TWD215401S - 基板處理腔室的製程護罩 - Google Patents

基板處理腔室的製程護罩 Download PDF

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Publication number
TWD215401S
TWD215401S TW109305253D01F TW109305253D01F TWD215401S TW D215401 S TWD215401 S TW D215401S TW 109305253D01 F TW109305253D01 F TW 109305253D01F TW 109305253D01 F TW109305253D01 F TW 109305253D01F TW D215401 S TWD215401 S TW D215401S
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TW
Taiwan
Prior art keywords
design
processing chamber
substrate processing
process shield
derivative
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TW109305253D01F
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English (en)
Inventor
伊利亞 拉維斯基
凱斯Ａ 米勒
吉留剛一
Original Assignee
美商應用材料股份有限公司
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Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD215401S publication Critical patent/TWD215401S/zh

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Abstract

【物品用途】;本衍生設計所請求之基板處理腔室的製程護罩係用於半導體製程。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。;本衍生設計與原設計不同之處在於以虛線呈現部分的外觀。

Description

基板處理腔室的製程護罩
本衍生設計所請求之基板處理腔室的製程護罩係用於半導體製程。
圖式所揭露之虛線部分，為本案不主張設計之部分。
本衍生設計與原設計不同之處在於以虛線呈現部分的外觀。
TW109305253D01F 2020-03-20 2020-09-18 基板處理腔室的製程護罩 TWD215401S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/728,820 2020-03-20
US29/728,820 USD941371S1 (en) 2020-03-20 2020-03-20 Process shield for a substrate processing chamber

Publications (1)

Publication Number Publication Date
TWD215401S true TWD215401S (zh) 2021-11-21

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TW109305253F TWD215400S (zh) 2020-03-20 2020-09-18 基板處理腔室的製程護罩
TW109305253D01F TWD215401S (zh) 2020-03-20 2020-09-18 基板處理腔室的製程護罩

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TW109305253F TWD215400S (zh) 2020-03-20 2020-09-18 基板處理腔室的製程護罩

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US (1) USD941371S1 (zh)
JP (2) JP1696763S (zh)
TW (2) TWD215400S (zh)

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USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber
USD1055006S1 (en) 2022-03-18 2024-12-24 Applied Materials, Inc. Support ring for an interlocking process kit for a substrate processing chamber

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1042374S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber
USD1055006S1 (en) 2022-03-18 2024-12-24 Applied Materials, Inc. Support ring for an interlocking process kit for a substrate processing chamber

Also Published As

Publication number Publication date
JP1696763S (zh) 2021-10-11
JP1696666S (zh) 2021-10-11
USD941371S1 (en) 2022-01-18
TWD215400S (zh) 2021-11-21

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