JP1704608S - 半導体処理チャンバ用ガス分配プレート - Google Patents
半導体処理チャンバ用ガス分配プレートInfo
- Publication number
- JP1704608S JP1704608S JP2021004329F JP2021004329F JP1704608S JP 1704608 S JP1704608 S JP 1704608S JP 2021004329 F JP2021004329 F JP 2021004329F JP 2021004329 F JP2021004329 F JP 2021004329F JP 1704608 S JP1704608 S JP 1704608S
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- gas distribution
- distribution plate
- semiconductor processing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title 1
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US202029749079 | 2020-09-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP1704608S true JP1704608S (ja) | 2022-01-13 |
Family
ID=80216979
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021022275F Active JP1708474S (ja) | 2020-09-02 | 2021-03-02 | 半導体処理チャンバ用ガス分配プレート |
JP2021004329F Active JP1704608S (ja) | 2020-09-02 | 2021-03-02 | 半導体処理チャンバ用ガス分配プレート |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021022275F Active JP1708474S (ja) | 2020-09-02 | 2021-03-02 | 半導体処理チャンバ用ガス分配プレート |
Country Status (2)
Country | Link |
---|---|
JP (2) | JP1708474S (ja) |
TW (2) | TWD217767S (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD1030687S1 (en) | 2022-05-31 | 2024-06-11 | Asm Ip Holding B.V. | Susceptor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
-
2021
- 2021-02-08 TW TW110300742F patent/TWD217767S/zh unknown
- 2021-02-08 TW TW110300742D01F patent/TWD231180S/zh unknown
- 2021-03-02 JP JP2021022275F patent/JP1708474S/ja active Active
- 2021-03-02 JP JP2021004329F patent/JP1704608S/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP1708474S (ja) | 2022-02-25 |
TWD231180S (zh) | 2024-05-11 |
TWD217767S (zh) | 2022-03-21 |
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