Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67706—Mechanical details, e.g. roller, belt
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
  • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
  • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/063—Transporting devices for sheet glass
  • B65G49/064—Transporting devices for sheet glass in a horizontal position
  • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67715—Changing the direction of the conveying path
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
  • B65G2249/02—Controlled or contamination-free environments or clean space conditions
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
  • B65G2249/04—Arrangements of vacuum systems or suction cups
  • B65G2249/045—Details of suction cups suction cups

Definitions

• the present invention relates to a substrate transfer apparatus and a substrate transfer method for transferring a substrate such as a semiconductor wafer or a glass plate for a flat panel display, for example.
• a substrate transfer device installed in a factory that manufactures semiconductor devices, a factory that manufactures flat panel displays such as liquid crystal devices, PDPs, and EL devices, it transfers substrates such as semiconductor wafers and glass plates, Using a loader, a robot arm, or the like, the substrate is transferred between various processing apparatuses such as a thin film forming apparatus, an etching apparatus, and a test apparatus, and a transfer path.
• the substrate is generally transported in a state where it is accommodated in a cassette that can accommodate a plurality of substrates.
• Patent Document 1 JP-A-9-58844
• the present invention has been made in view of the above-described problems, and an object of the present invention is to improve the substrate transfer speed between the main competitor and the branch competitor.
• a substrate transport apparatus includes a main conveyor that transports a single wafer, a branch compressor that horizontally branches the main compressor force, and the main conveyor and the branch compressor.
• the substrate is lifted and supported by the support portion on the main conveyor and the branch conveyor, and in this state, the substrate is transferred without changing its posture.
• the substrate is transferred between the main and branching conveyors in a state where there is no frictional resistance.
• the substrate delivery section includes a gripping member that grips an outer edge of the substrate and is movable in the transport direction of the substrate in the branch conveyor. Can be adopted.
• the support unit floats and supports the substrate using compressed air can be employed.
• the substrate conveyed by the main conveyor by the main conveyor is supported while being floated on the main competitor, and the substrate that is floated and supported on the main conveyor is
• the vehicle is delivered without changing its posture while maintaining a state where it floats and is supported by a branching conveyor that branches horizontally with respect to the main conveyor.
• the substrate is supported while being levitated on the main competitor. It is passed to the branch competitor while maintaining this state and without changing the posture.
• the substrate is transferred from the main conveyor to the branching conveyor in an equal state with no frictional resistance.
• the substrate supported while being levitated on the branch conveyor that branches horizontally with respect to the main conveyor is levitated and supported. It is characterized by being delivered to the main competitor while maintaining the state and without changing the posture.
• the substrate is supported while being floated on the branch competitor, and is transferred to the main competitor while maintaining this state and without changing the posture.
• the substrate is transferred from the branching conveyor to the main conveyor in a state where there is no frictional resistance.
• the substrate is transferred between the main competitor and the branch competitor in a state equal to no frictional resistance. For this reason, even if the delivery speed is increased, the substrate is not damaged by the impact.
• FIG. 1 is a schematic view showing a substrate transfer apparatus according to an embodiment of the present invention.
• FIG. 2 is a diagram showing a detailed configuration of the main competitor.
• FIG. 3 is a diagram showing a configuration of a plate delivery section of a branch competitor.
• FIG. 1 is a schematic diagram showing a substrate transfer apparatus 1 according to the present embodiment.
• the substrate transport device 1 is a device that transports glass plates P one by one in a factory that manufactures flat panel displays such as liquid crystal devices, PDPs, and EL devices.
• a plurality of branch competitors 20 that branch in a horizontal plane and a control unit (not shown) that controls these in a centralized manner are provided.
• the main compressor 10 is a device that places the glass plate P horizontally and conveys it at a constant speed in the direction along the surface thereof.
• Consists of a levitation unit 12 (support) and a competitor 15 see Fig. 2 and Fig. 3). That is, in the present embodiment, the function of the support portion in the present invention is incorporated in a part of the main compressor 10.
• the main compressor 10 is arranged in a substantially straight line on the floor surface in the clean nolem of the factory. Then, the plurality of locations of the main competitor 10 are connected to the one-force main compressor 10 of the branch competitor 20 substantially orthogonally and horizontally.
• the branch competitor 20 is a device that horizontally places the glass plate P and conveys it at a constant speed in the direction along the surface thereof. Consists of 15 parts etc. That is, in the present embodiment, the function of the support means in the present invention is also incorporated in a part of the branch competitor 10.
• the branching compressor 20 receives the glass plate P conveyed on the main competitor 10 in the branching compressor 20 and conversely transfers the glass plate P conveyed on the branching compressor 20 to the main competitor 10.
• the branch competition 20 It is equipped with a plate delivery part 40 (substrate delivery part) that delivers the glass plate P between them.
• processing devices such as a thin film forming device 5, an etching device 6, and a test device 7 are arranged and connected to the other end side of the branch competitor 20.
• a processing apparatus such as the thin film forming apparatus 5, the etching apparatus 6, and the test apparatus 7, two branching components 20 are arranged in parallel.
• the branching conveyor 21 is a conveyor for carrying the glass plate P into the thin film forming apparatus 5
• the branching competitor 22 is made of glass. This is a conveyor for unloading the plate P from the thin film forming apparatus 5.
• branch conveyors 23 and 25 are used to carry the glass plate P into the etching apparatus 6 and the test apparatus 7, and the branch competitors 24 and 26 (branch conveyor 20) are etched. It is a conveyor for unloading the glass plate P from the device 6 and the test device 7.
• branch competitors 21, 23, and 25 that carry the glass plate P into various processing apparatuses are arranged on the upstream side of the main competitor 10 with respect to the branch competitors 22, 24, and 26 that carry out the glass plate P.
• FIG. 2 is a diagram showing a detailed configuration of the main competitor 10.
• the main competitor 10 is a device that conveys the glass plate P in one direction on a horizontal plane while being floated by air, and includes a plurality of air floating units 12, a competitor unit 15, and the like.
• the air levitation unit 12 is a member having a planar upper surface, and a plurality of fluid ejection holes 13 for ejecting compressed air are provided on the upper surface (mounting surface) with a substantially uniform density. Yes.
• the air levitation unit 12 is formed in a rectangular shape in plan view, and is provided so that its longitudinal direction coincides with the conveying direction of the glass plate P.
• the short direction (width direction) of the air levitation unit 12 is formed slightly narrower than the width direction of the glass plate P (direction perpendicular to the transport direction).
• compressed air is supplied to the air levitation unit 12 from a compressed air supply device (not shown).
• a compressed air supply device not shown
• the compressed air is ejected from each fluid ejection hole 13.
• the glass plate P placed on the air levitation unit 12 is floated by the compressed air ejected from each fluid ejection hole 13 and can be supported in a non-contact manner.
• the competitor unit 15 includes a plurality of rollers 16 and a benolet 17 attached around the plurality of rollers 16. Further, f is provided on the surface of the benore 17 and is provided at equal intervals in the longitudinal direction of the plurality of protrusions 18 of the benolet 17 (conveying direction of the main compressor 10).
• the compressor unit 15 is arranged on both sides of the air levitation unit 12 along the conveying direction of the glass plate P.
• the arrangement interval (distance) between the pair of competitor parts 15 is substantially the same as the width of the glass plate P.
• the upper ends of the rollers 16 of the compressor section 15 are arranged so as to be located in the same horizontal plane, so that the protrusion 18 provided on the surface of the belt 17 is slightly lower than the upper surface of the air levitation unit 12. It arrange
• Each roller 16 of the compressor section 15 is rotated in the same direction at the same rotational speed by a motor (not shown) or the like.
• the glass plate P can be transported along the air levitation unit 12 by the conveyor unit 15 while being supported by the air levitation unit 12 in a non-contact manner.
• the competitor unit 15 is configured to be movable in the vertical direction by a lifting device (not shown).
• each projection 18 is positioned slightly above the upper surface of the air levitation unit 12. In this case, the projection 18 of the competitor portion 15 abuts on the lower surface of the glass plate P, and the glass plate P can be conveyed.
• the main compressor 10 is configured by connecting a plurality of air levitation units 12 and a compressor section 15. That is, each air levitation unit 12 and each competitor section 15 are arranged close to each other and arranged in the horizontal direction. At this time, the upper surface (mounting surface) of each air levitation unit 12 is adjusted so as to be located in the same horizontal plane.
• FIG. 3 is a diagram showing the configuration of the branch competitor 20.
• the branch competitor 20 is provided with an air levitation unit 12 and a compressor section 15 as in the case of the main competitor 10, and as described above, the glass plate P is connected to the main conveyor 10 and the branch compressor 20 as shown in FIG.
• a plate delivery section 40 is provided for delivering to and from.
• the plate delivery section 40 includes a pair of linear actuators 42 and a gripping member 44 that is connected to and driven by the linear actuators 42 to reciprocate.
• the pair of linear actuators 42 are arranged in parallel along the converter section 15 between the air levitation unit 12 and the compressor section 15 of the branch competitor 20.
• the plate delivery section 40 is configured such that each gripping member 44 is placed on the glass plate P from one end of the branching compressor 20 toward the other end side in a horizontal plane substantially flush with the upper surface of the air floating unit 12 of the branching competitor 20. It is possible to move in the conveyance direction of the glass plate P (the width direction of the glass plate P) in the branching compressor 20 by the same length as the width direction.
• the pair of gripping members 44 are controlled so that they are always at the same position in the longitudinal direction of the air floating unit 12 of the branching competitor 20 (the conveyance direction of the glass plate P).
• the gripping member 44 is configured to be able to grip the outer edge portion of the glass plate P, specifically, the vicinity of one side in the width direction of the glass plate P.
• the glass plate P may be gripped by adsorbing and holding the side surface of the glass plate P, or the glass plate P may be gripped by sandwiching the upper and lower surfaces of the glass plate P.
• the plate delivery section 40 is reciprocated near one end of the branch competitor 20 while gripping the outer edge of the glass plate P by the pair of gripping members 44, so that the glass posture is not changed.
• the plate P can be transferred between the main competitor 10 and the branch competitor 20.
• the substrate delivery section (plate delivery section 40) of the present invention is incorporated in the branch competitor 20.
• the operation (substrate transport method) of the substrate transport apparatus 1 will be described.
• compressed air is supplied to the air levitation units 12 of the main competitor 10 and the branch competitor 20, and the compressed air is ejected from the fluid ejection holes 13. Further, the compressor unit 15 is driven to rotate each roller 16 at a constant rotational speed. At this time, each of the competitors 15 is raised by an elevator device (not shown).
• the glass plates P are conveyed by a single sheet.
• the glass plate P is placed on the main compressor 10 so that the longitudinal direction thereof coincides with the transport direction, for example.
• the glass plate P is transported by the branch competitor 20 and delivered to various processing apparatuses such as the thin film forming apparatus 5, the etching apparatus 6, and the test apparatus 7.
• the glass plate P delivered to each processing apparatus is carried out to the outside of each processing apparatus after predetermined processing is performed in each processing apparatus.
• the glass plate P conveyed on the main compressor 10 is changed to the branching compressor 20.
• the glass plate P force is floated and supported on the main competitor 10 and is passed to the branch competitor 20 without changing the posture while maintaining this state. Therefore, the glass plate P has a frictional resistance. Passed to the main competitor 10 power branch competitor 20 in a state equal to none.
• the operation of transferring the glass plate P from the branch competitor 20 to the main competitor 10 is substantially the reverse of the operation of transferring the glass plate P from the main competitor 10 to the branch competitor 20.
• compressed air is supplied to the air levitation units 12 of the main competitor 10 and the branch competitor 20, and the compressed air is ejected from the fluid ejection holes 13. Further, the compressor unit 15 is driven to rotate each roller 16 at a constant rotational speed. At this time, the competitor unit 15 is raised by a lifting device (not shown).
• the glass plate P is delivered to the branching compressor 20 from various processing apparatuses such as the thin film forming apparatus 5, the etching apparatus 6, and the test apparatus 7.
• the glass plate P is transported by the branch competitor 20 and moves to the end of the branch competitor 20.
• the gripping member 44 of the plate delivery unit 40 grips the outer edge (near the side surface opposite to the conveying direction) of the glass plate P on the branching compressor 20.
• the gripping member 44 is moved along the branch competitor 20 and moved to one end of the branch competitor 20, whereby the glass plate P is transported from the branch competitor 20 onto the main competitor 10.
• the holding of the glass plate P by the holding member 44 is released.
• the competitor 15 of the main competitor 10 and the branch competitor 20 is lifted by a lifting device (not shown).
• the projections 18 of the compressor portion 15 of the main competitor 10 abut against both ends of the lower surface of the glass plate P in the width direction, and the glass plate P is delivered to the main competitor 10 and is transported as a single sheet.
• the glass plate P is transferred from the branching compressor 20 to the main competitor 10
• the glass plate P is floated and supported on the branching competitor 20, and maintains the state and maintains the posture. Passed to the main competitor 10 without change. Accordingly, the glass plate P is transferred to the main compressor 10 from the branching compressor 20 with the same friction resistance.
• the substrate transfer apparatus 1 includes the main conveyor 10 that transfers the glass plate P one by one, the branch converter 20 that branches horizontally with respect to the main compressor 10, and the main compressor. 10 and an air levitation unit 12 that floats and supports the glass plate P on the branch competitor 20 and the glass plate P that is supported by being levitated by the air levitation unit 12 without changing the posture. And a plate delivery section 40 for delivery between the branch conveyor 20 and the branch conveyor 20.
• the glass plate P is transferred between the main competitor 10 and the branch competitor 20 in a state equal to no frictional resistance. For this reason, even if the delivery speed is increased, the glass plate P is not damaged by the impact.
• the substrate transfer apparatus 1 of the present embodiment it is possible to improve the delivery speed of the glass plate P between the main conveyor 10 and the branch converter 20.
• the glass plate P is floated and supported using compressed air.
• the present invention is not limited to this.
• the glass plate P may be lifted and supported by applying a vibration wave propagating in space to the glass plate P.
• the glass plate P when the glass plate P is transferred between the main competitor 10 and the branch competitor 20 by the compensator unit 15 being lowered by an elevator device (not shown), the glass plate P
• the configuration is such that contact with the compressor section 15 can be prevented.
• the present invention is not limited to this. Instead of lowering, it is possible to prevent the glass plate P from coming into contact with the compressor section 15 by raising the air levitation unit 12.
• the upper surface of the air levitation unit 12 of the delivery-side competitor is positioned so as to be flush with the upper surface of the air levitation unit 12 after being lifted.
• the object of conveyance is not limited to this.
• a thin plate member such as a semiconductor wafer can be transported.
• branch compressor 20 may be further connected to the downstream side (the other end side) of the branch competitor 20.
• a stocker for temporarily storing a plurality of substrates such as a glass plate P may be arranged.
• the competitors 22, 24, and 26 are arranged has been described, the arrangement of the above devices is not limited to this.
• one branch competitor 20 may carry in and out the glass plate P.
• the main conveyor and the branching conveyor are arranged in a state where the substrate is equal to having no frictional resistance. Passed between. For this reason, even when the delivery speed is increased, the substrate is not damaged by the impact. Therefore, it is possible to improve the substrate transfer speed between the main and branch competitors.

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• Engineering & Computer Science (AREA)
• Computer Hardware Design (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Mechanical Engineering (AREA)
• Relays Between Conveyors (AREA)
• Intermediate Stations On Conveyors (AREA)
• Attitude Control For Articles On Conveyors (AREA)

Priority Applications (1)

Applications Claiming Priority (2)

Publications (1)

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ID=39183525

Family Applications (1)

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Cited By (1)

Families Citing this family (9)

Citations (1)

• 2006
  • 2006-09-11 JP JP2006246134A patent/JP5028919B2/ja active Active
• 2007
  • 2007-02-13 TW TW96105191A patent/TW200812889A/zh unknown
  • 2007-02-15 CN CN2007800331888A patent/CN101512747B/zh active Active
  • 2007-02-15 WO PCT/JP2007/052670 patent/WO2008032456A1/ja active Application Filing
  • 2007-02-15 KR KR1020097003168A patent/KR20090039792A/ko not_active Ceased

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