TW200423177A - Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process - Google Patents

Inorganic particle-containing composition, transfer film comprising the same and plasma display panel production process Download PDF

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TW200423177A
TW200423177A TW093103730A TW93103730A TW200423177A TW 200423177 A TW200423177 A TW 200423177A TW 093103730 A TW093103730 A TW 093103730A TW 93103730 A TW93103730 A TW 93103730A TW 200423177 A TW200423177 A TW 200423177A
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film
material layer
thin film
photoresist
inorganic particles
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TW093103730A
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Chinese (zh)
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TWI273624B (en
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Seiji Kawagishi
Katsumi Itoh
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Jsr Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61GTRANSPORT, PERSONAL CONVEYANCES, OR ACCOMMODATION SPECIALLY ADAPTED FOR PATIENTS OR DISABLED PERSONS; OPERATING TABLES OR CHAIRS; CHAIRS FOR DENTISTRY; FUNERAL DEVICES
    • A61G17/00Coffins; Funeral wrappings; Funeral urns
    • A61G17/04Fittings for coffins
    • A61G17/045Rack for flowers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61GTRANSPORT, PERSONAL CONVEYANCES, OR ACCOMMODATION SPECIALLY ADAPTED FOR PATIENTS OR DISABLED PERSONS; OPERATING TABLES OR CHAIRS; CHAIRS FOR DENTISTRY; FUNERAL DEVICES
    • A61G17/00Coffins; Funeral wrappings; Funeral urns
    • A61G17/007Coffins; Funeral wrappings; Funeral urns characterised by the construction material used, e.g. biodegradable material; Use of several materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2217/00Gas-filled discharge tubes
    • H01J2217/38Cold-cathode tubes
    • H01J2217/49Display panels, e.g. not making use of alternating current

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

An inorganic particle-containing composition comprising: (A) inorganic particles; (B) a binder resin; and (C) a compound represented by the following formula (I), wherein R1 represents a group represented by -CO-A, wherein A represents an alkyl group having 5-20 carbon atoms or an alchemy group having 5-20 carbon atoms, and n is an integer of 2-20. A transfer film and a plasma display panel production process using the composition are also described.

Description

200423177 玖、發明說明: 【發明所屬之技術領域】 本發明係有關一種含有無機粒子之組成物,一種包含該 組成物之轉印膜以及一種電漿顯示面板製造方法。 【先前技術】 近年來電漿顯示器作為平板狀螢光顯示器係受到許多 注意。圖1顯示交流型電漿顯示面板(後文為求簡便稱之為 「P D P」)截面形狀之示意圖。該圖中,1及2表示彼此相 對之玻璃基板,及3表示阻擋肋。單元(c e 1 1 )係藉玻璃基 板1、玻璃基板2及阻擋肋3所分隔及成形。4表示固定於 玻璃基板1之透明電極;5表示形成於透明電極4供降低 透明電極電阻之匯流排電極;6表示固定於玻璃基板2之 定址電極;7表示保有於單元内部之螢光材料;8表示形成 於玻璃基板1表面之介電層,因而覆蓋透明電極4及匯流 排電極5; 9表示形成於玻璃基板2表面因而覆蓋定址電極 6之介電層;以及1 0表示例如由氧化鎂製成的保護膜。於 彩色PDP,為了獲得高度對比度影像,彩色濾光片(紅、綠 或藍)或黑矩陣可設置於玻璃基板與介電層間。 至於製造此種P D P介電材料、阻擋肋、電極、螢先材料、 彩色濾光片或黑條紋(黑矩陣)之方法,適合採用微影術方 法,涉及形成光敏性含有無機粒子之樹脂層於基板上,經 由光罩以紫外光照射此薄膜,顯影所得薄膜而保有圖案於 基板上,以烤乾該圖案。 前述微影術方法理論上之圖案準確度絕佳,特別使用轉 印膜之使用方法絕佳,可形成有絕佳厚度均勻度及表面均 5 312/發明說明書(補件)/93-05/93103730 200423177 句度之圖案。但經由塗覆含有丙烯酸樹脂之含有無機粒子 之組成物於基底膜上所形成之薄膜生成性材料層不具有足 夠撓性,轉印能力也不足。 為了解決此等問題,進行研究將增塑劑、分散劑等包含 於薄膜生成性材料層。但此等無機材料於烤乾而造成著色 等之後可能留在圖案内。特別當形成燒結玻璃材料例如介 電層時,有所得燒結玻璃材料之透光比容易降低之問題。 於前述情況下,完成本發明。 【發明内容】 本發明之第一目的係提供一種含有無機粒子之組成 物,其適合提供具有絕佳表面平坦度之P D P組成元件(例如 阻擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及 黑矩陣)。 本發明之第二目的係提供一種含有無機粒子之組成 物,其可形成具有高度透光比之燒結玻璃材料(例如組成 PDP之介電層)。 本發明之第三目的係提供一種含有無機粒子之組成 物,其可製造具有薄膜生成性材料層而言有絕佳撓性之轉 印膜。 本發明之第四目的係提供一種含有無機粒子之組成 物,其可製造具有薄膜生成性材料層而言有絕佳轉印性(熱 黏合至基板)。 本發明之第五目的係提供一種轉印膜,其可有效形成具 有絕佳表面平坦度之PDP之組成元件。 本發明之第六目的係提供一種含有無機粒子之組成 6 312/發明說明補件)/93-05/93103730 200423177 物,其就薄膜生成性材料層而言具有絕佳撓性。 本發明之第七目的係提供一種含有無機粒子之組成 物,其就薄膜生成性材料層而言具有絕佳轉印性(熱黏合至 基板)。 本發明之第八目的係提供一種PDP製造方法,其可有效 製成具有絕佳表面平坦度之PDP之組成元件。 本發明之第九目的係提供一種PDP製造方法,其可有效 形成就組成元件而言有高度位置準確度之PDP。 本發明之第十目的係提供一種PDP製造方法,其可有效 形成一種具有大厚度之介電層。 本發明之第十一目的係提供一種P D P製造方法,其可有 效形成大尺寸面板需要。的介電層。 本發明之第十二目的係提供一種製造PDP之方法,該PDP 具有絕佳厚度均勻度之介電層。 本發明之第十三目的係提供一種製造P D P之方法,該P D P 具有絕佳表面平坦度之介電層。 本發明之含有無機粒子之組成物包含(A )無機粒子;(B ) 一種黏結劑樹脂;以及(C ) 一種下式(I )表示之化合物(此種 化合物於後文稱作為「特定化合物」):200423177 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a composition containing inorganic particles, a transfer film containing the composition, and a method for manufacturing a plasma display panel. [Prior art] In recent years, plasma displays have attracted much attention as flat-panel fluorescent displays. Fig. 1 is a schematic diagram showing a cross-sectional shape of an AC plasma display panel (hereinafter referred to as "P D P" for simplicity). In the figure, 1 and 2 indicate glass substrates facing each other, and 3 indicates barrier ribs. The unit (c e 1 1) is separated and formed by a glass substrate 1, a glass substrate 2 and a barrier rib 3. 4 is a transparent electrode fixed to the glass substrate 1; 5 is a bus electrode formed on the transparent electrode 4 for reducing the resistance of the transparent electrode; 6 is an addressing electrode fixed to the glass substrate 2; 7 is a fluorescent material held inside the unit; 8 indicates a dielectric layer formed on the surface of the glass substrate 1 and thus covers the transparent electrode 4 and the bus electrode 5; 9 indicates a dielectric layer formed on the surface of the glass substrate 2 and thus covers the address electrode 6; and 10 indicates, for example, magnesium oxide Made of protective film. In color PDP, in order to obtain a high contrast image, a color filter (red, green or blue) or a black matrix can be placed between the glass substrate and the dielectric layer. As for the method of manufacturing such a PDP dielectric material, barrier rib, electrode, fluorescent material, color filter or black stripe (black matrix), a lithography method is suitable, which involves forming a photosensitive resin layer containing inorganic particles on On the substrate, the film is irradiated with ultraviolet light through a photomask, and the obtained film is developed to retain a pattern on the substrate to dry the pattern. The aforementioned lithography method has excellent pattern accuracy in theory, especially using a transfer film, which can be formed with excellent thickness uniformity and surface uniformity 5 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 Sentence pattern. However, a thin film-forming material layer formed by coating a composition containing an inorganic resin-containing inorganic particle on a base film does not have sufficient flexibility and the transfer ability is insufficient. In order to solve these problems, studies have been made to include plasticizers, dispersants, and the like in the film-forming material layer. However, these inorganic materials may remain in the pattern after being dried to cause coloring or the like. In particular, when a sintered glass material such as a dielectric layer is formed, there is a problem that the transmittance of the obtained sintered glass material is liable to decrease. Under the foregoing circumstances, the present invention has been completed. [Summary of the Invention] A first object of the present invention is to provide a composition containing inorganic particles, which is suitable for providing a PDP component having excellent surface flatness (such as a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, Color filters and black matrix). A second object of the present invention is to provide a composition containing inorganic particles, which can form a sintered glass material having a high light transmittance (for example, a dielectric layer constituting a PDP). A third object of the present invention is to provide a composition containing inorganic particles that can produce a transfer film having excellent flexibility in terms of a thin film-forming material layer. A fourth object of the present invention is to provide a composition containing inorganic particles, which is capable of producing a film-forming material layer having excellent transferability (heat-bonded to a substrate). A fifth object of the present invention is to provide a transfer film which can effectively form a constituent element of a PDP having excellent surface flatness. A sixth object of the present invention is to provide an inorganic particle-containing composition 6 312 / Inventive Supplement) / 93-05 / 93103730 200423177, which has excellent flexibility in terms of a thin film-forming material layer. A seventh object of the present invention is to provide a composition containing inorganic particles, which has excellent transferability (heat-bonded to a substrate) in terms of a thin film-forming material layer. An eighth object of the present invention is to provide a method for manufacturing a PDP, which can effectively make a component of a PDP having excellent surface flatness. A ninth object of the present invention is to provide a PDP manufacturing method which can efficiently form a PDP having a high positional accuracy in terms of constituent elements. A tenth object of the present invention is to provide a PDP manufacturing method which can effectively form a dielectric layer having a large thickness. An eleventh object of the present invention is to provide a P D P manufacturing method which can effectively form a large-sized panel. Dielectric layer. A twelfth object of the present invention is to provide a method for manufacturing a PDP having a dielectric layer with excellent thickness uniformity. A thirteenth object of the present invention is to provide a method for manufacturing P D P, which has a dielectric layer with excellent surface flatness. The composition containing inorganic particles of the present invention includes (A) inorganic particles; (B) a binder resin; and (C) a compound represented by the following formula (I) (this compound is hereinafter referred to as a "specific compound" ):

OHOH

I WCK-CHtrCH-CHi-O-VH (I) 其中R1表示-C0-A表示之基團,其中A表示含5-20個碳 原子之烷基或含5 - 2 0個碳原子之烯基,以及|]_為2 - 2 0之 整數。 本發明之含有無機粒子之組成物可為一種組成物進一 312/發明說明書(補件)/93-05/93103730 200423177 步 成 包 膜 性 包 得 印 案 材 層 體 包 子 膜 成 膜 光 擋 矩 包含(D ) —種輻射敏感性成分(此種組成物於後文稱 輻射敏感性含有無機粒子之組成物」)。 本發明之轉印膜包含一種經由前述含有無機粒子之 物獲得之薄膜生成性材料層。 本發明之第一製造方法(後文稱之為「P D P製造方法 含轉印由根據本發明之含有無機粒子之組成物所得 生成性材料層至基板表面,以及烤乾轉印後之薄膜 材料層而形成介電層於基板上之步驟。 本發明之第二製造方法(後文稱之為「P D P製造方法 含下列步驟:轉印由本發明之含有無機粒子之組成 之薄膜生成性材料層轉印至基板表面;形成光阻膜 後之薄膜生成性材料層上;曝光該光阻膜而形成光 之潛像;顯影光阻膜而形成光阻圖案;蝕刻薄膜生 料層而形成對應於光阻圖案之圖案層;以及烤乾該 而形成一種選自阻彳當肋、電極、電阻器、介電層、 、彩色濾光片及黑矩陣中之組成元件。 本發明之第三製造方法(後文稱之為「P D P製造方法 含下列步驟:形成光阻膜以及得自本發明之含有無 所得之組成物之薄膜生成性材料層於一基底膜上之 ;轉印該形成於基底膜上之積層膜至基板表面;曝 該積層膜之光阻膜而形成光阻圖案之潛像;顯影該 而形成光阻圖案;蝕刻薄膜生成性材料層而形成對 阻圖案之圖案層;以及烤乾該圖案層而形成一種選 肋、電極、電阻器、介電層、磷光體、彩色濾光片 陣中之組成元件。 312/發明說明書(補件)/93-05/93103730 作為 組 (1) j) 之薄 生成 (2) 」) 物所 於轉 阻圖 成性 圖案 填光 (3 )」) 機粒 積層 光組 光阻 應於 自阻 及黑 8 200423177 本發明之第四製造方法(後文稱之為「PDP製造方法(4)」) 包含下列步驟:轉印由根據本發明之含有無機粒子之組成 物所得之薄膜生成性材料層至基板表面上;曝光該薄膜生 成性材料層而形成圖案潛像;顯影該薄膜生成性材料層而 形成圖案層;以及烤乾該圖案層而形成一種選自阻擋肋、 電極、電阻器、介電層、磷光體、彩色濾光片及黑矩陣中 之組成元件。 【實施方式】 本發明之含有無機粒子之組成物(後文簡稱為「組成物」) 將說明其細節如後。 本發明之組成物包含無機粒子、黏結劑樹脂及特定化合 物作為主要成分。 (無機粒子) 組成本發明組成物之無機粒子之無機材料組成並無特 殊限制,反而根據該組成物形成之燒結材料之應用(P D P組 成元件類型)而選定。 組成物所含之無機粒子用於形成組成PDP之「介電層」 或「阻擋肋」,該等無機粒子例如為具有軟化點落至 3 5 0 - 7 0 0 °C,且較佳4 0 0 - 6 2 0 °C之範圍之玻璃粉。當玻璃粉 之軟化點低於3 5 0 °C時,玻璃粉係於一種階段熔化,於該 階段,有機物質例如黏結劑樹脂尚未於組成物製成之薄膜 生成性材料層烤乾步驟完全分解且被去除,因此部分有機 物質留在欲形成之介電層。結果介電層容易著色,其透光 比容易降低。相反地,當玻璃粉之軟化點超過7 0 0 °C時, 由於玻璃粉須以高於7 0 0 °C之溫度烤乾,故玻璃基板容易 9 312/發明說明書(補件)/93-05/93103730 200423177 扭曲。 適合使用之玻璃粉特例包括(1 )氧化鉛、氧化硼與氧化 矽之混合物(P b 0 - B 2 0 3 - S i 0 2),( 2 )氧化鋅、氧化硼與氧化 矽之混合物(Ζ η 0 - B ‘2 0 3 - S i 0 2),( 3 )氧化鉛、氧化硼、氧化 石夕及氧化is之混合物(PbO_B2〇3-Si〇2-Al2〇3) ’及(4)氧化 鉛、氧化鋅、氧化硼及氧化矽之混合物(P b 0 - Ζ η 0 - B 2 0 3 -Si〇2)。 該等玻璃粉可含於組成物,供形成介電層及阻擋肋以外 之組成元件(例如電極、電阻器、磷光體、彩色濾光片及黑 矩陣)。玻璃料於用於獲得面板材料之含有無機粒子之組成 物之含量,以無機粒子總重為基準通常為9 0 %重量比或以 下,且較佳為5 0 - 9 0 %重量比。 用以形成組成PDP之「電極」之組成物中所含之無機粒 子例如為包含Ag、Au、Al、Ni、Ag-Pd合金、Cu、Cr等此 類金屬粒子。 此等金屬粒子可組合玻璃粉而含於生成介電層之組成 物。玻璃粒子於介電層生成性組成物之含量,以無機粒子 總重為基準,通常為1 0 %重量比或以下,且較佳為〇 . 1 - 5 % 重量比。 組成PDP之「電阻器」生成用組成物所含之無機粒子例 如為包含RuCh此類之粒子。 組成PDP之「磷光體」生成用組成物所含之無機粒子例 如為包含紅螢光材料粒子(例如Y 2 〇 3 : E U 3 +、Y 2 S i 0 5 : E u 3 —、 Y :3 A 15 0 12 : E u 3 +、Y V 0 4 : E u 3 +、( Y, G d ) B 0 3 : E u 3 + 以及 Ζ η 3 ( P 0 ί ) 2 ·· Μ η ),含綠螢光材料粒子(例如Ζ η 2 S i 0Μ η、 10 312/發明說明書(補件)/93-05/93103730 200423177I WCK-CHtrCH-CHi-O-VH (I) where R1 represents a group represented by -C0-A, where A represents an alkyl group containing 5-20 carbon atoms or an alkenyl group containing 5-20 carbon atoms , And |] _ is an integer from 2-2 0. The composition containing the inorganic particles of the present invention may be a composition. Further, 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 Step into a film-like package to obtain a printing material layer body bun film film light-blocking moment includes (D) — a radiation-sensitive component (this composition is hereinafter referred to as a radiation-sensitive composition containing inorganic particles "). The transfer film of the present invention includes a thin film-forming material layer obtained through the inorganic particle-containing substance. The first manufacturing method of the present invention (hereinafter referred to as "the PDP manufacturing method includes transferring a generated material layer obtained from the composition containing an inorganic particle according to the present invention to a substrate surface, and drying the transferred film material layer And a step of forming a dielectric layer on the substrate. The second manufacturing method of the present invention (hereinafter referred to as "the PDP manufacturing method includes the following steps: transferring the layer of the thin film-generating material of the composition containing inorganic particles of the present invention To the substrate surface; on the thin film generating material layer after forming the photoresist film; exposing the photoresist film to form a latent image of light; developing the photoresist film to form a photoresist pattern; etching the thin film raw material layer to form a photoresist A patterned layer of a pattern; and baked to form a constituent element selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a color filter, and a black matrix. The third manufacturing method (after It is referred to as "PDP manufacturing method including the following steps: forming a photoresist film and a film-forming material layer containing a composition obtained without the invention on a base film; transferring the formation Laminate a film on the base film to the surface of the substrate; expose the photoresist film of the laminate film to form a latent image of the photoresist pattern; develop it to form a photoresist pattern; etch a film-forming material layer to form a resist pattern pattern layer ; And drying the pattern layer to form a constituent element in a rib selection, an electrode, a resistor, a dielectric layer, a phosphor, and a color filter array. 312 / Invention Specification (Supplement) / 93-05 / 93103730 as a group (1) j) Thin film generation (2) ”) Light-filled transflective pattern in the building (3)”) The photoresist of the machine-layered layered light group should be self-resistance and black 8 200423177 The fourth manufacturing of the present invention Method (hereinafter referred to as "PDP manufacturing method (4)") includes the following steps: transferring a thin film-generating material layer obtained from the composition containing an inorganic particle according to the present invention to a substrate surface; exposing the thin film-generating property Material layer to form a pattern latent image; developing the thin film-generating material layer to form a pattern layer; and drying the pattern layer to form a member selected from barrier ribs, electrodes, resistors, dielectric layers, phosphors, and color filters And in the black matrix Of its constituent elements. [Embodiment] The composition containing inorganic particles (hereinafter referred to as "composition") of the present invention will be described in detail later. The composition of the present invention contains inorganic particles, a binder resin, and a specific compound as main components. (Inorganic Particles) There is no particular limitation on the composition of the inorganic material that constitutes the inorganic particles of the composition of the invention. Instead, it is selected based on the application of the sintered material formed by the composition (P D P component type). The inorganic particles contained in the composition are used to form a "dielectric layer" or "barrier rib" constituting the PDP. Such inorganic particles have, for example, a softening point falling to 3 50-7 0 0 ° C, and preferably 40 Glass frit in the range of 0-6 2 0 ° C. When the softening point of the glass frit is lower than 350 ° C, the glass frit is melted in a stage where organic substances such as a binder resin have not been completely decomposed during the baking step of the film-forming material layer made of the composition And it is removed, so part of the organic substance remains in the dielectric layer to be formed. As a result, the dielectric layer is easily colored, and its transmittance is easily reduced. Conversely, when the softening point of the glass powder exceeds 700 ° C, the glass substrate is easy to be baked because the glass powder must be baked at a temperature higher than 700 ° C. 9 312 / Invention Specification (Supplement) / 93- 05/93103730 200423177 Twisted. Specific examples of suitable glass powder include (1) a mixture of lead oxide, boron oxide and silicon oxide (P b 0-B 2 0 3-S i 0 2), (2) a mixture of zinc oxide, boron oxide and silicon oxide ( Z η 0-B '2 0 3-S i 0 2), (3) a mixture of lead oxide, boron oxide, stone oxide and oxide is (PbO_B2〇3-Si〇2-Al2〇3)' and (4 ) A mixture of lead oxide, zinc oxide, boron oxide, and silicon oxide (P b 0 -Z η 0 -B 2 0 3 -Si〇2). The glass frit may be contained in a composition for forming constituent elements (such as electrodes, resistors, phosphors, color filters, and black matrices) other than the dielectric layer and the barrier ribs. The content of the glass frit in the composition containing inorganic particles used to obtain the panel material is usually 90% by weight or less based on the total weight of the inorganic particles, and preferably 50-90% by weight. The inorganic particles contained in the composition used to form the "electrode" constituting the PDP are, for example, metal particles such as Ag, Au, Al, Ni, Ag-Pd alloy, Cu, Cr and the like. These metal particles can be combined with a glass frit and contained in a composition forming a dielectric layer. The content of the glass particles in the dielectric layer-forming composition, based on the total weight of the inorganic particles, is usually 10% by weight or less, and preferably 0.1 to 5% by weight. The inorganic particles contained in the "resistor" forming composition constituting the PDP are, for example, particles containing RuCh or the like. The inorganic particles contained in the "phosphor" generating composition constituting the PDP are, for example, particles containing red fluorescent material (for example, Y 2 0 3: EU 3 +, Y 2 S i 0 5: E u 3 —, Y: 3 A 15 0 12: E u 3 +, YV 0 4: E u 3 +, (Y, G d) B 0 3: E u 3 + and Z η 3 (P 0 ί) 2 ·· Μ η), including Particles of green fluorescent material (e.g. Z η 2 S i 0Μ η, 10 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177

BaAli2〇i9:Mn、BaMgAlH〇23:Mn、LaP〇4:(Ce,Tb)以及 Y 3 ( A 1 , G a ) 5 0 m T b ),含藍螢光材料粒子(如Y 2 S i 0 5 : C e、 BaMgAli〇Oi7:Eu2+、BaMgAlH〇2 3:Eu2+、( C a , S r , Ba)i〇(PCh)6Cl2:Eu2 +及(Zn, Cd)S:Ag)等。 組成PDP之「彩色濾光片」生成用組成物所含之無機粒 子例如為包含紅材料(如F e 2 0 3及P b 3 0 4 )、綠材料(如 C r 2 0 3 )、藍材料(如2 ( A 12 N a 2 S i 3 0丨。)· N a 2 S 4)此類之粒子。 組成.PDP之「黑矩陣」生成用組成物所含之無機粒子例 如為包含Μ η、F e、C r此類之粒子。 (黏結劑樹脂) 組成本發明組成物之黏結劑樹脂較佳為丙烯酸樹脂。 當含有丙烤酸樹脂作為黏結劑樹脂時,生成之薄膜生成 性材料層對基板有絕佳(熱)黏著性。如此當本發明組成物 施用於基底膜來製造轉印膜時,就薄膜生成性材料層而 言,所得轉印膜有絕佳轉應能力(對基板之熱黏合性)。 組成本發明組成物之丙烯酸樹脂係選自具有適當黏著 性,可黏合無機粒子且可經由烤乾薄膜生成性材料(於 4 0 0 - 6 2 Ot烤乾)而被完全氧化及去除之(共)聚合物。 丙烯酸包括如下通式(I I )表示之(曱基)丙烯酸化合物 之均聚物、如下通式(I I )表示之兩種或兩種以上(甲基)丙 烯酸化合物之共聚物、以及如下通式(I I )表示之(甲基)丙 烯酸化合物與可共聚合單體之共聚物。 H2OC-R2BaAli2〇i9: Mn, BaMgAlH〇23: Mn, LaP〇4: (Ce, Tb) and Y 3 (A 1, G a) 50 m T b), containing blue fluorescent material particles (such as Y 2 S i 0 5: Ce, BaMgAliOOi7: Eu2 +, BaMgAlH02: Eu2 +, (Ca, Sr, Ba) i0 (PCh) 6Cl2: Eu2 +, and (Zn, Cd) S: Ag) and the like. The inorganic particles contained in the composition for forming the "color filter" of the PDP include, for example, red materials (such as F e 2 0 3 and P b 3 0 4), green materials (such as C r 2 0 3), and blue Materials (such as 2 (A 12 N a 2 S i 3 0 丨.) · N a 2 S 4). The inorganic particles contained in the composition for forming the "black matrix" of the PDP are, for example, particles containing M η, F e, and C r. (Binder resin) The binder resin constituting the composition of the present invention is preferably an acrylic resin. When acrylic acid resin is contained as the binder resin, the resulting thin film-forming material layer has excellent (thermal) adhesion to the substrate. Thus, when the composition of the present invention is applied to a base film to produce a transfer film, the obtained transfer film has excellent transfer ability (heat-adhesiveness to a substrate) in terms of a film-forming material layer. The acrylic resin that composes the composition of the invention is selected from the group consisting of materials with appropriate adhesiveness, which can adhere inorganic particles, and can be completely oxidized and removed by baking film-forming materials (baking at 4 0-6 2 Ot) (commonly )polymer. Acrylic acid includes a homopolymer of a (fluorenyl) acrylic compound represented by the following general formula (II), a copolymer of two or more (meth) acrylic compounds represented by the following general formula (II), and the following general formula ( II) is a copolymer of a (meth) acrylic compound and a copolymerizable monomer. H2OC-R2

I C=0 (II)I C = 0 (II)

I οI ο

I h2c-r3 11 312/發明說明書(補件)/93-05/93103730 200423177 其中R2表示氫原子或甲基;以及R3表示一價有機基。 通式(I I )表示之(甲基)丙烯酸化合物之特例包括: 烷基(曱基)丙烯酸酯類例如(甲基)丙烯酸曱酯、(甲基) 丙烯酸乙酯、(曱基)丙烯酸丙酯、(甲基)丙烯酸異丙酯、(曱 基)丙烯酸丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸第三 丁酯、(曱基)丙烯酸戊酯(pentyl (meth)acrylate)、(曱 基)丙烯酸戊酯(amyl (meth)acrylate)、(甲基)丙烯酸異 戊酯、(曱基)丙烯酸己酯、(曱基)丙烯酸庚酯、(甲基)丙 烯酸辛酯、(曱基)丙烯酸異辛酯、(曱基)丙烯酸2 -乙基己 酯、(曱基)丙烯酸壬酯、(甲基)丙烯酸癸酯、(甲基)丙烯 酸異癸酯、(曱基)丙烯酸十一烷酯、(甲基)丙烯酸十二烷 酯、(甲基)丙烯酸月桂酯、(曱基)丙烯酸硬脂酯及(甲基) 丙烯酸異硬脂酯; 羥基烷基(曱基)丙烯酸酯類例如(甲基)丙烯酸羥基乙 酯、(甲基)丙烯酸2 -羥基丙酯、(曱基)丙烯酸3 -羥基丙 酯、(甲基)丙烯酸2 -羥基丁酯;(甲基)丙烯酸3 -羥基丁酯 及(曱基)丙烯酸4 -羥基丁酯。 苯氧基烷基(甲基)丙烯酸酯類例如(甲基)丙烯酸苯氧 基乙酯及(曱基)丙烯酸2 -羥基-3-苯氧基丙酯; 烷氧基烷基(甲基)丙烯酸酯類例如(甲基)丙烯酸2 -甲 氧基乙酯、(甲基)丙烯酸2 -乙氧基乙酯、(甲基)丙烯酸2-丙氧基乙酯、(甲基)丙烯酸2 -丁氧基乙酯及(曱基)丙烯酸 2 -曱氧基丁酯; 多烷二醇(曱基)丙烯酸酯類例如多乙二醇一(甲基)丙 烯酸酯、乙氧基二乙二醇(甲基)丙烯酸酯' 甲氧基多乙二 12 312/發明說明書(補件)/93-05/93103730 200423177 醇(曱基)丙烯酸酯、苯氧基多乙二醇(曱基)丙烯 基苯氧基多乙二醇(甲基)丙烯酸酯、聚丙二醇(1 酸酯、甲氧基聚丙二醇(曱基)丙烯酸酯、乙氧基 (甲基)丙烯酸酯及壬基苯氧聚丙二醇(曱基)丙烯 環烷基(甲基)丙烯酸酯類例如(甲基)丙烯酸環 (甲基)丙烯酸4 -丁基環己酯、(曱基)丙烯酸二環 基)丙烯酸二環戊烯酯、(曱基)丙烯酸二環戊二:) 基)丙烯酸冰片酯、(曱基)丙烯酸異冰片酯及(甲; 三環癸酯;以及 (曱基)丙烯酸芊酯及(曱基)丙烯酸四氫糠酯。 其中以通式(I I )表示之(曱基)丙烯酸酯化合物 表示含有烷基或氧基伸烷基之基團為佳。特佳為 烯酸酯化合物為(甲基)丙烯酸丁酯、(甲基)丙烯 酯、(曱基)丙烯酸月桂酯、(曱基)丙烯酸異癸酯 丙烯酸2 -乙氧基乙酯。 其它可共聚合單體並無特殊限制,只要為可與 烯酸酯化合物共聚合之化合物即可。其它可共聚 括不飽和魏酸如(甲基)丙稀酸、乙烯基苯曱酸、 酸及乙烯基苯二曱酸;以及含乙烯基之可基團聚 物,例如乙稀基爷基曱基醚、乙稀基縮水甘油醚、 α -甲基苯乙烯、丁二烯及異戊間二烯。 組成本發明組成物之丙稀酸樹脂中衍生自通式 示之(曱基)丙烯酸化合物之共聚單體比例通常為 比或以上,且較佳為9 0 %重量比或以上。 較佳丙烯酸樹脂之特例包括聚曱基丙烯酸曱酯 312/發明說明書(補件)/93-05/93103730 酸酯、壬 3基)丙烯 聚丙二醇 酸酯; 己酷、 戊醋、(甲 I酯、(甲 k )丙烯酸 ,其中R3 (曱基)丙 酸乙基己 及(曱基) (甲基)丙 合單體包 順丁烯二 合化合 苯乙婦、 (⑴表 7 0%重量 、聚曱基 13 200423177 丙烯酸丁酯及曱基丙烯酸甲.酯-甲基丙烯酸丁酯共聚物。 於利用後述光阻劑方法形成PDP之組成元件時,當薄膜 生成性材料層必須為鹼溶性來進行蝕刻時,較佳含有含羧 基之單體作為前述其它可共聚合單體(共聚單體)。含羧基 之單體特例包括丙烯酸、甲基丙烯酸、順丁烯二酸、反丁 烯二酸、巴豆酸、衣康酸、檸康酸、中康酸、桂皮酸、一 (2-(甲基)丙烯醯基氧基乙基)丁二酸酯及ω -羧基-聚己内 酯一(曱基)丙烯酸酯。其中以曱基丙烯酸為特佳。 較佳鹼溶性樹脂之特例包括: 烷基曱基丙烯酸酯類例如曱基丙烯酸曱酯、曱基丙烯酸 乙酷、甲基丙烯酸丙S旨、甲基丙烯酸異丙S旨、甲基丙烯酸 丁酯、甲基丙烯酸異丁酯、曱基丙烯酸第三丁酯、甲基丙 稀酸戊醋(pentyl methacrylate)、甲基丙稀西复戊酯(amyl methacrylate)、曱基丙烯酸異戊酯、曱基丙烯酸己酯、甲 基丙烯酸庚酯、甲基丙烯酸辛酯、曱基丙烯酸異辛酯、甲 基丙烯酸2 -乙基己酯、曱基丙烯酸壬酯、曱基丙烯酸癸 酯、甲基丙烯酸異癸酯、曱基丙烯酸十一烷酯、甲基丙烯 酸十二烷酯、曱基丙烯酸月桂酯、曱基丙烯酸硬脂酯及曱 基丙烯酸異硬脂酯; 羥基烷基甲基丙烯酸酯類例如曱基丙烯酸羥基乙酯、甲 基丙烯酸2-羥基丙酯、曱基丙烯酸3-羥基丙酯、甲基丙烯 酸2 -羥基丁酯;甲基丙烯酸3 -羥基丁酯及曱基丙烯酸4-羥基丁酯。 苯氧基烷基甲基丙烯酸酯類例如曱基丙烯酸苯氧基乙 酯及甲基丙烯酸2 -羥基苯氧基丙酯; 14 312/發明說明書(補件)/93-05/93103730 200423177 烷氧基烷基甲基丙烯酸酯類例如甲基丙烯酸2 -甲氧基 乙酯、甲基丙烯酸2 -乙氧基乙酯、甲基丙烯酸2 -丙氧基乙 酯、曱基丙烯酸2 -丁氧基乙酯及曱基丙烯酸2 -甲氧基丁 酯; 多烷二醇曱基丙烯酸酯類例如多乙二醇一甲基丙烯酸 酯、乙氧基二乙二醇甲基丙烯酸酯、曱氧基多乙二醇曱基 丙烯酸酯、苯氧基多乙二醇甲基丙烯酸酯、壬基苯氧基多 乙二醇甲基丙烯酸酯、聚丙二醇曱基丙烯酸酯、甲氧基聚 丙二醇曱基丙烯酸酯、乙氧基聚丙二醇甲基丙烯酸酯及壬 基苯氧聚丙二醇甲基丙烯酸酯; 環烷基曱基丙烯酸酯類例如甲基丙烯酸環己酯、甲基丙 烯酸4 - 丁基環己酯、甲基丙烯酸二環戊酯、曱基丙烯酸二 環戊烯酯、曱基丙烯酸二環戊二烯酯、甲基丙烯酸冰片酯、 甲基丙烯酸異冰片酯及甲基丙烯酸三環癸酯;以及 甲基丙烯酸苄酯及曱基丙烯酸四氫糠酯。 組成本發明組成物之丙烯酸樹脂之分子量,以重量平均 分子量藉凝膠滲透層析術(後文稱之為「G P C」)還原成為聚 苯乙烯表示,較佳為4, 000-300, 000,且更佳為 1 0,0 0 0 - 2 0 0,0 0 0 (該分子量於後文簡稱為「重量平均分子 量」)。 本發明組成物之黏結劑樹脂所占之比例相對於每1 0 0份 重量比無機粒子較佳為5 - 8 0份重量比,且更佳為1 0 - 5 0 份重量比。當黏結劑樹脂之比例過小時,黏結劑樹脂無法 確切黏結及保有無機粒子。相反地,當比例過大時,烤乾 步驟耗費長時間,形成的燒結材料(例如介電層)不具有足 夠強度或厚度。 (特定化合物) 15 312/發明說明書(補件)/93-05/93103730 200423177 特定化合物用作為具有增塑劑及分散劑雙重效果之添 加劑。含有特定化合物之本發明組成物顯示絕佳表面平坦 度。即使當所得轉印薄膜被彎曲時,薄膜生成性材料層表 面可精細裂開,轉印膜具有絕佳柔軟性而容易捲起。此外, 因特定化合物不易藉熱分解及去除,故烤乾薄膜生成性材 料層所得之面板材料不會被上色,特別介電層之透光比不 會降低。 表示特定化合物之式(I)中,R1表示-C0-A表示之基團, 其中A表示含5_20個破原子之坑基或含5_20個破原子之 稀基,以及|]_為2_20之整數。 A表示之烷基或烯基含5-20個碳原子且較佳為9-18個 碳原子。當碳原子數小於5時,作為添加劑之功能變得不 足。當碳原子數超過2 0時,於組成含有無機粒子之組成物 之添加劑溶劑中的溶解度降低,而無法獲得良好撓性。 烷基之特例包括正戊基、正己基、正庚基、正辛基、正 壬基、正癸基、正十一烧基、正十二烧基、正十五烧基、 正十六烧基、正十七烧基、正十八烧基、正十九烧基及正 廿烧基。 烯基之特例包括2 -戊烯基、2 -己烯基、2 -庚烯基、2-辛稀基、2 -癸稀基、10 -十一碳稀基、9 -十八碳稀基及9-十八碳稀基。 其中以正辛基、正十二烷基、正十八烷基及9-十八碳烯 基為佳,而以9 —h八碳稀基為特佳。 式(I)中R1表示- CO-A表示之基團;以及l為2 - 2 0之整 數。 16 312/發明說明書(補件)/93-05/93103730 200423177 特定化合物之特例包括一月桂酸雙甘油酯、一硬脂酸雙 甘油s旨、一油酸雙甘油西旨及一辛酸雙甘油_ 。其中以一油 酸雙甘油s旨為特佳。 特定化合物於本發明組成物之比例較佳相對於每1 〇 〇份 重量比無機粒子,為0 . 1 - 2 0份重量比,及更佳為0· 5 _ 1 0 份重量比。當特定化合物之比例過小時,無法充分改善使 用所得組成物形成之薄膜生成性材料層之表面平坦度及撓 性。相反地當比例過高時,使用所得組成物形成之薄膜生 成性材料層之黏著性(粘黏性)變過高,故包含該薄膜生成 性材料層之轉印膜之操控性質低劣。 (輻射敏感成分) 本發明之含有無機粒子之組成物可為含有輻射敏感成 分之輻射敏感性含有無機粒子之組成物。輻射敏感成分較 佳例如包括(a )多官能單體與輻射聚合引發劑之組合;以及 (b )蜜胺樹脂與當使用輻射照射時可生成酸之光酸產生劑 的組合。至於組合(a ),以多官能(甲基)丙烯酸酯與輻射聚 合引發劑之組合為特佳。 組成輻射敏感成分之多官能(曱基)丙烯酸酯之特例包 括烷二醇(例如乙二醇及丙二醇)之二(甲基)丙烯酸酯;多 烷二醇(例如多乙二醇及多丙二醇)之二(甲基)丙烯酸酯; 二端基經羥基化聚合物(例如二端基羥基聚丁二烯、二端基 羥基聚異戊間二烯及二端基羥基聚己内酯)之二(甲基)丙 烯酸酯;具有價數3或3以上之多元醇(例如甘油、1,2,4 -丁三醇、三羥甲基烷、四羥甲基烷、季戊四醇及二季戊四 醇)之多(曱基)丙烯酸酯;環狀多元醇(如1,4 -環己二醇及 17 312/發明說明書(補件)/93-05/93103730 200423177 1,4 -苯二醇之環狀多元醇);以及寡(甲基)丙烯酸酯例如聚 酯(曱基)丙烯酸酯、環氧樹脂(曱基)丙烯酸酯、胺基曱酸 酯樹脂(曱基)丙烯酸酯、醇酸樹脂(曱基)丙烯酸酯、聚矽 氧樹脂(曱基)丙烯酸酯及螺形烴樹脂(s p i r a n r e s i η )(甲 基)丙烯酸酯。此等多官能(甲基)丙烯酸酯可單獨使用或組 合兩種或兩種以上使用。 組成輻射敏感性成分之輻射聚合引發劑特例包括羰基 化合物例如聯苯醯、安息香、二苯曱酮、樟腦醌、2-羥基 -2 -甲基_1_苯基丙-1-3同、1_經基環己基苯基甲8同、2,2-二甲氧基-2-苯基苯乙酮、2 -甲基-[4’-(曱硫基)苯基]-2-嗎琳基丙S同及2_辛基_2~~二曱基胺基嗎琳基苯 基)_ 丁 - 1 -酮;偶氣化合物或疊氮化合物如偶氮異丁腈及 4 -疊氛基苄醒·;有機硫化合物如二硫化硫醇;有機過氧化 物如過氧化苯甲醯、過氧化二-第三丁基、第三丁基過氧 氫、異丙苯過氧氫及對甲烷過氧氫;三鹵甲烷類例如1,3 -貳(三氯曱基)-5 -(2’ -氯苯基)-1,3,5-三畊及2-[2-(2 -呋 喃基)伸乙基]-4,6 -貳(三氣甲基)-1,3,5 -三畊及咪唑二元 體例如2,2 ’ -貳(2 -氯苯基)-4,5,4 ’,5 ’ -四苯基-1,2,-聯咪 唑。此等輻射聚合引發劑可單獨使用或組合兩種或兩種以 上使用。 (溶劑) 本發明組成物通常含有溶劑。較佳溶劑為對無機粒子有 良好親和力及對黏結劑樹脂有良好溶解度,可對所得組成 物提供適當黏度,乾燥時容易氣化及去除之溶劑。 溶劑之特例包括酮類如二乙基曱酮、甲基丁基甲酮二丙 18 312/發明說明書(補件)/93-05/93103730 200423177 基甲酮及環己酮;醇類如正戊醇、4 -曱基-2 -戊醇、環 及二丙酮醇;以醚為主之醇類如乙二醇一曱醚、乙二 乙鍵、乙二醇一丁鍵、丙二醇一曱及丙二醇一乙鍵 飽和脂肪族一羧酸烷酯類例如乙酸正丁酯及乙酸戊酯 酸酯類如乳酸乙酯及乳酸正丁酯;以及以醚為主之酯 如乙酸曱基溶纖素、乙酸乙酯溶纖素、乙酸丙二醇一〒 及3 -乙氧基丙酸乙酯。此等溶劑可單獨使用或組合兩 兩種以上使用。 溶劑於本發明組成物之比例,由維持組成物黏度於 範圍之觀點,相對於每1 0 0份重量比無機粒子,較佳 份重量比或以下及更佳為5-30份重量比。 本發明組成物除了前述主要成分之外,可含有多種 劑作為選擇性成分,該等添加劑例如為粘黏劑、表面 控制劑、安定劑及消泡劑。 生成介電層之組成物作為含有無機粒子之組成物範 較佳實施例如包括一種組成物,該組成物包含 1 0 0份重量比混合物包含5 0 - 8 0 %重量比氧化鉛、5 -重量比氧化硼、0 - 2 0 %重量比氧化鋅、0 - 1 〇 %重量比氧 及0 _ 1 0 %重量比氧化矽作為無機粒子(玻璃粉); 10-30份重量比曱基丙烯酸丁酯/曱基丙烯酸2 -乙:! 酯/甲基丙烯酸羥基丙酯共聚物作為黏結劑樹脂; 0 · 1 - 1 0份重量比油酸二甘油酷作為特定化合物;以 5-30份重量比丙二醇一曱醚及/或3 -乙氧基丙酸乙 為溶劑。 本發明組成物可經由使用混練器例如輥混練器、混 312/發明說明書(補件)/93-05/93103730 己醇 醇一 ;不 ;乳 類例 〖醚、 種或 較佳 為4 0 添力口 張力 例 3 0% 化鋁 k己 及 酯作 合器 19 200423177 或均混器,混練前述無機粒子、黏結劑樹脂、特定化名 溶劑及選擇性成分而製備。 如此製備之本發明組成物為具有適合塗覆之流動性 膏狀組成物,通常具有黏度為1,000-30, 000 cp以及 為 3, 000-10, 000 cp° 本發明組成物可特別有利地用於製造轉印膜(本發E 轉印膜),容後詳述。 本發明組成物也較佳用於習知形成薄膜生成性材料 之方法,換言之藉網印法等直接塗覆組成物於基板表 及乾燥該塗覆膜而形成薄膜生成性材料之方法。 (轉印膜) 本發明之轉印膜為一種複合膜其可有利地用於製造 組成元件之步驟,特別製造介電層之步驟,經由塗覆 明組成物於基底膜上及乾燥該塗覆膜而形成薄膜生成 料層。 換言之,本發明之轉印膜係由基底膜其上形成有一 膜生成性材料層,且含有無機粒子、黏結劑樹脂及特 合物。 本發明之轉印膜可為薄膜(堆疊體),係經由形成後 阻膜於基底膜上,塗覆本發明組成物於光阻膜上,以 燥塗覆膜而製備。 此外,本發明轉印膜可為使用輻射敏感性含有無機 之組成物組成之輻射敏感性轉印膜。 (1 )轉印膜之構造:I h2c-r3 11 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 wherein R2 represents a hydrogen atom or a methyl group; and R3 represents a monovalent organic group. Specific examples of the (meth) acrylic compound represented by the general formula (II) include: alkyl (fluorenyl) acrylates such as (meth) acrylate, (meth) acrylate, and (meth) acrylate , Isopropyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, tertiary butyl (meth) acrylate, pentyl (meth) acrylate ), Amyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, octyl (meth) acrylate, (Methyl) isooctyl acrylate, (Methyl) 2-ethylhexyl acrylate, (Methyl) nonyl acrylate, decyl (meth) acrylate, isodecyl (meth) acrylate, (fluorenyl) Undecyl acrylate, dodecyl (meth) acrylate, lauryl (meth) acrylate, stearyl (meth) acrylate and isostearyl (meth) acrylate; hydroxyalkyl (fluorenyl) Acrylates such as hydroxyethyl (meth) acrylate, ( 2-hydroxypropyl acrylate, 3-hydroxypropyl (fluorenyl) acrylate, 2-hydroxybutyl (meth) acrylate; 3-hydroxybutyl (meth) acrylate and 4-hydroxy acrylate Butyl ester. Phenoxyalkyl (meth) acrylates such as phenoxyethyl (meth) acrylate and 2-hydroxy-3-phenoxypropyl (meth) acrylate; alkoxyalkyl (methyl) Examples of acrylates are 2-methoxyethyl (meth) acrylate, 2-ethoxyethyl (meth) acrylate, 2-propoxyethyl (meth) acrylate, 2- (meth) acrylate Butoxyethyl and 2-fluorenyl butyl (fluorenyl) acrylate; Polyalkanediol (fluorenyl) acrylates such as polyethylene glycol mono (meth) acrylate, ethoxy diethylene glycol (Meth) acrylates' methoxypolyethylenediene 12 312 / Inventory (Supplement) / 93-05 / 93103730 200423177 Alcohol (fluorenyl) acrylate, phenoxypolyethylene glycol (fluorenyl) propenyl Phenoxypolyethylene glycol (meth) acrylate, polypropylene glycol (1 ester, methoxy polypropylene glycol (fluorenyl) acrylate, ethoxy (meth) acrylate, and nonylphenoxy polypropylene glycol ( Fluorenyl) propylene cycloalkyl (meth) acrylates such as (meth) acrylic cyclo (meth) acrylate 4-butylcyclohexyl, (fluorenyl Acrylic dicyclo group) dicyclopentenyl acrylate, (fluorenyl) dicyclopentyl acrylate :) group) bornyl acrylate, (fluorenyl) isobornyl acrylate, and (a; tricyclodecyl); and (fluorenyl) ) Acrylic acid acrylate and (fluorenyl) tetrahydrofurfuryl acrylate. Among them, the (fluorenyl) acrylate compound represented by the general formula (II) preferably represents a group containing an alkyl group or an oxyalkylene group. Particularly preferred is olefin. The ester compounds are butyl (meth) acrylate, (meth) acrylic acid, lauryl (fluorenyl) acrylate, and 2-ethoxyethyl acrylate (decyl) isodecyl acrylate. Other copolymerizable monomers There is no particular limitation, as long as it is a compound that can be copolymerized with an enoate compound. Other copolymerizable polymers include unsaturated weilic acids such as (meth) acrylic acid, vinyl benzoic acid, acids, and vinyl benzene difluorene. Acids; and vinyl-containing polymerizable groups, such as vinyl undecyl ether, vinyl glycidyl ether, α-methylstyrene, butadiene, and isoprene. The acrylic resin is derived from the general formula (曱) The proportion of the comonomer of the acrylic compound is usually equal to or more, and preferably 90% by weight or more. Specific examples of the preferred acrylic resin include polymethyl methacrylate 312 / Invention Specification (Supplement) / 93- 05/93103730 acid esters, non 3yl) propylene polypropylene glycol esters; hexane, pentyl acetate, (methyl ester, (methyl k) acrylic acid, of which R3 (fluorenyl) ethyl propionate and (fluorenyl) ( Methyl) propylene monomers include cis-butene di-combined acetophenone, (Table 70% by weight, polyfluorenyl 13 200423177 butyl acrylate and methyl methacrylate-butyl methacrylate copolymer. When forming a PDP constituent element by a photoresist method described later, when the thin film-forming material layer must be alkali-soluble for etching, it is preferable to include a carboxyl group-containing monomer as the aforementioned other copolymerizable monomer (comonomer). . Specific examples of carboxyl-containing monomers include acrylic acid, methacrylic acid, maleic acid, fumaric acid, crotonic acid, itaconic acid, citraconic acid, mesaconic acid, cinnamic acid, mono (2- (methyl ) Acrylic fluorenyloxyethyl) succinate and ω-carboxy-polycaprolactone mono (fluorenyl) acrylate. Among them, fluorenyl acrylic acid is particularly preferred. Specific examples of preferred alkali-soluble resins include: alkyl fluorenyl acrylates such as fluorenyl acrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, butyl methacrylate, Isobutyl methacrylate, tertiary butyl methacrylate, pentyl methacrylate, amyl methacrylate, isoamyl methacrylate, methacrylic acid Hexyl, heptyl methacrylate, octyl methacrylate, isooctyl methacrylate, 2-ethylhexyl methacrylate, nonyl methacrylate, decyl methacrylate, isodecyl methacrylate Undecyl methacrylate, dodecyl methacrylate, lauryl methacrylate, stearyl methacrylate and isostearyl methacrylate; hydroxyalkyl methacrylates such as methacrylic acid Hydroxyethyl ester, 2-hydroxypropyl methacrylate, 3-hydroxypropyl methacrylate, 2-hydroxybutyl methacrylate; 3-hydroxybutyl methacrylate and 4-hydroxybutyl methacrylate. Phenoxyalkyl methacrylates such as phenoxyethyl fluorenyl acrylate and 2-hydroxyphenoxypropyl methacrylate; 14 312 / Description of the Invention (Supplement) / 93-05 / 93103730 200423177 Alkoxy Alkyl methacrylates such as 2-methoxyethyl methacrylate, 2-ethoxyethyl methacrylate, 2-propoxyethyl methacrylate, 2-butoxy methacrylate Ethyl and 2-methoxybutyl acrylate; polyalkylene glycol methacrylates such as polyethylene glycol monomethacrylate, ethoxy diethylene glycol methacrylate, fluorenyl polyacrylate Ethylene glycol methacrylate, phenoxypolyethylene glycol methacrylate, nonylphenoxy polyethylene glycol methacrylate, polypropylene glycol methacrylate, methoxy polypropylene glycol methacrylate Ethoxy polypropylene glycol methacrylate and nonylphenoxy polypropylene glycol methacrylate; cycloalkylfluorenyl acrylates such as cyclohexyl methacrylate, 4-butylcyclohexyl methacrylate, methyl Dicyclopentyl acrylate, dicyclopentenyl acrylate, fluorenyl acrylate Cyclopentadiene methacrylate, bornyl methacrylate, isobornyl methacrylate and tricyclo decyl acrylate; and benzyl methacrylate, and tetrahydrofurfuryl acrylate Yue group. The molecular weight of the acrylic resin constituting the composition of the present invention is expressed by weight average molecular weight reduced to polystyrene by gel permeation chromatography (hereinafter referred to as "GPC"), preferably 4, 000-300, 000. And more preferably 1 0, 0 0 0-2 0 0, 0 0 0 (this molecular weight is hereinafter referred to as "weight average molecular weight"). The proportion of the binder resin of the composition of the present invention is preferably 5 to 80 parts by weight and more preferably 10 to 50 parts by weight per 100 parts by weight of the inorganic particles. When the proportion of the binder resin is too small, the binder resin cannot accurately bind and retain inorganic particles. Conversely, when the proportion is too large, the baking step takes a long time, and the formed sintered material (such as a dielectric layer) does not have sufficient strength or thickness. (Specific compound) 15 312 / Invention specification (Supplement) / 93-05 / 93103730 200423177 The specific compound is used as an additive having the dual effects of a plasticizer and a dispersant. The composition of the present invention containing a specific compound shows excellent surface flatness. Even when the obtained transfer film is bent, the surface of the film-forming material layer can be finely cracked, and the transfer film has excellent flexibility and is easily rolled up. In addition, because specific compounds are not easily decomposed and removed by heat, the panel material obtained by baking the thin film-forming material layer will not be colored, and the transmittance of the dielectric layer will not decrease. In formula (I) representing a specific compound, R1 represents a group represented by -C0-A, where A represents a pit group containing 5-20 broken atoms or a dilute group containing 5-20 broken atoms, and |] _ is an integer of 2_20 . The alkyl or alkenyl group represented by A contains 5 to 20 carbon atoms and preferably 9 to 18 carbon atoms. When the number of carbon atoms is less than 5, the function as an additive becomes insufficient. When the number of carbon atoms exceeds 20, the solubility in the additive solvent constituting the composition containing the inorganic particles decreases, and good flexibility cannot be obtained. Specific examples of alkyl include n-pentyl, n-hexyl, n-heptyl, n-octyl, n-nonyl, n-decyl, n-undecyl, n-dodecyl, n-pentadecyl, n-hexadecyl Base, n-seven-single-base, n-seven-single-base, n-seven-single-base and n-stilbene-based. Specific examples of alkenyl include 2-pentenyl, 2-hexenyl, 2-heptenyl, 2-octyl, 2-decyl, 10-undecyl, 9-octadecyl And 9-octadecyl. Among them, n-octyl, n-dodecyl, n-octadecyl and 9-octadecenyl are preferred, and 9-h octadecyl is particularly preferred. R1 in formula (I) represents a group represented by -CO-A; and l is an integer of 2-2 0. 16 312 / Instruction of the Invention (Supplement) / 93-05 / 93103730 200423177 Specific examples of specific compounds include diglyceryl monolaurate, diglycerol monostearate, diglycerol monooleate, and diglycerol monocaprylate. . Among them, diglycerol monooleate is particularly preferred. The ratio of the specific compound to the composition of the present invention is preferably from 0.1 to 20 parts by weight, and more preferably from 0.5 to 10 parts by weight, per 1,000 parts by weight of the inorganic particles. When the ratio of the specific compound is too small, the surface flatness and flexibility of the thin film-forming material layer formed using the obtained composition cannot be sufficiently improved. Conversely, when the ratio is too high, the adhesiveness (adhesiveness) of the thin film-generating material layer formed using the obtained composition becomes too high, so the handling properties of the transfer film including the thin film-generating material layer are poor. (Radiation-sensitive component) The composition containing an inorganic particle of the present invention may be a radiation-sensitive composition containing an inorganic particle. Preferred radiation-sensitive components include, for example, (a) a combination of a polyfunctional monomer and a radiation polymerization initiator; and (b) a combination of a melamine resin and a photoacid generator that generates an acid when irradiated with radiation. As for the combination (a), a combination of a polyfunctional (meth) acrylate and a radiation polymerization initiator is particularly preferable. Specific examples of polyfunctional (fluorenyl) acrylates that make up radiation-sensitive components include di (meth) acrylates of alkanediols (such as ethylene glycol and propylene glycol); polyalkanediols (such as polyethylene glycol and polypropylene glycol) Bis (meth) acrylates; two hydroxyl-terminated polymers (such as two-terminal hydroxyl polybutadiene, two-terminal hydroxyl polyisoprene, and two-terminal hydroxyl polycaprolactone) (Meth) acrylates; polyhydric alcohols with a valence of 3 or more (such as glycerol, 1,2,4-butanetriol, trimethylolane, tetramethylolane, pentaerythritol, and dipentaerythritol) (Fluorenyl) acrylates; cyclic polyols (such as 1,4-cyclohexanediol and 17 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 1,4-benzenediol cyclic polyol ); And oligo (meth) acrylates such as polyester (fluorenyl) acrylate, epoxy resin (fluorenyl) acrylate, amino phosphonate resin (fluorenyl) acrylate, alkyd resin (fluorenyl) Acrylate, polysiloxane (fluorenyl) acrylate and spiral hydrocarbon resin (spiranr e s i η) (meth) acrylate. These polyfunctional (meth) acrylates can be used alone or in combination of two or more. Specific examples of the radiation polymerization initiator constituting the radiation-sensitive component include carbonyl compounds such as biphenylhydrazone, benzoin, benzophenone, camphorquinone, 2-hydroxy-2-methyl_1-phenylpropan-1-3 iso, 1 _Cyclohexylphenylmethyl-8, 2,2-dimethoxy-2-phenylacetophenone, 2-methyl- [4 '-(fluorenylthio) phenyl] -2-morphine Isopropyl S and 2_octyl_2 ~~ Diamidoaminomorphinylphenyl) _Butan-1-one; Aromatic compounds or azide compounds such as azoisobutyronitrile and 4-azide Benzene; organic sulfur compounds such as mercaptan disulfide; organic peroxides such as benzamidine peroxide, di-third butyl peroxide, third butyl hydroperoxide, cumene hydroperoxide, and p-methane Hydrogen peroxide; trihalomethanes such as 1,3-pyrene (trichlorofluorenyl) -5-(2'-chlorophenyl) -1,3,5-Sanken and 2- [2- (2-furan Group) ethylenyl] -4,6-pyrene (trifluoromethyl) -1,3,5-trio and imidazole binary such as 2,2'-pyrene (2-chlorophenyl) -4,5 , 4 ', 5'-tetraphenyl-1,2, -biimidazole. These radiation polymerization initiators may be used alone or in combination of two or more. (Solvent) The composition of the present invention usually contains a solvent. The preferred solvent is a solvent that has good affinity for inorganic particles and good solubility for the binder resin, can provide appropriate viscosity to the obtained composition, and is easy to vaporize and remove when dried. Specific examples of solvents include ketones such as diethylfluorenone, methyl butyl ketone dipropane 18 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 methyl ketone and cyclohexanone; alcohols such as n-pentanol, 4 -fluorenyl-2 -pentyl alcohol, cyclic and diacetone alcohol; ether-based alcohols such as ethylene glycol monomethyl ether, ethylene diethylene bond, ethylene glycol monobutyl bond, propylene glycol monofluorene and propylene glycol monoethyl alcohol Bonded saturated aliphatic monocarboxylic acid alkyl esters such as n-butyl acetate and pentyl acetate esters such as ethyl lactate and n-butyl lactate; and ether-based esters such as fluorenyl acetate lysinolysin, ethyl acetate Fibrinolysin, propylene glycol acetate, and ethyl 3-ethoxypropionate. These solvents may be used alone or in combination of two or more. The proportion of the solvent in the composition of the present invention is preferably from 5 to 30 parts by weight based on 100 parts by weight of the inorganic particles per 100 parts by weight of the inorganic particles from the viewpoint of maintaining the viscosity of the composition in the range. In addition to the aforementioned main components, the composition of the present invention may contain various agents as optional ingredients. Such additives are, for example, a tackifier, a surface control agent, a stabilizer, and an antifoaming agent. A composition for forming a dielectric layer as a composition containing inorganic particles. A preferred embodiment includes, for example, a composition including 100 parts by weight of the mixture and 50 to 80% by weight of lead oxide and 5-weight. Specific boron oxide, 0-20% by weight zinc oxide, 0-10% by weight oxygen, and 0 _ 1 0% by weight silicon oxide as inorganic particles (glass powder); 10-30 parts by weight of butyl acrylate Ester / Methyl Acrylic 2-Ethyl :! Ester / Hydroxypropyl Methacrylate Copolymer as Binder Resin; 0 · 1-10 parts by weight than diglycerol oleate as specific compounds; 5-30 parts by weight Propylene glycol monomethyl ether and / or ethyl 3-ethoxypropionate were used as solvents. The composition of the present invention can be prepared by using a kneader such as a roller kneader, mixing 312 / Invention Specification (Supplement) / 93-05 / 93103730 hexanol alcohol one; no; milk examples [ether, seed or preferably 40. Mouth Tension Example 3 0% Aluminium Alcohol and Ester Mixer 19 200423177 or homomixer, prepared by kneading the aforementioned inorganic particles, binder resins, specific aliased solvents and optional ingredients. The composition of the present invention thus prepared is a fluid paste composition suitable for coating, and generally has a viscosity of 1,000 to 30,000 cp and 3,000 to 10,000 cp. The composition of the present invention may be particularly advantageous. It is used to make transfer film (this transfer E transfer film), which will be described in detail later. The composition of the present invention is also preferably used for a conventional method for forming a thin film-forming material, in other words, a method for directly coating the composition on a substrate surface by a screen printing method and drying the coating film to form a thin film-forming material. (Transfer Film) The transfer film of the present invention is a composite film which can be advantageously used in the steps of manufacturing a component element, particularly in the step of manufacturing a dielectric layer, by applying a composition on a base film and drying the coating. Film to form a thin film layer. In other words, the transfer film of the present invention is formed from a base film with a film-forming material layer formed thereon, and contains inorganic particles, a binder resin, and a compound. The transfer film of the present invention can be a thin film (stacked body), which is prepared by coating the composition of the present invention on a photoresist film after forming a resist film on a base film, and drying the coated film. In addition, the transfer film of the present invention can be a radiation-sensitive transfer film composed of a radiation-sensitive inorganic composition. (1) Structure of transfer film:

圖2 A為顯示本發明之經輥軋之轉印膜之示意剖面I 312/發明說明書(補件)/93-05/93103730 物、 之 較佳 1之 層 面以 PDP 本發 性材 種薄 定化 述光 及乾 粒子 20 200423177 以及圖2 B為顯示轉印膜構造層之剖面圖((X )部分之細節 視圖)。 圖2所示轉印膜為一種複合膜,該複合膜可用於形成組 成P D P之介電層作為本發明之轉印膜範例。通常轉印膜之 組成為一基底膜F 1 ; —薄膜生成性材料層F 2,其係生成於 基底膜F 1表面上且可被撕離;以及一覆蓋膜F 3 .,其係設 置於薄膜生成性材料層F 2表面上且容易被撕離。根據薄膜 生成性材料層F 2之性質可未使用覆蓋膜卩3。 組成轉印膜之基底膜F 1較佳為具有耐熱性及耐溶劑性 且有撓性之樹脂膜。當基底膜F 1具有撓性時,膏狀組成物 (本發明組成物)可使用輥塗機、刮刀塗機等塗覆,因此可 形成有均勻厚度之薄膜生成性材料層,且將所形成之薄膜 生成性材料層以卷形式儲存與供應。 組成基底膜F 1之樹脂例如包括聚對苯二甲酸伸乙酯、 聚酯類、聚乙烯、聚丙烯、聚苯乙烯、聚醯亞胺類、聚乙 烯醇、聚氯乙烯、含氟樹脂類如聚氟乙烯、尼龍及纖維素。 基底膜F 1之厚度例如為2 0 - 1 0 0微米。 組成轉印膜之薄膜生成性材料層F 2為當烤乾時變成燒 結玻璃材料之層(介電層),且含有玻璃粉(無機粒子)、黏 結劑樹脂及特定化合物作為主要成分。 薄膜生成性材料層F 2之厚度係依據玻璃粉含量以及面 板類型及尺寸決定,但通常厚5 - 2 0 0微米且較佳厚1 0 - 1 0 0 微米。當厚度小於5微米時,最終生成之介電層厚度變過 小,而無法確保獲得載明之介電特性。通常當厚度為 1 0 - 1 0 0微米時,可充分確保大尺寸面板所要求的介電層厚 21 312/發明說明書(補件)/93-05/93103730 200423177 度。 組成轉印膜之覆蓋膜F 3為薄膜生成性材料層F 2 (與玻璃基板接觸面)之保護膜。此覆蓋膜F 3較佳為 樹脂膜。生成覆蓋膜F 3之樹脂例如為前述生成基> 之樹脂。覆蓋膜F 3之厚度例如為2 0 - 1 0 0微米。 (2 )轉印膜之製造方法: 本發明之轉印膜之製造方法,可經由形成薄膜生 料層(F 2 )於基底膜(F 1 )上,以及提供(加壓黏合)覆: 於薄膜生成性材料層(F 2 )上而製備。 一種形成薄膜生成性材料層之方法例如為塗覆本 之含有無機粒子、黏結劑樹脂、特定化合物及溶劑 物於基底膜上,以及乾燥該塗覆膜俾去除部分或全 之方法。 由厚度變大(例如2 0微米或以上),以及可有效; 有絕佳均勻厚度之塗覆膜觀點,塗覆本發明組成物 膜之方法較佳例如包括使用輥塗機之塗覆法、使用 覆機例如刮刀之塗覆法、使用簾塗機之塗覆法以及 塗機之塗覆法。 塗覆本發明組成物之基底膜表面使接受離型處理 佳。如此於轉印薄膜生成性材料層之後,基底膜容 膜生成性材料層撕離。 本發明組成物生成於基底膜上之塗覆膜,經乾燥 分或全部溶劑,且轉成組成轉印膜之薄膜生成性材 乾燥由本發明組成物製成之塗覆膜之條件包括4 0 -溫度及於約1 - 3 0分鐘時間。由對基板顯示粘黏性, 312/發明說明書(補件)/93-05/93103730 表面 有撓性 夜膜F1 成性材 篆膜(F 3 ) 發明 之組成 部溶劑 杉成具 於基底 到刀塗 使用線 係較 易由薄 去除部 料層。 1 5 0 °C 以及於 22 200423177 薄膜生成性材料層上顯示適當形狀保持性觀點,乾燥後殘 餘溶劑比例(溶劑於薄膜生成性材料層含量)通常為1 〇 %重 量比或以下,且較佳為0 . 1 - 5 %重量比。 較佳設置於(通常係加熱加壓黏合)如此生成之薄膜生 成性材料層上的覆蓋膜表面也接受離型處理。於轉印薄膜 生成性材料層之前,覆蓋膜易由薄膜生成性材料層撕離。 (3 )薄膜生成性材料層之轉印(轉印膜之用法) 基底膜上之薄膜生成性材料層轉印至基板全體表面 上。根據本發明之轉印膜,薄膜生成性材料層可透過如此 簡單的操作而確切形成於玻璃基板上。如此不僅可對形成 P D P組成元件(例如介電層)之步驟做改良(提升功效),同 時也可改良所生成之組成元件之品質(例如介電層顯示穩 定介電特性)。 P D P製法(1 )(介電層之形成) 本發明之P D P製法(1 )包含下列步驟:轉印組成本發明 轉印膜之薄膜生成性材料層至基板表面,以及烤乾該被轉 印的薄膜生成性材料層,來形成介電層於基板表面上。 轉印具有如圖2所示組成之轉印膜之薄膜生成性材料層 之步驟範例如後。 (1 )成卷形式之轉印膜切割成對應基板面積尺寸。 (2 )於由切割所得轉印膜之薄膜生成性材料層(F 2 )表面 上撕離覆蓋膜(F 3 )後,該轉印膜鋪於基板表面上,讓薄膜 生成性材料層(F 2 )表面接觸基板。 (3 )加熱輥移動於鋪於基板上之轉印膜上方,俾加熱加 壓黏合該轉印膜。 23 312/發明說明書(補件)/93-05/93103730 200423177 (4 )撕離基底膜(F 1 ),由藉加熱加壓黏合而固定於基板 之薄膜生成性材料層(F 2 )移出基底膜(F 1 )。 基底膜(F 1 )上之薄膜生成性材料層(F 2 )係藉前述操作 而轉印至基板。轉印條件包括加熱輥表面溫度6 0 - 1 2 0 °C , 加熱輥•壓力1 - 5千克/平方厘米及加熱輥移動速度 0 . 2 - 1 0 . 0米/分鐘。此項操作(轉印步驟)可使用層合機進 行。基板經過預熱,預熱溫度設定為例如4 〇 - 1 0 0 °C 。 轉印至基板表面之薄膜生成性材料層(F 2 )係藉烤乾而 轉成經燒結之無機材料(介電層)。烤乾方法為例如放置其 上已轉印薄膜生成性材料層(F 2 )之基板於高溫氣氛之方 法。如此,薄膜生成性材料層(F 2 )所含之有機材料(例如黏 結劑樹脂、殘餘溶劑、特定化合物及各種添加劑)被分解去 除,無機粒子經過熔化與燒結。燒結溫度係依據基板之熔 點、薄膜生成性材料層之組成元件等而改變,但燒結溫度 例如為3 0 0 - 8 0 0 °C ,且較佳為4 0 0 - 6 2 0。(:。 P D P製法(2 )(利用光阻劑方法形成組成元件) 本發明之P D P製法(2 )包括下列步驟:轉印組成本發明 之轉印膜之薄膜生成性材料層至基板;形成光阻膜於轉印 後之薄膜生成性材料層上;曝光該光阻膜而形成光阻圖案 之潛像;顯影光阻膜而形成光阻圖案;蝕刻薄膜生成性材 料層而形成對應於光阻圖案之圖案層;以及烤乾該圖案層 而形成一種選自阻擋肋、電極、電阻器、介電層、磷光體、 彩色濾光片及黑矩陣中之組成元件。 另外,本發明之製法(2 )包括下列步驟:形成光阻膜以 及得自本發明之含有無機粒子所得之組成物之薄膜生成性 24 312/發明說明書(補件)/93-05/93103730 200423177 材料層於一基底膜上之積層膜;轉印該形成於基底膜上之 積層膜至基板表面;曝光組成該積層膜之光阻膜而形成光 阻圖案之潛像;顯影該光阻膜而形成光阻圖案;蝕刻薄膜 生成性材料層而形成對應於光阻圖案之圖案層;以及烤乾 該圖案層而形成一種選自阻擔肋、電極、電阻器、介電層、 磷光體、彩色濾光片及黑矩陣中之組成元件。 一種形成「阻擋肋」作為PDP組成元件於基板背面之方 法將說明如後。此種方法包含(1 )轉印薄膜生成性材料層步 驟,(2 )形成光阻膜步驟,(3 )曝光光阻膜步驟,(4 )顯影光 阻膜步驟,(5 )钱刻薄膜生成性材料層步驟,以及(6 )烤乾 阻擋肋圖案步驟,因而形成阻擋肋於基板表面上。 圖3及圖4各自為示意剖面圖,顯示一系列生成阻擋肋 之步驟。圖3及圖4中,1 1表示玻璃基板,於玻璃基板上 以均等間隔校準產生電漿,以及介電層1 3形成於玻璃基板 11表面上因而覆蓋基板12。 本發明中,「轉印薄膜生成性材料層至基板」之具體例 不僅包括轉印薄膜生成性材料層至玻璃基板1 1表面之具 體例,同時也包括轉印薄膜生成性材料層至介電層1 3表面 之具體例。 (1 )轉印薄膜生成性材料層步驟: 轉印薄膜生成性材料層之步驟範例顯示如後。 如圖3 B所示,於撕離轉印膜之覆蓋膜(圖中未顯示)後, 轉印膜2 0鋪於介電層1 3表面上,讓薄膜生成性材料層2 1 表面接觸介電層1 3表面,轉印膜2 0藉加熱輥等而加熱加 壓黏合,以及基底膜2 2隨後被撕離而由薄膜生成性材料層 25 312/發明說明書(補件)/93-05/93103730 200423177 2 1去除。如此如圖3 C所示,薄膜生成性材料層2 1被轉印 且緊密黏合至介電層1 3表面。轉印條件包括加熱輥表面溫 度8 0 - 1 4 0 °C ,加熱輥壓力1 - 5千克/平方厘米及加熱輥移 動速度0 . 1 - 1 0 . 0米/分鐘。玻璃基板1 1可經預熱,預熱溫 度可設定為例如4 0 - 1 0 0 °C 。 (2 )生成光阻膜之步驟: 本步驟中,如圖3 D所示,光阻膜3 1形成於經轉印之薄 膜生成性材料層2 1表面上。組成光阻膜3 1之光阻可為任 一種正型光阻及負、型光阻。 光阻膜3 1可藉多種方法包括網印法、輥塗法、旋塗法 及鑄塗法等塗覆光阻,以及乾燥塗覆膜而形成。塗覆膜之 乾燥溫度通常為約6 0 - 1 3 0 °C 。 形成於基底膜上之光阻膜可藉轉印於薄膜生成性材料 層2 1表面而製成。根據此種形成方法,不僅可減少光阻膜 之形成步驟數目,同時所得光阻也具有絕佳厚度均句度。 如此,可一致地進行光阻膜之顯影,及薄膜生成性材料層 之#刻,因此生成之阻擋肋高度及形狀變均勻。 光阻膜3 1通常厚0 . 1 - 4 0微米且較佳0 . 5 - 2 0微米。 (3 )光阻膜曝光步驟 本步驟中,如圖3 E所示,形成於薄膜生成性材料層2 1 上之光阻膜3 1表面透過曝光罩Μ而以紫外光等輻射選擇性 照射(曝光)來形成光阻圖案潛像。本圖中,Μ Α及Μ Β分別 表示由曝光罩Μ所形成之透光部及遮光部。 紫外光照射裝置並無特殊限制,但可為用於微影術之紫 外光照射裝置,以及用於半導體及液晶顯示裝置製造用之 26 312/發明說明!··(補件)/93-05/93103730 200423177 曝光裝置。 當藉轉印而形成光阻膜時,較佳係於覆蓋於光阻膜之上 的基底膜未被撕離之狀態下進行曝光步驟。 (4 )光阻膜顯影步驟 本步驟中,曝光後之光阻膜經顯影來形成光阻圖案(潛 像)。 有關顯影條件,顯影溶液之類別、調配物及濃度、顯影 時間、顯影溫度、顯影方法(例如浸沒法、搖擺法、喷淋法、 噴霧法及攪煉法)、顯影裝置等可根據光阻膜3 1之類別等 適當選用。 由光阻剩餘部分3 5 A及光阻去除部分3 5 B所組成之光阻 圖案3 5 (對應於曝光罩Μ之圖案),係藉本顯影步驟形成, 如圖4 F顯示。 此光阻圖案3 5係作為隨後步驟(蝕刻步驟)之蝕刻罩, 光阻剩餘部分3 5之組成材料(光硬化光阻)於蝕刻溶液須 具有比薄膜生成性材料層2 1之組成材料更低的溶解速率。 (5 )薄膜生成性材料層蝕刻步驟: 本步驟中,薄膜生成性材料層經蝕刻而形成對應於光阻 圖案之阻擋肋圖案層。 換言之,如圖4 G所示,對應薄膜生成性材料層2 1之對 應光阻材料3 5之光阻去除部分3 5 Β之部分係溶解於蝕刻溶 液且被選擇性去除。圖4G顯示蝕刻中之狀態。 當進一步持續蝕刻時,如圖4Η所示,薄膜生成性材料 層21之預定部分完全被去除,因而暴露出介電層13。如 此形成由材料層剩餘部分2 5 Α及材料層去除部分2 5 Β所組 27 312/發明說明書(補件)/93-05/93103730 200423177 成之阻擋肋圖案層2 5。 有關蝕刻條件,蝕刻溶液之類別、調配物及濃度、處理 時間、處理溫度、處理方法(例如浸沒法、搖擺法、喷淋法、 噴霧法及擾煉法)、處理裝置等可根據薄膜生成性材料層 2 1之類型等適當選用。 光阻膜3 1類別及薄膜生成性材料層2 1類別經選擇,讓 顯影步驟使用之顯影溶液之相同溶液用作為蝕刻溶液,因 此可連續進行顯影步驟及蝕刻步驟,以及因製造步驟之減 化而改良製造效率。 較佳組成光阻圖案3 5之光阻剩餘部分3 5 A係藉蝕刻逐 漸溶解,而當阻擋肋圖案層2 5生成時(蝕刻完成時)完全被 去除。 即使蝕刻後剩餘部分或全部光阻剩餘部分3 5 A,光阻剩 餘部分3 5 A係於隨後之烤乾步驟被去除。 (6 )阻擋肋圖案層烤乾步驟: 於本步驟,阻擋肋係經由烤乾阻擋肋圖案層2 5而形成。 如此材料層其餘部分2 5 A之有機物質被燒掉而形成阻擋 肋。如圖4 I所示,於具有阻擋肋4 0形成於介電層1 3表面 上之面板材料5 0,由阻擋肋4 0 (衍生自材料層去除部分2 5 B 之阻擋肋)形成之空間係作為電漿工作空間。 烤乾溫度須為材料層剩餘部分2 5 A之有機物質被燒掉之 溫度,且通常為4 0 0 - 6 0 0 °C。烤乾時間通常為1 0 - 9 0分鐘。 P D P製法(3 )(利用光阻法之較佳具體例) 本發明之P D P製法(3 )非僅囿限於圖3及圖4所示方法。 其它形成P D P組成元件之較佳方法(P D P製法(3 ))例如為 28 312/發明說明書(補件)/93-05/93103730 200423177 包含如下步驟(1 )至(3 )之形成方法。 (1 )於形成光阻膜於基底膜後,本發明之含有無機粒子 之組成物塗覆於光阻膜上,且經乾燥而積層且形成薄膜生 成性材料層。於形成光阻膜及薄膜生成性材料層時,可使 用輥塗機等,因此可形成具有絕佳均句厚度之積層膜於基 底膜上。 (2 )由光阻膜及薄膜生成性材料層於基底膜上組成之積 層膜被轉印至基板。轉印條件係如前文「薄膜生成性材料 層轉印步驟」所述之條件相同。 (3 )進行於前文說明之「光阻膜曝光步驟」、「光阻膜顯 影步驟」、「薄膜生成性材料層蝕刻步驟」及「阻擋肋圖案 層烤乾步驟」所述相同操作。此等操作期間如前文說明, 較佳光阻膜之顯影溶液係與薄膜生成性材料層之蝕刻溶液 相同,以及連續進行「光阻膜顯影步驟」及「薄膜生成性 材料層4虫刻步驟」。 根據前述方法,因薄膜生成性材料層及光阻膜係轉印至 基板全體上,故藉簡化步驟可更進一步改良製造效率。 P D P製法(4 )(使用輻射敏感性轉印膜形成組成元件) 本發明之P D P製法(4 )包括下列步驟:轉印組成本發明 之輻射敏感性轉印膜之薄膜生成性材料層至基板;曝光該 薄膜生成性材料層而形成圖案潛像;顯影該薄膜生成性材 料層而形成圖案層;以及烤乾該圖案層而形成一種選自阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣中之組成元件。 本方法中,以阻擋肋形成方法為例,於前述「薄膜生成 29 312/發明說明書(補件)/93-05/93103730 200423177 性材料層轉印步驟」之後,圖案層係於根據「阻擋膜曝光 步驟」及「光阻膜顯影步驟」之條件下形成。隨後,阻擋 肋係藉「阻擋肋圖案烤乾步驟」而形成於基板表面上。 形成「阻擋肋」作為P D P組成元件之方法已經說明於P D P 製法(1 )至(4 )之個別步驟之解說。根據此種方法可形成個 別組成PDP之電極、電阻器、介電層、磷光體、彩色濾光 片及黑矩陣。 將參照下列實施例說明本發明之細節,但需瞭解本發明 絕非囿限於此。實施例及比較例中,全部「份數」為「份 數重量比」。 (實施例) (1 )玻璃膏狀組成物(含有無機粒子組成物)之製備 具有黏度3,400 cp(藉B型黏度計於30 rpm測定)之本 發明組成物係藉下述方式製備:使用分散混合器捏合1 0 0 份以P b 0 - B2 03 - S i 02為主之混合物(軟化點5 0 0 °C )(其組成 包含7 0 %重量比氧化鉛,1 0 %重量比氧化硼及2 0 %重量比氧 化矽),15份曱基丙烯酸丁酯/甲基丙烯酸2-乙基己酯/曱 基丙烯酸羥基丙酯共聚物(重量比:3 0 / 6 0 / 1 0,重量平均分 子量:1 5 0,0 0 0 )作為黏結劑樹脂,5份油酸二甘油酯作為 特定化合物,8 · 7份丙二醇一曱醚作為溶劑及1 3 . 1份3 -乙氧基丙酸乙酯而製備。 (2 )轉印膜之製造與評估(撓性及操控性質): 如上(1 )製備之本發明組成物使用刮刀塗覆機塗覆於聚 對苯二曱酸伸乙酯(P E T )製成且先前接受離型處理之基底 膜上(寬:4 0 0毫米,長:3 0米,厚:3 8微米)形成之塗覆 30 312/發明說明補件)/93-05/93103730 200423177 膜於8 0 °C乾燥5分鐘來去除溶劑。如此形成厚5 0微 薄膜生成性材料層於基底膜上。先前接受離型處理之 製成之覆蓋膜(寬:4 0 0毫米,長:3 0米,厚:3 8微3 著於薄膜生成性材料層來製造本發明之轉印膜,具有 所示構造。 所得轉印膜具有柔軟性,容易捲取。此外,即使轉 被彎曲,彎曲也不會於薄膜生成性材料層表面造成裂爽 曲裂開),薄膜生成性材料層具有絕佳撓性。 覆蓋膜由轉印膜撕離,轉印膜(由基底膜及薄膜生¥ 材料層組成之層合物)鋪於玻璃基板上,而未施壓,讓 生成性材料層表面接觸玻璃基板表面,然後轉印膜由 基板表面撕離。結果薄膜生成性材料層顯示對玻璃基 適當沾黏性,轉印膜可被撕離而未造成薄膜生成性材 之凝聚破損。因此轉印膜有良好操控性質。 (3 )薄膜生成性材料層之轉印 於覆蓋膜由如上(2 )所得之轉印膜撕離之後,轉印® 基底膜及薄膜生成性材料層組成之層合物)鋪於2 1 口寸 之玻璃基板上,讓薄膜生成性材料層表面接觸玻璃基 面(匯流排電極固定面),使用加熱報於加熱下加壓黏 加壓黏合條件包括加熱輥表面溫度9 0 °C ,輥壓力2千 平方厘米及加加熱輥移動速度0 , 6米/分鐘。 於加熱下加壓黏合完成後,基底膜被撕離,且由固哀 熱黏合固定)至玻璃基板表面之薄膜生成性材料層去1¾ 此完成薄膜生成性材料層的轉印。 於本轉印步驟,當基底膜撕離時,不會造成薄膜生 312/發明說明書(補件)/93-05/93103730 长之 PET i )黏 圖2 印膜 “彎 "生 薄膜 玻璃 板之 料層 U由 面板 板表 合0 克/ :(加 •,因 成性 31 200423177 材料層的凝聚破損,有夠高之薄膜強度。此外,轉印後之 薄膜生成性材料層對玻璃基板表面有良好黏著性。 (4 )薄膜生成性材料層之烤乾(介電層之生成): 如上(3 )生成之其上已經轉印薄膜生成性材料層之玻璃 基板置於窯内,經由升高窯内部溫度至6 2 0 °C進行烤乾, 而形成燒結玻璃材料製成之非發色透明介電層於玻璃基板 表面上。 本介電層厚度(平均厚度及公差)經測定,發現係為3 0 微米± 0 . 4微米之範圍。如此介電層有絕佳厚度均勻度。 所得介電層表面使用非接觸式厚度計(N Η - 3,李歐可俠 (Ryokosha)公司製造)接受三維測量,俾根據JIS標準 (B 0 6 0 1 )測定表面粗度(R a, R y, R z )。結果,介電層具有 R a = 0 · 0 8微米,R y = 0 · 5 6微米及R z = 0 . 2 8微米,故具有絕佳 表面平坦度。 此外,測定如此所得介電層之透光比(測量波長:5 5 0奈 米),且發現為9 3 %。如此證實介電層具有良好透明度。 (比較例) 以實施例之相同方式製備具有黏度3,0 0 0 c p (使用B型 黏度計於3 0 r p m測定)之組成物,但將黏結劑樹脂比例改 變成1 7份,以及使用4份壬二酸-二-2 -乙基己酯來替代該 特定化合物。使用所得組成物,轉印膜以實施例之相同方 式製造及評估。結果轉印膜有絕佳撓性及操控·性質。但以 實施例之相同方式製造介電層,及測量表面粗度(Ra, Ry , R z )。結果介電層具有R a = 0 · 6 5微米,R y = 2 . 5 1微米及 R z = 1 . 7 3微米,故表面平坦度低劣。 32 312/發明說明書(補件)/93-05/93103730 200423177 本發明組成物可獲得下列效果。 (1 )適合形成具有絕佳表面平坦度之P D P組成元件(例如阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣)。 (2 )適合形成有高透光比之燒結玻璃料(例如組成P D P之介 電層或阻擋肋)。 (3 )可製造就薄膜生成性材料層而言有絕佳撓性之轉印膜。 (4 )可製造就薄膜生成性材料層而言有絕佳轉印能力(加熱 黏合至基板)之轉印膜。 本發明之轉印膜可獲得下列優點。 (1 )可有效形成具有絕佳P D P表面平坦度之組成元件(特別 為介電層)。 (2 )就其薄膜生成性材料層而言,撓性絕佳,薄膜生成性材 料層表面不含彎曲裂開(裂痕)。 (3 )柔軟度絕佳而容易捲取。 (4 )就其薄膜生成性材料層而言,黏著性適當且操控性質良 好。 (5 )就其薄膜生成性材料層而言轉印性(加熱黏合至基板) 絕佳。 本發明之製造方法可獲得下列效果。 (1 ) 有效形成具有絕佳表面平坦度之P D P組成元件(例如 阻擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及 黑矩陣)。 (2) 可有效形成具有組成元件之高度位置準確度之PDP。 (3) 可有效形成有大厚度之介電層。 33 312/發明說明書(補件)/93-05/93103730 200423177 (4 ) 可有效形成大尺寸面板所需之介電層。 (5 ) 可有效形成P D P其設置有具有絕佳厚度均勻度及表 面平坦度之介電層。 【圖式簡單說明】 圖1為顯示交流型電漿顯示面板之截面形狀之示意圖。 圖2A為顯示本發明之轉印膜之示意剖面圖;以及圖2B 為顯示轉印膜之層狀組成之剖面圖。 圖3 A〜E為顯示於本發明之製法中形成阻擋肋之各步驟 (轉印步驟、光阻膜形成步驟及曝光步驟)之示意剖面圖。 圖4 F〜I為顯示於本發明之製法中形成阻擋肋之各步驟 (顯影步驟、蝕刻步驟及烤乾步驟)之示意剖面圖。 (元件符號說明) 1 玻璃基板 2 玻璃基板 3 阻擋肋 4 透明電極 5 匯流排電極 6 定址電極 7 螢光材料 ' 8 介電層 9 介電層 10 保護層 11 玻璃基板 12 電極 13 介電層 34 312/發明說明書(補件)/93-05/93103730 200423177 20 轉 印 膜 21 薄 膜 生 成 性 材 料 層 22 基 底 膜 25 阻 擋 肋 圖 案 層 25A 材 料 層 剩 餘 部 分 25B 材 料 層 去 除 部 分 31 光 阻 膜 35 光 阻 圖 案 35A 光 阻 剩 餘 部 分 35B 光 阻 去 除 部 分 40 阻 擋 肋 50 面 板 材 料 F1 基 底 膜 F2 薄 膜 生 成 性 材 料 層 F3 覆 蓋 膜 Μ 曝 光 罩 ΜΑ 透 光 部 MB 遮 光 部 35 312/發明說明書(補件)/93-05/93103730Figure 2 A is a schematic cross-section of a rolled transfer film of the present invention I 312 / Invention Specification (Supplement) / 93-05 / 93103730, the best, the first layer is thinly set with PDP material The light and dry particles 20 200423177 and FIG. 2B are sectional views (detailed views of part (X)) showing the structure layer of the transfer film. The transfer film shown in Fig. 2 is a composite film which can be used to form a dielectric layer composed of P D P as an example of the transfer film of the present invention. Generally, the composition of the transfer film is a base film F 1; a thin film-forming material layer F 2, which is formed on the surface of the base film F 1 and can be peeled off; and a cover film F 3. The thin film-forming material layer F 2 is easily peeled off on the surface. The cover film 薄膜 3 may not be used depending on the properties of the thin film generating material layer F2. The base film F1 constituting the transfer film is preferably a resin film having heat resistance, solvent resistance, and flexibility. When the base film F 1 is flexible, the paste-like composition (the composition of the present invention) can be applied using a roll coater, a blade coater, or the like, so that a film-forming material layer having a uniform thickness can be formed, and the formed The thin film-forming material layer is stored and supplied in a roll form. The resin constituting the base film F 1 includes, for example, polyethylene terephthalate, polyesters, polyethylene, polypropylene, polystyrene, polyimide, polyvinyl alcohol, polyvinyl chloride, and fluorine-containing resins. Such as polyvinyl fluoride, nylon and cellulose. The thickness of the base film F 1 is, for example, 20 to 100 μm. The thin film generating material layer F 2 constituting the transfer film is a layer (dielectric layer) that becomes a frit glass material when baked, and contains glass powder (inorganic particles), a binder resin, and a specific compound as main components. The thickness of the thin film-generating material layer F 2 is determined according to the glass frit content and the type and size of the panel, but it is usually 5 to 200 micrometers and preferably 10 to 100 micrometers. When the thickness is less than 5 micrometers, the thickness of the resulting dielectric layer becomes too small, and the specified dielectric characteristics cannot be ensured. Generally, when the thickness is 10 to 100 microns, the required dielectric layer thickness of a large-size panel can be sufficiently ensured. 21 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 degrees. The cover film F 3 constituting the transfer film is a protective film of the thin film generating material layer F 2 (a contact surface with the glass substrate). This cover film F 3 is preferably a resin film. The resin that forms the cover film F 3 is, for example, the resin of the aforementioned formation group>. The thickness of the cover film F 3 is, for example, 20 to 100 μm. (2) Manufacturing method of the transfer film: The manufacturing method of the transfer film of the present invention can be formed by forming a thin film raw material layer (F 2) on the base film (F 1) and providing (pressure bonding) a cover: It is prepared on a thin film generating material layer (F 2). A method for forming a thin film-generating material layer is, for example, a method of coating the base film containing inorganic particles, a binder resin, a specific compound, and a solvent, and drying the coating film to remove a part or the whole. From the point that the thickness becomes large (for example, 20 microns or more) and can be effective; from the viewpoint of a coating film with excellent uniform thickness, the method of coating the composition film of the present invention preferably includes, for example, a coating method using a roll coater, A coating method using a coater such as a doctor blade, a coating method using a curtain coater, and a coating method using a coater. The surface of the base film coated with the composition of the present invention is preferably subjected to a release treatment. After the film-forming material layer is transferred in this manner, the base film-capacitive film-forming material layer is torn off. The coating film formed by the composition of the present invention on the base film is dried or completely solvent, and converted into a film forming material constituting the transfer film. The conditions for drying the coating film made of the composition of the present invention include 40- Temperature and at about 1-30 minutes. 312 / Invention Specification (Supplement) / 93-05 / 93103730 shows flexible night film F1 on the surface of the substrate, and a flexible material film (F 3), which is a component of the invention. It is easier to remove the material layer by thinning using a thread system. 1 50 ° C and 22 200423177 on the film-forming material layer show an appropriate shape retention, the residual solvent ratio after drying (solvent-to-film-forming material layer content) is usually 10% by weight or less, and is preferred It is from 0.1 to 5% by weight. The surface of the cover film, which is preferably provided on the film-generating material layer (usually, pressure-bonded by heating), is also subjected to a release treatment. Before the film-forming material layer is transferred, the cover film is easily peeled off from the film-forming material layer. (3) Transfer of the thin film generating material layer (use of the transfer film) The thin film generating material layer on the base film is transferred onto the entire surface of the substrate. According to the transfer film of the present invention, the thin film-forming material layer can be accurately formed on the glass substrate by such a simple operation. In this way, not only can the steps of forming the P D P component elements (such as the dielectric layer) be improved (improving the efficiency), but also the quality of the generated component elements (such as the dielectric layer showing stable dielectric characteristics) can be improved. PDP Manufacturing Method (1) (Formation of Dielectric Layer) The PDP manufacturing method (1) of the present invention includes the following steps: transferring a film-forming material layer constituting the transfer film of the present invention to a substrate surface, and drying the transferred A thin film of a material layer is formed to form a dielectric layer on the surface of the substrate. The procedure of transferring a thin film-forming material layer having a transfer film having the composition shown in Fig. 2 is as follows. (1) The transfer film in the form of a roll is cut to correspond to the area size of the substrate. (2) After the cover film (F 3) is peeled off from the surface of the film-forming material layer (F 2) of the transfer film obtained by cutting, the transfer film is spread on the surface of the substrate to allow the film-forming material layer (F 2) The surface contacts the substrate. (3) The heating roller is moved over the transfer film spread on the substrate, and the transfer film is heated and pressed to bond the transfer film. 23 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 (4) The base film (F 1) is peeled off, and the film-forming material layer (F 2) fixed to the substrate by heating and pressure bonding is removed from the substrate Film (F 1). The thin film generating material layer (F 2) on the base film (F 1) is transferred to the substrate by the aforementioned operation. The transfer conditions include a surface temperature of the heating roller of 60 to 120 ° C, a heating roller pressure of 1 to 5 kg / cm2, and a moving speed of the heating roller of 0.2 to 10.0 m / min. This operation (transfer step) can be performed using a laminator. The substrate is preheated, and the preheating temperature is set to, for example, 4 0-100 ° C. The thin film generating material layer (F 2) transferred to the substrate surface is converted into a sintered inorganic material (dielectric layer) by baking. The baking method is, for example, a method in which a substrate on which the film-forming material layer (F 2) has been transferred is placed in a high-temperature atmosphere. In this way, the organic materials (such as the binder resin, residual solvents, specific compounds, and various additives) contained in the thin film-forming material layer (F 2) are decomposed and removed, and the inorganic particles are melted and sintered. The sintering temperature varies depending on the melting point of the substrate, the constituent elements of the thin film-forming material layer, etc., but the sintering temperature is, for example, 3 0-8 0 ° C, and preferably 4 0-6 2 0. (:. PDP manufacturing method (2) (using a photoresist method to form a component) The PDP manufacturing method (2) of the present invention includes the following steps: transferring a thin film-generating material layer constituting the transfer film of the present invention to a substrate; forming light The photoresist film is on the film-forming material layer after the transfer; the photoresist film is exposed to form a latent image of the photoresist pattern; the photoresist film is developed to form the photoresist pattern; A patterned pattern layer; and drying the patterned layer to form a constituent element selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix. In addition, the manufacturing method of the present invention ( 2) Including the following steps: forming a photoresist film and a film-forming property of the composition obtained from the present invention containing inorganic particles 24 312 / Invention (Supplement) / 93-05 / 93103730 200423177 Material layer on a base film Laminated film; transfer the laminated film formed on the base film to the substrate surface; expose the photoresist film constituting the laminated film to form a latent image of the photoresist pattern; develop the photoresist film to form the photoresist pattern; Forming a patterning layer corresponding to the photoresist pattern by forming a layer of a material; and drying the pattern layer to form a pattern selected from the group consisting of a rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix A method of forming a "barrier rib" as a PDP component on the back of the substrate will be described later. This method includes (1) a step of transferring a thin film generating material layer, and (2) a step of forming a photoresist film. (3) a step of exposing the photoresist film, (4) a step of developing the photoresist film, (5) a step of engraving the film-forming material layer, and (6) a step of drying the barrier rib pattern, thereby forming a barrier rib on the surface of the substrate. Fig. 3 and Fig. 4 are schematic cross-sectional views each showing a series of steps for generating the barrier ribs. In Fig. 3 and Fig. 4, 11 denotes a glass substrate, and the plasma is aligned at regular intervals on the glass substrate to generate a plasma, and the dielectric layer 1 3 is formed on the surface of the glass substrate 11 so as to cover the substrate 12. In the present invention, specific examples of the "transfer film-forming material layer to the substrate" include not only the specific transfer of the film-forming material layer to the surface of the glass substrate 1 1 Examples include specific examples of transferring the film-forming material layer to the surface of the dielectric layer 13. (1) Steps of transferring the film-forming material layer: Examples of the steps of transferring the film-forming material layer are shown below. As shown in FIG. 3B, after the cover film (not shown) of the transfer film is peeled off, the transfer film 20 is laid on the surface of the dielectric layer 13 so that the surface of the thin film generating material layer 2 1 is in contact with the dielectric. The surface of the layer 1 3, the transfer film 20 is bonded by heating and pressure by a heating roller, etc., and the base film 2 2 is then torn off and a film-forming material layer 25 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 2 1. As shown in FIG. 3C, the thin film generating material layer 21 is transferred and tightly adhered to the surface of the dielectric layer 13. The transfer conditions include a surface temperature of the heating roller of 80 to 140 ° C, a pressure of the heating roller of 1 to 5 kg / cm2, and a moving speed of the heating roller of 0.1 to 1.0 m / min. The glass substrate 11 can be preheated, and the preheating temperature can be set to, for example, 40-100 ° C. (2) Step of forming photoresist film: In this step, as shown in FIG. 3D, a photoresist film 31 is formed on the surface of the transferred film-forming material layer 21. The photoresist constituting the photoresist film 31 can be any of a positive type photoresistor and a negative type photoresistor. The photoresist film 31 can be formed by applying photoresist by various methods including screen printing method, roll coating method, spin coating method and cast coating method, and drying the coating film. The drying temperature of the coating film is usually about 60-130 ° C. The photoresist film formed on the base film can be formed by being transferred to the surface of the thin film generating material layer 21. According to this formation method, not only the number of steps of forming the photoresist film can be reduced, but also the obtained photoresist has excellent thickness uniformity. In this way, the development of the photoresist film and the #engraving of the thin film generating material layer can be performed uniformly, so the height and shape of the generated barrier ribs become uniform. The photoresist film 31 is usually 0.1 to 40 micrometers thick and preferably 0.5 to 20 micrometers. (3) Photoresist film exposure step In this step, as shown in FIG. 3E, the surface of the photoresist film 3 1 formed on the thin film generating material layer 2 1 passes through the exposure cover M and is selectively irradiated with radiation such as ultraviolet light ( Exposure) to form a latent image of the photoresist pattern. In this figure, Μ Α and Μ B respectively indicate a light transmitting portion and a light shielding portion formed by the exposure cover M. There is no special limitation on the ultraviolet light irradiation device, but it can be an ultraviolet light irradiation device used for lithography, and used for the manufacture of semiconductors and liquid crystal display devices. · (Supplement) / 93-05 / 93103730 200423177 Exposure device. When a photoresist film is formed by transfer, the exposure step is preferably performed in a state where the base film covering the photoresist film is not torn off. (4) Photoresist film development step In this step, the exposed photoresist film is developed to form a photoresist pattern (latent image). About the developing conditions, the type of the developing solution, the formulation and concentration, the developing time, the developing temperature, the developing method (such as the immersion method, the swing method, the spray method, the spray method and the agitation method), the developing device, etc. may be based on the photoresist film. 3 The categories such as 1 are appropriately selected. A photoresist pattern 3 5 (corresponding to the pattern of the exposure mask M) composed of the photoresist remaining portion 3 5 A and the photoresist removal portion 3 5 B is formed by this developing step, as shown in FIG. 4F. This photoresist pattern 35 is used as an etching cover in the subsequent step (etching step). The remaining material of the photoresist pattern 3 5 (light-curing photoresist) must have a composition in the etching solution more than that of the thin film generating material layer 21 Low dissolution rate. (5) Step of etching the thin film generating material layer: In this step, the thin film generating material layer is etched to form a barrier rib pattern layer corresponding to the photoresist pattern. In other words, as shown in Fig. 4G, a portion of the photoresist removing portion 3 5 B corresponding to the photoresist material 35 of the thin film generating material layer 21 is dissolved in the etching solution and selectively removed. FIG. 4G shows a state during etching. When the etching is continued further, as shown in FIG. 4 (a), a predetermined portion of the thin film-generating material layer 21 is completely removed, so that the dielectric layer 13 is exposed. In this way, a barrier rib pattern layer 25 composed of the remaining portion 2 5 A of the material layer and the removal portion 2 5 B of the material layer 27 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 is formed. Regarding the etching conditions, the type of the etching solution, the preparation and concentration, the processing time, the processing temperature, the processing method (such as the immersion method, the rocking method, the spray method, the spray method, and the scouring method), and the processing device can be determined according to the film formation properties The type of the material layer 21 is appropriately selected. Photoresist film 3 1 type and thin film generating material layer 2 1 type are selected so that the same solution of the developing solution used in the developing step is used as the etching solution, so the developing step and the etching step can be continuously performed, and the manufacturing steps can be reduced. And improve manufacturing efficiency. The remaining part 3 5 A of the photoresist pattern 35, which is preferably composed, is gradually dissolved by etching, and is completely removed when the barrier rib pattern layer 25 is formed (when the etching is completed). Even if the remaining part or all of the photoresist remaining part 3 5 A after the etching, the photoresist remaining part 3 5 A is removed in the subsequent baking step. (6) Drying step of the barrier rib pattern layer: In this step, the barrier rib system is formed by baking the barrier rib pattern layer 25. In this way, the organic matter in the remaining portion of the material layer 2 5 A is burned off to form barrier ribs. As shown in FIG. 4I, in the panel material 50 having the barrier rib 40 formed on the surface of the dielectric layer 13 and the space formed by the barrier rib 40 (the barrier rib derived from the material layer removal portion 2 5 B) Department as a plasma working space. The baking temperature must be the temperature at which the remaining 25 A of organic material in the material layer is burned out, and is usually 4 0-6 0 ° C. Baking time is usually 10-90 minutes. P D P production method (3) (a preferred specific example using a photoresist method) The P D P production method (3) of the present invention is not limited to the method shown in FIG. 3 and FIG. 4. The other preferred method for forming the P D P constituent element (P D P manufacturing method (3)) is, for example, 28 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177, which includes the following steps (1) to (3). (1) After the photoresist film is formed on the base film, the composition containing the inorganic particles of the present invention is coated on the photoresist film, and dried and laminated to form a film-forming material layer. When forming a photoresist film and a thin film-forming material layer, a roll coater or the like can be used, so that a laminated film having an excellent uniform thickness can be formed on the base film. (2) A laminated film composed of a photoresist film and a thin film generating material layer on a base film is transferred to a substrate. The transfer conditions are the same as those described in the above "Film-forming material layer transfer step". (3) Perform the same operations described in the "photoresist film exposure step", "photoresist film development step", "thin film-forming material layer etching step", and "barrier rib pattern layer baking step" described above. During these operations, as described above, the developing solution of the preferred photoresist film is the same as the etching solution of the thin film generating material layer, and the "photoresist film developing step" and the "film generating material layer 4 worming step" are continuously performed. . According to the aforementioned method, since the thin film generating material layer and the photoresist film are transferred to the entire substrate, the manufacturing efficiency can be further improved by simplifying the steps. PDP manufacturing method (4) (forming a component using a radiation-sensitive transfer film) The PDP manufacturing method (4) of the present invention includes the following steps: transferring a film-forming material layer constituting the radiation-sensitive transfer film of the present invention to a substrate; Exposing the thin film-generating material layer to form a pattern latent image; developing the thin film-generating material layer to form a pattern layer; and drying the pattern layer to form a layer selected from barrier ribs, electrodes, resistors, dielectric layers, and phosphors , The color filter and the components in the black matrix. In this method, taking the method of forming barrier ribs as an example, after the aforementioned "Thin Film Generation 29 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 Step of Transferring Material Layers", the pattern layer is based on the "Barrier Film It is formed under the conditions of "exposure step" and "photoresist film development step". Subsequently, the barrier ribs are formed on the surface of the substrate by a "barrier rib pattern baking step". The method of forming the "barrier rib" as a component of the P D P has been explained in the individual steps of the P D P manufacturing method (1) to (4). According to this method, electrodes, resistors, dielectric layers, phosphors, color filters, and black matrices that individually constitute a PDP can be formed. The details of the present invention will be described with reference to the following examples, but it should be understood that the present invention is by no means limited thereto. In Examples and Comparative Examples, all "parts" are "parts by weight ratio". (Examples) (1) Preparation of glass paste composition (composition containing inorganic particles) The composition of the present invention having a viscosity of 3,400 cp (measured by a B-type viscosity meter at 30 rpm) was prepared by the following method: Use a dispersing mixer to knead 100 parts of a mixture mainly composed of P b 0-B2 03-S i 02 (softening point 50 0 ° C) (its composition contains 70% by weight lead oxide, 10% by weight Boron oxide and 20% by weight silica), 15 parts of fluorenyl butyl acrylate / 2-ethylhexyl methacrylate / fluorenyl hydroxypropyl acrylate copolymer (weight ratio: 3 0/6 0/1 0 , Weight-average molecular weight: 150,000, 0) as a binder resin, 5 parts of diglyceryl oleate as a specific compound, 8.7 parts of propylene glycol monomethyl ether as a solvent, and 1 3.1 parts of 3-ethoxy Prepared with ethyl propionate. (2) Manufacture and evaluation of transfer film (flexibility and handling properties): The composition of the present invention prepared as above (1) is made by coating with polyethylene terephthalate (PET) using a doctor blade coater And coating 30 312 / invention supplementary film formed on the base film (width: 400 mm, length: 30 m, thickness: 38 micron) previously subjected to release treatment / 93-05 / 93103730 200423177 film Dry at 80 ° C for 5 minutes to remove the solvent. In this way, a 50 micron-thick film-forming material layer was formed on the base film. A cover film (width: 400 mm, length: 30 m, thickness: 3 8 micrometers) previously subjected to a release treatment is manufactured on a thin film-generating material layer to produce the transfer film of the present invention. Structure. The resulting transfer film is flexible and easy to wind up. In addition, even if it is bent, the bend will not cause cracks and cracks on the surface of the film-forming material layer), and the film-forming material layer has excellent flexibility . The cover film is peeled off by the transfer film, and the transfer film (a laminate composed of a base film and a thin film material layer) is laid on the glass substrate without applying pressure, so that the surface of the generative material layer contacts the surface of the glass substrate. The transfer film is then torn off from the substrate surface. As a result, the film-forming material layer showed proper adhesion to the glass substrate, and the transfer film could be peeled off without causing the film-forming material to be agglomerated and broken. Therefore, the transfer film has good handling properties. (3) Transfer of the thin film-generating material layer After the cover film is torn off from the transfer film obtained in (2) above, the laminate of the transfer® base film and the thin film-generating material layer is spread on 2 1 mouths On a glass substrate, the surface of the film-forming material layer should be in contact with the glass base surface (fixed surface of the bus electrode). The conditions of heating and pressing under heating and heating are used. The conditions include the surface temperature of the heating roller, 90 ° C, and the roller pressure. 2 thousand square centimeters and heating roller moving speed of 0,6 m / min. After the pressure-bonding is completed under heating, the base film is torn off and fixed to the thin film-generating material layer on the surface of the glass substrate by a thermal bonding method. This completes the transfer of the thin film-generating material layer. In this transfer step, when the base film is peeled off, it will not cause thin film 312 / Invention Manual (Supplement) / 93-05 / 93103730 long PET i) Figure 2 Printed film "bent " raw thin film glass plate" The material layer U is 0 g / from the panel surface: (plus •, due to the cohesive failure of the material layer 31 200423177, the film strength is high enough. In addition, the film-forming material layer after the transfer is on the surface of the glass substrate Good adhesion. (4) Drying of the thin film-generating material layer (generation of the dielectric layer): The glass substrate on which the thin film-generating material layer has been transferred as described above (3) is placed in a kiln, The internal temperature of the high kiln is roasted to 6 2 0 ° C, and a non-coloring transparent dielectric layer made of sintered glass material is formed on the surface of the glass substrate. The thickness (average thickness and tolerance) of the dielectric layer was measured and found The range is 30 micron ± 0.4 micron. In this way, the dielectric layer has excellent thickness uniformity. The surface of the obtained dielectric layer uses a non-contact thickness gauge (N Η-3, manufactured by Ryokosha). ) Accept three-dimensional measurement, 俾 according to JIS standard (B 0 6 0 1) Surface roughness (R a, R y, R z). As a result, the dielectric layer has R a = 0 · 0 8 micrometers, R y = 0 · 5 6 micrometers and R z = 0.2 8 micrometers, so it has absolute In addition, the transmittance of the dielectric layer (measurement wavelength: 5500 nm) was measured and found to be 93%. This confirmed that the dielectric layer had good transparency. (Comparative Example) Implementation Example A composition having a viscosity of 3,000 cp (measured at 30 rpm using a B-type viscometer) was prepared in the same manner, but the ratio of the binder resin was changed to 17 parts, and 4 parts of azelaic acid-di -2-Ethylhexyl ester instead of the specific compound. Using the resulting composition, the transfer film was manufactured and evaluated in the same manner as in the examples. As a result, the transfer film has excellent flexibility and handling and properties. The dielectric layer was manufactured in the same manner, and the surface roughness (Ra, Ry, Rz) was measured. As a result, the dielectric layer had Ra = 0 · 6 5 microns, R y = 2.5 1 microns, and R z = 1. 7 3 micron, so the surface flatness is inferior. 32 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 The composition of the present invention can obtain the following effects (1) Suitable for forming PDP constituent elements (such as barrier ribs, electrodes, resistors, dielectric layers, phosphors, color filters, and black matrices) with excellent surface flatness. (2) Suitable for high-transmittance formation Sintered glass frit with a light ratio (such as a dielectric layer or a barrier rib constituting a PDP). (3) A transfer film having excellent flexibility in terms of a thin film generating material layer can be manufactured. (4) A transfer film having excellent transfer ability (heat-bonded to a substrate) in terms of a thin film-forming material layer can be manufactured. The transfer film of the present invention can obtain the following advantages. (1) A component (particularly a dielectric layer) having excellent P D P surface flatness can be effectively formed. (2) The film-forming material layer is excellent in flexibility, and the surface of the film-forming material layer does not include bending cracks (cracks). (3) Excellent softness and easy to take up. (4) As far as the thin film generating material layer is concerned, the adhesiveness is appropriate and the controllability is good. (5) The film-forming material layer is excellent in transferability (heat-bonded to a substrate). The production method of the present invention can achieve the following effects. (1) Effectively form P D P constituent elements (such as barrier ribs, electrodes, resistors, dielectric layers, phosphors, color filters, and black matrices) with excellent surface flatness. (2) It can effectively form a PDP with the height position accuracy of constituent elements. (3) A dielectric layer having a large thickness can be effectively formed. 33 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 (4) The dielectric layer required for large-size panels can be effectively formed. (5) P D P can be effectively formed and is provided with a dielectric layer having excellent thickness uniformity and surface flatness. [Brief description of the drawings] FIG. 1 is a schematic diagram showing a cross-sectional shape of an AC plasma display panel. FIG. 2A is a schematic sectional view showing a transfer film of the present invention; and FIG. 2B is a sectional view showing a layered composition of the transfer film. 3A to 3E are schematic cross-sectional views showing steps (a transfer step, a photoresist film forming step, and an exposure step) for forming a barrier rib in the manufacturing method of the present invention. 4 to 4 are schematic cross-sectional views showing steps (development step, etching step, and baking step) for forming barrier ribs in the manufacturing method of the present invention. (Description of element symbols) 1 glass substrate 2 glass substrate 3 barrier rib 4 transparent electrode 5 bus electrode 6 address electrode 7 fluorescent material '8 dielectric layer 9 dielectric layer 10 protective layer 11 glass substrate 12 electrode 13 dielectric layer 34 312 / Inventory (Supplement) / 93-05 / 93103730 200423177 20 Transfer film 21 Thin film generating material layer 22 Base film 25 Barrier rib pattern layer 25A Material layer remaining portion 25B Material layer removing portion 31 Photoresist film 35 Photoresist Pattern 35A photoresist remaining part 35B photoresist removal part 40 barrier rib 50 panel material F1 base film F2 thin film generating material layer F3 cover film M exposure cover MA light transmitting part MB light blocking part 35 312 / Instruction Manual (Supplement) / 93 -05/93103730

Claims (1)

200423177 拾、申請專利範圍: 1 . 一種含有無機粒子之組成物,包含: (A )無機粒子; (B ) —黏結劑樹脂;以及 (C) 一下式(I)表示之化合物: OH I r^CK-CHb-CH-CHb-O-VH (I) 其中R1表示-C0_A表示之基團,其中A表示含5-20個碳 原子之烷基或含5-20個碳原子之烯基,以及〇_為2 _ 2 0之 整數。 2 .如申請專利範圍第1項之含有無機粒子之組成物,進 一步包含(D)—輻射敏感.成分。 3. —種轉印膜,包含一薄膜生成性材料層,其係由如申 請專利範圍第1項之含有無機粒子之組成物獲得。 4. 一種轉印膜,包含一薄膜生成性材料層,其係由如申 請專利範圍第2項之含有無機粒子之組成物獲得。 5 · —種轉印膜,包含一種光阻膜與薄膜生成性材料層之 層合物,該薄膜生成性材料層係由如申請專利範圍第1項 之含有無機粒子之組成物獲得。 6 · —種電漿顯示面板之製造方法,該方法包含下列步 驟:轉印一由如申請專利範圍第1項之含有無機粒子之組 成物獲得之薄膜生成性材料層至基板表面,以及烤乾經轉 印之薄膜生成性材料層而形成一介電層於該基板上。 7 · —種電漿顯示面板之製造方法,該方法包含下列步 驟:轉印由如申請專利範圍第1項之含有無機粒子之組成 36 312/發明說明書(補件)/93-05/93103730 200423177 物獲得之薄膜生成性材料層轉印至基板表面;形成光阻膜 於轉印後之薄膜生成性材料層上;曝光該光阻膜而形成光 阻圖案之潛像;顯影光阻膜而形成光阻圖案;蝕刻薄膜生 成性材料層而形成對應於光阻圖案之圖案層;以及烤乾該 圖案層而形成一種選自阻擋肋、電極、電阻器、介電層、 磷光體、彩色濾光片及黑矩陣中之組成元件。 8 . —種電漿顯示面板之製造方法,該方法包含下列步 驟:轉印由如申請專利範圍第1項之含有無機粒子之組成 物獲得之組成物之薄膜生成性材料層於一基底膜上之積層 膜;轉印該形成於基底膜上之積層膜至基板表面;曝光組 成該積層膜之光阻膜而形成光阻圖案之潛像;顯影該光阻 膜而形成光阻圖案;蝕刻薄膜生成性材料層而形成對應於 光阻圖案之圖案層;以及烤乾該圖案層而形成一種選自阻 擋肋、電極、電阻器、介電層、磷光體、彩色濾光片及黑 矩陣中之組成元件。 9. 一種電漿顯示面板之製造方法,該方法包含下列步 驟··轉印由如申請專利範圍第2項之含有無機粒子之組成 物獲得之薄膜生成性材料層至基板表面上;曝光該薄膜生 成性材料層而形成圖案潛像;顯影該薄膜生成性材料層而 形成圖案層;以及烤乾該圖案層而形成一種選自阻擋肋、 電極、電阻器、介電層、磷光體、彩色濾光片及黑矩陣中 之組成元件。 37 312/發明說明書(補件)/93-05/93103730200423177 Scope of patent application: 1. A composition containing inorganic particles, comprising: (A) inorganic particles; (B)-a binder resin; and (C) a compound represented by the following formula (I): OH I r ^ CK-CHb-CH-CHb-O-VH (I) wherein R1 represents a group represented by -C0_A, wherein A represents an alkyl group containing 5-20 carbon atoms or an alkenyl group containing 5-20 carbon atoms, and 〇_ is an integer of 2 _ 2 0. 2. If the composition containing inorganic particles in item 1 of the scope of patent application, further contains (D)-radiation-sensitive ingredients. 3. A transfer film comprising a thin film-forming material layer obtained from a composition containing inorganic particles as described in the first patent application. 4. A transfer film comprising a thin film-forming material layer obtained from a composition containing inorganic particles as described in item 2 of the patent application. 5-A transfer film comprising a laminate of a photoresist film and a thin film-forming material layer, the thin film-forming material layer being obtained from a composition containing inorganic particles as described in item 1 of the scope of patent application. 6 · A method for manufacturing a plasma display panel, the method includes the following steps: transferring a thin film-generating material layer obtained from a composition containing inorganic particles as described in item 1 of the patent application to a substrate surface, and baking The transferred film-forming material layer forms a dielectric layer on the substrate. 7 · A method for manufacturing a plasma display panel, the method includes the following steps: transferring the composition containing inorganic particles as described in the first item of the patent application 36 312 / Invention Specification (Supplement) / 93-05 / 93103730 200423177 The obtained film-forming material layer is transferred to the substrate surface; a photoresist film is formed on the film-forming material layer after the transfer; the photoresist film is exposed to form a latent image of the photoresist pattern; the photoresist film is developed and formed Photoresist pattern; etching a thin film generating material layer to form a pattern layer corresponding to the photoresist pattern; and baking the pattern layer to form a kind selected from barrier ribs, electrodes, resistors, dielectric layers, phosphors, and color filters And the black matrix components. 8. A method for manufacturing a plasma display panel, the method includes the following steps: transferring a thin film-generating material layer of a composition obtained from a composition containing inorganic particles as described in item 1 of the patent application on a base film Laminated film; transfer the laminated film formed on the base film to the surface of the substrate; expose the photoresist film constituting the laminated film to form a latent image of the photoresist pattern; develop the photoresist film to form the photoresist pattern; etch film Generating a material layer to form a pattern layer corresponding to the photoresist pattern; and drying the pattern layer to form a material selected from the group consisting of a barrier rib, an electrode, a resistor, a dielectric layer, a phosphor, a color filter, and a black matrix Component elements. 9. A method for manufacturing a plasma display panel, the method comprising the steps of: transferring a thin film-generating material layer obtained from a composition containing an inorganic particle as in item 2 of the patent application onto a substrate surface; exposing the thin film Generate a latent image by forming a material layer; develop the pattern layer by forming the thin film material layer; and dry the pattern layer to form a layer selected from barrier ribs, electrodes, resistors, dielectric layers, phosphors, and color filters Components in light sheet and black matrix. 37 312 / Invention Specification (Supplement) / 93-05 / 93103730
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