generates a pulsed discharge between the main electrodes by releasing the charge charged in the capacitor, thereby causing optical resonance. In the pulsed laser oscillator configured to emit laser light from a device, the pulsed laser oscillator has an insulating wall that is connected to the insulating electrode substrate and prevents discharge between the first main electrode and the first pre-ionization electrode. A pulsed laser oscillator featuring:
に設けられている特許請求の範囲第１項記載のパルスレ
ーザ発振器。(2) The pulsed laser oscillator according to claim 1, wherein the insulating wall is provided between the first main electrode and the first pre-ionization electrode.
い高さである特許請求の範囲第２項記載のパルスレーザ
発振器。(3) The pulsed laser oscillator according to claim 2, wherein the height of the insulating wall is approximately equal to the discharge surface of the first main electrode.
的に接続する主放電回路導電板と上記コンデンサーとの
間に設けられている特許請求の範囲第１項記載のパルス
レーザ発振器。(4) The pulse laser oscillator according to claim 1, wherein the insulating wall is provided between the main discharge circuit conductive plate that electrically connects the first main electrode and the capacitor and the capacitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21283884A JPS6190481A (en) | 1984-10-09 | 1984-10-09 | Pulse laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21283884A JPS6190481A (en) | 1984-10-09 | 1984-10-09 | Pulse laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190481A true JPS6190481A (en) | 1986-05-08 |
| JPH0535585B2 JPH0535585B2 (en) | 1993-05-26 |
Family
ID=16629182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21283884A Granted JPS6190481A (en) | 1984-10-09 | 1984-10-09 | Pulse laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190481A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6484677A (en) * | 1987-09-28 | 1989-03-29 | Agency Ind Science Techn | Gas laser oscillator |
| JPH04177773A (en) * | 1990-11-09 | 1992-06-24 | Mitsubishi Electric Corp | Switch for pulse laser |
-
1984
- 1984-10-09 JP JP21283884A patent/JPS6190481A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6484677A (en) * | 1987-09-28 | 1989-03-29 | Agency Ind Science Techn | Gas laser oscillator |
| JPH04177773A (en) * | 1990-11-09 | 1992-06-24 | Mitsubishi Electric Corp | Switch for pulse laser |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0535585B2 (en) | 1993-05-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |