TWI227342B - Light waveguide device, manufacturing method thereof, and optical communication apparatus - Google Patents
Light waveguide device, manufacturing method thereof, and optical communication apparatus Download PDFInfo
- Publication number
- TWI227342B TWI227342B TW092117659A TW92117659A TWI227342B TW I227342 B TWI227342 B TW I227342B TW 092117659 A TW092117659 A TW 092117659A TW 92117659 A TW92117659 A TW 92117659A TW I227342 B TWI227342 B TW I227342B
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- substrate
- optical waveguide
- light
- optical
- waveguide device
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
- G02B1/045—Light guides
- G02B1/046—Light guides characterised by the core material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
- H10F55/10—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the radiation-sensitive semiconductor devices control the electric light source, e.g. image converters, image amplifiers or image storage devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12069—Organic material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002194017 | 2002-07-02 | ||
| JP2003011709A JP3858995B2 (ja) | 2002-07-02 | 2003-01-20 | 光導波路装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200407571A TW200407571A (en) | 2004-05-16 |
| TWI227342B true TWI227342B (en) | 2005-02-01 |
Family
ID=31890503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092117659A TWI227342B (en) | 2002-07-02 | 2003-06-27 | Light waveguide device, manufacturing method thereof, and optical communication apparatus |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US7013055B2 (enExample) |
| JP (1) | JP3858995B2 (enExample) |
| KR (3) | KR100559645B1 (enExample) |
| CN (1) | CN1246712C (enExample) |
| TW (1) | TWI227342B (enExample) |
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| US7195941B2 (en) * | 2003-03-26 | 2007-03-27 | Intel Corporation | Optical devices and methods to construct the same |
| JP2005266179A (ja) * | 2004-03-17 | 2005-09-29 | Omron Corp | 光導波路装置及び光導波路装置の製造方法並びに光導波路装置の中間体 |
| JP4440697B2 (ja) * | 2004-04-22 | 2010-03-24 | 浜松ホトニクス株式会社 | 光導波路基板及びその製造方法 |
| JP4558400B2 (ja) * | 2004-07-23 | 2010-10-06 | 新光電気工業株式会社 | 半導体装置 |
| US7282311B2 (en) * | 2004-08-19 | 2007-10-16 | Infinera Corporation | Method of forming an integrated optical circuit |
| US7251398B2 (en) * | 2004-08-26 | 2007-07-31 | Interuniversitair Microelektronica Centrum (Imec) | Method for providing an optical interface and devices according to such methods |
| JP2006126568A (ja) * | 2004-10-29 | 2006-05-18 | Fuji Xerox Co Ltd | 高分子光導波路デバイスの製造方法 |
| KR100630091B1 (ko) * | 2004-10-29 | 2006-09-27 | 삼성전자주식회사 | 광학 필터 및 광학 필터의 제작 방법과 그를 이용한 평면광도파로 소자 |
| JP2006171173A (ja) * | 2004-12-14 | 2006-06-29 | Omron Corp | 光モジュール及びその製造方法 |
| JP4704125B2 (ja) * | 2005-06-22 | 2011-06-15 | 浜松ホトニクス株式会社 | 光デバイス |
| US7570679B2 (en) * | 2006-02-22 | 2009-08-04 | Optical Communication Products, Inc. | Wide temperature range uncooled transceiver module for uncontrolled environments |
| JP2008015336A (ja) * | 2006-07-07 | 2008-01-24 | Fujitsu Ltd | 回路基板及び半導体デバイスの光結合方法 |
| JP5055882B2 (ja) * | 2006-08-02 | 2012-10-24 | 富士ゼロックス株式会社 | 光導波路モジュール及びその製造方法 |
| US20080031584A1 (en) * | 2006-08-02 | 2008-02-07 | National Semiconductor Corporation | Apparatus and method for a singulation of polymer waveguides using photolithography |
| CN101523264A (zh) * | 2006-08-10 | 2009-09-02 | 松下电工株式会社 | 光电变换装置 |
| KR100801278B1 (ko) | 2006-08-29 | 2008-02-04 | 삼성전기주식회사 | 하이브리드형 광도파로 센서 |
| US7553215B2 (en) * | 2007-08-24 | 2009-06-30 | Panasonic Electric Works Co, Ltd. | Process of forming a deflection mirror in a light waveguide |
| US7599596B1 (en) * | 2008-03-13 | 2009-10-06 | Kotura, Inc. | Optical receiver for use with range of signal strengths |
| US20110074054A1 (en) * | 2008-06-04 | 2011-03-31 | Kozo Tajiri | Process for producing an optical waveguide and stamp for use in the production process |
| US20100095707A1 (en) * | 2008-10-21 | 2010-04-22 | Qualcomm Mems Technologies,Inc. | Fabricating optical waveguides |
| KR101059621B1 (ko) * | 2008-12-09 | 2011-08-25 | 삼성전기주식회사 | 광도파로용 인쇄회로기판 및 그 제조방법 |
| US8755655B2 (en) * | 2009-09-22 | 2014-06-17 | Oracle America, Inc. | Edge-coupled optical proximity communication |
| KR101074689B1 (ko) * | 2009-11-02 | 2011-10-19 | 삼성전기주식회사 | 광기판 및 그 제조방법 |
| WO2011065384A1 (ja) * | 2009-11-25 | 2011-06-03 | シチズンホールディングス株式会社 | 光デバイス |
| US8507322B2 (en) | 2010-06-24 | 2013-08-13 | Akihiro Chida | Semiconductor substrate and method for manufacturing semiconductor device |
| WO2012134025A1 (ko) * | 2011-03-25 | 2012-10-04 | Lee Seo Young | 광도파로 및 그 제조방법 |
| TWI463204B (zh) * | 2011-11-18 | 2014-12-01 | Universal Microelectronics Co Ltd | 光機總成及其製作方法 |
| US8895429B2 (en) * | 2013-03-05 | 2014-11-25 | Eastman Kodak Company | Micro-channel structure with variable depths |
| CN105044839A (zh) * | 2013-03-29 | 2015-11-11 | 南京邮电大学 | 微机电可调氮化物光波导器件的制备方法 |
| US9244223B2 (en) * | 2013-11-08 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Light coupling formation in a waveguide layer |
| JP2016004224A (ja) * | 2014-06-19 | 2016-01-12 | 富士通株式会社 | 光学モジュール、光学モジュールの製造方法及び光学装置 |
| EP3174169B1 (en) * | 2014-07-25 | 2019-04-24 | Mitsuboshi Diamond Industrial Co., Ltd. | Optical fiber cooling device and laser oscillator |
| KR101925476B1 (ko) * | 2015-11-25 | 2018-12-05 | 주식회사 옵텔라 | 광학 모듈 및 이를 포함하는 광학 엔진 |
| WO2017132834A1 (zh) * | 2016-02-02 | 2017-08-10 | 华为技术有限公司 | 单纤双向组件 |
| US9933570B2 (en) * | 2016-03-01 | 2018-04-03 | Futurewei Technologies, Inc. | Integration of V-grooves on silicon-on-insulator (SOI) platform for direct fiber coupling |
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| US6266250B1 (en) * | 2000-04-26 | 2001-07-24 | Multiplex Technology, Inc. | Electronics component mounting system |
| JP2001350051A (ja) | 2000-06-06 | 2001-12-21 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路モジュール及びその製造方法 |
| JP5218713B2 (ja) * | 2000-07-28 | 2013-06-26 | 住友ベークライト株式会社 | 光学導波管を形成するためのポリマー組成物；それらから形成される光学導波管；およびそれを作製するための方法 |
| US6766082B2 (en) * | 2000-10-18 | 2004-07-20 | Nippon Telegraph And Telephone Corporation | Waveguide-type optical device and manufacturing method therefor |
| WO2002048765A1 (en) | 2000-12-14 | 2002-06-20 | Bookham Technology Plc | Integrated optical devices |
| WO2002050585A1 (en) | 2000-12-21 | 2002-06-27 | Cquint Communications Corporation | Multi-layer dispersion-engineered waveguides and resonators |
| US6885781B2 (en) * | 2002-05-03 | 2005-04-26 | Fujitsu Limited | Thin film electro-optical deflector device and a method of fabrication of such a device |
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2003
- 2003-01-20 JP JP2003011709A patent/JP3858995B2/ja not_active Expired - Fee Related
- 2003-06-27 TW TW092117659A patent/TWI227342B/zh not_active IP Right Cessation
- 2003-07-01 US US10/611,684 patent/US7013055B2/en not_active Expired - Fee Related
- 2003-07-01 KR KR1020030044106A patent/KR100559645B1/ko not_active Expired - Fee Related
- 2003-07-01 CN CNB031481280A patent/CN1246712C/zh not_active Expired - Fee Related
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2005
- 2005-04-19 KR KR1020050032420A patent/KR100766686B1/ko not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| US7013055B2 (en) | 2006-03-14 |
| US20060104587A1 (en) | 2006-05-18 |
| KR20060029657A (ko) | 2006-04-06 |
| US7174081B2 (en) | 2007-02-06 |
| JP3858995B2 (ja) | 2006-12-20 |
| KR100713498B1 (ko) | 2007-05-02 |
| CN1477410A (zh) | 2004-02-25 |
| CN1246712C (zh) | 2006-03-22 |
| KR20050045966A (ko) | 2005-05-17 |
| KR100559645B1 (ko) | 2006-03-10 |
| KR100766686B1 (ko) | 2007-10-15 |
| TW200407571A (en) | 2004-05-16 |
| KR20040004106A (ko) | 2004-01-13 |
| JP2004086129A (ja) | 2004-03-18 |
| US20060110098A1 (en) | 2006-05-25 |
| US7113683B2 (en) | 2006-09-26 |
| US20040184702A1 (en) | 2004-09-23 |
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