SG10201901906YA - Atmospheric epitaxial deposition chamber - Google Patents

Atmospheric epitaxial deposition chamber

Info

Publication number
SG10201901906YA
SG10201901906YA SG10201901906YA SG10201901906YA SG10201901906YA SG 10201901906Y A SG10201901906Y A SG 10201901906YA SG 10201901906Y A SG10201901906Y A SG 10201901906YA SG 10201901906Y A SG10201901906Y A SG 10201901906YA SG 10201901906Y A SG10201901906Y A SG 10201901906YA
Authority
SG
Singapore
Prior art keywords
epitaxial deposition
assembly
radiant energy
deposition chamber
liner
Prior art date
Application number
SG10201901906YA
Inventor
Shu-Kwan Lau
Mehmet Tugrul Samir
Nyi Oo Myo
Aaron Miller
Aaron Muir Hunter
Errol Antonio C Sanchez
Paul Brillhart
Joseph M Ranish
Kartik Shah
Dennis L Demars
Satheesh Kuppurao
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/584,441 external-priority patent/US10760161B2/en
Priority claimed from US14/826,065 external-priority patent/US11060203B2/en
Priority claimed from US14/826,287 external-priority patent/US20160068996A1/en
Priority claimed from US14/826,310 external-priority patent/US20160071749A1/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG10201901906YA publication Critical patent/SG10201901906YA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/08—Reaction chambers; Selection of materials therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/08—Germanium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • C30B29/406—Gallium nitride
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42—Gallium arsenide

Abstract

Embodiments described herein disclose epitaxial deposition chambers and components thereof. In one embodiment, a chamber can include a substrate support positioned in a processing region, a radiant energy assembly comprising a plurality of radiant energy sources, a liner assembly having an upper liner and a lower liner, and a dome assembly positioned between the substrate support and the radiant energy assembly. The epitaxial deposition chambers described herein allow for processing of larger substrates, while maintaining throughput, reducing costs and providing a reliably uniform deposition product.
SG10201901906YA 2014-09-05 2015-09-02 Atmospheric epitaxial deposition chamber SG10201901906YA (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US201462046451P 2014-09-05 2014-09-05
US201462046414P 2014-09-05 2014-09-05
US201462046377P 2014-09-05 2014-09-05
US201462046400P 2014-09-05 2014-09-05
US201462046559P 2014-09-05 2014-09-05
US14/584,441 US10760161B2 (en) 2014-09-05 2014-12-29 Inject insert for EPI chamber
US14/826,065 US11060203B2 (en) 2014-09-05 2015-08-13 Liner for epi chamber
US14/826,287 US20160068996A1 (en) 2014-09-05 2015-08-14 Susceptor and pre-heat ring for thermal processing of substrates
US14/826,310 US20160071749A1 (en) 2014-09-05 2015-08-14 Upper dome for epi chamber

Publications (1)

Publication Number Publication Date
SG10201901906YA true SG10201901906YA (en) 2019-04-29

Family

ID=55440346

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201901906YA SG10201901906YA (en) 2014-09-05 2015-09-02 Atmospheric epitaxial deposition chamber
SG11201701463XA SG11201701463XA (en) 2014-09-05 2015-09-02 Atmospheric epitaxial deposition chamber

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201701463XA SG11201701463XA (en) 2014-09-05 2015-09-02 Atmospheric epitaxial deposition chamber

Country Status (5)

Country Link
KR (1) KR20170048578A (en)
CN (1) CN106715753B (en)
SG (2) SG10201901906YA (en)
TW (1) TWI673396B (en)
WO (1) WO2016036868A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7384784B2 (en) 2017-08-11 2023-11-21 アプライド マテリアルズ インコーポレイテッド Apparatus and method for improving uniformity in thermal chemical vapor deposition (CVD)
CN112639164B (en) * 2018-09-28 2023-10-10 应用材料公司 Coaxial lifting device with dynamic leveling function
CN111831022B (en) * 2019-04-18 2022-03-18 北京七星华创流量计有限公司 Chamber pressure control method and device and semiconductor equipment
KR102263006B1 (en) * 2019-07-18 2021-06-10 세메스 주식회사 Substrate processing apparatus
US20220056583A1 (en) * 2020-08-18 2022-02-24 Globalwafers Co., Ltd. Window for chemical vapor deposition systems and related methods
KR102457294B1 (en) * 2020-09-15 2022-10-21 에스케이실트론 주식회사 Dome assembly and epitaxial reactor
CN113278953B (en) * 2021-03-26 2022-06-17 华灿光电(苏州）有限公司 Graphite substrate
US20220352006A1 (en) * 2021-04-30 2022-11-03 Asm Ip Holding B.V. Susceptors with film deposition control features

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5837058A (en) * 1996-07-12 1998-11-17 Applied Materials, Inc. High temperature susceptor
US6099648A (en) * 1997-08-06 2000-08-08 Applied Materials, Inc. Domed wafer reactor vessel window with reduced stress at atmospheric and above atmospheric pressures
US6143079A (en) * 1998-11-19 2000-11-07 Asm America, Inc. Compact process chamber for improved process uniformity
JP4841873B2 (en) * 2005-06-23 2011-12-21 大日本スクリーン製造株式会社 Heat treatment susceptor and heat treatment apparatus
TW200802552A (en) * 2006-03-30 2008-01-01 Sumco Techxiv Corp Method of manufacturing epitaxial silicon wafer and apparatus thereof
US20080017116A1 (en) * 2006-07-18 2008-01-24 Jeffrey Campbell Substrate support with adjustable lift and rotation mount
DE102008034260B4 (en) * 2008-07-16 2014-06-26 Siltronic Ag Method for depositing a layer on a semiconductor wafer by means of CVD in a chamber and chamber for depositing a layer on a semiconductor wafer by means of CVD
US9127360B2 (en) * 2009-10-05 2015-09-08 Applied Materials, Inc. Epitaxial chamber with cross flow
US8404048B2 (en) * 2011-03-11 2013-03-26 Applied Materials, Inc. Off-angled heating of the underside of a substrate using a lamp assembly
US20120270384A1 (en) * 2011-04-22 2012-10-25 Applied Materials, Inc. Apparatus for deposition of materials on a substrate
WO2013162972A1 (en) * 2012-04-25 2013-10-31 Applied Materials, Inc. Process chamber having separate process gas and purge gas regions

Also Published As

Publication number Publication date
TW201617488A (en) 2016-05-16
SG11201701463XA (en) 2017-03-30
TWI673396B (en) 2019-10-01
CN106715753A (en) 2017-05-24
KR20170048578A (en) 2017-05-08
WO2016036868A1 (en) 2016-03-10
CN106715753B (en) 2020-03-17

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