TWI308770B - - Google Patents
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- TWI308770B TWI308770B TW091116901A TW91116901A TWI308770B TW I308770 B TWI308770 B TW I308770B TW 091116901 A TW091116901 A TW 091116901A TW 91116901 A TW91116901 A TW 91116901A TW I308770 B TWI308770 B TW I308770B
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- Taiwan
- Prior art keywords
- film
- forming material
- material layer
- photoresist
- meth
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- 239000000463 material Substances 0.000 claims description 155
- 229920002120 photoresistant polymer Polymers 0.000 claims description 91
- 239000000203 mixture Substances 0.000 claims description 85
- 238000012546 transfer Methods 0.000 claims description 82
- 239000000758 substrate Substances 0.000 claims description 70
- -1 acrylate compound Chemical class 0.000 claims description 69
- 238000000034 method Methods 0.000 claims description 54
- 239000010954 inorganic particle Substances 0.000 claims description 52
- 239000011521 glass Substances 0.000 claims description 48
- 238000005192 partition Methods 0.000 claims description 35
- 239000011347 resin Substances 0.000 claims description 28
- 229920005989 resin Polymers 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 27
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 24
- 238000010304 firing Methods 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 18
- 239000000470 constituent Substances 0.000 claims description 18
- 239000000843 powder Substances 0.000 claims description 16
- 239000011230 binding agent Substances 0.000 claims description 15
- 239000011159 matrix material Substances 0.000 claims description 15
- 125000000217 alkyl group Chemical group 0.000 claims description 13
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 12
- 230000002079 cooperative effect Effects 0.000 claims description 10
- 230000000875 corresponding effect Effects 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 9
- 229920001577 copolymer Polymers 0.000 claims description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 150000002148 esters Chemical class 0.000 claims description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000178 monomer Substances 0.000 claims description 4
- 239000005639 Lauric acid Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 229940070765 laurate Drugs 0.000 claims description 3
- 239000004840 adhesive resin Substances 0.000 claims description 2
- 229920006223 adhesive resin Polymers 0.000 claims description 2
- 238000011049 filling Methods 0.000 claims description 2
- ATPNEAQEWYMEJG-UHFFFAOYSA-N 1-propyl-9h-fluorene Chemical group C1C2=CC=CC=C2C2=C1C(CCC)=CC=C2 ATPNEAQEWYMEJG-UHFFFAOYSA-N 0.000 claims 1
- 125000006125 ethylsulfonyl group Chemical group 0.000 claims 1
- MVDYEFQVZNBPPH-UHFFFAOYSA-N pentane-2,3,4-trione Chemical compound CC(=O)C(=O)C(C)=O MVDYEFQVZNBPPH-UHFFFAOYSA-N 0.000 claims 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- 239000000052 vinegar Substances 0.000 claims 1
- 235000021419 vinegar Nutrition 0.000 claims 1
- 239000010408 film Substances 0.000 description 289
- 239000010410 layer Substances 0.000 description 215
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 52
- 238000005530 etching Methods 0.000 description 22
- 238000000576 coating method Methods 0.000 description 19
- 230000015572 biosynthetic process Effects 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 16
- 239000004014 plasticizer Substances 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 15
- 238000007639 printing Methods 0.000 description 14
- 229920006395 saturated elastomer Polymers 0.000 description 14
- 239000013039 cover film Substances 0.000 description 13
- 239000002904 solvent Substances 0.000 description 13
- 239000000126 substance Substances 0.000 description 11
- 239000002585 base Substances 0.000 description 8
- 238000001035 drying Methods 0.000 description 7
- 125000003396 thiol group Chemical group [H]S* 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 6
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 6
- 239000004925 Acrylic resin Substances 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 229910052810 boron oxide Inorganic materials 0.000 description 5
- 229910000420 cerium oxide Inorganic materials 0.000 description 5
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 5
- 229910000464 lead oxide Inorganic materials 0.000 description 5
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000005001 laminate film Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 239000004576 sand Substances 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 150000001335 aliphatic alkanes Chemical class 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000000753 cycloalkyl group Chemical group 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- IZMVCSOUIXREHX-UHFFFAOYSA-N 9-(trimethoxymethyl)pentacosane Chemical compound C(CCCCCCCCCCCCCCC)C(C(OC)(OC)OC)CCCCCCCC IZMVCSOUIXREHX-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- IRLPCADXTQQIGQ-UHFFFAOYSA-N C(CC)C(CCCCCCCCC)(OCC)CCC Chemical compound C(CC)C(CCCCCCCCC)(OCC)CCC IRLPCADXTQQIGQ-UHFFFAOYSA-N 0.000 description 2
- LIZWNKDRENZMRV-UHFFFAOYSA-N C(CC)OC(CCC)CCCCCCCCC Chemical group C(CC)OC(CCC)CCCCCCCCC LIZWNKDRENZMRV-UHFFFAOYSA-N 0.000 description 2
- GHTQBJZRHNNLIS-UHFFFAOYSA-N C(CCC)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(CCC)C(C(OC)(OC)OC)CCCCCCCC GHTQBJZRHNNLIS-UHFFFAOYSA-N 0.000 description 2
- FPYZFGNMCPBDBU-UHFFFAOYSA-N C(CCC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C(CCC)C(C(OCC)(OCC)OCC)CCCCCCCC FPYZFGNMCPBDBU-UHFFFAOYSA-N 0.000 description 2
- JMBLCTYRAJLFSE-UHFFFAOYSA-N C(CCC)C(C(OCCC)(OCCC)OCCC)CCCCCCCC Chemical compound C(CCC)C(C(OCCC)(OCCC)OCCC)CCCCCCCC JMBLCTYRAJLFSE-UHFFFAOYSA-N 0.000 description 2
- IKEVUICGDJISMI-UHFFFAOYSA-N C(CCCCCCCCC)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(CCCCCCCCC)C(C(OC)(OC)OC)CCCCCCCC IKEVUICGDJISMI-UHFFFAOYSA-N 0.000 description 2
- IDFYSNKHPHQPJK-UHFFFAOYSA-N C(CCCCCCCCC)C(C(OCCC)(OCCC)OCCC)CCCCCCCC Chemical compound C(CCCCCCCCC)C(C(OCCC)(OCCC)OCCC)CCCCCCCC IDFYSNKHPHQPJK-UHFFFAOYSA-N 0.000 description 2
- BWFLWKLKYSRJFB-UHFFFAOYSA-N C(CCCCCCCCCCCCCCC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C(CCCCCCCCCCCCCCC)C(C(OCC)(OCC)OCC)CCCCCCCC BWFLWKLKYSRJFB-UHFFFAOYSA-N 0.000 description 2
- PEWPLISOLIXTSK-UHFFFAOYSA-N CCCCCCCCCCC(CCCCCCCC)C(CC)(OCC)OCC Chemical compound CCCCCCCCCCC(CCCCCCCC)C(CC)(OCC)OCC PEWPLISOLIXTSK-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 238000007334 copolymerization reaction Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- LWELLWPGADCVIZ-UHFFFAOYSA-N (4-butylcyclohexyl) prop-2-enoate Chemical compound CCCCC1CCC(OC(=O)C=C)CC1 LWELLWPGADCVIZ-UHFFFAOYSA-N 0.000 description 1
- AGGJWJFEEKIYOF-UHFFFAOYSA-N 1,1,1-triethoxydecane Chemical compound CCCCCCCCCC(OCC)(OCC)OCC AGGJWJFEEKIYOF-UHFFFAOYSA-N 0.000 description 1
- CWZQYRJRRHYJOI-UHFFFAOYSA-N 1,1,1-trimethoxydecane Chemical compound CCCCCCCCCC(OC)(OC)OC CWZQYRJRRHYJOI-UHFFFAOYSA-N 0.000 description 1
- NCRNCSZWOOYBQF-UHFFFAOYSA-N 1,1-Dimethoxydecane Chemical class CCCCCCCCCC(OC)OC NCRNCSZWOOYBQF-UHFFFAOYSA-N 0.000 description 1
- SDXHBDVTZNMBEW-UHFFFAOYSA-N 1-ethoxy-2-(2-hydroxyethoxy)ethanol Chemical compound CCOC(O)COCCO SDXHBDVTZNMBEW-UHFFFAOYSA-N 0.000 description 1
- JPEWDCTZJFUITH-UHFFFAOYSA-N 1-methoxydecane Chemical compound CCCCCCCCCCOC JPEWDCTZJFUITH-UHFFFAOYSA-N 0.000 description 1
- FMWCKLXINCGQFM-UHFFFAOYSA-N 1-methoxyethyl acetate Chemical compound COC(C)OC(C)=O FMWCKLXINCGQFM-UHFFFAOYSA-N 0.000 description 1
- NHXCUKIHMLHWQT-UHFFFAOYSA-N 1-propoxydecane Chemical compound CCCCCCCCCCOCCC NHXCUKIHMLHWQT-UHFFFAOYSA-N 0.000 description 1
- YNICHAOCDICNOT-UHFFFAOYSA-N 2,2-dimethoxyundecane Chemical compound CCCCCCCCCC(C)(OC)OC YNICHAOCDICNOT-UHFFFAOYSA-N 0.000 description 1
- BMECLZHKPZFPMT-UHFFFAOYSA-N 2,2-dipropoxyundecane Chemical class CCCCCCCCCC(C)(OCCC)OCCC BMECLZHKPZFPMT-UHFFFAOYSA-N 0.000 description 1
- ZAOMUMJENGCKAR-UHFFFAOYSA-N 2-(1-phenylbut-3-en-2-yloxy)but-3-enylbenzene Chemical compound C=1C=CC=CC=1CC(C=C)OC(C=C)CC1=CC=CC=C1 ZAOMUMJENGCKAR-UHFFFAOYSA-N 0.000 description 1
- JJRUAPNVLBABCN-UHFFFAOYSA-N 2-(ethenoxymethyl)oxirane Chemical compound C=COCC1CO1 JJRUAPNVLBABCN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- XUDBVJCTLZTSDC-UHFFFAOYSA-N 2-ethenylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C=C XUDBVJCTLZTSDC-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 1
- 125000004200 2-methoxyethyl group Chemical group [H]C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 1
- NSIWGZFZGMIPEC-UHFFFAOYSA-N 2-propoxyethyl 2-methylprop-2-enoate Chemical compound CCCOCCOC(=O)C(C)=C NSIWGZFZGMIPEC-UHFFFAOYSA-N 0.000 description 1
- KBIWOJBFYNSQKW-UHFFFAOYSA-N 3-ethenylphthalic acid Chemical compound OC(=O)C1=CC=CC(C=C)=C1C(O)=O KBIWOJBFYNSQKW-UHFFFAOYSA-N 0.000 description 1
- GNPSQUCXOBDIDY-UHFFFAOYSA-N 4-(trimethoxymethyl)dodecane Chemical compound C(CCCCCCC)C(C(OC)(OC)OC)CCC GNPSQUCXOBDIDY-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- WVYWICLMDOOCFB-UHFFFAOYSA-N 4-methyl-2-pentanol Chemical compound CC(C)CC(C)O WVYWICLMDOOCFB-UHFFFAOYSA-N 0.000 description 1
- IZSHZLKNFQAAKX-UHFFFAOYSA-N 5-cyclopenta-2,4-dien-1-ylcyclopenta-1,3-diene Chemical group C1=CC=CC1C1C=CC=C1 IZSHZLKNFQAAKX-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- NQUDTXYCPBGSDK-UHFFFAOYSA-N C(C)OC(C)CCCCCCCCC Chemical compound C(C)OC(C)CCCCCCCCC NQUDTXYCPBGSDK-UHFFFAOYSA-N 0.000 description 1
- FLJJVOJEWVRHPB-UHFFFAOYSA-N C(CC)C(C(OC)(C)C)CCCCCCCC Chemical compound C(CC)C(C(OC)(C)C)CCCCCCCC FLJJVOJEWVRHPB-UHFFFAOYSA-N 0.000 description 1
- LKYCIZFMSSPSQN-UHFFFAOYSA-N C(CC)C(C(OC)(OC)C)CCCCCCCC Chemical compound C(CC)C(C(OC)(OC)C)CCCCCCCC LKYCIZFMSSPSQN-UHFFFAOYSA-N 0.000 description 1
- VQGOCFUBAYEYJK-UHFFFAOYSA-N C(CC)C(C(OC)(OC)CC)CCCCCCCC Chemical compound C(CC)C(C(OC)(OC)CC)CCCCCCCC VQGOCFUBAYEYJK-UHFFFAOYSA-N 0.000 description 1
- OFTCDOQQZMYUJW-UHFFFAOYSA-N C(CC)C(C(OC)(OC)CCC)CCCCCCCC Chemical compound C(CC)C(C(OC)(OC)CCC)CCCCCCCC OFTCDOQQZMYUJW-UHFFFAOYSA-N 0.000 description 1
- VHWNKHSUVAWRTE-UHFFFAOYSA-N C(CC)C(C(OCC)(C)C)CCCCCCCC Chemical compound C(CC)C(C(OCC)(C)C)CCCCCCCC VHWNKHSUVAWRTE-UHFFFAOYSA-N 0.000 description 1
- XIEJKNZEPDMQOY-UHFFFAOYSA-N C(CC)C(C(OCC)(OCC)C)CCCCCCCC Chemical compound C(CC)C(C(OCC)(OCC)C)CCCCCCCC XIEJKNZEPDMQOY-UHFFFAOYSA-N 0.000 description 1
- ZBJNNAGBFOUWPY-UHFFFAOYSA-N C(CC)C(C(OCC)(OCC)CC)CCCCCCCC Chemical compound C(CC)C(C(OCC)(OCC)CC)CCCCCCCC ZBJNNAGBFOUWPY-UHFFFAOYSA-N 0.000 description 1
- XRNDMACZMJPCRX-UHFFFAOYSA-N C(CC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C(CC)C(C(OCC)(OCC)OCC)CCCCCCCC XRNDMACZMJPCRX-UHFFFAOYSA-N 0.000 description 1
- DEVBHAZRAFTCSX-UHFFFAOYSA-N C(CC)C(C(OCCC)(OCCC)CC)CCCCCCCC Chemical compound C(CC)C(C(OCCC)(OCCC)CC)CCCCCCCC DEVBHAZRAFTCSX-UHFFFAOYSA-N 0.000 description 1
- GKBLKGNHHNRTCG-UHFFFAOYSA-N C(CC)C(CCCCCCCCC)(OC)CCCCCCCCCC Chemical compound C(CC)C(CCCCCCCCC)(OC)CCCCCCCCCC GKBLKGNHHNRTCG-UHFFFAOYSA-N 0.000 description 1
- YBLMTMCPOVJYGN-UHFFFAOYSA-N C(CC)C(CCCCCCCCC)(OCC)CCCCCCCCCC Chemical compound C(CC)C(CCCCCCCCC)(OCC)CCCCCCCCCC YBLMTMCPOVJYGN-UHFFFAOYSA-N 0.000 description 1
- PSMMYPFUVQQYNQ-UHFFFAOYSA-N C(CC)OC(CCCCCCCCC)(OCCC)OCCC Chemical class C(CC)OC(CCCCCCCCC)(OCCC)OCCC PSMMYPFUVQQYNQ-UHFFFAOYSA-N 0.000 description 1
- ZOQBHMUBCNQVKJ-UHFFFAOYSA-N C(CCC)C(C(OC)(CC)CC)CCCCCCCC Chemical compound C(CCC)C(C(OC)(CC)CC)CCCCCCCC ZOQBHMUBCNQVKJ-UHFFFAOYSA-N 0.000 description 1
- LLGLNDIUGOTTBH-UHFFFAOYSA-N C(CCC)C(C(OC)(CCC)CCC)CCCCCCCC Chemical compound C(CCC)C(C(OC)(CCC)CCC)CCCCCCCC LLGLNDIUGOTTBH-UHFFFAOYSA-N 0.000 description 1
- RTIQEZSVVZAVBD-UHFFFAOYSA-N C(CCC)C(C(OC)(OC)CCC)CCCCCCCC Chemical compound C(CCC)C(C(OC)(OC)CCC)CCCCCCCC RTIQEZSVVZAVBD-UHFFFAOYSA-N 0.000 description 1
- ZBUAUEGAVBBRQH-UHFFFAOYSA-N C(CCC)C(C(OCC)(C)C)CCCCCCCC Chemical compound C(CCC)C(C(OCC)(C)C)CCCCCCCC ZBUAUEGAVBBRQH-UHFFFAOYSA-N 0.000 description 1
- UTBZWMMMTOCAQO-UHFFFAOYSA-N C(CCC)C(C(OCC)(OCC)C)CCCCCCCC Chemical compound C(CCC)C(C(OCC)(OCC)C)CCCCCCCC UTBZWMMMTOCAQO-UHFFFAOYSA-N 0.000 description 1
- XFZKCABBIPRXGT-UHFFFAOYSA-N C(CCCCCCCCC)C(C(OC)(C)C)CCCCCCCC Chemical compound C(CCCCCCCCC)C(C(OC)(C)C)CCCCCCCC XFZKCABBIPRXGT-UHFFFAOYSA-N 0.000 description 1
- KFAIJCLJIWFFPP-UHFFFAOYSA-N C(CCCCCCCCC)C(C(OC)(CC)CC)CCCCCCCC Chemical compound C(CCCCCCCCC)C(C(OC)(CC)CC)CCCCCCCC KFAIJCLJIWFFPP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/40—Glass
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
- C08K5/0016—Plasticisers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/05—Alcohols; Metal alcoholates
- C08K5/053—Polyhydroxylic alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L33/04—Homopolymers or copolymers of esters
- C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
- C08L33/08—Homopolymers or copolymers of acrylic acid esters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/22—Electrodes, e.g. special shape, material or configuration
- H01J11/24—Sustain electrodes or scan electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/36—Spacers, barriers, ribs, partitions or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/38—Dielectric or insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/42—Fluorescent layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/66—Transforming electric information into light information
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Materials Engineering (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001285841A JP2003096305A (ja) | 2001-09-19 | 2001-09-19 | 無機粒子含有組成物、転写フィルムおよびプラズマディスプレイパネルの製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI308770B true TWI308770B (enrdf_load_stackoverflow) | 2009-04-11 |
Family
ID=19108919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091116901A TWI308770B (enrdf_load_stackoverflow) | 2001-09-19 | 2002-07-29 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2003096305A (enrdf_load_stackoverflow) |
| KR (1) | KR100852295B1 (enrdf_load_stackoverflow) |
| TW (1) | TWI308770B (enrdf_load_stackoverflow) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4337388B2 (ja) * | 2003-04-24 | 2009-09-30 | Ｊｓｒ株式会社 | プラズマディスプレイパネル用無機粒子含有組成物、転写フィルムおよびプラズマディスプレイパネルの製造方法 |
| WO2004113449A1 (ja) * | 2003-06-17 | 2004-12-29 | Jsr Corporation | プラズマディスプレイパネル用転写フィルム並びにプラズマディスプレイパネルおよびその製造方法 |
| JP2005264138A (ja) * | 2004-02-20 | 2005-09-29 | Jsr Corp | ガラス粉末含有樹脂組成物、転写フィルムおよびこれを用いたプラズマディスプレイパネルの製造方法 |
| CN101137712B (zh) | 2005-03-31 | 2010-12-01 | 积水化学工业株式会社 | 粘合剂树脂组合物及无机微粒分散膏状组合物 |
| JP5055712B2 (ja) * | 2005-04-18 | 2012-10-24 | Ｊｓｒ株式会社 | 無機粒子含有組成物、転写フィルムおよびプラズマディスプレイパネルの製造方法 |
| JP2007137939A (ja) * | 2005-11-15 | 2007-06-07 | Jsr Corp | 無機粉体含有樹脂組成物、転写フィルム、パネル部材の形成方法およびプラズマディスプレイパネルの製造方法 |
| JP4788391B2 (ja) * | 2006-02-23 | 2011-10-05 | パナソニック株式会社 | プラズマディスプレイパネルの製造方法 |
| JP2008034153A (ja) * | 2006-07-26 | 2008-02-14 | Jsr Corp | 無機粉体含有樹脂組成物、転写フィルムおよびフラットパネルディスプレイの製造方法 |
| JP5041768B2 (ja) * | 2006-08-29 | 2012-10-03 | 富士フイルム株式会社 | 表示装置用遮光膜形成用樹脂組成物及びそれを用いた表示装置用遮光膜形成用転写材料、表示装置用遮光膜及びその形成方法、ブラックマトリクス、遮光膜付基板、カラーフィルタ並びに表示装置 |
| WO2016132381A1 (en) * | 2015-02-19 | 2016-08-25 | Fine Research & Development Centre Pvt Ltd | A bio based plasticizer with improved properties and processing characteristics of polymer |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0578162A (ja) * | 1991-09-24 | 1993-03-30 | Tokuyama Soda Co Ltd | セラミツク組成物 |
| JPH1116491A (ja) * | 1997-06-26 | 1999-01-22 | Dainippon Printing Co Ltd | プラズマディスプレイパネル用厚膜パターンの形成方法 |
| JPH11236534A (ja) * | 1998-02-20 | 1999-08-31 | Dainippon Printing Co Ltd | 塗布組成物 |
| JP4092781B2 (ja) * | 1998-06-22 | 2008-05-28 | Ｊｓｒ株式会社 | 無機粒子含有組成物、転写フィルムおよびそれを用いたプラズマディスプレイパネルの製造方法 |
| JP2000109341A (ja) * | 1998-10-01 | 2000-04-18 | Jsr Corp | 無機粒子含有組成物、転写フィルムおよびプラズマディスプレイパネルの製造方法 |
| JP2000191945A (ja) * | 1998-12-24 | 2000-07-11 | Dainippon Printing Co Ltd | 感光性ペーストおよび転写シート |
| JP3427764B2 (ja) * | 1999-01-28 | 2003-07-22 | 三菱マテリアル株式会社 | プラズマディスプレイ（ｐｄｐ）用リブ組成物 |
| DE60012381T2 (de) * | 1999-02-18 | 2005-05-04 | Mitsui Chemicals, Inc. | Aliphatische Polyesterabmischung und daraus erhaltener verstreckter Film |
| JP2001155542A (ja) * | 1999-11-26 | 2001-06-08 | Fuji Photo Film Co Ltd | 導電性組成物、転写用導電性フィルム、およびパターン化された導電層の形成方法 |
| JP2001229813A (ja) * | 1999-12-08 | 2001-08-24 | Matsushita Electric Ind Co Ltd | プラズマディスプレイパネルの製造方法 |
-
2001
- 2001-09-19 JP JP2001285841A patent/JP2003096305A/ja active Pending
-
2002
- 2002-07-29 TW TW091116901A patent/TWI308770B/zh not_active IP Right Cessation
- 2002-09-18 KR KR1020020056753A patent/KR100852295B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003096305A (ja) | 2003-04-03 |
| KR20030025195A (ko) | 2003-03-28 |
| KR100852295B1 (ko) | 2008-08-14 |
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