TWI329607B - - Google Patents
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- Publication number
- TWI329607B TWI329607B TW96105191A TW96105191A TWI329607B TW I329607 B TWI329607 B TW I329607B TW 96105191 A TW96105191 A TW 96105191A TW 96105191 A TW96105191 A TW 96105191A TW I329607 B TWI329607 B TW I329607B
- Authority
- TW
- Taiwan
- Prior art keywords
- conveyor
- substrate
- main
- divergent
- main conveyor
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 84
- 238000012546 transfer Methods 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 14
- 239000002689 soil Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 69
- 230000032258 transport Effects 0.000 description 27
- 238000012545 processing Methods 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 239000010408 film Substances 0.000 description 8
- 239000012530 fluid Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 206010036790 Productive cough Diseases 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Engineering (AREA)
- Relays Between Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006246134A JP5028919B2 (ja) | 2006-09-11 | 2006-09-11 | 基板搬送装置及び基板搬送方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200812889A TW200812889A (en) | 2008-03-16 |
| TWI329607B true TWI329607B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2010-09-01 |
Family
ID=39183525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96105191A TW200812889A (en) | 2006-09-11 | 2007-02-13 | Substrate transmission apparatus and substrate transmission method |
Country Status (5)
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100978852B1 (ko) * | 2008-06-12 | 2010-08-31 | 세메스 주식회사 | 기판 반송 장치 및 그 방법 그리고 그 장치를 갖는 기판제조 설비 |
| CN103158899A (zh) * | 2011-12-15 | 2013-06-19 | 苏州澳昆智能机器人技术有限公司 | 包装箱输送线的包装箱转弯定位机构 |
| JP6106988B2 (ja) * | 2012-08-23 | 2017-04-05 | 株式会社Ihi | 搬送装置 |
| KR101610215B1 (ko) * | 2012-04-26 | 2016-04-07 | 가부시키가이샤 아이에이치아이 | 반송 장치 |
| JP5915358B2 (ja) * | 2012-04-26 | 2016-05-11 | 株式会社Ihi | 搬送装置 |
| CN104779189B (zh) * | 2014-01-13 | 2017-09-01 | 上海和辉光电有限公司 | 切割后玻璃面板搬送装置与搬送方法 |
| CN107316834A (zh) * | 2017-07-31 | 2017-11-03 | 武汉华星光电半导体显示技术有限公司 | 基板传送装置 |
| EP3514825B1 (en) * | 2018-01-22 | 2023-11-29 | Meyer Burger GmbH | Wafer sorting |
| CN110282433A (zh) * | 2019-06-14 | 2019-09-27 | 中国建材国际工程集团有限公司 | 一种基于中断的玻璃自动对准系统及方法 |
| CN112536786B (zh) * | 2020-11-17 | 2022-01-28 | 宁波金凤焊割机械制造有限公司 | 一种金属条板喷码划线系统 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4161273B2 (ja) * | 2003-12-16 | 2008-10-08 | 株式会社ダイフク | 搬送装置 |
-
2006
- 2006-09-11 JP JP2006246134A patent/JP5028919B2/ja active Active
-
2007
- 2007-02-13 TW TW96105191A patent/TW200812889A/zh unknown
- 2007-02-15 CN CN2007800331888A patent/CN101512747B/zh active Active
- 2007-02-15 WO PCT/JP2007/052670 patent/WO2008032456A1/ja active Application Filing
- 2007-02-15 KR KR1020097003168A patent/KR20090039792A/ko not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CN101512747B (zh) | 2012-04-25 |
| KR20090039792A (ko) | 2009-04-22 |
| WO2008032456A1 (fr) | 2008-03-20 |
| JP5028919B2 (ja) | 2012-09-19 |
| JP2008066675A (ja) | 2008-03-21 |
| TW200812889A (en) | 2008-03-16 |
| CN101512747A (zh) | 2009-08-19 |
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