TWD227252S - 基板處理腔室用的基板支撐件 - Google Patents

基板處理腔室用的基板支撐件 Download PDF

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Publication number
TWD227252S
TWD227252S TW111303301F TW111303301F TWD227252S TW D227252 S TWD227252 S TW D227252S TW 111303301 F TW111303301 F TW 111303301F TW 111303301 F TW111303301 F TW 111303301F TW D227252 S TWD227252 S TW D227252S
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TW
Taiwan
Prior art keywords
substrate
processing chamber
support
substrate processing
design
Prior art date
Application number
TW111303301F
Other languages
English (en)
Chinese (zh)
Inventor
梁志修
麥可史特林 傑克森
疆 呂
振雄 蔡
松下智治
黃祖濱
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD227252S publication Critical patent/TWD227252S/zh

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TW111303301F 2022-01-20 2022-07-05 基板處理腔室用的基板支撐件 TWD227252S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202229823917 2022-01-20
US29/823,917 2022-01-20

Publications (1)

Publication Number Publication Date
TWD227252S true TWD227252S (zh) 2023-09-01

Family

ID=84601223

Family Applications (2)

Application Number Title Priority Date Filing Date
TW111303301F TWD227252S (zh) 2022-01-20 2022-07-05 基板處理腔室用的基板支撐件
TW111303298F TWD227251S (zh) 2022-01-20 2022-07-05 基板處理腔室用的基板支撐件

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW111303298F TWD227251S (zh) 2022-01-20 2022-07-05 基板處理腔室用的基板支撐件

Country Status (2)

Country Link
JP (2) JP1733480S (ja)
TW (2) TWD227252S (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214316S (zh) 2019-08-28 2021-10-01 美商應用材料股份有限公司 基板處理腔室的內部護罩

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214316S (zh) 2019-08-28 2021-10-01 美商應用材料股份有限公司 基板處理腔室的內部護罩

Also Published As

Publication number Publication date
JP1733480S (ja) 2022-12-28
TWD227251S (zh) 2023-09-01
JP1733479S (ja) 2022-12-28

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