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Applied Materials, Inc. |
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1998-01-27 |
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1998-01-27 |
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1998-01-27 |
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Tokyo Electron Limited |
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2008-01-15 |
Tokyo Electron Limited |
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2010-02-26 |
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Fujifilm Corporation |
Physical vapor deposition with heat diffuser
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2010-08-17 |
2011-12-06 |
Ebara Corporation |
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Veeco Instruments Inc. |
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Tokyo Electron Limited |
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Applied Materials, Inc. |
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2012-01-31 |
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2013-07-11 |
2014-05-20 |
Ebara Corporation |
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Applied Materials, Inc. |
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Applied Materials, Inc. |
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2020-06-30 |
Applied Materials, Inc. |
Deposition ring for physical vapor deposition chamber
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Sputtering target for a physical vapor deposition chamber
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