TW200615390A - Vaporizing temperature sensitive materials - Google Patents

Vaporizing temperature sensitive materials

Info

Publication number
TW200615390A
TW200615390A TW094119929A TW94119929A TW200615390A TW 200615390 A TW200615390 A TW 200615390A TW 094119929 A TW094119929 A TW 094119929A TW 94119929 A TW94119929 A TW 94119929A TW 200615390 A TW200615390 A TW 200615390A
Authority
TW
Taiwan
Prior art keywords
temperature sensitive
sensitive materials
vaporizing temperature
vaporizing
substrate surface
Prior art date
Application number
TW094119929A
Other languages
English (en)
Chinese (zh)
Inventor
Jeremy M Grace
Michael Long
Bruce E Koppe
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of TW200615390A publication Critical patent/TW200615390A/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
TW094119929A 2004-06-17 2005-06-16 Vaporizing temperature sensitive materials TW200615390A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/870,623 US20050281948A1 (en) 2004-06-17 2004-06-17 Vaporizing temperature sensitive materials

Publications (1)

Publication Number Publication Date
TW200615390A true TW200615390A (en) 2006-05-16

Family

ID=34971736

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094119929A TW200615390A (en) 2004-06-17 2005-06-16 Vaporizing temperature sensitive materials

Country Status (6)

Country Link
US (1) US20050281948A1 (de)
EP (1) EP1759035B1 (de)
JP (2) JP2008503854A (de)
CN (1) CN100549218C (de)
TW (1) TW200615390A (de)
WO (1) WO2006007280A1 (de)

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* Cited by examiner, † Cited by third party
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US20060141135A1 (en) * 2004-12-29 2006-06-29 Jian Wang Processes for forming layers for electronic devices using heating elements
US20070231490A1 (en) * 2006-03-29 2007-10-04 Eastman Kodak Company Uniformly vaporizing metals and organic materials
TW200815616A (en) * 2006-05-31 2008-04-01 Univ Vanderbilt Solvent-enhanced wavelength-selective infrared laser vapor deposition of polymers and applications of same
ITPD20070036A1 (it) * 2007-02-05 2008-08-06 Sincrotrone Trieste S C P A Metodo di marcatura di un oggetto basato su centri di colore
US8119204B2 (en) * 2007-04-27 2012-02-21 Semiconductor Energy Laboratory Co., Ltd. Film formation method and method for manufacturing light-emitting device
US8889223B2 (en) * 2008-07-28 2014-11-18 Tanaka Kikinzoku Kogyo K.K. Physical vapor deposition apparatus and physical vapor deposition method
EP2461387A4 (de) * 2009-07-31 2013-01-23 Udc Ireland Ltd Dampfablagerungsmaterial für eine organische vorrichtung und verfahren zur herstellung der organischen vorrichtung
AT512949B1 (de) * 2012-06-04 2016-06-15 Leica Microsysteme Gmbh Verfahren zur Beschichtung mit einem Verdampfungsmaterial
CN111286185B (zh) * 2020-02-28 2022-05-20 珀力玛新材料(苏州)有限公司 温变调光材料、含温变调光材料的变色玻璃和其制备方法
JP7434261B2 (ja) * 2021-12-02 2024-02-20 長州産業株式会社 蒸着装置及び蒸着方法

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US3607135A (en) * 1967-10-12 1971-09-21 Ibm Flash evaporating gallium arsenide
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JP4679291B2 (ja) * 2005-08-05 2011-04-27 日立造船株式会社 真空蒸着用蒸発方法および装置

Also Published As

Publication number Publication date
CN100549218C (zh) 2009-10-14
JP5767258B2 (ja) 2015-08-19
EP1759035B1 (de) 2011-08-17
EP1759035A1 (de) 2007-03-07
WO2006007280A1 (en) 2006-01-19
JP2008503854A (ja) 2008-02-07
US20050281948A1 (en) 2005-12-22
JP2013091857A (ja) 2013-05-16
CN1969055A (zh) 2007-05-23

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