TWI273624B - Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process - Google Patents

Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process Download PDF

Info

Publication number
TWI273624B
TWI273624B TW093103730A TW93103730A TWI273624B TW I273624 B TWI273624 B TW I273624B TW 093103730 A TW093103730 A TW 093103730A TW 93103730 A TW93103730 A TW 93103730A TW I273624 B TWI273624 B TW I273624B
Authority
TW
Taiwan
Prior art keywords
film
material layer
forming material
photoresist
inorganic particles
Prior art date
Application number
TW093103730A
Other languages
Chinese (zh)
Other versions
TW200423177A (en
Inventor
Seiji Kawagishi
Katsumi Itoh
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Publication of TW200423177A publication Critical patent/TW200423177A/en
Application granted granted Critical
Publication of TWI273624B publication Critical patent/TWI273624B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61GTRANSPORT, PERSONAL CONVEYANCES, OR ACCOMMODATION SPECIALLY ADAPTED FOR PATIENTS OR DISABLED PERSONS; OPERATING TABLES OR CHAIRS; CHAIRS FOR DENTISTRY; FUNERAL DEVICES
    • A61G17/00Coffins; Funeral wrappings; Funeral urns
    • A61G17/04Fittings for coffins
    • A61G17/045Rack for flowers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61GTRANSPORT, PERSONAL CONVEYANCES, OR ACCOMMODATION SPECIALLY ADAPTED FOR PATIENTS OR DISABLED PERSONS; OPERATING TABLES OR CHAIRS; CHAIRS FOR DENTISTRY; FUNERAL DEVICES
    • A61G17/00Coffins; Funeral wrappings; Funeral urns
    • A61G17/007Coffins; Funeral wrappings; Funeral urns characterised by the construction material used, e.g. biodegradable material; Use of several materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2217/00Gas-filled discharge tubes
    • H01J2217/38Cold-cathode tubes
    • H01J2217/49Display panels, e.g. not making use of alternating current

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

An inorganic particle-containing composition comprising: (A) inorganic particles; (B) a binder resin; and (C) a compound represented by the following formula (I), wherein R1 represents a group represented by -CO-A, wherein A represents an alkyl group having 5-20 carbon atoms or an alkenyl group having 5-20 carbon atoms, and n is an integer of 2-20. A transfer film and a plasma display panel production process using the composition are also described.

Description

1273624 玫、發明說明: 【發明所屬之技術領域】 本發明係有關一種含有無機粒子之組成物,一種包含該 組成物之轉印膜以及一種電漿顯示面板製造方法。 【先前技術】 近年來電漿顯示器作為平板狀螢光顯示器係受到許多 注意。圖1顯示交流型電漿顯示面板(後文為求簡便稱之為 「P D P」)截面形狀之示意圖。該圖中,1及2表示彼此相 對之玻璃基板,及3表示阻擋肋。單元(c e 1 1 )係藉玻璃基 板1、玻璃基板2及阻擋肋3所分隔及成形。4表示固定於 玻璃基板1之透明電極;5表示形成於透明電極4供降低 透明電極電阻之匯流排電極;6表示固定於玻璃基板2之 定址電極;7表示保有於單元内部之螢光材料;8表示形成 於玻璃基板1表面之介電層,因而覆蓋透明電極4及匯流 排電極5; 9表示形成於玻璃基板2表面因而覆蓋定址電極 6之介電層;以及1 0表示例如由氧化鎂製成的保護膜。於 彩色PDP,為了獲得高度對比度影像,彩色濾光片(紅、綠 或藍)或黑矩陣可設置於玻璃基板與介電層間。 至於製造此種P D P介電材料、阻擋肋、電極、螢先材料、 彩色濾光片或黑條紋(黑矩陣)之方法,適合採用微影術方 法,涉及形成光敏性含有無機粒子之樹脂層於基板上,經 由光罩以紫外光照射此薄膜,顯影所得薄膜而保有圖案於 基板上,以烤乾該圖案。 前述微影術方法理論上之圖案準確度絕佳,特別使用轉 印膜之使用方法絕佳,可形成有絕佳厚度均句度及表面均 5 312/發明說明書(補件)/93-05/93103730 1273624 勻度之圖案。但經由塗覆含有丙烯酸樹脂之含有無機粒子 之組成物於基底膜上所形成之薄膜生成性材料層不具有足 夠撓性,轉印能力也不足。 為了解決此等問題,進行研究將增塑劑、分散劑等包含 於薄膜生成性材料層。但此等無機材料於烤乾而造成著色 等之後可能留在圖案内。特別當形成燒結玻璃材料例如介 電層時,有所得燒結玻璃材料之透光比容易降低之問題。 於前述情況下,完成本發明。 【發明内容】 本發明之第一目的係提供一種含有無機粒子之組成 物,其適合提供具有絕佳表面平坦度之P D P組成元件(例如 阻擂肋、電極、電阻器、介電層、磷光體、彩色濾光片及 黑矩陣)。 本發明之第二目的係提供一種含有無機粒子之組成 物,其可形成具有高度透光比之燒結玻璃材料(例如組成 PDP之介電層)。 本發明之第三目的係提供一種含有無機粒子之組成 物,其可製造具有薄膜生成性材料層而言有絕佳撓性之轉 印膜。 本發明之第四目的係提供一種含有無機粒子之組成 物,其可製造具有薄膜生成性材料層而言有絕佳轉印性(熱 黏合至基板)。 本發明之第五目的係提供一種轉印膜,其可有效形成具 有絕佳表面平坦度之PDP之組成元件。 本發明之第六目的係提供一種含有無機粒子之組成 6 312/發明說明書(補件)/93-05/93103730 1273624 物,其就薄膜生成性材料層而言具有絕佳撓性。 本發明之第七目的係提供一種含有無機粒子之組成 物,其就薄膜生成性材料層而言具有絕佳轉印性(熱黏合至 基板)。 本發明之第八目的係提供一種PDP製造方法,其可有效 製成具有絕佳表面平坦度之PDP之組成元件。 本發明之第九目的係提供一種PDP製造方法,其可有效 形成就組成元件而言有高度位置準確度之PDP。 本發明之第十目的係提供一種PDP製造方法,其可有效 形成一種具有大厚度之介電層。 本發明之第十一目的係提供一種PDP製造方法,其可有 效形成大尺寸面板需要的介電層。 本發明之第十二目的係提供一種製造PDP之方法,該PDP 具有絕佳厚度均勾度之介電層。 本發明之第十三目的係提供一種製造PDP之方法,該PDP 具有絕佳表面平坦度之介電層。 本發明之含有無機粒子之組成物包含(A )無機粒子;(B ) 一種黏結劑樹脂;以及(C ) 一種下式(I )表示之化合物(此種 化合物於後文稱作為「特定化合物」):BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composition containing inorganic particles, a transfer film comprising the composition, and a method of manufacturing a plasma display panel. [Prior Art] In recent years, plasma displays have received much attention as flat-panel fluorescent display systems. Fig. 1 is a view showing the sectional shape of an AC type plasma display panel (hereinafter referred to as "P D P" for the sake of simplicity). In the figure, 1 and 2 indicate glass substrates opposed to each other, and 3 indicates barrier ribs. The unit (c e 1 1 ) is partitioned and formed by the glass substrate 1, the glass substrate 2, and the barrier ribs 3. 4 denotes a transparent electrode fixed to the glass substrate 1; 5 denotes a bus bar electrode formed on the transparent electrode 4 for lowering the resistance of the transparent electrode; 6 denotes an address electrode fixed to the glass substrate 2; and 7 denotes a fluorescent material retained inside the unit; 8 denotes a dielectric layer formed on the surface of the glass substrate 1, thus covering the transparent electrode 4 and the bus bar electrode 5; 9 denotes a dielectric layer formed on the surface of the glass substrate 2 so as to cover the address electrode 6; and 10 represents, for example, magnesium oxide A protective film made. In color PDPs, color filters (red, green or blue) or black matrices can be placed between the glass substrate and the dielectric layer in order to obtain a high contrast image. As for the method of manufacturing such a PDP dielectric material, a barrier rib, an electrode, a fluorescent material, a color filter or a black stripe (black matrix), it is suitable to adopt a lithography method, and to form a photosensitive resin layer containing inorganic particles. On the substrate, the film is irradiated with ultraviolet light through a photomask, and the resulting film is developed to retain a pattern on the substrate to dry the pattern. The above-mentioned lithography method is theoretically excellent in pattern accuracy, and the use of the transfer film is excellent, and the thickness can be formed with excellent thickness and surface. 5 312 / invention specification (supplement) / 93-05 /93103730 1273624 Pattern of uniformity. However, the film-forming material layer formed on the base film by coating the composition containing the inorganic particles containing the acrylic resin is not sufficiently flexible, and the transfer ability is also insufficient. In order to solve such problems, studies have been conducted to include a plasticizer, a dispersant, and the like in the film-forming material layer. However, such inorganic materials may remain in the pattern after being baked to cause coloring or the like. Particularly when a sintered glass material such as a dielectric layer is formed, there is a problem that the light transmittance of the obtained sintered glass material is easily lowered. In the foregoing case, the present invention has been completed. SUMMARY OF THE INVENTION A first object of the present invention is to provide a composition containing inorganic particles suitable for providing PDP constituent elements having excellent surface flatness (for example, barrier ribs, electrodes, resistors, dielectric layers, phosphors) , color filters and black matrix). A second object of the present invention is to provide a composition containing inorganic particles which can form a sintered glass material having a high light transmittance (e.g., a dielectric layer constituting a PDP). A third object of the present invention is to provide a composition containing inorganic particles which can produce a transfer film having excellent flexibility in a film-forming material layer. A fourth object of the present invention is to provide a composition containing inorganic particles which is excellent in transferability (thermal adhesion to a substrate) in the case of producing a film-forming material layer. A fifth object of the present invention is to provide a transfer film which can effectively form constituent elements of a PDP having excellent surface flatness. A sixth object of the present invention is to provide a composition containing inorganic particles 6 312 / invention specification (supplement) / 93-05/93103730 1273624, which has excellent flexibility in terms of a film-forming material layer. A seventh object of the present invention is to provide a composition containing inorganic particles which has excellent transferability (thermal adhesion to a substrate) in terms of a film-forming material layer. An eighth object of the present invention is to provide a PDP manufacturing method which can effectively form a constituent element of a PDP having excellent surface flatness. A ninth object of the present invention is to provide a PDP manufacturing method which can effectively form a PDP having high positional accuracy in terms of constituent elements. A tenth object of the present invention is to provide a PDP manufacturing method which can effectively form a dielectric layer having a large thickness. An eleventh object of the present invention is to provide a PDP manufacturing method which can effectively form a dielectric layer required for a large-sized panel. A twelfth object of the present invention is to provide a method of manufacturing a PDP having a dielectric layer of excellent thickness uniformity. A thirteenth object of the present invention is to provide a method of manufacturing a PDP having a dielectric layer excellent in surface flatness. The inorganic particle-containing composition of the present invention comprises (A) inorganic particles; (B) a binder resin; and (C) a compound represented by the following formula (I) (this compound is hereinafter referred to as "specific compound" ):

0H0H

I R^-C-OT-CH-CHi-O-VH (I) 其中R1表示-C0-A表示之基團,其中A表示含5-20個碳 原子之烷基或含5 - 2 0個碳原子之烯基,以及2_為2 - 2 0之 整數。 本發明之含有無’機粒子之組成物可為一種組成物進一 7 312/發明說明書(補件)/93-05/93103730 1273624 步包含(D ) —種輻射敏感性成分(此種組成物於後文稱作為 「輻射敏感性含有無機粒子之組成物」)。 本發明之轉印膜包含一種經由前述含有無機粒子之組 成物獲得之薄膜生成性材料層。 本發明之第一製造方法(後文稱之為「P D P製造方法(1 )」) 包含轉印由根據本發明之含有無機粒子之組成物所得之薄 膜生成性材料層至基板表面,以及烤乾轉印後之薄膜生成 性材料層而形成介電層於基板上之步驟。 本發明之第二製造方法(後文稱之為「P D P製造方法(2 )」) 包含下列步驟:轉印由本發明之含有無機粒子之組成物所 得之薄膜生成性材料層轉印至基板表面;形成光阻膜於轉 印後之薄膜生成性材料層上;曝光該光阻膜而形成光阻圖 案之潛像;顯影光阻膜而形成光阻圖案;蝕刻薄膜生成性 材料層而形成對應於光阻圖案之圖案層;以及烤乾該圖案 層而形成一種選自阻擋肋、電極、電阻器、介電層、磷光 體、彩色濾光片及黑矩陣中之組成元件。 本發明之第三製造方法(後文稱之為「P D P製造方法(3 )」) 包含下列步驟:形成光阻膜以及得自本發明之含有無機粒 子所得之組成物之薄膜生成性材料層於一基底膜上之積層 膜;轉印該形成於基底膜上之積層膜至基板表面;曝光組 成該積層膜之光阻膜而形成光阻圖案之潛像;顯影該光阻 膜而形成光阻圖案;蝕刻薄膜生成性材料層而形成對應於 光阻圖案之圖案層;以及烤乾該圖案層而形成一種選自阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣中之組成元件。 8 312/發明說明書(補件)/93-05/93103730 1273624 本發明之第四製造方法(後文稱之為「P D P製造方法(4 )」) 包含下列步驟:轉印由根據本發明之含有無機粒子之組成 物所得之薄膜生成性材料層至基板表面上;曝光該薄膜生 成性材料層而形成圖案潛像;顯影該薄膜生成性材料層而 形成圖案層;以及烤乾該圖案層而形成一種選自阻擋肋、 電極、電阻器、介電層、磷光體、彩色濾光片及黑矩陣中 之組成元件。 【實施方式】 本發明之含有無機粒子之組成物(後文簡稱為「組成物」) 將說明其細節如後。 本發明之組成物包含無機粒子、黏結劑樹脂及特定化合 物作為主要成分。 (無機粒子) 組成本發明組成物之無機粒子之無機材料組成並無特 殊限制,反而根據該組成物形成之燒結材料之應用(P D P組 成元件類型)而選定。 組成物所含之無機粒子用於形成組成PDP之「介電層」 或「阻擋肋」,該等無機粒子例如為具有軟化點落至 3 5 0 - 7 0 0 °C,且較佳4 0 0 - 6 2 0 °C之範圍之玻璃粉。當玻璃粉 之軟化點低於3 5 0 °C時,玻璃粉係於一種階段熔化,於該 階段,有機物質例如黏結劑樹脂尚未於組成物製成之薄膜 生成性材料層烤乾步驟完全分解且被去除,因此部分有機 物質留在欲形成之介電層。結果介電層容易著色,其透光 比容易降低。相反地,當玻璃粉之軟化點超過7 0 0 °C時, 由於玻璃粉須以高於7 0 0 °C之溫度烤乾,故玻璃基板容易 312/發明說明書(補件)/93-05/93103730 9 1273624 扭曲。 適合使用之玻璃粉特例包括(1 )氧化鉛、氧化硼與氧化 矽之混合物(P b 0 - B 2 0 3 - S i 0 2),( 2 )氧化鋅、氧化硼與氧化 矽之混合物(Ζ η 0 - B 2 0 3 - S i 0 2),( 3 )氧化鉛、氧化硼、氧化 石夕及氧化铭之混合物(PbO_B2〇3-Si〇2-AI2O3),及(4)氧化 鉛、氧化鋅、氧化硼及氧化矽之混合物(?13〇-211〇-62〇3-Sith)。 該等玻璃粉可含於組成物,供形成介電層及阻擋肋以外 之組成元件(例如電極、電阻器、磷光體、彩色濾光片及黑 矩陣)。玻璃料於用於獲得面板材料之含有無機粒子之組成 物之含量,以無機粒子總重為基準通常為9 0 %重量比或以 下,且較佳為5 0 - 9 0 %重量比。 用以形成組成PDP之「電極」之組成物中所含之無機粒 子例如為包含Ag、An、Al、Ni、Ag-Pd合金、Cu、Cr等此 類金屬粒子。 此等金屬粒子可組合玻璃粉而含於生成介電層之組成 物。玻璃粒子於介電層生成性組成物之含量,以無機粒子 總重為基準,通常為1 0 %重量比或以下,且較佳為0 . 1 - 5 °/〇 重量比。 組成PDP之「電阻器」生成用組成物所含之無機粒子例 如為包含Ru〇2此類之粒子。 組成PDP之「磷光體」生成用組成物所含之無機粒子例 如為包含紅營光材料粒子(例如Y 2 0 3 : E U 3 +、Y 2 S i 0 5 : E U 3 4、 Y :3 A 1「) Ο 12 : E u 3 +、Y V 0 4 : E u <3 +、( Y, G d ) B 0 3 : E u 3 + 以及 Z η 3 ( P 0,丨)2 : Μ η ),含綠螢光材料粒子(例如Z η 2 S i 0 /丨:Μ η、 10 312/發明說明書(補件)/93-05/93103730 1273624IR^-C-OT-CH-CHi-O-VH (I) wherein R1 represents a group represented by -C0-A, wherein A represents an alkyl group having 5-20 carbon atoms or contains 5-20 carbons The alkenyl group of the atom, and 2_ is an integer of 2 - 2 0. The composition containing the non-organic particles of the present invention may be a composition of a 7 312 / invention specification (supplement) / 93-05 / 93103730 1273624 step comprising (D) a radiation-sensitive component (such a composition It is hereinafter referred to as "a composition containing inorganic particles of radiation sensitivity"). The transfer film of the present invention comprises a film-forming material layer obtained through the aforementioned composition containing inorganic particles. The first production method of the present invention (hereinafter referred to as "PDP production method (1)")) comprises transferring a film-forming material layer obtained from the inorganic particle-containing composition according to the present invention to a substrate surface, and baking it. The step of transferring the thin film-forming material layer to form a dielectric layer on the substrate. The second manufacturing method of the present invention (hereinafter referred to as "PDP manufacturing method (2)") comprises the steps of: transferring a film-forming material layer obtained by the inorganic particle-containing composition of the present invention to a substrate surface; Forming a photoresist film on the film-forming material layer after the transfer; exposing the photoresist film to form a latent image of the photoresist pattern; developing the photoresist film to form a photoresist pattern; etching the film-forming material layer to form a corresponding a pattern layer of the photoresist pattern; and baking the pattern layer to form a constituent element selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix. The third manufacturing method of the present invention (hereinafter referred to as "PDP manufacturing method (3)") comprises the steps of forming a photoresist film and a film-forming material layer obtained from the composition containing the inorganic particles of the present invention. a laminated film on the base film; transferring the laminated film formed on the base film to the surface of the substrate; exposing the photoresist film forming the laminated film to form a latent image of the photoresist pattern; developing the photoresist film to form a photoresist a pattern; etching a film-forming material layer to form a pattern layer corresponding to the photoresist pattern; and baking the pattern layer to form a layer selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and The constituent elements in the black matrix. 8 312/Invention Manual (Supplement)/93-05/93103730 1273624 The fourth manufacturing method of the present invention (hereinafter referred to as "PDP manufacturing method (4)")) comprises the following steps: transfer is contained by the present invention a film-forming material layer obtained from the composition of the inorganic particles onto the surface of the substrate; exposing the film-forming material layer to form a pattern latent image; developing the film-forming material layer to form a pattern layer; and baking the pattern layer to form A component selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix. [Embodiment] The composition containing inorganic particles of the present invention (hereinafter simply referred to as "composition") will be described later. The composition of the present invention contains inorganic particles, a binder resin, and a specific compound as main components. (Inorganic Particles) The inorganic material composition of the inorganic particles of the composition of the invention is not particularly limited, but is selected depending on the application of the sintered material formed by the composition (the type of P D P component). The inorganic particles contained in the composition are used to form a "dielectric layer" or a "barrier rib" constituting the PDP, and the inorganic particles have, for example, a softening point falling to 3 5 0 - 70 ° C, and preferably 40 Glass powder in the range of 0 - 6 2 0 °C. When the softening point of the glass frit is lower than 305 ° C, the glass frit is melted in a stage in which an organic substance such as a binder resin has not been completely decomposed in the baking step of the film-forming material layer made of the composition. And is removed, so part of the organic matter remains in the dielectric layer to be formed. As a result, the dielectric layer is easily colored, and its light transmittance is easily lowered. On the contrary, when the softening point of the glass powder exceeds 700 ° C, since the glass powder must be baked at a temperature higher than 700 ° C, the glass substrate is easy 312 / invention specification (supplement) / 93-05 /93103730 9 1273624 Distorted. Specific examples of glass powders suitable for use include (1) lead oxide, a mixture of boron oxide and cerium oxide (P b 0 - B 2 0 3 - S i 0 2), (2) a mixture of zinc oxide, boron oxide and cerium oxide ( η η 0 - B 2 0 3 - S i 0 2), (3) a mixture of lead oxide, boron oxide, oxidized stone and oxidized (PbO_B2〇3-Si〇2-AI2O3), and (4) lead oxide a mixture of zinc oxide, boron oxide and cerium oxide (?13〇-211〇-62〇3-Sith). The glass frits may be contained in a composition for forming constituent elements other than the dielectric layer and the barrier ribs (e.g., electrodes, resistors, phosphors, color filters, and black matrices). The content of the glass frit to the inorganic particle-containing composition for obtaining the panel material is usually 90% by weight or less based on the total weight of the inorganic particles, and preferably 50 to 90% by weight. The inorganic particles contained in the composition for forming the "electrode" constituting the PDP are, for example, metal particles containing Ag, An, Al, Ni, Ag-Pd alloy, Cu, Cr or the like. These metal particles may be combined with a glass frit to be contained in a composition for forming a dielectric layer. The content of the glass particles in the dielectric layer-forming composition is usually 10% by weight or less based on the total weight of the inorganic particles, and preferably 0.1 to 5 ° / 重量 by weight. The inorganic particles contained in the composition for forming a "resistor" constituting the PDP are, for example, particles containing Ru〇2. The inorganic particles contained in the "phosphor" forming composition constituting the PDP include, for example, red camping material particles (for example, Y 2 0 3 : EU 3 +, Y 2 S i 0 5 : EU 3 4, Y : 3 A 1") Ο 12 : E u 3 +, YV 0 4 : E u <3 +, ( Y, G d ) B 0 3 : E u 3 + and Z η 3 ( P 0,丨) 2 : Μ η ), particles containing green fluorescent material (for example, Z η 2 S i 0 /丨:Μ η, 10 312/invention specification (supplement)/93-05/93103730 1273624

BaAl12〇l9:Mn、BaMgAlH〇23:Mn、LaP(h:(Ce, Tb)以及 Ys(Al, G a ) 5 Ο ! 2 ·· T b ),含藍螢光材料粒子(如Y 2 S i 0 r C e、 BaMgAli〇Oi7:Eu2+、B a M g A 1 i 0 2 a : E u 2 + ^ ( C a , S r , BahJPOOGChJun 及(Zn, Cd)S:Ag)等。 組成PDP之「彩色濾光片」生成用組成物所含之無機粒 子例如為包含紅材料(如F e 2 0 3及P b 3 0 4 )、綠材料(如 C r 2 0 〇、藍材料(如 2 ( A 12 N a 2 S i 3 0 I ◦) · N a 2 S 4)此類之粒子。 組成.PDP之「黑矩陣」生成用組成物所含之無機粒子例 如為包含Μ η、F e、C r此類之粒子。 (黏結劑樹脂) 組成本發明組成物之黏結劑樹脂較佳為丙烯酸樹脂。 當含有丙烯酸樹脂作為黏結劑樹脂時,生成之薄膜生成 性材料層對基板有絕佳(熱)黏著性。如此當本發明組成物 施用於基底膜來製造轉印膜時,就薄膜生成性材料層而 言,所得轉印膜有絕佳轉應能力(對基板之熱黏合性)。 組成本發明組成物之丙烯酸樹脂係選自具有適當黏著 性,可黏合無機粒子且可經由烤乾薄膜生成性材料(於 4 0 0 - 6 2 (TC烤乾)而被完全氧化及去除之(共)聚合物。 丙稀酸包括如下通式(II)表示之(甲基)丙稀酸化合物 之均聚物、如下通式(I I )表示之兩種或兩種以上(曱基)丙 烯酸化合物之共聚物、以及如下通式(I I )表示之(曱基)丙 烯酸化合物與可共聚合單體之共聚物。 h2c=c-r2BaAl12〇l9: Mn, BaMgAlH〇23: Mn, LaP(h:(Ce, Tb), and Ys(Al, G a ) 5 Ο ! 2 ·· T b ), particles containing blue fluorescent materials (such as Y 2 S i 0 r C e, BaMgAli〇Oi7: Eu2+, B a M g A 1 i 0 2 a : E u 2 + ^ (C a , S r , BahJPOOGChJun and (Zn, Cd)S: Ag), etc. Composition PDP The inorganic particles contained in the "color filter"-forming composition include, for example, red materials (such as F e 2 0 3 and P b 3 0 4 ), and green materials (such as C r 2 0 〇, blue materials (such as 2 ( A 12 N a 2 S i 3 0 I ◦) · N a 2 S 4) Particles of the type. The inorganic particles contained in the composition for forming a "black matrix" of the composition PDP include, for example, Μη, F e, C r particles of this type (adhesive resin) The binder resin of the composition of the invention is preferably an acrylic resin. When an acrylic resin is used as the binder resin, the resulting film-forming material layer is absolutely excellent for the substrate. Good (thermal) adhesion. When the composition of the present invention is applied to a base film to produce a transfer film, the resulting transfer film has excellent transfer ability (thermal adhesion to the substrate) in terms of the film-forming material layer. ). The acrylic resin of the composition of the invention is selected from the group consisting of having an appropriate adhesive property, capable of bonding inorganic particles, and being completely oxidized and removed by baking a film-forming material (at 400 to 6 2 (TC baking)). The acrylic acid includes a homopolymer of a (meth)acrylic acid compound represented by the following formula (II), and two or more (indenyl)acrylic acid compounds represented by the following formula (II). a copolymer, and a copolymer of a (fluorenyl)acrylic compound represented by the following formula (II) and a copolymerizable monomer. h2c=c-r2

I 00 (II) 1 0I 00 (II) 1 0

I H2C-R3 11 312/發明說明書(補件)/93-05/93103730 1273624 其中R2表示氫原子或甲基;以及R3表示一價有機基。 通式(I I )表示之(甲基)丙烯酸化合物之特例包括: 烷基(曱基)丙烯酸酯類例如(甲基)丙烯酸甲酯、(甲基) 丙烯酸乙酯、(曱基)丙烯酸丙酯、(甲基)丙烯酸異丙酯、(曱 基)丙烯酸丁酯、(曱基)丙烯酸異丁酯、(曱基)丙烯酸第三 丁酯、(甲基)丙稀酸戊酯(pentyl (meth)acrylate)、(曱 基)丙烯酸戊酯(amyl (meth)acrylate)、(甲基)丙稀酸異 戊酯、(曱基)丙烯酸己酯、(甲基)丙烯酸庚酯、(甲基)丙 烯酸辛酯、(曱基)丙烯酸異辛酯、(曱基)丙烯酸2 -乙基己 酯、(曱基)丙烯酸壬酯、(曱基)丙烯酸癸酯、(曱基)丙烯 酸異癸酯、(甲基)丙烯酸十一烷酯、(甲基)丙烯酸十二烷 酯、(甲基)丙烯酸月桂酯、(曱基)丙烯酸硬脂酯及(甲基) 丙烯酸異硬脂酯; 羥基烷基(曱基)丙烯酸酯類例如(曱基)丙烯酸羥基乙 酯、(曱基)丙烯酸2 -羥基丙酯、(甲基)丙烯酸3 -羥基丙 酯、(甲基)丙烯酸2 -羥基丁酯;(曱基)丙烯酸3 -羥基丁酯 及(曱基)丙烯酸4 -羥基丁酯。 苯氧基烷基(甲基)丙烯酸酯類例如(甲基)丙烯酸苯氧 基乙酯及(曱基)丙烯酸2 -羥基-3-苯氧基丙酯; 烷氧基烷基(甲基)丙烯酸酯類例如(甲基)丙烯酸2 -甲 氧基乙酯、(曱基)丙烯酸2 -乙氧基乙酯、(曱基)丙烯酸2-丙氧基乙酯、(甲基)丙烯酸2 - 丁氧基乙酯及(甲基)丙烯酸 2 -曱氧基丁酯; 多烷二醇(甲基)丙烯酸酯類例如多乙二醇一(甲基)丙 烯酸酯、乙氧基二乙二醇(甲基)丙烯酸酯、甲氧基多乙二 12 312/發明說明書(補件)/93-05/93103730 1273624 醇(曱基)丙烯酸酯、苯氧基多乙二醇(曱基)丙烯酸酯、壬 基苯氧基多乙二醇(曱基)丙烯酸酯、聚丙二醇(甲基)丙烯 酸酯、甲氧基聚丙二醇(曱基)丙烯酸酯、乙氧基聚丙二醇 (甲基)丙烯酸酯及壬基苯氧聚丙二醇(甲基)丙烯酸酯; 環烷基(甲基)丙烯酸酯類例如(甲基)丙烯酸環己酯、 (甲基)丙烯酸4 - 丁基環己酯、(曱基)丙烯酸二環戊酯、(甲 基)丙烯酸二環戊烯酯、(曱基)丙烯酸二環戊二烯酯、(曱 基)丙烯酸冰片酯、(曱基)丙烯酸異冰片酯及(甲基)丙烯酸 三環癸酯;以及 (曱基)丙烯酸¥酯及(甲基)丙烯酸四氫糠酯。 其中以通式(II)表示之(曱基)丙稀酸酯化合物,其中R3 表示含有烷基或氧基伸烷基之基團為佳。特佳為(甲基)丙 烯酸酯化合物為(曱基)丙烯酸丁酯、(曱基)丙烯酸乙基己 酯、(曱基)丙烯酸月桂酯、(曱基)丙烯酸異癸酯及(曱基) 丙烯酸2 -乙氧基乙酯。 其它可共聚合單體並無特殊限制,只要為可與(曱基)丙 烯酸酯化合物共聚合之化合物即可。其它可共聚合單體包 括不飽和羧酸如(曱基)丙烯酸、乙烯基苯曱酸、順丁烯二 酸及乙烯基苯二甲酸;以及含乙烯基之可基團聚合化合 物,例如乙烯基窄基甲基醚、乙烯基縮水甘油醚、苯乙烯、 α_曱基苯乙烯、丁二烯及異戊間二烯。 組成本發明組成物之丙烯酸樹脂中衍生自通式(I I )表 示之(曱基)丙烯酸化合物之共聚單體比例通常為7 0 %重量 比或以上,且較佳為9 0 %重量比或以上。 較佳丙烯酸樹脂之特例包括聚曱基丙烯酸曱酯、聚曱基 13 312/發明說明書(補件)/93-05/93103730 1273624 丙烯酸丁酯及曱基丙烯酸曱酯-甲基丙烯酸丁酯共聚物。 於利用後述光阻劑方法形成PDP之組成元件時,當薄膜 生成性材料層必須為驗溶性來進行姓刻時,較佳含有含魏 基之單體作為前述其它可共聚合單體(共聚單體)。含羧基 之單體特例包括丙烯酸、甲基丙烯酸、順丁烯二酸、反丁 烯二酸、巴豆酸、衣康酸、檸康酸、中康酸、桂皮酸、一 (2-(曱基)丙烯醯基氧基乙基)丁二酸酯及ω -羧基-聚己内 酯一(甲基)丙烯酸酯。其中以甲基丙烯酸為特佳。 較佳驗溶性樹脂之特例包括: 烷基曱基丙烯酸酯類例如曱基丙烯酸曱S旨、甲基丙烯酸 乙、甲基丙烯酸丙S旨、曱基丙烯酸異丙8旨、甲基丙烯酸 丁酯、曱基丙烯酸異丁酯、曱基丙烯酸第三丁酯、甲基丙 烤酸戊S旨(pentyl methacrylate)、甲基丙婦酸戊S旨(amyl methacrylate)、曱基丙稀酸異戊酯、曱基丙烤酸己酯、甲 基丙烯酸庚酯、曱基丙烯酸辛酯、甲基丙烯酸異辛酯、甲 基丙烯酸2 -乙基己酯、甲基丙烯酸壬酯、曱基丙烯酸癸 酯、甲基丙烯酸異癸酯、甲基丙烯酸十一烷酯、甲基丙烯 酸十二烷酯、曱基丙烯酸月桂酯、曱基丙烯酸硬脂酯及曱 基丙烯酸異硬脂酯; 羥基烷基甲基丙烯酸酯類例如甲基丙烯酸羥基乙酯、甲 基丙烯酸2-羥基丙酯、曱基丙烯酸3-羥基丙酯、甲基丙烯 酸2-羥基丁酯;曱基丙烯酸3-羥基丁酯及曱基丙烯酸4-羥基丁酯。 苯氧基烷基甲基丙烯酸酯類例如曱基丙烯酸苯氧基乙 酯及甲基丙烯酸2 -羥基-3-苯氧基丙酯; 14 312/發明說明書(補件)/93-05/93103730 1273624 烷氧基烷基曱基丙烯酸酯類例如曱基丙烯酸2 -甲氧基 乙酯、曱基丙烯酸2 -乙氧基乙酯、曱基丙烯酸2 -丙氧基乙 酯、甲基丙烯酸2 -丁氧基乙酯及曱基丙烯酸2 -甲氧基丁 酯; 多烷二醇曱基丙烯酸酯類例如多乙二醇一甲基丙烯酸 酯、乙氧基二乙二醇甲基丙烯酸酯、曱氧基多乙二醇曱基 丙烯酸酯、苯氧基多乙二醇甲基丙烯酸酯、壬基苯氧基多 乙二醇甲基丙烯酸酯、聚丙二醇曱基丙烯酸酯、甲氧基聚 丙二醇曱基丙烯酸酯、乙氧基聚丙二醇甲基丙烯酸酯及壬 基苯氧聚丙二醇曱基丙烯酸酯; 環烷基曱基丙烯酸酯類例如曱基丙烯酸環己廟、曱基丙 烯酸4 - 丁基環己酯、甲基丙烯酸二環戊酯、甲基丙烯酸二 環戊烯酯、甲基丙烯酸二環戊二烯酯、甲基丙烯酸冰片酯、 曱基丙烯酸異冰片酯及曱基丙烯酸三環癸酯;以及 甲基丙烯酸苄酯及曱基丙烯酸四氫糠酯。 組成本發明組成物之丙烯酸樹脂之分子量,以重量平均 分子量藉凝膠滲透層析術(後文稱之為「G P C」)還原成為聚 苯乙烯表示,較佳為4, 000-300, 000,且更佳為 1 0,0 0 0 - 2 0 0,0 0 0 (該分子量於後文簡稱為「重量平均分子 量」)。 本發明組成物之黏結劑樹脂所占之比例相對於每1 0 0份 重量比無機粒子較佳為5 - 8 0份重量比,且更佳為1 0 - 5 0 份重量比。當黏結劑樹脂之比例過小時,黏結劑樹脂無法 確切黏結及保有無機粒子。相反地,當比例過大時,烤乾 步驟耗費長時間,形成的燒結材料(例如介電層)不具有足 夠強度或厚度。 (特定化合物) 15 312/發明說明書(補件)/93-05/93103730 1273624 特定化合物用作為具有增塑劑及分散劑雙重效果之添 加劑。含有特定化合物之本發明組成物顯示絕佳表面平坦 度。即使當所得轉印薄膜被彎曲時,薄膜生成性材料層表 面可精細裂開,轉印膜具有絕佳柔軟性而容易捲起。此外, 因特定化合物不易藉熱分解及去除,故烤乾薄膜生成性材 料層所得之面板材料不會被上色,特別介電層之透光比不 會降低。 表示特定化合物之式(I)中,R1表示-CO-A表示之基團, 其中A表示含5 - 2 0個碳原子之烷基或含5 - 2 0個碳原子之 稀基,以及i為2 - 2 0之整數。 A表示之烷基或烯基含5 - 2 0個碳原子且較佳為9 _ 1 8個 碳原子。當碳原子數小於5時,作為添加劑之功能變得不 足。當碳原子數超過2 0時,於組成含有無機粒子之組成物 之添加劑溶劑中的溶解度降低,而無法獲得良好撓性。 烷基之特例包括正戊基、正己基、正庚基、正辛基、正 壬基、正癸基、正十一 完基、正十二烧基、正十五烧基、 正十六烷基、正十七烷基、正十八烷基、正十九烷基及正 廿烧基。 細基之特例包括2 -戍細基、2_己細基、2_庚稀基、2-辛烯基、2 -癸烯基、1 0 -十一碳烯基、9 -十八碳烯基及9 -十八碳稀基。 其中以正辛基、正十二;(:完基、正十八烧基及9-十八碳稀 基為佳’而以9 —h八碳稀基為特佳。 式(I)中R1表示- CO-A表示之基團;以及[為2 - 2 0之整 數。 16 312/發明說明書(補件)/93-05/93103730 1273624 特定化合物之特例包括一月桂酸雙甘油酯、一硬脂酸雙 甘油酯、一油酸雙甘油酯及一辛酸雙甘油酯。其中以一油 酸雙甘油S旨為特佳。 特定化合物於本發明組成物之比例較佳相對於每1 〇 〇份 重量比無機粒子,為0 . 1 - 2 0份重量比,及更佳為0 · 5 - 1 0 份重量比。當特定化合物之比例過小時,無法充分改善使 用所得組成物形成之薄膜生成性材料層之表面平坦度及撓 性。相反地當比例過高時,使用所得組成物形成之薄膜生 成性材料層之黏著性(粘黏性)變過高,故包含該薄膜生成 性材料層之轉印膜之操控性質低劣。 (輻射敏感成分) 本發明之含有無機粒子之組成物可為含有輻射敏感成 分之輻射敏感性含有無機粒子之組成物。轄射敏感成分較 佳例如包括(a )多官能單體與輻射聚合引發劑之組合;以及 (b )蜜胺樹脂與當使用輻射照射時可生成酸之光酸產生劑 的組合。至於組合(a ),以多官能(甲基)丙烯酸酯與輻射聚 合引發劑之組合為特佳。 組成輻射敏感成分之多官能(曱基)丙烯酸酯之特例包 括烷二醇(例如乙二醇及丙二醇)之二(曱基)丙烯酸酯;多 烷二醇(例如多乙二醇及多丙二醇)之二(甲基)丙烯酸酯; 二端基經羥基化聚合物(例如二端基羥基聚丁二烯、二端基 羥基聚異戊間二烯及二端基羥基聚己内酯)之二(甲基)丙 烯酸酯;具有價數3或3以上之多元醇(例如甘油、1,2,4 -丁三醇、三羥甲基烷、四羥甲基烷、季戊四醇及二季戊四 醇)之多(曱基)丙烯酸酯;環狀多元醇(如1,4 -環己二醇及 17 312/發明說明書(補件)/93-05/93103730 1273624 1,4 -苯二醇之環狀多元醇);以及寡(甲基)丙烯酸酯例如聚 酯(曱基)丙烯酸酯、環氧樹脂(曱基)丙烯酸酯、胺基曱酸 酯樹脂(曱基)丙烯酸酯、醇酸樹脂(曱基)丙烯酸酯、聚矽 氧樹脂(甲基)丙烯酸酯及螺形烴樹月旨(s p i r a n r e s i η )(曱 基)丙烯酸酯。此等多官能(曱基)丙烯酸酯可單獨使用或組 合兩種或兩種以上使用。 組成輻射敏感性成分之輻射聚合引發劑特例包括羰基 化合物例如聯苯醯、安息香、二苯曱酮、樟腦醌、2-羥基 -2 -曱基-1-苯基丙-1-酮、1-羥基環己基苯基曱酮、2, 2-二甲氧基-2-苯基苯乙酮、2 -甲基-[4’-(甲硫基)苯基]-2-嗎琳基-1 _丙8同及2 -爷基_ 2 _二甲基胺基_ 1 - ( 4 -嗎琳基苯 基)-丁 - 1 -酮;偶氮化合物或疊氮化合物如偶氮異丁腈及 4 -疊氮基苄醛;有機硫化合物如二硫化硫醇;有機過氧化 物如過氧化苯甲醯、過氧化二-第三丁基、第三丁基過氧 氫、異丙苯過氧氫及對曱烷過氧氫;三鹵曱烷類例如1,3 -貳(三氯甲基)-5-(2,-氯苯基)-1,3,5-三畊及2-[2-(2-呋 喃基)伸乙基]-4, 6 -貳(三氯曱基)-1,3,5-三畊及咪唑二元 體例如2,2 ’ - C ( 2 -氯苯基)-4,5,4 ’,5 ’ -四苯基-1,2 ’ -聯口米 唑。此等輻射聚合引發劑可單獨使用或組合兩種或兩種以 上使用。 (溶劑) 本發明組成物通常含有溶劑。較佳溶劑為對無機粒子有 良好親和力及對黏結劑樹脂有良好溶解度,可對所得組成 物提供適當黏度,乾燥時容易氣化及去除之溶劑。 溶劑之特例包括酮類如二乙基曱酮、甲基丁基甲酮二丙 18 312/發明說明書(補件)/93-05/93103730 1273624 基曱酮及環己酮;醇類如正戊醇、4 -曱基-2 -戊醇、 及二丙酮醇;以醚為主之醇類如乙二醇一曱醚、乙 乙&| 、乙二醇一丁鱗、丙二醇一曱及丙二醇一乙 飽和脂肪族一羧酸烷酯類例如乙酸正丁酯及乙酸戊 酸酯類如乳酸乙酯及乳酸正丁酯;以及以醚為主之 如乙酸甲基溶纖素、乙酸乙酯溶纖素、乙酸丙二醇-及3 -乙氧基丙酸乙酯。此等溶劑可單獨使用或組合 兩種以上使用。 溶劑於本發明組成物之比例,由維持組成物黏度 範圍之觀點,相對於每1 0 0份重量比無機粒子,較 份重量比或以下及更佳為5-30份重量比。 本發明組成物除了前述主要成分之外,可含有多 劑作為選擇性成分,該等添加劑例如為粘黏劑、表 控制劑、安定劑及消泡劑。 生成介電層之組成物作為含有無機粒子之組成物 較佳實施例如包括一種組成物,該組成物包含 1 0 0份重量比混合物包含5 0 - 8 0 %重量比氧化錯、 重量比氧化硼、0 - 2 0 %重量比氧化鋅、0 - 1 0 %重量比 及0 - 1 0 %重量比氧化矽作為無機粒子(玻璃粉); 10-30份重量比甲基丙烯酸丁酯/甲基丙烯酸2 - Ζ 酯/曱基丙烯酸羥基丙酯共聚物作為黏結劑樹脂; 0 · 1 - 1 0份重量比油酸二甘油酯作為特定化合物; 5-30份重量比丙二醇一曱醚及/或3 -乙氧基丙酸 為溶劑。 本發明組成物可經由使用混練器例如輥混練器、 312/發明說明書(補件)/93-05/93103730 環己醇 二醇一 ; 不 酯;乳 酯類例 曱醚、 兩種或 於較佳 佳為40 種添加 面張力 範例 5 - 3 0 % 氧化鋁 ;基己 以及 乙醋作 混合器 19 1273624 或均混器,混練前述無機粒子、黏結劑樹脂、特定化名 溶劑及選擇性成分而製備。 如此製備之本發明組成物為具有適合塗覆之流動性 膏狀組成物,通常具有黏度為1,000-30, 000 cp以及 為 3, 0 0 0 - 1 0, 0 0 0 cp ° 本發明組成物可特別有利地用於製造轉印膜(本發E 轉印膜),容後詳述。 本發明組成物也較佳用於習知形成薄膜生成性材料 之方法,換言之藉網印法等直接塗覆組成物於基板表 及乾燥該塗覆膜而形成薄膜生成性材料之方法。 (轉印膜) 本發明之轉印膜為一種複合膜其可有利地用於製造 組成元件之步驟,特別製造介電層之步驟,經由塗覆 明組成物於基底膜上及乾燥該塗覆膜而形成薄膜生成 料層。 換言之,本發明之轉印膜係由基底膜其上形成有一 膜生成性材料層,且含有無機粒子、黏結劑樹脂及特 合物。 本發明之轉印膜可為薄膜(堆疊體),係經由形成後 阻膜於基底膜上,塗覆本發明組成物於光阻膜上,以 燥塗覆膜而製備。 此外,本發明轉印膜可為使用輻射敏感性含有無機 之組成物組成之輻射敏感性轉印膜。 (1 )轉印膜之構造:I H2C-R3 11 312 / Inventive Specification (Supplement) / 93-05/93103730 1273624 wherein R 2 represents a hydrogen atom or a methyl group; and R 3 represents a monovalent organic group. Specific examples of the (meth)acrylic compound represented by the formula (II) include: alkyl (mercapto) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, propyl (mercapto) acrylate , (isopropyl) (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, tert-butyl (meth) acrylate, pentyl (meth) Acrylate, (amyl (meth)acrylate), (meth)isoamyl acrylate, hexyl acrylate, heptyl (meth)acrylate, (methyl) Octyl acrylate, isooctyl (decyl) acrylate, 2-ethylhexyl (decyl) acrylate, decyl (decyl) acrylate, decyl acrylate, isodecyl acrylate Undecyl (meth)acrylate, dodecyl (meth)acrylate, lauryl (meth)acrylate, stearyl (meth) acrylate and isostearyl (meth) acrylate; hydroxyalkyl (fluorenyl) acrylates such as hydroxyethyl (meth) acrylate, 2-hydroxypropyl acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate; 3-hydroxybutyl (meth) acrylate and 4-hydroxyl (meth) acrylate Butyl ester. Phenoxyalkyl (meth) acrylates such as phenoxyethyl (meth) acrylate and 2-hydroxy-3-phenoxypropyl (meth) acrylate; alkoxyalkyl (methyl) Acrylates such as 2-methoxyethyl (meth)acrylate, 2-ethoxyethyl (meth)acrylate, 2-propoxyethyl (meth)acrylate, 2-(meth)acrylate 2 - Butoxyethyl ester and 2-methoxybutyl (meth)acrylate; polyalkylene glycol (meth) acrylates such as polyglycol mono(meth) acrylate, ethoxy diethylene glycol (Meth) acrylate, methoxypolyethylene 2 12 312 / invention specification (supplement) / 93-05/93103730 1273624 alcohol (mercapto) acrylate, phenoxy polyethylene glycol (fluorenyl) acrylate , nonylphenoxypolyethylene glycol (mercapto) acrylate, polypropylene glycol (meth) acrylate, methoxy polypropylene glycol (meth) acrylate, ethoxy polypropylene glycol (meth) acrylate and Nonylphenoxypolypropylene glycol (meth) acrylate; cycloalkyl (meth) acrylates such as (meth) acrylate , 4-butylcyclohexyl (meth)acrylate, dicyclopentanyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentadienyl (mercapto)acrylate, ) borneol acrylate, isobornyl (meth) acrylate and tricyclodecyl (meth) acrylate; and (mercapto) acrylate and tetrahydrofurfuryl (meth) acrylate. The (mercapto) acrylate compound represented by the formula (II), wherein R3 represents a group containing an alkyl group or an alkyloxy group. Particularly preferred (meth) acrylate compounds are (butyl) butyl acrylate, ethyl (hexyl) hexyl acrylate, (decyl) decyl acrylate, isodecyl (mercapto) acrylate and (fluorenyl) 2-ethoxyethyl acrylate. The other copolymerizable monomer is not particularly limited as long as it is a compound copolymerizable with the (mercapto) acrylate compound. Other copolymerizable monomers include unsaturated carboxylic acids such as (meth)acrylic acid, vinyl benzoic acid, maleic acid, and vinyl phthalic acid; and vinyl group-containing polymerizable compounds such as vinyl Narrow-based methyl ether, vinyl glycidyl ether, styrene, α-mercaptostyrene, butadiene, and isoprene. The proportion of the comonomer derived from the (fluorenyl)acrylic compound represented by the formula (II) in the acrylic resin of the composition of the invention is usually 70% by weight or more, and preferably 90% by weight or more. . Specific examples of preferred acrylic resins include polydecyl methacrylate, polyfluorenyl 13 312 / invention specification (supplement) / 93-05/93103730 1273624 butyl acrylate and decyl methacrylate - butyl methacrylate copolymer . When the constituent elements of the PDP are formed by the photoresist method described later, when the film-forming material layer must be subjected to the solubility test, it is preferable to contain a monomer containing a Wei group as the other copolymerizable monomer (co-formation). body). Specific examples of the carboxyl group-containing monomer include acrylic acid, methacrylic acid, maleic acid, fumaric acid, crotonic acid, itaconic acid, citraconic acid, mesaconic acid, cinnamic acid, and one (2-(indenyl) group. Ethyl decyloxyethyl) succinate and ω-carboxy-polycaprolactone mono(meth) acrylate. Among them, methacrylic acid is particularly preferred. Specific examples of the preferred solvent-soluble resin include: alkyl mercapto acrylates such as hydrazine acrylate S, methacrylic acid methacrylate, methacrylic acid propyl methacrylate, isopropyl isopropyl acrylate, butyl methacrylate, Isobutyl methacrylate, tert-butyl methacrylate, pentyl methacrylate, amyl methacrylate, isoamyl thioglycolate, Mercaptopropionate, hexyl methacrylate, octyl methacrylate, isooctyl methacrylate, 2-ethylhexyl methacrylate, decyl methacrylate, decyl methacrylate, A Isodecyl acrylate, undecyl methacrylate, dodecyl methacrylate, lauryl methacrylate, stearyl methacrylate and isostearyl methacrylate; hydroxyalkyl methacrylate Such as hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, 3-hydroxypropyl methacrylate, 2-hydroxybutyl methacrylate; 3-hydroxybutyl methacrylate and thiol acrylate 4- Hydroxybutyl ester. Phenoxyalkyl methacrylates such as phenoxyethyl methacrylate and 2-hydroxy-3-phenoxypropyl methacrylate; 14 312 / invention specification (supplement) / 93-05/93103730 1273624 Alkoxyalkyl methacrylates such as 2-methoxyethyl methacrylate, 2-ethoxyethyl methacrylate, 2-propoxyethyl methacrylate, methacrylic acid 2 - Butoxyethyl ester and 2-methoxybutyl methacrylate; polyalkylene glycol methacrylates such as polyethylene glycol monomethacrylate, ethoxy diethylene glycol methacrylate, hydrazine Oxypolyethylene glycol methacrylate, phenoxy polyethylene glycol methacrylate, nonyl phenoxy polyethylene glycol methacrylate, polypropylene glycol methacrylate, methoxy polypropylene glycol oxime Acrylate, ethoxypolypropylene glycol methacrylate and nonylphenoxy polypropylene glycol acrylate; cycloalkyl methacrylates such as thioglycolcyclohexanyl, methacrylic acid 4-butylcyclohexane Ester, dicyclopentyl methacrylate, dicyclopentenyl methacrylate, methacrylic acid Cyclopentadiene methacrylate, isobornyl methacrylate, isobornyl acrylate group Yue and Yue acrylate, tricyclodecane acrylate group; and benzyl methacrylate, and tetrahydrofurfuryl acrylate Yue group. The molecular weight of the acrylic resin of the composition of the invention is represented by polystyrene by gel permeation chromatography (hereinafter referred to as "GPC"), preferably 4,000 to 300,000. More preferably, it is 1 0,0 0 0 - 2 0 0,0 0 0 (this molecular weight is hereinafter referred to as "weight average molecular weight"). The proportion of the binder resin of the composition of the present invention is preferably from 5 to 80 parts by weight, and more preferably from 10 to 50 parts by weight, per 100 parts by weight of the inorganic particles. When the proportion of the binder resin is too small, the binder resin cannot bond and retain inorganic particles. Conversely, when the ratio is too large, the baking step takes a long time, and the formed sintered material (e.g., dielectric layer) does not have sufficient strength or thickness. (Specific compound) 15 312/Invention specification (supplement)/93-05/93103730 1273624 A specific compound is used as an additive having a dual effect of a plasticizer and a dispersant. The composition of the present invention containing a specific compound showed excellent surface flatness. Even when the resulting transfer film is bent, the surface of the film-forming material layer can be finely cracked, and the transfer film has excellent flexibility and is easily rolled up. Further, since the specific compound is not easily decomposed and removed by heat, the panel material obtained by baking the film-forming material layer is not colored, and the light transmittance of the dielectric layer is not lowered. In the formula (I) representing a specific compound, R1 represents a group represented by -CO-A, wherein A represents an alkyl group having 5 to 20 carbon atoms or a rare group having 5 to 20 carbon atoms, and i Is an integer from 2 - 2 0. The alkyl or alkenyl group represented by A has 5 to 20 carbon atoms and preferably 9 to 18 carbon atoms. When the number of carbon atoms is less than 5, the function as an additive becomes insufficient. When the number of carbon atoms exceeds 20, the solubility in the additive solvent constituting the composition containing the inorganic particles is lowered, and good flexibility cannot be obtained. Specific examples of alkyl groups include n-pentyl, n-hexyl, n-heptyl, n-octyl, n-decyl, n-decyl, n-decyl, n-decyl, n-decyl, n-hexadecane Base, n-heptadecyl, n-octadecyl, n-nonadecyl and n-decyl. Specific examples of the fine base include 2-indenyl, 2-hexyl, 2-hexyl, 2-octenyl, 2-nonenyl, 10-undecenyl, 9-octadecene Base and 9 - 18 carbon base. Among them, n-octyl and n-decyl; (: complete, n-octadecyl and 9-octadecyl are preferred) and 9-h eight-carbon dilute is preferred. R1 in formula (I) Represents a group represented by -CO-A; and [is an integer of 2 - 2 0. 16 312 / invention specification (supplement) / 93-05/93103730 1273624 Specific examples of specific compounds include monolauric acid diglyceride, a hard a diglyceride fatty acid, a monoglyceride monooleate and a diglyceride monocaprylate, wherein a monooleic acid diglycerin S is particularly preferred. The proportion of the specific compound in the composition of the present invention is preferably relative to one part per serving. The weight ratio of the inorganic particles is from 0.1 to 20 parts by weight, and more preferably from 0.5 to 10 parts by weight. When the ratio of the specific compound is too small, the film formation property by using the obtained composition cannot be sufficiently improved. The surface flatness and flexibility of the material layer. Conversely, when the ratio is too high, the adhesiveness (viscosity) of the film-forming material layer formed using the obtained composition becomes too high, so that the film-forming material layer is included. The handling property of the transfer film is inferior. (radiation-sensitive component) The inorganic particle-containing material of the present invention The composition may be a radiation-sensitive composition containing inorganic particles containing a radiation-sensitive component. The sensitizing-sensitive component preferably includes, for example, (a) a combination of a polyfunctional monomer and a radiation polymerization initiator; and (b) a melamine resin and A combination of acid photoacid generators can be formed when irradiated with radiation. As for the combination (a), a combination of a polyfunctional (meth) acrylate and a radiation polymerization initiator is particularly preferred. Specific examples of mercapto acrylates include bis(indenyl) acrylates of alkanediols (such as ethylene glycol and propylene glycol); di(meth)acrylates of polyalkylene glycols (such as polyglycol and polypropylene glycol). a di(meth)acrylate having a hydroxyl group polymer (for example, a dihydroxy hydroxypolybutadiene, a dihydroxy hydroxy polyisoprene, and a dihydroxy hydroxy polycaprolactone); a poly(alkyl) acrylate having a valence of 3 or more or more (for example, glycerin, 1,2,4-butanetriol, trimethylolane, tetramethylolane, pentaerythritol, and dipentaerythritol); Polyol (such as 1,4 - ring Glycol and 17 312 / invention specification (supplement) / 93-05 / 93103730 1273624 1,4 - benzenediol cyclic polyol); and oligo (meth) acrylate such as polyester (fluorenyl) acrylate , epoxy resin (fluorenyl) acrylate, amine phthalate resin (fluorenyl) acrylate, alkyd resin (mercapto) acrylate, polyoxyl resin (meth) acrylate and spiral hydrocarbon tree (spiranresi η ) (fluorenyl) acrylate. These polyfunctional (fluorenyl) acrylates may be used singly or in combination of two or more. Specific examples of the radiation polymerization initiator constituting the radiation-sensitive component include a carbonyl compound such as Biphenyl hydrazine, benzoin, benzophenone, camphorquinone, 2-hydroxy-2-mercapto-1-phenylpropan-1-one, 1-hydroxycyclohexylphenyl fluorenone, 2, 2-dimethoxy Benzyl-2-phenylacetophenone, 2-methyl-[4'-(methylthio)phenyl]-2-morphinyl-1-propane 8 and 2-meryl-2-phenylene Amino- 1 -( 4 -morphinylphenyl)-butan-1-one; azo compound or azide compound such as azoisobutyronitrile and 4-azidobenzyl aldehyde; organic sulfur compound such as Mercaptan; organic peroxides such as benzamidine peroxide, di-tert-butyl peroxide, tert-butyl hydroperoxide, cumene hydroperoxide and p-decane hydroperoxide; trihalodecane Classes such as 1,3 - fluorene (trichloromethyl)-5-(2,-chlorophenyl)-1,3,5-three tillage and 2-[2-(2-furyl)extended ethyl]- 4,6-贰(trichloroindenyl)-1,3,5-three tillage and imidazole binary such as 2,2 '-C (2-chlorophenyl)-4,5,4 ',5 ' - Tetraphenyl-1,2'-linked mesozole. These radiation polymerization initiators may be used singly or in combination of two or more. (Solvent) The composition of the present invention usually contains a solvent. The preferred solvent is a solvent which has good affinity for inorganic particles and good solubility to the binder resin, provides appropriate viscosity to the obtained composition, and is easily vaporized and removed upon drying. Specific examples of the solvent include ketones such as diethyl ketone, methyl butyl ketone dipropyl 18 312 / invention specification (supplement) / 93-05 / 93103730 1273624 ketone and cyclohexanone; alcohols such as n-pentanol, 4 - mercapto-2-pentanol, and diacetone alcohol; ether-based alcohols such as ethylene glycol monoterpene ether, ethyl bethane & |, ethylene glycol monobutylene, propylene glycol monopropene and propylene glycol-B Saturated aliphatic monocarboxylic acid alkyl esters such as n-butyl acetate and valerate acetates such as ethyl lactate and n-butyl lactate; and ether-based such as methyl cellosolve acetate, ethyl acetate cellosolve , propylene glycol acetate and ethyl 3-ethoxypropionate. These solvents may be used singly or in combination of two or more. The ratio of the solvent to the composition of the present invention is from 5 to 30 parts by weight, relative to the weight ratio of the inorganic particles per 100 parts by weight of the inorganic particles, from the viewpoint of maintaining the viscosity of the composition. The composition of the present invention may contain, in addition to the above-mentioned main components, a plurality of agents as optional components, such as a tackifier, a surface control agent, a stabilizer, and an antifoaming agent. The composition for forming a dielectric layer as a composition containing inorganic particles preferably comprises, for example, a composition comprising 100 parts by weight of a mixture comprising 50 to 80% by weight of oxidized weight, boron oxide by weight. , 0 - 20% by weight of zinc oxide, 0 - 10% by weight and 0 - 10% by weight of cerium oxide as inorganic particles (glass powder); 10-30 parts by weight of butyl methacrylate / methyl 2 - decyl acrylate / hydroxypropyl methacrylate copolymer as a binder resin; 0 · 1 - 10 parts by weight of diglyceride oleate as a specific compound; 5-30 parts by weight of propylene glycol monoterpene ether and / or 3-ethoxypropionic acid is a solvent. The composition of the present invention may be via the use of a kneader such as a roll kneader, 312/invention specification (supplement)/93-05/93103730 cyclohexanol diol; a non-ester; a lactone type oxime ether, two or more Jiajia prepares 40 kinds of surface tension examples 5 - 30% alumina; base and ethyl acetate as mixer 19 1273624 or homomixer, mixes the above inorganic particles, binder resin, specific name solvent and selective components to prepare . The composition of the present invention thus prepared is a flowable paste composition suitable for coating, and generally has a viscosity of 1,000 to 10,000 cp and is 3,0 0 - 1 0, 0 0 0 cp °. The composition can be used particularly advantageously for the production of a transfer film (the present invention), which will be described later in detail. The composition of the present invention is also preferably used in a conventional method for forming a film-forming material, in other words, a method of directly coating a composition on a substrate surface by a screen printing method or the like, and drying the coating film to form a film-forming material. (Transfer film) The transfer film of the present invention is a composite film which can be advantageously used in the steps of manufacturing a constituent element, in particular, a step of manufacturing a dielectric layer by coating a composition on a base film and drying the coating The film forms a film-forming layer. In other words, the transfer film of the present invention has a film-forming material layer formed thereon from a base film, and contains inorganic particles, a binder resin, and a specific composition. The transfer film of the present invention may be a film (stack) prepared by forming a back-resist film on a base film, coating the composition of the present invention on a photoresist film, and drying the film. Further, the transfer film of the present invention may be a radiation-sensitive transfer film composed of a composition containing a radiation-sensitive inorganic substance. (1) The structure of the transfer film:

圖2A為顯示本發明之經輥軋之轉印膜之示意剖面E 312/發明說明書(補件)/93-05/93103730 物、 之 較佳 3之 層 面以 PDP 本發 性材 種薄 定化 述光 及乾 粒子 20 1273624 以及圖2 B為顯示轉印膜構造層之剖面圖((X )部分之細節 視圖)。 圖2所示轉印膜為一種複合膜,該複合膜可用於形成組 成PDP之介電層作為本發明之轉印膜範例。通常轉印膜之 組成為一基底膜F 1 ; —薄膜生成性材料層F 2,其係生成於 基底膜F 1表面上且可被撕離;以及一覆蓋膜F 3 .,其係設 置於薄膜生成性材料層F 2表面上且容易被撕離。根據薄膜 生成性材料層F 2之性質可未使用覆蓋膜F 3。 組成轉印膜之基底膜F 1較佳為具有耐熱性及耐溶劑性 且有撓性之樹脂膜。當基底膜F 1具有撓性時,膏狀組成物 (本發明組成物)可使用輥塗機、刮刀塗機等塗覆,因此可 形成有均勻厚度之薄膜生成性材料層,且將所形成之薄膜 生成性材料層以卷形式儲存與供應。 組成基底膜F 1之樹脂例如包括聚對苯二甲酸伸乙酯、 聚酯類、聚乙烯、聚丙烯、聚苯乙烯、聚醯亞胺類、聚乙 烯醇、聚氯乙烯、含氟樹脂類如聚氟乙烯、尼龍及纖維素。 基底膜F 1之厚度例如為2 0 - 1 0 0微米。 組成轉印膜之薄膜生成性材料層F 2為當烤乾時變成燒 結玻璃材料之層(介電層),且含有玻璃粉(無機粒子)、黏 結劑樹脂及特定化合物作為主要成分。 薄膜生成性材料層F 2之厚度係依據玻璃粉含量以及面 板類型及尺寸決定,但通常厚5 - 2 0 0微米且較佳厚1 0 - 1 0 0 微米。當厚度小於5微米時,最終生成之介電層厚度變過 小,而無法確保獲得載明之介電特性。通常當厚度為 1 0 - 1 0 0微米時,可充分確保大尺寸面板所要求的介電層厚 21 312/發明說明書(補件)/93-05/93103730 1273624 度。 組成轉印膜之覆蓋膜F 3為薄膜生成性材料層F 2表面 (與玻璃基板接觸面)之保護膜。此覆蓋膜F 3較佳為有撓性 樹脂膜。生成覆蓋膜F 3之樹脂例如為前述生成基底膜F 1 之樹脂。覆蓋膜F 3之厚度例如為2 0 - 1 0 0微米。 (2 )轉印膜之製造方法: 本發明之轉印膜之製造方法,可經由形成薄膜生成性材 料層(F 2 )於基底膜(F 1 )上,以及提供(加壓黏合)覆蓋膜(F 3 於薄膜生成性材料層(F 2 )上而製備。 一種形成薄膜生成性材料層之方法例如為塗覆本發明 之含有無機粒子、黏結劑樹脂、特定化合物及溶劑之組成 物於基底膜上,以及乾燥該塗覆膜俾去除部分或全部溶劑 之方法。 由厚度變大(例如2 0微米或以上),以及可有效形成具 有絕佳均勻厚度之塗覆膜觀點,塗覆本發明組成物於基底 膜之方法較佳例如包括使用輥塗機之塗覆法、使用刮刀塗 覆機例如刮刀之塗覆法、使用簾塗機之塗覆法以及使用線 塗機之塗覆法。 塗覆本發明組成物之基底膜表面使接受離型處理係較 佳。如此於轉印薄膜生成性材料層之後,基底膜容易由薄 膜生成性材料層撕離。 本發明組成物生成於基底膜上之塗覆膜,經乾燥去除部 分或全部溶劑,且轉成組成轉印膜之薄膜生成性材料層。 乾燥由本發明組成物製成之塗覆膜之條件包括4 0 - 1 5 0 °C 溫度及於約1 - 3 0分鐘時間。由對基板顯示粘黏性,以及於 312/發明說明書(補件)/93-05/93103730 22 1273624 薄膜生成性材料層上顯示適當形狀保持性觀點,乾燥後殘 餘溶劑比例(溶劑於薄膜生成性材料層含量)通常為1 〇 %重 量比或以下,且較佳為0 . 1 - 5 %重量比。 較佳設置於(通常係加熱加壓黏合)如此生成之薄膜生 成性材料層上的覆蓋膜表面也接受離型處理。於轉印薄膜 生成性材料層之前,覆蓋膜易由薄膜生成性材料層撕離。 (3 )薄膜生成性材料層之轉印(轉印膜之用法) 基底膜上之薄膜生成性材料層轉印至基板全體表面 上。根據本發明之轉印膜,薄膜生成性材料層可透過如此 簡單的操作而確切形成於玻璃基板上。如此不僅可對形成 P D P組成元件(例如介電層)之步驟做改良(提升功效),同 時也可改良所生成之組成元件之品質(例如介電層顯示穩 定介電特性)。 P D P製法(1 )(介電層之形成) 本發明之P D P製法(1 )包含下列步驟:轉印組成本發明 轉印膜之薄膜生成性材料層至基板表面,以及烤乾該被轉 印的薄膜生成性材料層,來形成介電層於基板表面上。 轉印具有如圖2所示組成之轉印膜之薄膜生成性材料層 之步驟範例如後。 (1 )成卷形式之轉印膜切割成對應基板面積尺寸。 (2 )於由切割所得轉印膜之薄膜生成性材料層(F 2 )表面 上撕離覆蓋膜(F 3 )後,該轉印膜鋪於基板表面上,讓薄膜 生成性材料層(F 2 )表面接觸基板。 (3 )加熱輥移動於鋪於基板上之轉印膜上方,俾加熱加 壓黏合該轉印膜。 23 312/發明說明書(補件)/93-05/93103730 1273624 (4 )撕離基底膜(F 1 ),由藉加熱加壓黏合而固定於基板 之薄膜生成性材料層(F 2 )移出基底膜(F 1)。 基底膜(F 1 )上之薄膜生成性材料層(F 2 )係藉前述操作 而轉印至基板。轉印條件包括加熱輥表面溫度6 0 - 1 2 0 °C , 加熱報壓力1 - 5千克/平方厘米及加熱報移動速度 0 . 2 - 1 0 . 0米/分鐘。此項操作(轉印步驟)可使用層合機進 行。基板經過預熱,預熱溫度設定為例如4 〇 - 1 0 0 °C 。 轉印至基板表面之薄膜生成性材料層(F 2 )係藉烤乾而 轉成經燒結之無機材料(介電層)。烤乾方法為例如放置其 上已轉印薄膜生成性材料層(F 2 )之基板於高溫氣氛之方 法。如此,薄膜生成性材料層(F 2 )所含之有機材料(例如黏 結劑樹脂、殘餘溶劑、特定化合物及各種添加劑)被分解去 除,無機粒子經過熔化與燒結。燒結溫度係依據基板之熔 點、薄膜生成性材料層之組成元件等而改變,但燒結溫度 例如為3 0 0 - 8 0 0 °C ,且較佳為4 0 0 - 6 2 0 °C 。 P D P製法(2 )(利用光阻劑方法形成組成元件) 本發明之P D P製法(2 )包括下列步驟:轉印組成本發明 之轉印膜之薄膜生成性材料層至基板;形成光阻膜於轉印 後之薄膜生成性材料層上;曝光該光阻膜而形成光阻圖案 之潛像;顯影光阻膜而形成光阻圖案;蝕刻薄膜生成性材 料層而形成對應於光阻圖案之圖案層;以及烤乾該圖案層 而形成一種選自阻擋肋、電極、電阻器、介電層、磷光體、 彩色濾光片及黑矩陣中之組成元件。 另外,本發明之製法(2 )包括下列步驟:形成光阻膜以 及得自本發明之含有無機粒子所得之組成物之薄膜生成性 24 312/發明說明書(補件)/93-05/93103730 1273624 材料層於一基底膜上之積層膜;轉印該形成於基底膜上之 積層膜至基板表面;曝光組成該積層膜之光阻膜而形成光 阻圖案之潛像;顯影該光阻膜而形成光阻圖案;蝕刻薄膜 生成性材料層而形成對應於光阻圖案之圖案層;以及烤乾 該圖案層而形成一種選自阻擋肋、電極、電阻器、介電層、 磷光體、彩色濾光片及黑矩陣中之組成元件。 一種形成「阻擋肋」作為PDP組成元件於基板背面之方 法將說明如後。此種方法包含(1 )轉印薄膜生成性材料層步 驟,(2 )形成光阻膜步驟,(3 )曝光光阻膜步驟,(4 )顯影光 阻膜步驟,(5 )蝕刻薄膜生成性材料層步驟,以及(6 )烤乾 阻擋肋圖案步驟,因而形成阻擋肋於基板表面上。 圖3及圖4各自為示意剖面圖,顯示一系列生成阻擋肋 之步驟。圖3及圖4中,1 1表示玻璃基板,於玻璃基板上 以均等間隔校準產生電漿,以及介電層1 3形成於玻璃基板 11表面上因而覆蓋基板12。 本發明中,「轉印薄膜生成性材料層至基板」之具體例 不僅包括轉印薄膜生成性材料層至玻璃基板1 1表面之具 體例,同時也包括轉印薄膜生成性材料層至介電層1 3表面 之具體例。 (1 )轉印薄膜生成性材料層步驟: 轉印薄膜生成性材料層之步驟範例顯示如後。 如圖3 B所示,於撕離轉印膜之覆蓋膜(圖中未顯示)後, 轉印膜2 0鋪於介電層1 3表面上,讓薄膜生成性材料層2 1 表面接觸介電層1 3表面,轉印膜2 0藉加熱輥等而加熱加 壓黏合,以及基底膜2 2隨後被撕離而由薄膜生成性材料層 25 312/發明說明書(補件)/93-05/93103730 1273624 2 1去除。如此如圖3 C所示,薄膜生成性材料層2 1被轉印 且緊密黏合至介電層1 3表面。轉印條件包括加熱輥表面溫 度8 0 - 1 4 0 °C ,加熱輥壓力1 - 5千克/平方厘米及加熱輥移 動速度0 . 1 - 1 0 . 0米/分鐘。玻璃基板1 1可經預熱,預熱溫 度可設定為例如4 0 - 1 0 0 °C 。 (2 )生成光阻膜之步驟: 本步驟中,如圖3 D所示,光阻膜3 1形成於經轉印之薄 膜生成性材料層2 1表面上。組成光阻膜3 1之光阻可為任 一種正型光阻及負型光阻。 光阻膜3 1可藉多種方法包括網印法、輥塗法、旋塗法 及鑄塗法等塗覆光阻,以及乾燥塗覆膜而形成。塗覆膜之 乾燥溫度通常為約6 0 - 1 3 0 °C 。 形成於基底膜上之光阻膜可藉轉印於薄膜生成性材料 層2 1表面而製成。根據此種形成方法,不僅可減少光阻膜 之形成步驟數目,同時所得光阻也具有絕佳厚度均勻度。 如此,可一致地進行光阻膜之顯影,及薄膜生成性材料層 之蝕刻,因此生成之阻擋肋高度及形狀變均勻。 光阻膜3 1通常厚0 . 1 - 4 0微米且較佳0 . 5 - 2 0微米。 (3 )光阻膜曝光步驟 本步驟中,如圖3 E所示,形成於薄膜生成性材料層2 1 上之光阻膜3 1表面透過曝光罩Μ而以紫外光等輻射選擇性 照射(曝光)來形成光阻圖案潛像。本圖中,Μ Α及Μ Β分別 表示由曝光罩Μ所形成之透光部及遮光部。 紫外光照射裝置並無特殊限制,但可為用於微影術之紫 外光照射裝置,以及用於半導體及液晶顯示裝置製造用之 26 312/發明說明書(補件)/93-05/93103730 1273624 曝光裝置。 當藉轉印而形成光阻膜時,較佳係於覆蓋於光阻膜之上 的基底膜未被撕離之狀態下進行曝光步驟。 (4 )光阻膜顯影步驟 本步驟中,曝光後之光阻膜經顯影來形成光阻圖案(潛 像)。 有關顯影條件,顯影溶液之類別、調配物及濃度、顯影 時間、顯影溫度、顯影方法(例如浸沒法、搖擺法、喷淋法、 噴霧法及攪煉法)、顯影裝置等可根據光阻膜3 1之類別等 適當選用。 由光阻剩餘部分3 5 A及光阻去除部分3 5 B所組成之光阻 圖案3 5 (對應於曝光罩Μ之圖案),係藉本顯影步驟形成, 如圖4 F顯示。 此光阻圖案3 5係作為隨後步驟(蝕刻步驟)之蝕刻罩, 光阻剩餘部分3 5之組成材料(光硬化光阻)於蝕刻溶液須 具有比薄膜生成性材料層2 1之組成材料更低的溶解速率。 (5 )薄膜生成性材料層蝕刻步驟: 本步驟中,薄膜生成性材料層經蝕刻而形成對應於光阻 圖案之阻擋肋圖案層。 換言之,如圖4 G所示,對應薄膜生成性材料層2 1之對 應光阻材料3 5之光阻去除部分3 5 Β之部分係溶解於蝕刻溶 液且被選擇性去除。圖4G顯示蝕刻中之狀態。 當進一步持續触刻時,如圖4 Η所示,薄膜生成性材料 層21之預定部分完全被去除,因而暴露出介電層13。如 此形成由材料層剩餘部分2 5 Α及材料層去除部分2 5 Β所組 27 312/發明說明書(補件)/93-05/93103730 1273624 成之阻擋肋圖案層2 5。 有關蝕刻條件,蝕刻溶液之類別、調配物及濃度、處理 時間、處理溫度、處理方法(例如浸沒法、搖擺法、喷淋法、 噴霧法及攪煉法)、處理裝置等可根據薄膜生成性材料層 2 1之類型等適當選用。 光阻膜3 1類別及薄膜生成性材料層2 1類別經選擇,讓 顯影步驟使用之顯影溶液之相同溶液用作為蝕刻溶液’因 此可連續進行顯影步驟及蝕刻步驟,以及因製造步驟之減 化而改良製造效率。 較佳組成光阻圖案3 5之光阻剩餘部分3 5 A係藉蝕刻逐 漸溶解,而當阻擋肋圖案層2 5生成時(蝕刻完成時)完全被 去除。 即使姓刻後剩餘部分或全部光阻剩餘部分3 5 A,光阻剩 餘部分3 5 A係於隨後之烤乾步驟被去除。 (6 )阻擋肋圖案層烤乾步驟: 於本步驟,阻擋肋係經由烤乾阻擋肋圖案層2 5而形成。 如此材料層其餘部分2 5 A之有機物質被燒掉而形成阻擋 肋。如圖4 I所示,於具有阻擋肋4 0形成於介電層1 3表面 上之面板材料5 0,由阻擋肋4 0 (衍生自材料層去除部分2 5 B 之阻擋肋)形成之空間係作為電漿工作空間。 烤乾溫度須為材料層剩餘部分2 5 A之有機物質被燒掉之 溫度,且通常為4 0 0 - 6 0 0 °C。烤乾時間通常為1 0 - 9 0分鐘。 P D P製法(3 )(利用光阻法之較佳具體例) 本發明之P D P製法(3 )非僅囿限於圖3及圖4所示方法。 其它形成P D P組成元件之較佳方法(P D P製法(3 ))例如為 28 312/發明說明書(補件)/93-05/93103730 1273624 包含如下步驟(1 )至(3 )之形成方法。 (1 )於形成光阻膜於基底膜後,本發明之含有無機粒子 之組成物塗覆於光阻膜上,且經乾燥而積層且形成薄膜生 成性材料層。於形成光阻膜及薄膜生成性材料層時,可使 用輥塗機等,因此可形成具有絕佳均勻厚度之積層膜於基 底膜上。 (2 )由光阻膜及薄膜生成性材料層於基底膜上組成之積 層膜被轉印至基板。轉印條件係如前文「薄膜生成性材料 層轉印步驟」所述之條件相同。 (3 )進行於前文說明之「光阻膜曝光步驟」、「光阻膜顯 影步驟」、「薄膜生成性材料層蝕刻步驟」及「阻擋肋圖案 層烤乾步驟」所述相同操作。此等操作期間如前文說明, 較佳光阻膜之顯影溶液係與薄膜生成性材料層之蝕刻溶液 相同,以及連續進行「光阻膜顯影步驟」及「薄膜生成性 材料層蚀刻步驟」。 根據前述方法,因薄膜生成性材料層及光阻膜係轉印至 基板全體上,故藉簡化步驟可更進一步改良製造效率。 P D P製法(4 )(使用輻射敏感性轉印膜形成組成元件) 本發明之P D P製法(4 )包括下列步驟:轉印組成本發明 之輻射敏感性轉印膜之薄膜生成性材料層至基板;曝光該 薄膜生成性材料層而形成圖案潛像;顯影該薄膜生成性材 料層而形成圖案層;以及烤乾該圖案層而形成一種選自阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣中之組成元件。 本方法中,以阻擋肋形成方法為例,於前述「薄膜生成 29 312/發明說明書(補件)/93-05/93103730 1273624 性材料層轉印步驟」之後,圖案層係於根據「阻擋膜曝光 步驟」及「光阻膜顯影步驟」之條件下形成。隨後,阻擋 肋係藉「阻擋肋圖案烤乾步驟」而形成於基板表面上。 形成「阻擋肋」作為P D P組成元件之方法已經說明於P D P 製法(1 )至(4 )之個別步驟之解說。根據此種方法可形成個 別組成PDP之電極、電阻器、介電層、磷光體、彩色濾光 片及黑矩陣。 將參照下列實施例說明本發明之細節,但需瞭解本發明 絕非囿限於此。實施例及比較例中,全部「份數」為「份 數重量比」。 (實施例) (1 )玻璃膏狀組成物(含有無機粒子組成物)之製備 具有黏度3,4 0 0 c ρ (藉B型黏度計於3 0 r p m測定)之本 發明組成物係藉下述方式製備:使用分散混合器捏合1 0 0 份以P b 0 - B 2 0 3 - S i 0 2為主之混合物(軟化點5 0 0 °C )(其組成 包含7 0 %重量比氧化鉛,1 0 %重量比氧化硼及2 0 %重量比氧 化矽),15份甲基丙烯酸丁酯/甲基丙烯酸2_乙基己酯/曱 基丙烯酸羥基丙酯共聚物(重量比·· 3 0 / 6 0 / 1 0,重量平均分 子量:1 5 0,0 0 0 )作為黏結劑樹脂,5份油酸二甘油酯作為 特定化合物,8 . 7份丙二醇一曱醚作為溶劑及1 3 . 1份3 -乙氧基丙酸乙酯而製備。 (2 )轉印膜之製造與評估(撓性及操控性質): 如上(1 )製備之本發明組成物使用刮刀塗覆機塗覆於聚 對苯二甲酸伸乙酯(Ρ E T )製成且先前接受離型處理之基底 膜上(寬:4 0 0毫米,長:3 0米,厚:3 8微米)形成之塗覆 30 312/發明說明書(補件)/93-05/93103730 1273624 膜於8 0 °C乾燥5分鐘來去除溶劑。如此形成厚5 0微米之 薄膜生成性材料層於基底膜上。先前接受離型處理之PET 製成之覆蓋膜(寬:4 0 0毫米,長:3 0米,厚:3 8微米)黏 著於薄膜生成性材料層來製造本發明之轉印膜,具有圖2 所示構造。 所得轉印膜具有柔軟性,容易捲取。此外,即使轉印膜 被彎曲,彎曲也不會於薄膜生成性材料層表面造成裂痕(彎 曲裂開),薄膜生成性材料層具有絕佳撓性。 覆蓋膜由轉印膜撕離,轉印膜(由基底膜及薄膜生成性 材料層組成之層合物)鋪於玻璃基板上,而未施壓,讓薄膜 生成性材料層表面接觸玻璃基板表面,然後轉印膜由玻璃 基板表面撕離。結果薄膜生成性材料層顯示對玻璃基板之 適當沾黏性,轉印膜可被撕離而未造成薄膜生成性材料層 之凝聚破損。因此轉印膜有良好操控性質。 (3 )薄膜生成性材料層之轉印 於覆蓋膜由如上(2 )所得之轉印膜撕離之後,轉印膜(由 基底膜及薄膜生成性材料層組成之層合物)鋪於2 1吋面板 之玻璃基板上,讓薄膜生成性材料層表面接觸玻璃基板表 面(匯流排電極固定面),使用加熱輥·於加熱下加壓黏合。 加壓黏合條件包括加熱輥表面溫度9 0 °C ,輥壓力2千克/ 平方厘米及加加熱輥移動速度0 , 6米/分鐘。 於加熱下加壓黏合完成後,基底膜被撕離,且由固定(加 熱黏合固定)至玻璃基板表面之薄膜生成性材料層去除,因 此完成薄膜生成性材料層的轉印。 於本轉印步驟,當基底膜撕離時,不會造成薄膜生成性 31 312/發明說明書(補件)/93-05/93103730 1273624 材料層的凝聚破損,有夠高之薄膜強度。此外,轉印後之 薄膜生成性材料層對玻璃基板表面有良好黏著性。 (4 )薄膜生成性材料層之烤乾(介電層之生成): 如上(3 )生成之其上已經轉印薄膜生成性材料層之玻璃 基板置於窯内,經由升高窯内部溫度至6 2 0 °C進行烤乾, 而形成燒結玻璃材料製成之非發色透明介電層於玻璃基板 表面上。 本介電層厚度(平均厚度及公差)經測定,發現係為3 0 微米± 0 . 4微米之範圍。如此介電層有絕佳厚度均勻度。 所得介電層表面使用非接觸式厚度計(N Η - 3,李歐可俠 (R y 〇 k 〇 s h a )公司製造)接受三維測量,俾根據J I S標準 (B 0 6 0 1 )測定表面粗度(R a, R y, R z )。結果,介電層具有 R a = 0 . 0 8微米,R y二0 . 5 6微米及R z = 0 , 2 8微米,故具有絕佳 表面平坦度。 此外,測定如此所得介電層之透光比(測量波長·· 5 5 0奈 米),且發現為9 3 %。如此證實介電層具有良好透明度。 (比較例) 以實施例之相同方式製備具有黏度3,0 0 0 c p (使用B型 黏度計於3 0 r p m測定)之組成物,但將黏結劑樹脂比例改 變成1 7份,以及使用4份壬二酸-二-2 -乙基己酯來替代該 特定化合物。使用所得組成物,轉印膜以實施例之相同方 式製造及評估。結果轉印膜有絕佳撓性及操控.性質。但以 實施例之相同方式製造介電層,及測量表面粗度(R a, R y, R z )。結果介電層具有R a二Ο . 6 5微米,R y = 2 . 5 1微米及 R z二1 . 7 3微米,故表面平坦度低劣。 32 312/發明說明書(補件)/93-05/93103730 1273624 本發明組成物可獲得下列效果。 (1 )適合形成具有絕佳表面平坦度之P D P組成元件(例如阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣)。 (2 )適合形成有高透光比之燒結玻璃料(例如組成P D P之介 電層或阻擋肋)。 (3 )可製造就薄膜生成性材料層而言有絕佳撓性之轉印膜。 (4 )可製造就薄膜生成性材料層而言有絕佳轉印能力(加熱 黏合至基板)之轉印膜。 本發明之轉印膜可獲得下列優點。 (1 )可有效形成具有絕佳P D P表面平坦度之組成元件(特別 為介電層)。 (2 )就其薄膜生成性材料層而言,撓性絕佳,薄膜生成性材 料層表面不含彎曲裂開(裂痕)。 (3 )柔軟度絕佳而容易捲取。 (4 )就其薄膜生成性材料層而言,黏著性適當且操控性質良 好。 (5 )就其薄膜生成性材料層而言轉印性(加熱黏合至基板) 絕佳。 本發明之製造方法可獲得下列效果。 (1 ) 有效形成具有絕佳表面平坦度之P D P組成元件(例如 阻擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及 黑矩陣)。 (2) 可有效形成具有組成元件之高度位置準確度之PDP。 (3) 可有效形成有大厚度之介電層。 33 312/發明說明書(補件)/93-05/93103730 1273624 (4) 可有效形成大尺寸面板所需之介電層。 (5) 可有效形成P D P其設置有具有絕佳厚度均勻度及表 面平坦度之介電層。 【圖式簡單說明】 圖1為顯示交流型電漿顯示面板之截面形狀之示意圖。 圖2A為顯示本發明之轉印膜之示意剖面圖;以及圖2B 為顯示轉印膜之層狀組成之剖面圖。 圖3 A〜E為顯示於本發明之製法中形成阻擋肋之各步驟 (轉印步驟、光阻膜形成步驟及曝光步驟)之示意剖面圖。 圖4 F〜I為顯示於本發明之製法中形成阻擋肋之各步驟 (顯影步驟、蝕刻步驟及烤乾步驟)之示意剖面圖。 (元件符號說明) 1 玻璃基板 2 玻璃基板 3 阻擋肋 4 透明電極 5 匯流排電極 6 定址電極 7 螢光材料 8 介電層 9 介電層 10 保護層 11 玻璃基板 12 電極 13 介電層 34 312/發明說明書(補件)/93-05/93103730 1273624 20 轉印膜 2 1 薄膜生成性材料層 22 基底膜 25 阻擋肋圖案層 2 5 A 材料層剩餘部分 25B 材料層去除部分 3 1 光阻膜 35 光阻圖案 3 5 A 光阻剩餘部分 35B 光阻去除部分 4 0 阻擋肋 5 0 面板材料 F1 基底膜 F 2 薄膜生成性材料層 F3 覆蓋膜 Μ 曝光罩 Μ Α 透光部 MB 遮光部 35 312/發明說明書(補件)/93-05/931037302A is a schematic cross-sectional view of a transfer film of the present invention, showing a cross-section E 312/invention specification (supplement)/93-05/93103730, and a layer of a preferred layer 3 is thinned by a PDP. The light and dry particles 20 1273624 and FIG. 2B are cross-sectional views showing the transfer film structural layer (detailed view of the portion (X)). The transfer film shown in Fig. 2 is a composite film which can be used to form a dielectric layer constituting a PDP as an example of the transfer film of the present invention. Usually, the composition of the transfer film is a base film F 1 ; a film-forming material layer F 2 which is formed on the surface of the base film F 1 and which can be peeled off; and a cover film F 3 . The film-forming material layer F 2 is on the surface and is easily peeled off. The cover film F 3 may not be used depending on the properties of the film-forming material layer F 2 . The base film F 1 constituting the transfer film is preferably a resin film having heat resistance and solvent resistance and having flexibility. When the base film F 1 has flexibility, the paste composition (the composition of the present invention) can be applied by a roll coater, a knife coater or the like, so that a film-forming material layer having a uniform thickness can be formed and formed. The film-forming material layer is stored and supplied in the form of a roll. The resin constituting the base film F 1 includes, for example, polyethylene terephthalate, polyester, polyethylene, polypropylene, polystyrene, polyimine, polyvinyl alcohol, polyvinyl chloride, fluorine-containing resin. Such as polyvinyl fluoride, nylon and cellulose. The thickness of the base film F 1 is, for example, 20 to 1000 μm. The film-forming material layer F 2 constituting the transfer film is a layer (dielectric layer) which becomes a sintered glass material when baked, and contains glass frit (inorganic particles), a binder resin, and a specific compound as main components. The thickness of the film-forming material layer F 2 is determined depending on the glass powder content and the type and size of the panel, but is usually 5 - 200 μm thick and preferably 10 - 10 μm thick. When the thickness is less than 5 μm, the thickness of the dielectric layer finally formed becomes too small to secure the dielectric properties of the inclusion. Generally, when the thickness is from 10 0 to 100 μm, the dielectric layer thickness required for a large-sized panel can be sufficiently ensured 21 312 / invention specification (supplement) / 93-05 / 93103730 1273624 degrees. The cover film F 3 constituting the transfer film is a protective film on the surface (contact surface with the glass substrate) of the film-forming material layer F 2 . This cover film F 3 is preferably a flexible resin film. The resin which forms the cover film F3 is, for example, the above-mentioned resin which forms the base film F1. The thickness of the cover film F 3 is, for example, 20 to 1000 μm. (2) Manufacturing method of transfer film: The method for producing a transfer film of the present invention can form a film-forming material layer (F 2 ) on the base film (F 1 ), and provide a (pressure-bonded) cover film. (F 3 is prepared on the film-forming material layer (F 2 ). A method of forming a film-forming material layer is, for example, coating the composition of the present invention containing inorganic particles, a binder resin, a specific compound, and a solvent on a substrate. a method of removing some or all of the solvent on the film, and drying the coating film. The invention is coated from the viewpoint that the thickness becomes large (for example, 20 μm or more), and the coating film having an excellent uniform thickness can be effectively formed. The method of constituting the composition on the base film preferably includes, for example, a coating method using a roll coater, a coating method using a knife coater such as a doctor blade, a coating method using a curtain coater, and a coating method using a wire coater. It is preferred that the surface of the base film coated with the composition of the present invention is subjected to a release treatment. Thus, after the transfer of the film-forming material layer, the base film is easily peeled off by the film-forming material layer. The coating film on the base film is dried to remove part or all of the solvent, and is converted into a film-forming material layer constituting the transfer film. Conditions for drying the coating film made of the composition of the present invention include 4 0 - 15 0 °C temperature and about 1 - 30 minutes. Appropriate shape retention is shown on the film-forming material layer by the adhesion of the substrate and on the 312/invention manual (supplement)/93-05/93103730 22 1273624 The viewpoint of the residual solvent after drying (the content of the solvent in the film-forming material layer) is usually 1% by weight or less, and preferably 0.1 to 5% by weight. It is preferably set (usually heated) The surface of the cover film on the film-forming material layer thus formed is also subjected to release treatment. Before the transfer of the film-forming material layer, the cover film is easily peeled off by the film-forming material layer. (3) Film formation property Transfer of material layer (use of transfer film) The film-forming material layer on the base film is transferred onto the entire surface of the substrate. According to the transfer film of the present invention, the film-forming material layer can be precisely operated by such a simple operation. shape Formed on a glass substrate. This not only improves the steps of forming a PDP component (such as a dielectric layer), but also improves the quality of the resulting component (for example, the dielectric layer exhibits stable dielectric properties). PDP Process (1) (Formation of Dielectric Layer) The PDP process (1) of the present invention comprises the steps of: transferring a film-forming material layer constituting the transfer film of the present invention to a substrate surface, and baking the transferred The film-forming material layer is printed to form a dielectric layer on the surface of the substrate. The step of transferring the film-forming material layer having the transfer film of the composition shown in Fig. 2 is, for example, followed by (1) in the form of a roll. The transfer film is cut into a corresponding substrate area size. (2) After the cover film (F 3 ) is peeled off from the surface of the film-forming material layer (F 2 ) of the transfer film obtained by cutting, the transfer film is spread on the surface of the substrate The surface of the film-forming material layer (F 2 ) is brought into contact with the substrate. (3) The heating roller is moved over the transfer film laid on the substrate, and the transfer film is bonded by heating and pressing. 23 312/Invention Manual (Supplement)/93-05/93103730 1273624 (4) The base film (F 1 ) is peeled off, and the film-forming material layer (F 2 ) fixed to the substrate by heat and pressure bonding is removed from the substrate. Film (F 1). The film-forming material layer (F 2 ) on the base film (F 1 ) is transferred to the substrate by the aforementioned operation. The transfer conditions include a heating roller surface temperature of 6 0 - 1 2 0 ° C, a heating report pressure of 1 - 5 kg / cm 2 and a heating report moving speed of 0. 2 - 1 0 . 0 m / min. This operation (transfer step) can be performed using a laminator. The substrate is preheated and the preheating temperature is set to, for example, 4 〇 - 1 0 0 °C. The film-forming material layer (F 2 ) transferred to the surface of the substrate is converted into a sintered inorganic material (dielectric layer) by baking. The baking method is, for example, a method of placing a substrate on which the film-forming material layer (F 2 ) has been transferred in a high-temperature atmosphere. Thus, the organic material (e.g., binder resin, residual solvent, specific compound, and various additives) contained in the film-forming material layer (F 2 ) is decomposed and removed, and the inorganic particles are melted and sintered. The sintering temperature varies depending on the melting point of the substrate, the constituent elements of the film-forming material layer, and the like, but the sintering temperature is, for example, 300 to 800 ° C, and preferably 4 0 0 to 6 2 0 °C. PDP Process (2) (Formation of Component by Photoresist Method) The PDP process (2) of the present invention comprises the steps of: transferring a film-forming material layer constituting the transfer film of the present invention to a substrate; forming a photoresist film thereon a film on the film-forming material after the transfer; exposing the photoresist film to form a latent image of the photoresist pattern; developing the photoresist film to form a photoresist pattern; etching the film-forming material layer to form a pattern corresponding to the photoresist pattern a layer; and baking the pattern layer to form a constituent element selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix. Further, the process (2) of the present invention comprises the steps of: forming a photoresist film and a film-forming property obtained from the composition containing the inorganic particles of the present invention 24 312 / invention specification (supplement) / 93-05/93103730 1273624 a laminated film of a material layer on a base film; transferring the laminated film formed on the base film to the surface of the substrate; exposing the photoresist film constituting the laminated film to form a latent image of the photoresist pattern; developing the photoresist film Forming a photoresist pattern; etching the film-forming material layer to form a pattern layer corresponding to the photoresist pattern; and baking the pattern layer to form a layer selected from the group consisting of barrier ribs, electrodes, resistors, dielectric layers, phosphors, and color filters The components in the light sheet and the black matrix. A method of forming a "barrier rib" as a component of a PDP on the back surface of a substrate will be described later. The method comprises (1) a step of transferring a film-forming material layer, (2) a step of forming a photoresist film, (3) a step of exposing the photoresist film, (4) a step of developing a photoresist film, and (5) an etch film formation property. The material layer step, and (6) the step of baking the barrier rib pattern, thereby forming barrier ribs on the surface of the substrate. 3 and 4 are each a schematic cross-sectional view showing a series of steps of generating barrier ribs. In Figs. 3 and 4, 1 1 denotes a glass substrate on which plasma is calibrated at equal intervals, and a dielectric layer 13 is formed on the surface of the glass substrate 11 so as to cover the substrate 12. In the present invention, specific examples of the "transfer film-forming material layer to the substrate" include not only a specific example of transferring the film-forming material layer to the surface of the glass substrate 11, but also a transfer film-forming material layer to dielectric. Specific examples of the surface of layer 13. (1) Transfer film-forming material layer step: An example of the step of transferring the film-forming material layer is shown as follows. As shown in FIG. 3B, after the cover film (not shown) of the transfer film is peeled off, the transfer film 20 is laid on the surface of the dielectric layer 13 to make the surface of the film-forming material layer 2 1 contact. The surface of the electric layer 13 , the transfer film 20 is heated and pressure bonded by a heating roller or the like, and the base film 2 2 is subsequently peeled off by the film-forming material layer 25 312 / invention specification (supplement) / 93-05 /93103730 1273624 2 1 removed. Thus, as shown in Fig. 3C, the film-forming material layer 21 is transferred and adhered to the surface of the dielectric layer 13. The transfer conditions include a heating roll surface temperature of 80 - 1 40 ° C, a heating roll pressure of 1 - 5 kg / cm 2 and a heating roll moving speed of 0.1 - 1 0 . 0 m / min. The glass substrate 11 can be preheated, and the preheating temperature can be set to, for example, 40 - 1 0 0 °C. (2) Step of producing a photoresist film: In this step, as shown in Fig. 3D, a photoresist film 31 is formed on the surface of the transferred film-forming material layer 2 1 . The photoresist constituting the photoresist film 31 may be any of a positive photoresist and a negative photoresist. The photoresist film 31 can be formed by coating a photoresist by a plurality of methods including screen printing, roll coating, spin coating, and cast coating, and drying the coated film. The drying temperature of the coated film is usually from about 60 to 130 °C. The photoresist film formed on the base film can be formed by transferring onto the surface of the film-forming material layer 21. According to this formation method, not only the number of forming steps of the photoresist film can be reduced, but also the obtained photoresist also has excellent thickness uniformity. Thus, the development of the photoresist film and the etching of the film-forming material layer can be performed in unison, so that the height and shape of the barrier ribs formed are uniform. The photoresist film 3 1 is usually from 0.1 to 40 μm thick and preferably from 0.5 to 20 μm. (3) Photoresist film exposure step In this step, as shown in FIG. 3E, the surface of the photoresist film 31 formed on the film-forming material layer 2 1 is selectively irradiated with radiation such as ultraviolet light through an exposure mask ( Exposure) to form a photoresist pattern latent image. In the figure, Μ Α and Μ Β respectively indicate a light transmitting portion and a light blocking portion which are formed by the exposure cover. The ultraviolet light irradiation device is not particularly limited, but may be an ultraviolet light irradiation device for lithography, and a semiconductor 312/invention specification (supplement) for manufacturing semiconductors and liquid crystal display devices/93-05/93103730 1273624 Exposure device. When the photoresist film is formed by transfer, it is preferred to carry out the exposure step in a state where the base film overlying the photoresist film is not peeled off. (4) Photoresist film development step In this step, the exposed photoresist film is developed to form a photoresist pattern (latent image). Regarding development conditions, types of developing solutions, formulations and concentrations, development time, development temperature, development methods (for example, immersion method, rocking method, spray method, spray method, and pulverization method), developing devices, etc. may be based on the photoresist film The category of 3 1 is appropriately selected. The photoresist pattern 35 (corresponding to the pattern of the exposure mask 由) composed of the remaining portion of the photoresist 35 A and the photoresist removing portion 3 5 B is formed by the development step, as shown in Fig. 4F. The photoresist pattern 35 is used as an etching mask for the subsequent step (etching step), and the constituent material (photohardening photoresist) of the remaining portion of the photoresist must have a more etching material than the constituent material of the thin film-forming material layer 2 1 . Low dissolution rate. (5) Film-forming material layer etching step: In this step, the film-forming material layer is etched to form a barrier rib pattern layer corresponding to the photoresist pattern. In other words, as shown in Fig. 4G, the portion of the photoresist-removing portion 35 corresponding to the photoresist-removing material 35 of the film-forming material layer 2 is dissolved in the etching solution and selectively removed. Figure 4G shows the state during etching. When the etch is further continued, as shown in Fig. 4, a predetermined portion of the film-forming material layer 21 is completely removed, thereby exposing the dielectric layer 13. Thus, a barrier rib pattern layer 25 is formed by the remaining portion of the material layer 2 5 Α and the material layer removing portion 2 5 Β 27 312 / invention specification (supplement) / 93-05 / 93103730 1273624. The etching conditions, the type of the etching solution, the formulation and concentration, the processing time, the processing temperature, the treatment method (for example, immersion method, rocking method, spray method, spray method, and pulverization method), processing device, etc. may be based on film formation property. The type of the material layer 2 1 and the like are appropriately selected. The photoresist film 3 1 type and the film-forming material layer 2 1 are selected such that the same solution of the developing solution used in the development step is used as an etching solution. Thus, the developing step and the etching step can be continuously performed, and the manufacturing step can be reduced. Improve manufacturing efficiency. Preferably, the remaining portion of the photoresist constituting the photoresist pattern 35 is gradually dissolved by etching, and is completely removed when the barrier rib pattern layer 25 is formed (when etching is completed). Even if the remaining part or all of the remaining portion of the photoresist is 3 5 A after the engraving, the remaining portion of the photoresist is removed in the subsequent drying step. (6) Barrier rib pattern layer baking step: In this step, the barrier ribs are formed by baking the barrier rib pattern layer 25. The organic material of the remaining portion of the material layer 2 5 A is burned off to form a barrier rib. As shown in FIG. 4I, the panel material 50 having the barrier ribs 40 formed on the surface of the dielectric layer 13 is formed by the barrier ribs 40 (the barrier ribs derived from the material layer removing portions 2 5 B). It is used as a plasma working space. The drying temperature shall be the temperature at which the organic matter of the remaining portion of the material layer of 25 A is burned off, and is usually from 4 0 0 to 60 ° C. The drying time is usually 1 0 - 90 minutes. P D P Production Method (3) (Best Specific Example Using Photoresist Method) The P D P production method (3) of the present invention is not limited to the methods shown in Figs. 3 and 4. Other preferred methods of forming the P D P constituent element (P D P production method (3)) are, for example, 28 312/invention specification (supplement)/93-05/93103730 1273624, including the formation methods of the following steps (1) to (3). (1) After the photoresist film is formed on the base film, the composition containing the inorganic particles of the present invention is coated on the photoresist film, and dried to be laminated to form a film-forming material layer. When a photoresist film and a film-forming material layer are formed, a roll coater or the like can be used, so that a laminated film having an excellent uniform thickness can be formed on the base film. (2) The laminated film composed of the photoresist film and the film-forming material layer on the base film is transferred to the substrate. The transfer conditions are the same as described above in the "film-forming material layer transfer step". (3) The same operations as described in the "Photoresist film exposure step", "Photoresist film development step", "Thin film-forming material layer etching step" and "Block rib pattern layer baking step" described above are carried out. During the operation, as described above, the development solution of the preferred photoresist film is the same as the etching solution of the film-forming material layer, and the "photoresist film development step" and the "film-forming material layer etching step" are continuously performed. According to the above method, since the film-forming material layer and the photoresist film are transferred onto the entire substrate, the manufacturing efficiency can be further improved by the simplification step. PDP Process (4) (Formation of Component Using Radiation Sensitive Transfer Film) The PDP process (4) of the present invention comprises the steps of: transferring a film-forming material layer constituting the radiation-sensitive transfer film of the present invention to a substrate; Exposing the film-forming material layer to form a pattern latent image; developing the film-forming material layer to form a pattern layer; and baking the pattern layer to form a layer selected from the group consisting of barrier ribs, electrodes, resistors, dielectric layers, and phosphors , color filters and components in the black matrix. In the method, the barrier rib forming method is taken as an example, and after the "film formation 29 312 / invention specification (supplement) / 93-05/93103730 1273624 material layer transfer step", the pattern layer is based on the "barrier film" It is formed under the conditions of the exposure step and the "photoresist film development step". Subsequently, the barrier ribs are formed on the surface of the substrate by a "blocking rib pattern baking step". The method of forming the "barrier rib" as the constituent element of the P D P has been explained in the explanation of the individual steps of the P D P method (1) to (4). According to this method, electrodes, resistors, dielectric layers, phosphors, color filters, and black matrices constituting the PDP can be formed. The details of the present invention will be described with reference to the following examples, but it should be understood that the invention is not limited thereto. In the examples and comparative examples, all "parts" are "parts by weight". (Example) (1) Preparation of a glass paste composition (containing an inorganic particle composition) The composition of the present invention having a viscosity of 3,400 ρ (measured by a B-type viscosity meter at 30 rpm) was borrowed Prepared by method: using a dispersing mixer to knead 100 parts of P b 0 - B 2 0 3 - S i 0 2 based mixture (softening point 5000 ° C) (the composition of which contains 70% by weight of oxidation Lead, 10% by weight of boron oxide and 20% by weight of cerium oxide), 15 parts of butyl methacrylate / 2 - ethylhexyl methacrylate / hydroxypropyl methacrylate copolymer (weight ratio · · 3 0 / 6 0 / 1 0, weight average molecular weight: 1 5 0, 0 0 0 ) as a binder resin, 5 parts of diglyceryl oleate as a specific compound, 8.7 parts of propylene glycol monoterpene ether as a solvent and 1 3 Prepared by adding 1 part of ethyl 3-ethoxypropionate. (2) Manufacture and evaluation of transfer film (flexibility and handling properties): The composition of the present invention prepared as described in (1) above was coated with polyethylene terephthalate (Ρ ET ) using a knife coater. Coating formed on the base film previously subjected to release treatment (width: 400 mm, length: 30 m, thickness: 38 μm) 30 312 / invention specification (supplement) / 93-05/93103730 1273624 The film was dried at 80 ° C for 5 minutes to remove the solvent. Thus, a film of a 50 μm thick film-forming material was formed on the base film. A cover film made of PET previously subjected to release treatment (width: 400 mm, length: 30 m, thickness: 38 μm) is adhered to a film-forming material layer to produce a transfer film of the present invention, having a pattern 2 construction shown. The resulting transfer film has flexibility and is easily wound up. Further, even if the transfer film is bent, the bending does not cause cracks (bending and cracking) on the surface of the film-forming material layer, and the film-forming material layer has excellent flexibility. The cover film is peeled off by the transfer film, and the transfer film (a laminate composed of the base film and the film-forming material layer) is spread on the glass substrate without pressing, so that the surface of the film-forming material layer contacts the surface of the glass substrate Then, the transfer film is peeled off from the surface of the glass substrate. As a result, the film-forming material layer showed appropriate adhesion to the glass substrate, and the transfer film could be peeled off without causing agglomeration of the film-forming material layer. Therefore, the transfer film has good handling properties. (3) Transfer of the film-forming material layer to the cover film After the transfer film obtained by the above (2) is peeled off, the transfer film (a laminate composed of the base film and the film-forming material layer) is spread on 2 On the glass substrate of the panel, the surface of the film-forming material layer is brought into contact with the surface of the glass substrate (the busbar electrode fixing surface), and is heated and bonded under heating using a heating roller. The pressure bonding conditions include a heating roller surface temperature of 90 ° C, a roller pressure of 2 kg/cm 2 , and a heating roller moving speed of 0,6 m/min. After the pressure bonding is completed by heating, the base film is peeled off, and the film-forming material layer which is fixed (heat-adhesively fixed) to the surface of the glass substrate is removed, whereby the transfer of the film-forming material layer is completed. In the present transfer step, when the base film is peeled off, the film formation property of the film layer is not caused, and the film strength of the film layer is high enough. Further, the film-forming material layer after transfer has good adhesion to the surface of the glass substrate. (4) Baking of the film-forming material layer (generation of the dielectric layer): The glass substrate on which the film-forming material layer has been transferred as shown in (3) is placed in the kiln, by raising the temperature inside the kiln to Bake dry at 6 2 ° C to form a non-colored transparent dielectric layer made of sintered glass material on the surface of the glass substrate. The thickness of the dielectric layer (average thickness and tolerance) was determined to be in the range of 30 μm ± 0.4 μm. Such a dielectric layer has excellent thickness uniformity. The surface of the obtained dielectric layer was subjected to three-dimensional measurement using a non-contact thickness gauge (N Η - 3, manufactured by R y 〇k 〇sha Co., Ltd.), and the surface roughness was measured according to JIS standard (B 0 6 0 1 ). Degree (R a, R y, R z ). As a result, the dielectric layer has R a = 0.08 μm, R y is 0.25 μm and R z = 0 , 28 μm, so that it has excellent surface flatness. Further, the light transmittance (measurement wavelength ··500 nm) of the dielectric layer thus obtained was measured and found to be 93%. This confirms that the dielectric layer has good transparency. (Comparative Example) A composition having a viscosity of 3,0 0 cp (measured using a B-type viscometer at 30 rpm) was prepared in the same manner as in the examples, except that the ratio of the binder resin was changed to 17 parts, and 4 was used. A portion of azelaic acid-di-2-ethylhexyl ester is substituted for this particular compound. Using the obtained composition, the transfer film was produced and evaluated in the same manner as in the examples. As a result, the transfer film has excellent flexibility and handling properties. However, the dielectric layer was fabricated in the same manner as in the examples, and the surface roughness (R a, R y, R z ) was measured. As a result, the dielectric layer has R a Ο . 65 μm, R y = 2.51 μm and R z 1.7 μm, so the surface flatness is inferior. 32 312/Invention Description (Supplement)/93-05/93103730 1273624 The composition of the present invention can obtain the following effects. (1) It is suitable to form P D P constituent elements (e.g., barrier ribs, electrodes, resistors, dielectric layers, phosphors, color filters, and black matrices) having excellent surface flatness. (2) It is suitable to form a sintered frit having a high light transmittance (e.g., a dielectric layer or barrier rib constituting P D P). (3) A transfer film having excellent flexibility in terms of a film-forming material layer can be produced. (4) A transfer film having excellent transfer ability (heat-bonding to a substrate) in terms of a film-forming material layer can be produced. The transfer film of the present invention can attain the following advantages. (1) It is effective to form a constituent element (particularly a dielectric layer) having excellent surface roughness of P D P . (2) The film-forming material layer is excellent in flexibility, and the surface of the film-forming material layer does not contain a crack (crack). (3) Excellent softness and easy to take up. (4) Adhesiveness and handling properties are good for the film-forming material layer. (5) It is excellent in transferability (heat bonding to the substrate) in terms of the film-forming material layer. The production method of the present invention can obtain the following effects. (1) Effective formation of P D P constituent elements (e.g., barrier ribs, electrodes, resistors, dielectric layers, phosphors, color filters, and black matrix) having excellent surface flatness. (2) A PDP having a high positional accuracy of constituent elements can be effectively formed. (3) It is effective to form a dielectric layer having a large thickness. 33 312/Invention Manual (Supplement)/93-05/93103730 1273624 (4) The dielectric layer required for a large-sized panel can be effectively formed. (5) P D P can be effectively formed which is provided with a dielectric layer having excellent thickness uniformity and surface flatness. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the cross-sectional shape of an AC type plasma display panel. 2A is a schematic cross-sectional view showing a transfer film of the present invention; and FIG. 2B is a cross-sectional view showing a layered composition of the transfer film. 3A to E are schematic cross-sectional views showing the steps (transfer step, photoresist film forming step, and exposure step) for forming barrier ribs in the process of the present invention. Fig. 4 F to I are schematic cross-sectional views showing the steps (developing step, etching step, and baking step) for forming barrier ribs in the process of the present invention. (Description of component symbols) 1 Glass substrate 2 Glass substrate 3 Barrier rib 4 Transparent electrode 5 Bus bar electrode 6 Addressing electrode 7 Fluorescent material 8 Dielectric layer 9 Dielectric layer 10 Protective layer 11 Glass substrate 12 Electrode 13 Dielectric layer 34 312 /Invention Manual (Supplement)/93-05/93103730 1273624 20 Transfer film 2 1 Film-forming material layer 22 Base film 25 Barrier rib pattern layer 2 5 A Material layer remaining portion 25B Material layer removing portion 3 1 Photoresist film 35 photoresist pattern 3 5 A photoresist remaining portion 35B photoresist removal portion 4 0 barrier rib 5 0 panel material F1 base film F 2 film-forming material layer F3 cover film 曝光 exposure cover Α 透光 light transmitting portion MB light shielding portion 35 312 /Invention manual (supplement)/93-05/93103730

Claims (1)

t 94. 12. 2 6 替換本 拾、申請專利範圍: 1 . 一種含有無機粒子之組成物,包含: (A ) 1 0 0份重量比之無機粒子; (B ) 5至8 0份重量比之丙烯酸系樹脂;以及 (C)O.l至20份重量比之下式(I)表示之化合物: OH I WO+CHrCH-CIVO-VH (I)t 94. 12. 2 6 Replacement, patent application scope: 1. A composition containing inorganic particles, comprising: (A) 1000 parts by weight of inorganic particles; (B) 5 to 80 parts by weight Acrylic resin; and (C) from 0 to 20 parts by weight of the compound represented by the formula (I): OH I WO+CHrCH-CIVO-VH (I) 其中R1表示- C0-A表示之基團,其中A表示含9-18個碳 原子之烷基或含9-18個碳原子之烯基,以及η為2-20之 整數。 2。 如申請專利範圍第1項之含有無機粒子之組成物,進 一步包含(D)—輕射敏感成分。 3. 如申請專利範圍第1項之含有無機粒子之組成物,其 中,由式(I )表示之化合物(C )係至少一選自由一月桂酸雙 甘油自旨、一硬脂酸雙甘油醋、一油酸雙甘油酯及一辛酸雙 甘油S旨組成之族群。Wherein R1 represents a group represented by -C0-A, wherein A represents an alkyl group having 9 to 18 carbon atoms or an alkenyl group having 9 to 18 carbon atoms, and η is an integer of 2 to 20. 2. The composition containing inorganic particles according to item 1 of the patent application further contains (D) - a light-sensitive component. 3. The composition containing inorganic particles according to claim 1, wherein the compound (C) represented by the formula (I) is at least one selected from the group consisting of monolaurin monoglyceride and monostearic acid diglycerin. A group consisting of monooleic acid diglyceride and monooctanoic acid diglycerol. 4 . 一種轉印膜,包含一薄膜生成性材料層,其係由申請 專利範圍第1項之含有無機粒子之組成物獲得。 5 . —種轉印膜,包含一薄膜生成性材料層,其係由申請 專利範圍第2項之含有無機粒子之組成物獲得。 6 . —種轉印膜,包含一種光阻膜與薄膜生成性材料層之 層合物,該薄膜生成性材料層係由申請專利範圍第1項之 含有無機粒子之組成物獲得。 7. —種電漿顯示面板之製造方法,該方法包含下列步 驟:轉印一由申請專利範圍第1項之含有無機粒子之組成 36 326\總檔\93\93103730\93103730(替換)-1 1273624 物獲得之薄膜生成性材料層至基板表面,以及烤乾經轉印 之薄膜生成性材料層而形成一介電層於該基板上。 8 . —種電漿顯示面板之製造方法,該方法包含下列步 驟:轉印由申請專利範圍第1項之含有無機粒子之組成物 獲得之薄膜生成性材料層轉印至基板表面;形成光阻膜於 轉印後之薄膜生成性材料層上;曝光該光阻膜而形成光阻 圖案之潛像;顯影光阻膜而形成光阻圖案;蝕刻薄膜生成 性材料層而形成對應於光阻圖案之圖案層;以及烤乾該圖 案層而形成一種選自阻擋肋、電極、電阻器、介電層、磷 光體、彩色濾光片及黑矩陣中之組成元件。 9 , 一種電漿顯示面板之製造方法,該方法包含下列步 驟:形成光阻膜及由申請專利範圍第1項之含有無機粒子 之組成物獲得之薄膜生成性材料層之積層膜於一基底膜 上;轉印該形成於基底膜上之積層膜至基板表面;曝光組 成該積層膜之光阻膜而形成光阻圖案之潛像;顯影該光阻 膜而形成光阻圖案;蝕刻薄膜生成性材料層而形成對應於 光阻圖案之圖案層;以及烤乾該圖案層而形成一種選自阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣中之組成元件。 1 0 . —種電漿顯示面板之製造方法,該方法包含下列步 驟:轉印由申請專利範圍第2項之含有無機粒子之組成物 獲得之薄膜生成性材料層至基板表面上;曝光該薄膜生成 性材料層而形成圖案潛像;顯影該薄膜生成性材料層而形 成圖案層;以及烤乾該圖案層而形成一種選自阻擋肋、電 極、電阻器、介電層、磷光體、彩色濾光片及黑矩陣中之 37 326\總檔\93\93103730\93103730(替換 Η 1273624 組成元件。A transfer film comprising a film-forming material layer obtained by the composition containing inorganic particles of the first aspect of the patent application. A transfer film comprising a film-forming material layer obtained by the composition containing inorganic particles of the second aspect of the patent application. A transfer film comprising a laminate of a photoresist film and a film-forming material layer obtained by the composition containing inorganic particles of the first aspect of the patent application. 7. A method of manufacturing a plasma display panel, the method comprising the steps of: transferring a composition containing inorganic particles according to item 1 of the patent application scope 36 326\total file\93\93103730\93103730 (replacement)-1 1273624 The film-forming material layer obtained by the object is applied to the surface of the substrate, and the transferred film-forming material layer is baked to form a dielectric layer on the substrate. 8. A method of manufacturing a plasma display panel, the method comprising the steps of: transferring a film-forming material layer obtained by the composition containing inorganic particles of claim 1 of the patent application to a surface of a substrate; forming a photoresist The film is formed on the film-forming material layer after the transfer; the photoresist film is exposed to form a latent image of the photoresist pattern; the photoresist film is developed to form a photoresist pattern; and the film-forming material layer is etched to form a photoresist pattern corresponding to the photoresist pattern a pattern layer; and baking the pattern layer to form a constituent element selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix. 9. A method of manufacturing a plasma display panel, the method comprising the steps of: forming a photoresist film and laminating a film of a film-forming material layer obtained from the composition containing inorganic particles of claim 1 in a base film Transferring the laminated film formed on the base film to the surface of the substrate; exposing the photoresist film constituting the laminated film to form a latent image of the photoresist pattern; developing the photoresist film to form a photoresist pattern; etching film formation property a material layer to form a pattern layer corresponding to the photoresist pattern; and baking the pattern layer to form a component selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix . A manufacturing method of a plasma display panel, comprising the steps of: transferring a film-forming material layer obtained from the composition containing inorganic particles of claim 2 to the surface of the substrate; and exposing the film Forming a material layer to form a pattern latent image; developing the film-forming material layer to form a pattern layer; and baking the pattern layer to form a layer selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, and a color filter In the light film and black matrix, 37 326\total file\93\93103730\93103730 (replace Η 1273624 to form components. 326\總檔\93\93103730\93103730(替換)-1 38326\Total file\93\93103730\93103730 (replace)-1 38
TW093103730A 2003-02-28 2004-02-17 Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process TWI273624B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003052986 2003-02-28

Publications (2)

Publication Number Publication Date
TW200423177A TW200423177A (en) 2004-11-01
TWI273624B true TWI273624B (en) 2007-02-11

Family

ID=32767829

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093103730A TWI273624B (en) 2003-02-28 2004-02-17 Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process

Country Status (4)

Country Link
EP (1) EP1452558A1 (en)
KR (1) KR20040077526A (en)
CN (1) CN1320584C (en)
TW (1) TWI273624B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005264138A (en) * 2004-02-20 2005-09-29 Jsr Corp Glass powder-containing resin composition, transfer film and method of manufacturing plasma display panel using the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621829A (en) * 1979-08-01 1981-02-28 Mitsubishi Chem Ind Ltd Manufacture of polyethylene film
JPS62100554A (en) * 1985-10-29 1987-05-11 Toshiba Silicone Co Ltd Silicone emulsion composition
JP3229641B2 (en) * 1992-01-28 2001-11-19 大日本印刷株式会社 Method for forming phosphor screen of plasma display panel and phosphor slurry for plasma display panel used therefor
EP0758641B1 (en) * 1995-08-11 2000-08-30 Daicel Chemical Industries, Ltd. A fatty acid esters composition of a polyglycerine, a process for the preparation thereof, a process for the preparation of a highly-purified fatty acid esters composition of a polyglycerine, a highly-purified fatty acid esters composition of a polyglycerine, an additive for food-stuffs, a resin composition, and a composition for cosmetics or detergents
EP1086985B1 (en) * 1997-09-02 2003-10-15 Ajinomoto Co., Inc. Thermoplastic resin composition, agent for improving thermal aging resistance of thermoplastic resin, and resin molded article obtained therefrom
JP2000053444A (en) * 1998-08-07 2000-02-22 Jsr Corp Glass paste composition, transfer film and plasma display panel
JP2000109341A (en) * 1998-10-01 2000-04-18 Jsr Corp Composition containing inorganic particles, transfer film and production of plasma display panel
JP4075277B2 (en) * 2000-03-22 2008-04-16 Jsr株式会社 Inorganic particle-containing photosensitive composition and photosensitive film

Also Published As

Publication number Publication date
TW200423177A (en) 2004-11-01
KR20040077526A (en) 2004-09-04
EP1452558A1 (en) 2004-09-01
CN1320584C (en) 2007-06-06
CN1530998A (en) 2004-09-22

Similar Documents

Publication Publication Date Title
KR100444915B1 (en) Inorganic Particles-Containing Compositions, Transfer Films Using the Same and Processes for Preparing Plasma Display Panels
KR100852295B1 (en) Inorganic Particle-containing Composition, Transfer Film and Plasma Display Panel Production Process
JP2006219660A (en) Inorganic powder-containing resin composition, transfer film, and method for producing plasma display panel
TWI273624B (en) Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process
KR20060049024A (en) Inorganic powder-containing resin composition, transfer film, and process for producing plasma display panel
JP2006219659A (en) Inorganic-powder-containing resin composition, transfer film, and method for producing plasma display panel
JP2006228506A (en) Manufacturing method of resin composition containing inorganic powder, transfer film, and plasma display panel
JP2006233031A (en) Composition containing inorganic particle, transfer film and manufacturing method of plasma display panel
JP2007056117A (en) Resin composition comprising inorganic particle, transfer film and method for producing plasma display panel
JP2000169764A (en) Glass paste composition, transfer film, and manufacture of plasma display panel using the composition
JP4103776B2 (en) Inorganic particle-containing composition, transfer film, and method for producing plasma display panel
JP2007009190A (en) Resin composition containing inorganic powder, transfer film and manufacturing process of plasma display panel
JP2008077069A (en) Inorganic powder-containing resin composition, transfer film and method for manufacturing flat panel display
JP4078686B2 (en) Transfer film for plasma display panel dielectric layer formation
TWI248425B (en) Inorganic particle-containing composition for plasma display panel, transfer film, and plasma display panel production process
JP2008274221A (en) Inorganic powder-containing resin composition, transfer film and method for producing flat panel display
TWI300234B (en)
JP2008074681A (en) Inorganic powder containing resin composition, transcription film and manufacturing method of flat panel display panel
JP2008034153A (en) Inorganic powder contained resin composition, transfer film, and manufacturing method of flat panel display
JP2007137939A (en) Inorganic powdery material-containing resin composition, transfer film, method for molding panel member and method for producing plasma displaying panel
JP2003100205A (en) Manufacturing method of plasma display panel and transfer film
WO2008072582A1 (en) Inorganic-particle-containing resin composition, transfer film, and process for producing flat panel display member
JP2003071962A (en) Transfer film
JP2006139989A (en) Manufacturing method of back plate for plasma display panel
JP2003051250A (en) Manufacturing method of plasma display panel and transfer film

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees