CN1246712C - 光波导装置、光波导装置的制造方法以及光通信装置 - Google Patents
光波导装置、光波导装置的制造方法以及光通信装置 Download PDFInfo
- Publication number
- CN1246712C CN1246712C CNB031481280A CN03148128A CN1246712C CN 1246712 C CN1246712 C CN 1246712C CN B031481280 A CNB031481280 A CN B031481280A CN 03148128 A CN03148128 A CN 03148128A CN 1246712 C CN1246712 C CN 1246712C
- Authority
- CN
- China
- Prior art keywords
- substrate
- optical waveguide
- optical
- waveguide device
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
- G02B1/045—Light guides
- G02B1/046—Light guides characterised by the core material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
- H10F55/10—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the radiation-sensitive semiconductor devices control the electric light source, e.g. image converters, image amplifiers or image storage devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12069—Organic material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002194017 | 2002-07-02 | ||
| JP2002194017 | 2002-07-02 | ||
| JP200311709 | 2003-01-20 | ||
| JP2003011709A JP3858995B2 (ja) | 2002-07-02 | 2003-01-20 | 光導波路装置の製造方法 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610005930 Division CN1808196A (zh) | 2002-07-02 | 2003-07-01 | 光波导装置、光波导装置的制造方法以及光通信装置 |
| CN 200610005929 Division CN1808195A (zh) | 2002-07-02 | 2003-07-01 | 光波导装置、光波导装置的制造方法以及光通信装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1477410A CN1477410A (zh) | 2004-02-25 |
| CN1246712C true CN1246712C (zh) | 2006-03-22 |
Family
ID=31890503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031481280A Expired - Fee Related CN1246712C (zh) | 2002-07-02 | 2003-07-01 | 光波导装置、光波导装置的制造方法以及光通信装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US7013055B2 (enExample) |
| JP (1) | JP3858995B2 (enExample) |
| KR (3) | KR100559645B1 (enExample) |
| CN (1) | CN1246712C (enExample) |
| TW (1) | TWI227342B (enExample) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US7195941B2 (en) * | 2003-03-26 | 2007-03-27 | Intel Corporation | Optical devices and methods to construct the same |
| JP2005266179A (ja) * | 2004-03-17 | 2005-09-29 | Omron Corp | 光導波路装置及び光導波路装置の製造方法並びに光導波路装置の中間体 |
| JP4440697B2 (ja) * | 2004-04-22 | 2010-03-24 | 浜松ホトニクス株式会社 | 光導波路基板及びその製造方法 |
| JP4558400B2 (ja) * | 2004-07-23 | 2010-10-06 | 新光電気工業株式会社 | 半導体装置 |
| US7282311B2 (en) * | 2004-08-19 | 2007-10-16 | Infinera Corporation | Method of forming an integrated optical circuit |
| US7251398B2 (en) * | 2004-08-26 | 2007-07-31 | Interuniversitair Microelektronica Centrum (Imec) | Method for providing an optical interface and devices according to such methods |
| JP2006126568A (ja) * | 2004-10-29 | 2006-05-18 | Fuji Xerox Co Ltd | 高分子光導波路デバイスの製造方法 |
| KR100630091B1 (ko) * | 2004-10-29 | 2006-09-27 | 삼성전자주식회사 | 광학 필터 및 광학 필터의 제작 방법과 그를 이용한 평면광도파로 소자 |
| JP2006171173A (ja) * | 2004-12-14 | 2006-06-29 | Omron Corp | 光モジュール及びその製造方法 |
| JP4704125B2 (ja) * | 2005-06-22 | 2011-06-15 | 浜松ホトニクス株式会社 | 光デバイス |
| US7570679B2 (en) * | 2006-02-22 | 2009-08-04 | Optical Communication Products, Inc. | Wide temperature range uncooled transceiver module for uncontrolled environments |
| JP2008015336A (ja) * | 2006-07-07 | 2008-01-24 | Fujitsu Ltd | 回路基板及び半導体デバイスの光結合方法 |
| JP5055882B2 (ja) * | 2006-08-02 | 2012-10-24 | 富士ゼロックス株式会社 | 光導波路モジュール及びその製造方法 |
| US20080031584A1 (en) * | 2006-08-02 | 2008-02-07 | National Semiconductor Corporation | Apparatus and method for a singulation of polymer waveguides using photolithography |
| CN101523264A (zh) * | 2006-08-10 | 2009-09-02 | 松下电工株式会社 | 光电变换装置 |
| KR100801278B1 (ko) | 2006-08-29 | 2008-02-04 | 삼성전기주식회사 | 하이브리드형 광도파로 센서 |
| US7553215B2 (en) * | 2007-08-24 | 2009-06-30 | Panasonic Electric Works Co, Ltd. | Process of forming a deflection mirror in a light waveguide |
| US7599596B1 (en) * | 2008-03-13 | 2009-10-06 | Kotura, Inc. | Optical receiver for use with range of signal strengths |
| US20110074054A1 (en) * | 2008-06-04 | 2011-03-31 | Kozo Tajiri | Process for producing an optical waveguide and stamp for use in the production process |
| US20100095707A1 (en) * | 2008-10-21 | 2010-04-22 | Qualcomm Mems Technologies,Inc. | Fabricating optical waveguides |
| KR101059621B1 (ko) * | 2008-12-09 | 2011-08-25 | 삼성전기주식회사 | 광도파로용 인쇄회로기판 및 그 제조방법 |
| US8755655B2 (en) * | 2009-09-22 | 2014-06-17 | Oracle America, Inc. | Edge-coupled optical proximity communication |
| KR101074689B1 (ko) * | 2009-11-02 | 2011-10-19 | 삼성전기주식회사 | 광기판 및 그 제조방법 |
| WO2011065384A1 (ja) * | 2009-11-25 | 2011-06-03 | シチズンホールディングス株式会社 | 光デバイス |
| US8507322B2 (en) | 2010-06-24 | 2013-08-13 | Akihiro Chida | Semiconductor substrate and method for manufacturing semiconductor device |
| WO2012134025A1 (ko) * | 2011-03-25 | 2012-10-04 | Lee Seo Young | 광도파로 및 그 제조방법 |
| TWI463204B (zh) * | 2011-11-18 | 2014-12-01 | Universal Microelectronics Co Ltd | 光機總成及其製作方法 |
| US8895429B2 (en) * | 2013-03-05 | 2014-11-25 | Eastman Kodak Company | Micro-channel structure with variable depths |
| CN105044839A (zh) * | 2013-03-29 | 2015-11-11 | 南京邮电大学 | 微机电可调氮化物光波导器件的制备方法 |
| US9244223B2 (en) * | 2013-11-08 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Light coupling formation in a waveguide layer |
| JP2016004224A (ja) * | 2014-06-19 | 2016-01-12 | 富士通株式会社 | 光学モジュール、光学モジュールの製造方法及び光学装置 |
| EP3174169B1 (en) * | 2014-07-25 | 2019-04-24 | Mitsuboshi Diamond Industrial Co., Ltd. | Optical fiber cooling device and laser oscillator |
| KR101925476B1 (ko) * | 2015-11-25 | 2018-12-05 | 주식회사 옵텔라 | 광학 모듈 및 이를 포함하는 광학 엔진 |
| WO2017132834A1 (zh) * | 2016-02-02 | 2017-08-10 | 华为技术有限公司 | 单纤双向组件 |
| US9933570B2 (en) * | 2016-03-01 | 2018-04-03 | Futurewei Technologies, Inc. | Integration of V-grooves on silicon-on-insulator (SOI) platform for direct fiber coupling |
| JP6694206B2 (ja) * | 2016-04-12 | 2020-05-13 | 日東電工株式会社 | 光コネクタ部材およびそれを用いた光コネクタキット、並びにそれによって得られる光配線 |
| JP6678510B2 (ja) * | 2016-05-11 | 2020-04-08 | 古河電気工業株式会社 | 光導波路素子 |
| US9772458B1 (en) * | 2016-09-12 | 2017-09-26 | Yottahn, Inc. | Optical module for optical fibers and method of manufacturing the same |
| CN109994461B (zh) * | 2017-12-30 | 2021-10-08 | 苏州旭创科技有限公司 | 光学组件、光模块及其封装方法 |
| CN108494478A (zh) * | 2018-03-30 | 2018-09-04 | 昂纳信息技术(深圳)有限公司 | 一种实现监测发射功率的sr4器件和一种监测方法 |
| US10877213B2 (en) * | 2018-06-20 | 2020-12-29 | Hisense Broadband Multimedia Technologies Co., Ltd. | Optical module |
| US11886001B2 (en) * | 2019-12-20 | 2024-01-30 | Snap Inc. | Optical waveguide fabrication process |
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| JPH04107403A (ja) * | 1990-08-28 | 1992-04-08 | Brother Ind Ltd | 光導波路アレイ及びその製造方法 |
| JP3031385B2 (ja) | 1991-03-11 | 2000-04-10 | 日本電信電話株式会社 | フレキシブル光導波路基板及びその製造方法 |
| JPH05224076A (ja) * | 1992-02-07 | 1993-09-03 | Sumitomo Electric Ind Ltd | 光結合装置とその製造方法 |
| JP3484543B2 (ja) * | 1993-03-24 | 2004-01-06 | 富士通株式会社 | 光結合部材の製造方法及び光装置 |
| JPH08262249A (ja) | 1995-03-23 | 1996-10-11 | Fujikura Ltd | 光導波路素子の形成方法 |
| JP2818132B2 (ja) * | 1995-05-08 | 1998-10-30 | 東芝機械株式会社 | 光導波路の製造方法 |
| US5745631A (en) * | 1996-01-26 | 1998-04-28 | Irvine Sensors Corporation | Self-aligning optical beam system |
| US6355198B1 (en) * | 1996-03-15 | 2002-03-12 | President And Fellows Of Harvard College | Method of forming articles including waveguides via capillary micromolding and microtransfer molding |
| JP3448627B2 (ja) * | 1996-09-12 | 2003-09-22 | 日本航空電子工業株式会社 | 光モジュールおよびその製造方法 |
| KR100263195B1 (ko) * | 1996-09-16 | 2000-08-01 | 윤종용 | 광도파로 소자의 제작 방법 |
| DE19642088A1 (de) * | 1996-10-12 | 1998-04-16 | Bosch Gmbh Robert | Verfahren zur Herstellung eines mikrostrukturierten Körpers, eines Gußrahmens und eines integriert-optischen Bauteils |
| KR100211039B1 (ko) * | 1996-12-20 | 1999-07-15 | 이계철 | 광스위치-광섬유 광결합 장치 |
| US6061487A (en) * | 1997-04-30 | 2000-05-09 | Nok Corporation | Optical waveguide circuit, optical branched waveguide circuit, and optical modulator |
| JPH11145487A (ja) | 1997-11-12 | 1999-05-28 | Nippon Telegr & Teleph Corp <Ntt> | 光モジュールの製造方法及び製造装置 |
| AR018448A1 (es) * | 1998-06-04 | 2001-11-14 | Pirelli Cavi E Sistemi Spa | Metodo para fabricar una estructura de guia de ondas opticas difundida en un substrato, guia de ondas opticas difundida obtenida y dispositivooptico que la contiene |
| JP2000047055A (ja) * | 1998-07-28 | 2000-02-18 | Japan Aviation Electronics Industry Ltd | 光導波路デバイスおよびその製造方法 |
| JP2000199827A (ja) * | 1998-10-27 | 2000-07-18 | Sony Corp | 光導波装置およびその製造方法 |
| CA2274193A1 (en) * | 1999-01-11 | 2000-07-11 | Hamid Hatami-Hanza | Method for making integrated and composite optical devices utilizing prefabrication optical fibers and such devices |
| JP3628547B2 (ja) | 1999-04-16 | 2005-03-16 | 日本電信電話株式会社 | 電気・光機能モジュール |
| JP2000321452A (ja) * | 1999-05-11 | 2000-11-24 | Oki Electric Ind Co Ltd | 光導波路素子及び光導波路素子の製造方法 |
| JP2001042150A (ja) * | 1999-07-30 | 2001-02-16 | Canon Inc | 光導波路、その作製方法、およびこれを用いた光インタコネクション装置 |
| US6445857B1 (en) * | 1999-09-21 | 2002-09-03 | Matsushita Electric Industrial Co., Ltd. | Optical waveguide part, its manufacturing method, connection member, optical part, method for connecting optical waveguide part, and optical element |
| JP3774598B2 (ja) * | 1999-09-30 | 2006-05-17 | 株式会社日立製作所 | ポリマ導波路基板の製造方法およびポリマ導波路基板 |
| JP2001154051A (ja) | 1999-11-29 | 2001-06-08 | Oki Printed Circuit Kk | 光導波路の製造方法 |
| JP3681947B2 (ja) | 2000-03-13 | 2005-08-10 | 日本電信電話株式会社 | 光導波路の製造方法 |
| JP4060023B2 (ja) * | 2000-03-28 | 2008-03-12 | 沖電気工業株式会社 | 光導波路送受信モジュール |
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| JP5218713B2 (ja) * | 2000-07-28 | 2013-06-26 | 住友ベークライト株式会社 | 光学導波管を形成するためのポリマー組成物;それらから形成される光学導波管;およびそれを作製するための方法 |
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| WO2002048765A1 (en) | 2000-12-14 | 2002-06-20 | Bookham Technology Plc | Integrated optical devices |
| WO2002050585A1 (en) | 2000-12-21 | 2002-06-27 | Cquint Communications Corporation | Multi-layer dispersion-engineered waveguides and resonators |
| US6885781B2 (en) * | 2002-05-03 | 2005-04-26 | Fujitsu Limited | Thin film electro-optical deflector device and a method of fabrication of such a device |
-
2003
- 2003-01-20 JP JP2003011709A patent/JP3858995B2/ja not_active Expired - Fee Related
- 2003-06-27 TW TW092117659A patent/TWI227342B/zh not_active IP Right Cessation
- 2003-07-01 US US10/611,684 patent/US7013055B2/en not_active Expired - Fee Related
- 2003-07-01 KR KR1020030044106A patent/KR100559645B1/ko not_active Expired - Fee Related
- 2003-07-01 CN CNB031481280A patent/CN1246712C/zh not_active Expired - Fee Related
-
2005
- 2005-04-19 KR KR1020050032420A patent/KR100766686B1/ko not_active Expired - Fee Related
- 2005-12-20 US US11/313,171 patent/US7174081B2/en not_active Expired - Fee Related
- 2005-12-20 US US11/312,663 patent/US7113683B2/en not_active Expired - Fee Related
-
2006
- 2006-03-14 KR KR1020060023531A patent/KR100713498B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7013055B2 (en) | 2006-03-14 |
| US20060104587A1 (en) | 2006-05-18 |
| KR20060029657A (ko) | 2006-04-06 |
| US7174081B2 (en) | 2007-02-06 |
| JP3858995B2 (ja) | 2006-12-20 |
| TWI227342B (en) | 2005-02-01 |
| KR100713498B1 (ko) | 2007-05-02 |
| CN1477410A (zh) | 2004-02-25 |
| KR20050045966A (ko) | 2005-05-17 |
| KR100559645B1 (ko) | 2006-03-10 |
| KR100766686B1 (ko) | 2007-10-15 |
| TW200407571A (en) | 2004-05-16 |
| KR20040004106A (ko) | 2004-01-13 |
| JP2004086129A (ja) | 2004-03-18 |
| US20060110098A1 (en) | 2006-05-25 |
| US7113683B2 (en) | 2006-09-26 |
| US20040184702A1 (en) | 2004-09-23 |
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Granted publication date: 20060322 Termination date: 20100701 |