HK1049705A1 - 硅板上有源與無源光學部件的混合集成 - Google Patents
硅板上有源與無源光學部件的混合集成Info
- Publication number
- HK1049705A1 HK1049705A1 HK03101790.7A HK03101790A HK1049705A1 HK 1049705 A1 HK1049705 A1 HK 1049705A1 HK 03101790 A HK03101790 A HK 03101790A HK 1049705 A1 HK1049705 A1 HK 1049705A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- board
- active
- optical components
- passive optical
- hybrid integration
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4238—Soldering
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DKPA199901040 | 1999-07-16 | ||
PCT/DK2000/000407 WO2001006285A2 (en) | 1999-07-16 | 2000-07-17 | Hybrid integration of active and passive optical components on an si-board |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1049705A1 true HK1049705A1 (zh) | 2003-05-23 |
Family
ID=8100326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK03101790.7A HK1049705A1 (zh) | 1999-07-16 | 2003-03-12 | 硅板上有源與無源光學部件的混合集成 |
Country Status (12)
Country | Link |
---|---|
US (1) | US6832013B1 (zh) |
EP (1) | EP1218780A2 (zh) |
JP (1) | JP2003517630A (zh) |
KR (1) | KR100762387B1 (zh) |
CN (1) | CN1183396C (zh) |
AU (1) | AU5967000A (zh) |
BR (1) | BR0012511A (zh) |
CA (1) | CA2378972A1 (zh) |
HK (1) | HK1049705A1 (zh) |
IL (1) | IL147358A0 (zh) |
PL (1) | PL365959A1 (zh) |
WO (1) | WO2001006285A2 (zh) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8054971B2 (en) * | 2001-04-27 | 2011-11-08 | Comverse Ltd | Free-hand mobile messaging-method and device |
GB2381082A (en) * | 2001-10-17 | 2003-04-23 | Marconi Caswell Ltd | Optical waveguide with alignment feature in core layer |
GB0128616D0 (en) * | 2001-11-29 | 2002-01-23 | Denselight Semiconductors Pte | Standoffs for passive alignment of semiconductor chip and coupling bench |
GB0203343D0 (en) | 2002-02-13 | 2002-03-27 | Alcatel Optronics Uk Ltd | Micro opto electro mechanical device |
EP1457798A1 (en) * | 2003-03-12 | 2004-09-15 | Agilent Technologies, Inc. - a Delaware corporation - | Hybrid integrated optical module |
WO2004087541A2 (en) * | 2003-04-04 | 2004-10-14 | Mobile Concepts, Inc. | Pallet and conveyor system for loading onto transport |
US7212698B2 (en) * | 2004-02-10 | 2007-05-01 | International Business Machines Corporation | Circuit board integrated optical coupling elements |
US7495462B2 (en) * | 2005-03-24 | 2009-02-24 | Memsic, Inc. | Method of wafer-level packaging using low-aspect ratio through-wafer holes |
US7262622B2 (en) * | 2005-03-24 | 2007-08-28 | Memsic, Inc. | Wafer-level package for integrated circuits |
US7419853B2 (en) * | 2005-08-11 | 2008-09-02 | Hymite A/S | Method of fabrication for chip scale package for a micro component |
JP4796884B2 (ja) * | 2006-04-17 | 2011-10-19 | 日本電気株式会社 | 光導波路デバイスの製造方法 |
WO2011109442A2 (en) * | 2010-03-02 | 2011-09-09 | Oliver Steven D | Led packaging with integrated optics and methods of manufacturing the same |
JP2012068399A (ja) * | 2010-09-22 | 2012-04-05 | Nec Corp | 光モジュール及びその製造方法 |
KR101048428B1 (ko) | 2011-02-22 | 2011-07-11 | 주식회사 피피아이 | 광도파로형 광모듈 |
US10180547B2 (en) | 2012-02-23 | 2019-01-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Optical bench on substrate |
US9618712B2 (en) | 2012-02-23 | 2017-04-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Optical bench on substrate and method of making the same |
EP2685297B1 (en) * | 2012-07-13 | 2017-12-06 | Huawei Technologies Co., Ltd. | A process for manufacturing a photonic circuit with active and passive structures |
CN107731976A (zh) * | 2013-04-12 | 2018-02-23 | 深圳迈辽技术转移中心有限公司 | 二极管模组 |
DE102014221728A1 (de) * | 2014-10-24 | 2016-04-28 | Technische Universität Dresden | Anordnung elektro-optischer Bauelemente zur optischen Daten- und/oder Energieübertragung in einem Gehäuse |
US9323012B1 (en) * | 2014-10-27 | 2016-04-26 | Laxense Inc. | Hybrid integrated optical device with high alignment tolerance |
CN104965267B (zh) * | 2015-07-13 | 2016-09-21 | 青岛海信宽带多媒体技术有限公司 | 光模块 |
JP6664897B2 (ja) * | 2015-07-22 | 2020-03-13 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US10027087B2 (en) * | 2016-02-19 | 2018-07-17 | Macom Technology Solutions Holdings, Inc. | Techniques for laser alignment in photonic integrated circuits |
FR3053479B1 (fr) * | 2016-06-30 | 2019-11-01 | Stmicroelectronics (Crolles 2) Sas | Region de jonction entre deux guides d'ondes et procede de fabrication associe |
WO2018047119A1 (en) * | 2016-09-09 | 2018-03-15 | Ranovus Inc. | An optical coupler with a waveguide and waveguide index matched materials at an edge of a substrate |
JP6977267B2 (ja) * | 2017-02-02 | 2021-12-08 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイス及び光デバイスの製造方法 |
KR102364852B1 (ko) | 2017-06-19 | 2022-02-18 | 삼성전자주식회사 | 식각정지층을 포함하는 하이브리드 광소자 및 그 제조방법 |
CN111316149A (zh) * | 2017-09-08 | 2020-06-19 | 芬兰国家技术研究中心股份公司 | 具有单侧耦合的光子芯片的混合集成 |
JP7138056B2 (ja) * | 2019-01-24 | 2022-09-15 | 京セラ株式会社 | 光コネクタモジュール及び光導波路基板の製造方法 |
JP7222136B2 (ja) * | 2019-01-24 | 2023-02-14 | 京セラ株式会社 | 光コネクタモジュール及び光導波路基板の製造方法 |
DE102019210750B4 (de) * | 2019-07-19 | 2023-12-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur herstellung einer anordnung mit einem substrat und zwei bauelementen mit lichtwellenleitern |
US20230092838A1 (en) * | 2021-09-23 | 2023-03-23 | Osram Opto Semiconductors Gmbh | Optoelectronic semiconductor device and glasses |
WO2023162964A1 (ja) * | 2022-02-22 | 2023-08-31 | 京セラ株式会社 | 光回路基板 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4356047A (en) | 1980-02-19 | 1982-10-26 | Consolidated Refining Co., Inc. | Method of making ceramic lid assembly for hermetic sealing of a semiconductor chip |
NL8105424A (nl) * | 1981-12-01 | 1983-07-01 | Schoenfabriek Anton Van Bladel | Schoeisel. |
US5023881A (en) | 1990-06-19 | 1991-06-11 | At&T Bell Laboratories | Photonics module and alignment method |
DE69112058T2 (de) * | 1991-09-19 | 1996-05-02 | Ibm | Selbstjustierender optischer Wellenleiter-Laser, Struktur und dessen Herstellungsverfahren. |
DE69331876T2 (de) | 1992-01-28 | 2002-11-28 | British Telecommunications P.L.C., London | Ausrichtung von integrierten optischen Komponenten |
US5259059A (en) * | 1992-12-10 | 1993-11-02 | Xerox Corporation | Optical fibers with built-in alignment features |
JPH0719873A (ja) | 1993-06-29 | 1995-01-20 | Topcon Corp | 測量機の回転駆動装置 |
JP3117107B2 (ja) * | 1993-08-03 | 2000-12-11 | シャープ株式会社 | 光集積回路素子の組立構造 |
JP2550890B2 (ja) | 1993-10-28 | 1996-11-06 | 日本電気株式会社 | 光導波路の接続構造およびその製造方法 |
JP2684984B2 (ja) * | 1993-12-28 | 1997-12-03 | 日本電気株式会社 | 導波路型光デバイスの気密封止構造 |
US5611014A (en) | 1994-12-07 | 1997-03-11 | Lucent Technologies Inc. | Optoelectronic device connecting techniques |
US5745631A (en) | 1996-01-26 | 1998-04-28 | Irvine Sensors Corporation | Self-aligning optical beam system |
US5703973A (en) * | 1996-03-29 | 1997-12-30 | Lucent Technologies Inc. | Optical integrated circuit having passively aligned fibers and method using same |
JP2823044B2 (ja) | 1996-05-14 | 1998-11-11 | 日本電気株式会社 | 光結合回路及びその製造方法 |
US5721797A (en) | 1996-05-28 | 1998-02-24 | Lucent Technologies Inc. | Apparatus and method for mounting a laser to a substrate and aligning the laser with an optical conduit |
EP0864893A3 (en) * | 1997-03-13 | 1999-09-22 | Nippon Telegraph and Telephone Corporation | Packaging platform, optical module using the platform, and methods for producing the platform and the module |
-
2000
- 2000-07-17 BR BR0012511-3A patent/BR0012511A/pt not_active Application Discontinuation
- 2000-07-17 CN CNB008129916A patent/CN1183396C/zh not_active Expired - Fee Related
- 2000-07-17 PL PL00365959A patent/PL365959A1/xx not_active Application Discontinuation
- 2000-07-17 EP EP00945666A patent/EP1218780A2/en not_active Withdrawn
- 2000-07-17 AU AU59670/00A patent/AU5967000A/en not_active Abandoned
- 2000-07-17 JP JP2001510866A patent/JP2003517630A/ja active Pending
- 2000-07-17 IL IL14735800A patent/IL147358A0/xx unknown
- 2000-07-17 KR KR1020027000672A patent/KR100762387B1/ko active IP Right Grant
- 2000-07-17 CA CA002378972A patent/CA2378972A1/en not_active Abandoned
- 2000-07-17 US US10/030,639 patent/US6832013B1/en not_active Expired - Lifetime
- 2000-07-17 WO PCT/DK2000/000407 patent/WO2001006285A2/en not_active Application Discontinuation
-
2003
- 2003-03-12 HK HK03101790.7A patent/HK1049705A1/zh unknown
Also Published As
Publication number | Publication date |
---|---|
PL365959A1 (en) | 2005-01-24 |
BR0012511A (pt) | 2002-04-02 |
US6832013B1 (en) | 2004-12-14 |
CA2378972A1 (en) | 2001-01-25 |
CN1375070A (zh) | 2002-10-16 |
WO2001006285A2 (en) | 2001-01-25 |
KR100762387B1 (ko) | 2007-10-02 |
IL147358A0 (en) | 2002-08-14 |
JP2003517630A (ja) | 2003-05-27 |
CN1183396C (zh) | 2005-01-05 |
WO2001006285A3 (en) | 2001-08-30 |
AU5967000A (en) | 2001-02-05 |
KR20020038693A (ko) | 2002-05-23 |
EP1218780A2 (en) | 2002-07-03 |
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