TWD224469S - 基板支撐件的基底板 - Google Patents
基板支撐件的基底板 Download PDFInfo
- Publication number
- TWD224469S TWD224469S TW110304221F TW110304221F TWD224469S TW D224469 S TWD224469 S TW D224469S TW 110304221 F TW110304221 F TW 110304221F TW 110304221 F TW110304221 F TW 110304221F TW D224469 S TWD224469 S TW D224469S
- Authority
- TW
- Taiwan
- Prior art keywords
- base plate
- substrate support
- design
- processing chamber
- dotted line
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title description 2
- 238000010586 diagram Methods 0.000 description 1
Images
Abstract
【物品用途】;本設計所請求係用於處理腔室基板支撐件的基底板。;【設計說明】;圖式所揭露的虛線部分，為本案不主張設計之部分。
Description
本設計所請求係用於處理腔室基板支撐件的基底板。
圖式所揭露的虛線部分，為本案不主張設計之部分。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/759,527 | 2020-11-23 | ||
| US29/759,527 USD947914S1 (en) | 2020-11-23 | 2020-11-23 | Base plate for a processing chamber substrate support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD224469S true TWD224469S (zh) | 2023-04-01 |
Family
ID=80857170
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109306844F TWD217559S (zh) | 2020-11-23 | 2020-12-04 | 用於處理腔室基板支撐件的基底板 |
| TW110304221F TWD224469S (zh) | 2020-11-23 | 2020-12-04 | 基板支撐件的基底板 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109306844F TWD217559S (zh) | 2020-11-23 | 2020-12-04 | 用於處理腔室基板支撐件的基底板 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | USD947914S1 (zh) |
| TW (2) | TWD217559S (zh) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD943539S1 (en) * | 2020-03-19 | 2022-02-15 | Applied Materials, Inc. | Confinement plate for a substrate processing chamber |
| USD991012S1 (en) | 2020-05-20 | 2023-07-04 | Peak Industries, Inc. | Base plate of a mobile stackable tower |
| USD947414S1 (en) | 2020-05-20 | 2022-03-29 | Peak Industries, Inc. | Mobile stackable tower |
| USD989012S1 (en) * | 2020-09-17 | 2023-06-13 | Ebara Corporation | Elastic membrane |
| USD1012873S1 (en) * | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
| USD981973S1 (en) * | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
| USD980813S1 (en) * | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
| USD980814S1 (en) * | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
| USD990441S1 (en) * | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
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| USD375961S (en) | 1995-08-03 | 1996-11-26 | American Standard Inc. | Base plate for a refrigeration compressor |
| US6046885A (en) | 1998-04-03 | 2000-04-04 | Intri-Plex Technologies, Inc. | Base plate suspension assembly in a hard disk drive with step in flange |
| FR2786420B1 (fr) | 1998-11-30 | 2001-01-05 | Prospection & Inventions | Procede de pose d'une embase de fixation de piece et outil de fixation pour la mise en oeuvre du procede |
| JP3526788B2 (ja) | 1999-07-01 | 2004-05-17 | 沖電気工業株式会社 | 半導体装置の製造方法 |
| KR20010111058A (ko) | 2000-06-09 | 2001-12-15 | 조셉 제이. 스위니 | 전체 영역 온도 제어 정전기 척 및 그 제조방법 |
| US7324307B2 (en) | 2002-02-20 | 2008-01-29 | Intri-Plex Technologies, Inc. | Plated base plate for suspension assembly in hard disk drive |
| JP4744855B2 (ja) * | 2003-12-26 | 2011-08-10 | 日本碍子株式会社 | 静電チャック |
| US7697260B2 (en) | 2004-03-31 | 2010-04-13 | Applied Materials, Inc. | Detachable electrostatic chuck |
| US7134819B2 (en) * | 2004-12-20 | 2006-11-14 | A.L. Hansen Manufacturing Co. | Tie-down assembly |
| US7589950B2 (en) | 2006-10-13 | 2009-09-15 | Applied Materials, Inc. | Detachable electrostatic chuck having sealing assembly |
| US8476793B2 (en) | 2008-05-03 | 2013-07-02 | Anthony J. Aiello | Stiffener tab for a spindle motor base plate |
| USD616390S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Quartz cover for manufacturing semiconductor wafers |
| USD623500S1 (en) | 2009-04-20 | 2010-09-14 | Armorworks Enterprises, Llc | Tie-down base plate |
| KR101063340B1 (ko) * | 2010-06-18 | 2011-09-07 | 주식회사 삼홍사 | 모터 |
| USD707257S1 (en) * | 2012-04-30 | 2014-06-17 | Samhongsa Co., Ltd. | Base plate for spindle motor |
| TWD159673S (zh) | 2012-11-30 | 2014-04-01 | 日立國際電氣股份有限公司 | 基板處理裝置用廻轉器 |
| US9668873B2 (en) | 2013-03-08 | 2017-06-06 | Biomet Manufacturing, Llc | Modular glenoid base plate with augments |
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| USD793816S1 (en) | 2014-08-19 | 2017-08-08 | Frank J Alteslaben | Saucer base plate |
| US9666467B2 (en) | 2014-11-21 | 2017-05-30 | Varian Semiconductor Equipment Associates, Inc. | Detachable high-temperature electrostatic chuck assembly |
| JP1546801S (zh) | 2015-06-12 | 2016-03-28 | ||
| TWD178698S (zh) * | 2016-01-08 | 2016-10-01 | Asm Ip Holding Bv | 用於半導體製造設備的反應器外壁 |
| USD847982S1 (en) | 2016-02-04 | 2019-05-07 | Atos Medical Ab | Heat exchanger base plate |
| JP1564807S (zh) | 2016-02-10 | 2016-12-05 | ||
| CA176852S (en) * | 2017-03-17 | 2018-09-17 | Huskee Tech Pty Ltd | Saucer |
| KR102417931B1 (ko) * | 2017-05-30 | 2022-07-06 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 장치 및 이를 포함하는 기판 처리 장치 |
| JP1605838S (zh) | 2017-11-10 | 2018-06-04 | ||
| USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
| JP2019149218A (ja) | 2018-02-28 | 2019-09-05 | 日本電産株式会社 | ベースプレートおよびベースプレートの製造方法 |
| JP1624334S (zh) * | 2018-05-18 | 2019-02-12 | ||
| US10609994B2 (en) * | 2018-05-25 | 2020-04-07 | Telescope Casual Furniture, Inc. | Nestable and stackable umbrella bases |
| USD893441S1 (en) * | 2019-06-28 | 2020-08-18 | Applied Materials, Inc. | Base plate for a processing chamber substrate support |
-
2020
- 2020-11-23 US US29/759,527 patent/USD947914S1/en active Active
- 2020-12-04 TW TW109306844F patent/TWD217559S/zh unknown
- 2020-12-04 TW TW110304221F patent/TWD224469S/zh unknown
-
2022
- 2022-03-11 US US29/830,409 patent/USD960216S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TWD217559S (zh) | 2022-03-11 |
| USD960216S1 (en) | 2022-08-09 |
| USD947914S1 (en) | 2022-04-05 |
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