TWI319220B - - Google Patents

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Publication number
TWI319220B
TWI319220B TW095107726A TW95107726A TWI319220B TW I319220 B TWI319220 B TW I319220B TW 095107726 A TW095107726 A TW 095107726A TW 95107726 A TW95107726 A TW 95107726A TW I319220 B TWI319220 B TW I319220B
Authority
TW
Taiwan
Application number
TW095107726A
Other versions
TW200711065A (en
Inventor
Kojiro Kameyama
Akira Suzuki
Yoshio Okayama
Mitsuo Umemoto
Original Assignee
Sanyo Electric Co
Kanto Sanyo Semiconductors Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co, Kanto Sanyo Semiconductors Co filed Critical Sanyo Electric Co
Publication of TW200711065A publication Critical patent/TW200711065A/zh
Application granted granted Critical
Publication of TWI319220B publication Critical patent/TWI319220B/zh

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Classifications

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    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
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US9165898B2 (en) 2015-10-20
TW200711065A (en) 2007-03-16
CN1841718A (zh) 2006-10-04
KR20060097637A (ko) 2006-09-14
CN100429963C (zh) 2008-10-29
US7485967B2 (en) 2009-02-03
EP1701379A2 (en) 2006-09-13
EP1701379A3 (en) 2009-07-29
KR100709662B1 (ko) 2007-04-23
US20060202348A1 (en) 2006-09-14

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