TWD167111S - 半導體晶圓硏磨裝置用彈性膜 - Google Patents

半導體晶圓硏磨裝置用彈性膜

Info

Publication number
TWD167111S
TWD167111S TW102307327F TW102307327F TWD167111S TW D167111 S TWD167111 S TW D167111S TW 102307327 F TW102307327 F TW 102307327F TW 102307327 F TW102307327 F TW 102307327F TW D167111 S TWD167111 S TW D167111S
Authority
TW
Taiwan
Prior art keywords
elastic membrane
semiconductor wafer
wafer polishing
article
view
Prior art date
Application number
TW102307327F
Other languages
English (en)
Chinese (zh)
Inventor
Makoto Fukushima
Hozumi Yasuda
Keisuke Namiki
Osamu Nabeya
Shingo Togashi
Satoru Yamaki
Original Assignee
荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司 filed Critical 荏原製作所股份有限公司
Publication of TWD167111S publication Critical patent/TWD167111S/zh

Links

TW102307327F 2013-05-15 2013-11-14 半導體晶圓硏磨裝置用彈性膜 TWD167111S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2013-10672F JP1494713S (enExample) 2013-05-15 2013-05-15

Publications (1)

Publication Number Publication Date
TWD167111S true TWD167111S (zh) 2015-04-11

Family

ID=58418543

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102307327F TWD167111S (zh) 2013-05-15 2013-11-14 半導體晶圓硏磨裝置用彈性膜

Country Status (2)

Country Link
JP (1) JP1494713S (enExample)
TW (1) TWD167111S (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981969S1 (en) 2020-12-18 2023-03-28 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981969S1 (en) 2020-12-18 2023-03-28 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus

Also Published As

Publication number Publication date
JP1494713S (enExample) 2017-04-03

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