TWD217686S - 用於半導體處理腔室的沉積環 - Google Patents
用於半導體處理腔室的沉積環 Download PDFInfo
- Publication number
- TWD217686S TWD217686S TW110304099F TW110304099F TWD217686S TW D217686 S TWD217686 S TW D217686S TW 110304099 F TW110304099 F TW 110304099F TW 110304099 F TW110304099 F TW 110304099F TW D217686 S TWD217686 S TW D217686S
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor processing
- processing chamber
- deposition ring
- design
- deposition
- Prior art date
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- 230000008021 deposition Effects 0.000 title abstract description 3
- 239000004065 semiconductor Substances 0.000 title abstract description 3
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Abstract
【物品用途】;本設計所請求係用於半導體處理腔室的沉積環。;【設計說明】;圖式所揭露的虛線部分,為本案不主張設計之部分。
Description
本設計所請求係用於半導體處理腔室的沉積環。
圖式所揭露的虛線部分,為本案不主張設計之部分。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/744,882 | 2020-07-31 | ||
| US29/744,882 USD933726S1 (en) | 2020-07-31 | 2020-07-31 | Deposition ring for a semiconductor processing chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD217686S true TWD217686S (zh) | 2022-03-11 |
Family
ID=78069701
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110300413F TWD217572S (zh) | 2020-07-31 | 2021-01-25 | 用於半導體處理腔室的沉積環 |
| TW110304099F TWD217686S (zh) | 2020-07-31 | 2021-01-25 | 用於半導體處理腔室的沉積環 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110300413F TWD217572S (zh) | 2020-07-31 | 2021-01-25 | 用於半導體處理腔室的沉積環 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD933726S1 (zh) |
| JP (2) | JP1704604S (zh) |
| TW (2) | TWD217572S (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD241336S (zh) | 2024-10-29 | 2025-11-01 | 南韓商Komico有限公司 (南韓) | 蓋環 |
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| USD979524S1 (en) * | 2020-03-19 | 2023-02-28 | Applied Materials, Inc. | Confinement liner for a substrate processing chamber |
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| JP1711120S (ja) * | 2021-10-22 | 2022-03-29 | サセプタカバー | |
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| USD1059312S1 (en) * | 2022-08-04 | 2025-01-28 | Applied Materials, Inc. | Deposition ring of a process kit for semiconductor substrate processing |
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| USD1105368S1 (en) * | 2023-07-11 | 2025-12-09 | Caterpillar Inc. | Dual-peak annular seal |
| JP1760971S (zh) * | 2023-08-31 | 2024-01-10 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWD187824S (zh) | 2016-04-14 | 2018-01-11 | 應用材料股份有限公司 | 組合邊緣環 |
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-
2020
- 2020-07-31 US US29/744,882 patent/USD933726S1/en active Active
-
2021
- 2021-01-25 TW TW110300413F patent/TWD217572S/zh unknown
- 2021-01-25 TW TW110304099F patent/TWD217686S/zh unknown
- 2021-02-01 JP JP2021002209F patent/JP1704604S/ja active Active
- 2021-02-01 JP JP2021022122F patent/JP1708687S/ja active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD187824S (zh) | 2016-04-14 | 2018-01-11 | 應用材料股份有限公司 | 組合邊緣環 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD241336S (zh) | 2024-10-29 | 2025-11-01 | 南韓商Komico有限公司 (南韓) | 蓋環 |
Also Published As
| Publication number | Publication date |
|---|---|
| USD933726S1 (en) | 2021-10-19 |
| JP1708687S (ja) | 2022-03-01 |
| JP1704604S (ja) | 2022-01-13 |
| TWD217572S (zh) | 2022-03-11 |
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