TW200536689A - Carrying device, method of controlling the same, and vacuum processing device - Google Patents

Carrying device, method of controlling the same, and vacuum processing device Download PDF

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Publication number
TW200536689A
TW200536689A TW094110563A TW94110563A TW200536689A TW 200536689 A TW200536689 A TW 200536689A TW 094110563 A TW094110563 A TW 094110563A TW 94110563 A TW94110563 A TW 94110563A TW 200536689 A TW200536689 A TW 200536689A
Authority
TW
Taiwan
Prior art keywords
conveying
arm
arms
link
rotation axis
Prior art date
Application number
TW094110563A
Other languages
English (en)
Chinese (zh)
Other versions
TWI339611B (enExample
Inventor
Hirofumi Minami
Kenji Ago
Takafumi Kawaguchi
Toshio Koike
Junpei Yuyama
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200536689A publication Critical patent/TW200536689A/zh
Application granted granted Critical
Publication of TWI339611B publication Critical patent/TWI339611B/zh

Links

Classifications

    • H10P72/50—
    • H10P72/7602—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW094110563A 2004-04-02 2005-04-01 Carrying device, method of controlling the same, and vacuum processing device TW200536689A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004109683A JP4515133B2 (ja) 2004-04-02 2004-04-02 搬送装置及びその制御方法並びに真空処理装置

Publications (2)

Publication Number Publication Date
TW200536689A true TW200536689A (en) 2005-11-16
TWI339611B TWI339611B (enExample) 2011-04-01

Family

ID=35049108

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110563A TW200536689A (en) 2004-04-02 2005-04-01 Carrying device, method of controlling the same, and vacuum processing device

Country Status (5)

Country Link
US (1) US7572093B2 (enExample)
JP (1) JP4515133B2 (enExample)
KR (1) KR101143287B1 (enExample)
CN (1) CN100463783C (enExample)
TW (1) TW200536689A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI581360B (zh) * 2015-05-27 2017-05-01 中微半導體設備（上海）有限公司 Processing chamber, processing chamber and vacuum lock combination and substrate processing system

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US9117859B2 (en) * 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
WO2008140093A1 (ja) * 2007-05-15 2008-11-20 Ulvac, Inc. 搬送装置及びこれを用いた真空処理装置
CN103862463B (zh) * 2007-05-31 2017-08-15 应用材料公司 延伸双scara机械手连接装置的伸出距离的方法及设备
US20110135426A1 (en) * 2008-01-31 2011-06-09 Canon Anelva Corporation Vacuum transfer apparatus
JP5150608B2 (ja) * 2009-11-20 2013-02-20 株式会社アルバック 搬送装置及び真空装置
WO2012023156A1 (ja) 2010-08-17 2012-02-23 キヤノンアネルバ株式会社 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法
ITBO20120015A1 (it) * 2012-01-16 2013-07-17 Marchesini Group Spa Apparato per introdurre articoli all'interno di astucci
JP6349947B2 (ja) * 2013-11-19 2018-07-04 株式会社ジェイテクト 搬送装置
CN103904008B (zh) * 2014-03-20 2016-08-17 上海华力微电子有限公司 一种半导体设备的机械臂的动态传感器结构
CN105598971A (zh) * 2016-02-03 2016-05-25 先驱智能机械（深圳）有限公司 机械手臂的控制系统
CN105500385A (zh) * 2016-02-03 2016-04-20 先驱智能机械（深圳）有限公司 机械手臂的控制方法
CN110678576B (zh) * 2017-06-14 2022-03-22 株式会社爱发科 真空处理装置
JP7506971B2 (ja) * 2019-07-23 2024-06-27 川崎重工業株式会社 ブレード間隔調整装置
CN211208421U (zh) * 2020-03-05 2020-08-07 福建北电新材料科技有限公司 一种可拆卸蚀刻多片碳化硅蚀刻工装治具
CN112234008B (zh) * 2020-09-03 2023-05-30 北京晶亦精微科技股份有限公司 用于晶圆的夹取及传输机构、cmp抛光设备
CN117124339A (zh) * 2023-09-05 2023-11-28 上海广川科技有限公司 一种基于磁流体的紧凑型同心两轴真空机器人传动结构

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US3204115A (en) * 1961-07-31 1965-08-31 Rca Corp Four-terminal solid state superconductive device with control current flowing transverse to controlled output current
JPH0773833B2 (ja) * 1992-04-23 1995-08-09 アプライド マテリアルズ インコーポレイテッド ロボット・アセンブリ
CN1046654C (zh) * 1993-04-16 1999-11-24 布鲁克斯自动化公司 传送装置
US6299404B1 (en) * 1995-10-27 2001-10-09 Brooks Automation Inc. Substrate transport apparatus with double substrate holders
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders
JP3204115B2 (ja) * 1996-01-25 2001-09-04 ダイキン工業株式会社 ワーク搬送ロボット
US5954840A (en) * 1996-06-13 1999-09-21 Genmark Automation Universally tiltable Z axis drive arm
US5789878A (en) * 1996-07-15 1998-08-04 Applied Materials, Inc. Dual plane robot
JPH10163296A (ja) * 1996-11-27 1998-06-19 Rootsue Kk 基板搬送装置
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
CN1140388C (zh) * 1998-04-29 2004-03-03 Fci赫托根博斯有限公司 包括两平行连杆机构的装置
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
US6464448B1 (en) * 1998-09-01 2002-10-15 Brooks Automation, Inc. Substrate transport apparatus
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
JP3926501B2 (ja) * 1998-11-13 2007-06-06 ナブテスコ株式会社 ロボットアーム及びその駆動装置
JP2001118905A (ja) * 1999-10-20 2001-04-27 Hitachi Ltd 搬送方法及び搬送装置
JP4227298B2 (ja) * 1999-12-02 2009-02-18 ローツェ株式会社 搬送用ロボット
JP4489999B2 (ja) 2000-10-24 2010-06-23 株式会社アルバック 搬送装置及び真空処理装置
TW511220B (en) * 2000-10-24 2002-11-21 Ulvac Corp Carrying device and vacuum processing apparatus using the same
CN2461719Y (zh) * 2000-12-19 2001-11-28 沈宗麟 多连杆式机械手
JP4173309B2 (ja) * 2002-01-28 2008-10-29 東京エレクトロン株式会社 センタリング装置及び枚葉式検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI581360B (zh) * 2015-05-27 2017-05-01 中微半導體設備（上海）有限公司 Processing chamber, processing chamber and vacuum lock combination and substrate processing system

Also Published As

Publication number Publication date
KR101143287B1 (ko) 2012-05-08
US20050232744A1 (en) 2005-10-20
CN1676285A (zh) 2005-10-05
JP2005294662A (ja) 2005-10-20
KR20060045058A (ko) 2006-05-16
CN100463783C (zh) 2009-02-25
JP4515133B2 (ja) 2010-07-28
US7572093B2 (en) 2009-08-11
TWI339611B (enExample) 2011-04-01

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