CN1246712C - 光波导装置、光波导装置的制造方法以及光通信装置 - Google Patents

光波导装置、光波导装置的制造方法以及光通信装置 Download PDF

Info

Publication number
CN1246712C
CN1246712C CNB031481280A CN03148128A CN1246712C CN 1246712 C CN1246712 C CN 1246712C CN B031481280 A CNB031481280 A CN B031481280A CN 03148128 A CN03148128 A CN 03148128A CN 1246712 C CN1246712 C CN 1246712C
Authority
CN
China
Prior art keywords
substrate
optical waveguide
optical
waveguide device
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB031481280A
Other languages
English (en)
Chinese (zh)
Other versions
CN1477410A (zh
Inventor
速水一行
古村由幸
寺川裕佳里
细川速美
高桥敏幸
樋口诚良
多田罗佳孝
安田成留
野泽洋人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Publication of CN1477410A publication Critical patent/CN1477410A/zh
Application granted granted Critical
Publication of CN1246712C publication Critical patent/CN1246712C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4246Bidirectionally operating package structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045Light guides
    • G02B1/046Light guides characterised by the core material
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/138Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F55/00Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
    • H10F55/10Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto wherein the radiation-sensitive semiconductor devices control the electric light source, e.g. image converters, image amplifiers or image storage devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035Materials
    • G02B2006/12069Organic material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
CNB031481280A 2002-07-02 2003-07-01 光波导装置、光波导装置的制造方法以及光通信装置 Expired - Fee Related CN1246712C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002194017 2002-07-02
JP2002194017 2002-07-02
JP200311709 2003-01-20
JP2003011709A JP3858995B2 (ja) 2002-07-02 2003-01-20 光導波路装置の製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN 200610005930 Division CN1808196A (zh) 2002-07-02 2003-07-01 光波导装置、光波导装置的制造方法以及光通信装置
CN 200610005929 Division CN1808195A (zh) 2002-07-02 2003-07-01 光波导装置、光波导装置的制造方法以及光通信装置

Publications (2)

Publication Number Publication Date
CN1477410A CN1477410A (zh) 2004-02-25
CN1246712C true CN1246712C (zh) 2006-03-22

Family

ID=31890503

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031481280A Expired - Fee Related CN1246712C (zh) 2002-07-02 2003-07-01 光波导装置、光波导装置的制造方法以及光通信装置

Country Status (5)

Country Link
US (3) US7013055B2 (enExample)
JP (1) JP3858995B2 (enExample)
KR (3) KR100559645B1 (enExample)
CN (1) CN1246712C (enExample)
TW (1) TWI227342B (enExample)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7195941B2 (en) * 2003-03-26 2007-03-27 Intel Corporation Optical devices and methods to construct the same
JP2005266179A (ja) * 2004-03-17 2005-09-29 Omron Corp 光導波路装置及び光導波路装置の製造方法並びに光導波路装置の中間体
JP4440697B2 (ja) * 2004-04-22 2010-03-24 浜松ホトニクス株式会社 光導波路基板及びその製造方法
JP4558400B2 (ja) * 2004-07-23 2010-10-06 新光電気工業株式会社 半導体装置
US7282311B2 (en) * 2004-08-19 2007-10-16 Infinera Corporation Method of forming an integrated optical circuit
US7251398B2 (en) * 2004-08-26 2007-07-31 Interuniversitair Microelektronica Centrum (Imec) Method for providing an optical interface and devices according to such methods
JP2006126568A (ja) * 2004-10-29 2006-05-18 Fuji Xerox Co Ltd 高分子光導波路デバイスの製造方法
KR100630091B1 (ko) * 2004-10-29 2006-09-27 삼성전자주식회사 광학 필터 및 광학 필터의 제작 방법과 그를 이용한 평면광도파로 소자
JP2006171173A (ja) * 2004-12-14 2006-06-29 Omron Corp 光モジュール及びその製造方法
JP4704125B2 (ja) * 2005-06-22 2011-06-15 浜松ホトニクス株式会社 光デバイス
US7570679B2 (en) * 2006-02-22 2009-08-04 Optical Communication Products, Inc. Wide temperature range uncooled transceiver module for uncontrolled environments
JP2008015336A (ja) * 2006-07-07 2008-01-24 Fujitsu Ltd 回路基板及び半導体デバイスの光結合方法
JP5055882B2 (ja) * 2006-08-02 2012-10-24 富士ゼロックス株式会社 光導波路モジュール及びその製造方法
US20080031584A1 (en) * 2006-08-02 2008-02-07 National Semiconductor Corporation Apparatus and method for a singulation of polymer waveguides using photolithography
CN101523264A (zh) * 2006-08-10 2009-09-02 松下电工株式会社 光电变换装置
KR100801278B1 (ko) 2006-08-29 2008-02-04 삼성전기주식회사 하이브리드형 광도파로 센서
US7553215B2 (en) * 2007-08-24 2009-06-30 Panasonic Electric Works Co, Ltd. Process of forming a deflection mirror in a light waveguide
US7599596B1 (en) * 2008-03-13 2009-10-06 Kotura, Inc. Optical receiver for use with range of signal strengths
US20110074054A1 (en) * 2008-06-04 2011-03-31 Kozo Tajiri Process for producing an optical waveguide and stamp for use in the production process
US20100095707A1 (en) * 2008-10-21 2010-04-22 Qualcomm Mems Technologies,Inc. Fabricating optical waveguides
KR101059621B1 (ko) * 2008-12-09 2011-08-25 삼성전기주식회사 광도파로용 인쇄회로기판 및 그 제조방법
US8755655B2 (en) * 2009-09-22 2014-06-17 Oracle America, Inc. Edge-coupled optical proximity communication
KR101074689B1 (ko) * 2009-11-02 2011-10-19 삼성전기주식회사 광기판 및 그 제조방법
WO2011065384A1 (ja) * 2009-11-25 2011-06-03 シチズンホールディングス株式会社 光デバイス
US8507322B2 (en) 2010-06-24 2013-08-13 Akihiro Chida Semiconductor substrate and method for manufacturing semiconductor device
WO2012134025A1 (ko) * 2011-03-25 2012-10-04 Lee Seo Young 광도파로 및 그 제조방법
TWI463204B (zh) * 2011-11-18 2014-12-01 Universal Microelectronics Co Ltd 光機總成及其製作方法
US8895429B2 (en) * 2013-03-05 2014-11-25 Eastman Kodak Company Micro-channel structure with variable depths
CN105044839A (zh) * 2013-03-29 2015-11-11 南京邮电大学 微机电可调氮化物光波导器件的制备方法
US9244223B2 (en) * 2013-11-08 2016-01-26 Taiwan Semiconductor Manufacturing Company, Ltd. Light coupling formation in a waveguide layer
JP2016004224A (ja) * 2014-06-19 2016-01-12 富士通株式会社 光学モジュール、光学モジュールの製造方法及び光学装置
EP3174169B1 (en) * 2014-07-25 2019-04-24 Mitsuboshi Diamond Industrial Co., Ltd. Optical fiber cooling device and laser oscillator
KR101925476B1 (ko) * 2015-11-25 2018-12-05 주식회사 옵텔라 광학 모듈 및 이를 포함하는 광학 엔진
WO2017132834A1 (zh) * 2016-02-02 2017-08-10 华为技术有限公司 单纤双向组件
US9933570B2 (en) * 2016-03-01 2018-04-03 Futurewei Technologies, Inc. Integration of V-grooves on silicon-on-insulator (SOI) platform for direct fiber coupling
JP6694206B2 (ja) * 2016-04-12 2020-05-13 日東電工株式会社 光コネクタ部材およびそれを用いた光コネクタキット、並びにそれによって得られる光配線
JP6678510B2 (ja) * 2016-05-11 2020-04-08 古河電気工業株式会社 光導波路素子
US9772458B1 (en) * 2016-09-12 2017-09-26 Yottahn, Inc. Optical module for optical fibers and method of manufacturing the same
CN109994461B (zh) * 2017-12-30 2021-10-08 苏州旭创科技有限公司 光学组件、光模块及其封装方法
CN108494478A (zh) * 2018-03-30 2018-09-04 昂纳信息技术(深圳)有限公司 一种实现监测发射功率的sr4器件和一种监测方法
US10877213B2 (en) * 2018-06-20 2020-12-29 Hisense Broadband Multimedia Technologies Co., Ltd. Optical module
US11886001B2 (en) * 2019-12-20 2024-01-30 Snap Inc. Optical waveguide fabrication process

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107403A (ja) * 1990-08-28 1992-04-08 Brother Ind Ltd 光導波路アレイ及びその製造方法
JP3031385B2 (ja) 1991-03-11 2000-04-10 日本電信電話株式会社 フレキシブル光導波路基板及びその製造方法
JPH05224076A (ja) * 1992-02-07 1993-09-03 Sumitomo Electric Ind Ltd 光結合装置とその製造方法
JP3484543B2 (ja) * 1993-03-24 2004-01-06 富士通株式会社 光結合部材の製造方法及び光装置
JPH08262249A (ja) 1995-03-23 1996-10-11 Fujikura Ltd 光導波路素子の形成方法
JP2818132B2 (ja) * 1995-05-08 1998-10-30 東芝機械株式会社 光導波路の製造方法
US5745631A (en) * 1996-01-26 1998-04-28 Irvine Sensors Corporation Self-aligning optical beam system
US6355198B1 (en) * 1996-03-15 2002-03-12 President And Fellows Of Harvard College Method of forming articles including waveguides via capillary micromolding and microtransfer molding
JP3448627B2 (ja) * 1996-09-12 2003-09-22 日本航空電子工業株式会社 光モジュールおよびその製造方法
KR100263195B1 (ko) * 1996-09-16 2000-08-01 윤종용 광도파로 소자의 제작 방법
DE19642088A1 (de) * 1996-10-12 1998-04-16 Bosch Gmbh Robert Verfahren zur Herstellung eines mikrostrukturierten Körpers, eines Gußrahmens und eines integriert-optischen Bauteils
KR100211039B1 (ko) * 1996-12-20 1999-07-15 이계철 광스위치-광섬유 광결합 장치
US6061487A (en) * 1997-04-30 2000-05-09 Nok Corporation Optical waveguide circuit, optical branched waveguide circuit, and optical modulator
JPH11145487A (ja) 1997-11-12 1999-05-28 Nippon Telegr & Teleph Corp <Ntt> 光モジュールの製造方法及び製造装置
AR018448A1 (es) * 1998-06-04 2001-11-14 Pirelli Cavi E Sistemi Spa Metodo para fabricar una estructura de guia de ondas opticas difundida en un substrato, guia de ondas opticas difundida obtenida y dispositivooptico que la contiene
JP2000047055A (ja) * 1998-07-28 2000-02-18 Japan Aviation Electronics Industry Ltd 光導波路デバイスおよびその製造方法
JP2000199827A (ja) * 1998-10-27 2000-07-18 Sony Corp 光導波装置およびその製造方法
CA2274193A1 (en) * 1999-01-11 2000-07-11 Hamid Hatami-Hanza Method for making integrated and composite optical devices utilizing prefabrication optical fibers and such devices
JP3628547B2 (ja) 1999-04-16 2005-03-16 日本電信電話株式会社 電気・光機能モジュール
JP2000321452A (ja) * 1999-05-11 2000-11-24 Oki Electric Ind Co Ltd 光導波路素子及び光導波路素子の製造方法
JP2001042150A (ja) * 1999-07-30 2001-02-16 Canon Inc 光導波路、その作製方法、およびこれを用いた光インタコネクション装置
US6445857B1 (en) * 1999-09-21 2002-09-03 Matsushita Electric Industrial Co., Ltd. Optical waveguide part, its manufacturing method, connection member, optical part, method for connecting optical waveguide part, and optical element
JP3774598B2 (ja) * 1999-09-30 2006-05-17 株式会社日立製作所 ポリマ導波路基板の製造方法およびポリマ導波路基板
JP2001154051A (ja) 1999-11-29 2001-06-08 Oki Printed Circuit Kk 光導波路の製造方法
JP3681947B2 (ja) 2000-03-13 2005-08-10 日本電信電話株式会社 光導波路の製造方法
JP4060023B2 (ja) * 2000-03-28 2008-03-12 沖電気工業株式会社 光導波路送受信モジュール
US6266250B1 (en) * 2000-04-26 2001-07-24 Multiplex Technology, Inc. Electronics component mounting system
JP2001350051A (ja) 2000-06-06 2001-12-21 Nippon Telegr & Teleph Corp <Ntt> 光導波路モジュール及びその製造方法
JP5218713B2 (ja) * 2000-07-28 2013-06-26 住友ベークライト株式会社 光学導波管を形成するためのポリマー組成物;それらから形成される光学導波管;およびそれを作製するための方法
US6766082B2 (en) * 2000-10-18 2004-07-20 Nippon Telegraph And Telephone Corporation Waveguide-type optical device and manufacturing method therefor
WO2002048765A1 (en) 2000-12-14 2002-06-20 Bookham Technology Plc Integrated optical devices
WO2002050585A1 (en) 2000-12-21 2002-06-27 Cquint Communications Corporation Multi-layer dispersion-engineered waveguides and resonators
US6885781B2 (en) * 2002-05-03 2005-04-26 Fujitsu Limited Thin film electro-optical deflector device and a method of fabrication of such a device

Also Published As

Publication number Publication date
US7013055B2 (en) 2006-03-14
US20060104587A1 (en) 2006-05-18
KR20060029657A (ko) 2006-04-06
US7174081B2 (en) 2007-02-06
JP3858995B2 (ja) 2006-12-20
TWI227342B (en) 2005-02-01
KR100713498B1 (ko) 2007-05-02
CN1477410A (zh) 2004-02-25
KR20050045966A (ko) 2005-05-17
KR100559645B1 (ko) 2006-03-10
KR100766686B1 (ko) 2007-10-15
TW200407571A (en) 2004-05-16
KR20040004106A (ko) 2004-01-13
JP2004086129A (ja) 2004-03-18
US20060110098A1 (en) 2006-05-25
US7113683B2 (en) 2006-09-26
US20040184702A1 (en) 2004-09-23

Similar Documents

Publication Publication Date Title
CN1246712C (zh) 光波导装置、光波导装置的制造方法以及光通信装置
US8041159B2 (en) Optical/electrical hybrid substrate and method of manufacturing the same
CN1274005C (zh) 光电子器件集成
JP2010243770A (ja) 光電気混載モジュールの製造方法およびそれによって得られた光電気混載モジュール
JP3774598B2 (ja) ポリマ導波路基板の製造方法およびポリマ導波路基板
HK1049705A1 (zh) 硅板上有源与无源光学部件的混合集成
US10135224B2 (en) Apparatus and method of forming chip package with waveguide for light coupling having a molding layer for a laser die
CN1808195A (zh) 光波导装置、光波导装置的制造方法以及光通信装置
CN100377359C (zh) 光器件的制造方法
JP4934565B2 (ja) 光モジュール
JP2006227655A (ja) 光導波路装置の製造方法
JP4133410B2 (ja) 光ファイバアレイの製造方法
JP2004046020A (ja) 光導波路及び光導波路装置の製造方法、光導波路装置及び光導波路、並びに光導波路装置を用いた光通信用装置
JP2006259769A (ja) 光導波路装置及びその製造方法並びに光通信装置
JP2016001289A (ja) 光デバイスの作製方法
JP2006053579A (ja) 光導波路及び光導波路の製造方法
JP2015212733A (ja) 半導体基板
WO2016093262A1 (ja) 光モジュール
JP2009116084A (ja) 光導波路構造体の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20060322

Termination date: 20100701