JP1733480S - 基板処理チャンバ用基板支持体 - Google Patents

基板処理チャンバ用基板支持体

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Publication number
JP1733480S
JP1733480S JP2022014279F JP2022014279F JP1733480S JP 1733480 S JP1733480 S JP 1733480S JP 2022014279 F JP2022014279 F JP 2022014279F JP 2022014279 F JP2022014279 F JP 2022014279F JP 1733480 S JP1733480 S JP 1733480S
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JP
Japan
Prior art keywords
substrate
processing chamber
support
substrate processing
substrate support
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JP2022014279F
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English (en)
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JP2022014279F 2022-01-20 2022-07-04 基板処理チャンバ用基板支持体 Active JP1733480S (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US202229823917 2022-01-20

Publications (1)

Publication Number Publication Date
JP1733480S true JP1733480S (ja) 2022-12-28

Family

ID=84601223

Family Applications (2)

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JP2022014276F Active JP1733479S (ja) 2022-01-20 2022-07-04 基板処理チャンバ用基板支持体
JP2022014279F Active JP1733480S (ja) 2022-01-20 2022-07-04 基板処理チャンバ用基板支持体

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022014276F Active JP1733479S (ja) 2022-01-20 2022-07-04 基板処理チャンバ用基板支持体

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JP (2) JP1733479S (ja)
TW (2) TWD227252S (ja)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD913979S1 (en) 2019-08-28 2021-03-23 Applied Materials, Inc. Inner shield for a substrate processing chamber

Also Published As

Publication number Publication date
TWD227251S (zh) 2023-09-01
TWD227252S (zh) 2023-09-01
JP1733479S (ja) 2022-12-28

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