TW200540353A - Gas supply integrated unit and method of adding gas unit - Google Patents

Gas supply integrated unit and method of adding gas unit Download PDF

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Publication number
TW200540353A
TW200540353A TW094115878A TW94115878A TW200540353A TW 200540353 A TW200540353 A TW 200540353A TW 094115878 A TW094115878 A TW 094115878A TW 94115878 A TW94115878 A TW 94115878A TW 200540353 A TW200540353 A TW 200540353A
Authority
TW
Taiwan
Prior art keywords
gas
unit
flow path
common flow
manual valve
Prior art date
Application number
TW094115878A
Other languages
English (en)
Chinese (zh)
Other versions
TWI338755B (enExample
Inventor
Akihiro Takeichi
Tatsuhito Aoyama
Toshikazu Miwa
Akinori Nagaya
Original Assignee
Ckd Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp filed Critical Ckd Corp
Publication of TW200540353A publication Critical patent/TW200540353A/zh
Application granted granted Critical
Publication of TWI338755B publication Critical patent/TWI338755B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H10P95/00—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/08—Details
    • F16K5/10—Means for additional adjustment of the rate of flow
    • F16K5/103—Means for additional adjustment of the rate of flow specially adapted for gas valves
    • H10P72/0408—

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
TW094115878A 2004-05-20 2005-05-17 Gas supply integrated unit and method of adding gas unit TW200540353A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004150192 2004-05-20

Publications (2)

Publication Number Publication Date
TW200540353A true TW200540353A (en) 2005-12-16
TWI338755B TWI338755B (enExample) 2011-03-11

Family

ID=35428453

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094115878A TW200540353A (en) 2004-05-20 2005-05-17 Gas supply integrated unit and method of adding gas unit

Country Status (5)

Country Link
JP (1) JP4504368B2 (enExample)
KR (1) KR101074266B1 (enExample)
CN (1) CN100408900C (enExample)
TW (1) TW200540353A (enExample)
WO (1) WO2005114016A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI568962B (zh) * 2011-05-20 2017-02-01 富士金股份有限公司 流體控制裝置
TWI650500B (zh) * 2018-04-02 2019-02-11 奇鼎科技股份有限公司 多流道閥塊
TWI656292B (zh) * 2016-06-21 2019-04-11 日商富士金股份有限公司 Fluid control device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5081665B2 (ja) * 2008-02-28 2012-11-28 株式会社フジキン 流体制御装置
JP5324347B2 (ja) * 2009-07-15 2013-10-23 大陽日酸イー・エム・シー株式会社 気相成長装置
WO2011040268A1 (ja) * 2009-09-30 2011-04-07 株式会社堀場エステック 流量算出システム、集積型ガスパネル装置及びベースプレート
US20140137961A1 (en) * 2012-11-19 2014-05-22 Applied Materials, Inc. Modular chemical delivery system
JP7583186B2 (ja) 2021-03-03 2024-11-13 アイコール・システムズ・インク マニホールドアセンブリを備える流体流れ制御システム

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
JPH10214117A (ja) * 1998-03-05 1998-08-11 Ckd Corp ガス供給集積ユニット及びそのシステム
JPH11294698A (ja) * 1998-04-10 1999-10-29 Nippon Sanso Kk ガス供給設備
JP2000035148A (ja) * 1998-07-22 2000-02-02 Hitachi Metals Ltd 集積形流体制御装置
JP3409060B2 (ja) * 1999-03-31 2003-05-19 エスエムシー株式会社 シリアル信号駆動のマニホールド形電磁弁
JP4238453B2 (ja) * 2000-03-10 2009-03-18 株式会社東芝 流体制御装置
JP2001355800A (ja) * 2000-06-14 2001-12-26 Nippon Applied Flow Kk ガス供給装置
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置
US6325248B1 (en) * 2000-07-05 2001-12-04 Robert E. Corba Container assembly
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP4554853B2 (ja) * 2001-09-17 2010-09-29 シーケーディ株式会社 ガス供給集積弁
JP4501027B2 (ja) * 2003-08-22 2010-07-14 株式会社フジキン 流体制御装置
JP3809162B2 (ja) * 2003-11-12 2006-08-16 シーケーディ株式会社 ガス供給集積ユニット
JP3767897B2 (ja) * 2004-03-01 2006-04-19 シーケーディ株式会社 ガス供給集積ユニット

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI568962B (zh) * 2011-05-20 2017-02-01 富士金股份有限公司 流體控制裝置
TWI656292B (zh) * 2016-06-21 2019-04-11 日商富士金股份有限公司 Fluid control device
TWI650500B (zh) * 2018-04-02 2019-02-11 奇鼎科技股份有限公司 多流道閥塊

Also Published As

Publication number Publication date
KR20070028428A (ko) 2007-03-12
CN100408900C (zh) 2008-08-06
CN1957197A (zh) 2007-05-02
WO2005114016A1 (ja) 2005-12-01
JPWO2005114016A1 (ja) 2008-03-27
KR101074266B1 (ko) 2011-10-19
TWI338755B (enExample) 2011-03-11
JP4504368B2 (ja) 2010-07-14

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Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees