KR101143287B1 - 반송장치 및 그 제어방법 그리고 진공처리장치 - Google Patents

반송장치 및 그 제어방법 그리고 진공처리장치 Download PDF

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Publication number
KR101143287B1
KR101143287B1 KR1020050026885A KR20050026885A KR101143287B1 KR 101143287 B1 KR101143287 B1 KR 101143287B1 KR 1020050026885 A KR1020050026885 A KR 1020050026885A KR 20050026885 A KR20050026885 A KR 20050026885A KR 101143287 B1 KR101143287 B1 KR 101143287B1
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KR
South Korea
Prior art keywords
conveying
arm
arms
link mechanism
concentric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1020050026885A
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English (en)
Korean (ko)
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KR20060045058A (ko
Inventor
히로후미 미나미
겐지 아고
다카후미 가와구치
도시오 고이케
준페이 유야마
Original Assignee
가부시키가이샤 알박
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Publication of KR20060045058A publication Critical patent/KR20060045058A/ko
Application granted granted Critical
Publication of KR101143287B1 publication Critical patent/KR101143287B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR1020050026885A 2004-04-02 2005-03-31 반송장치 및 그 제어방법 그리고 진공처리장치 Expired - Lifetime KR101143287B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00109683 2004-04-02
JP2004109683A JP4515133B2 (ja) 2004-04-02 2004-04-02 搬送装置及びその制御方法並びに真空処理装置

Publications (2)

Publication Number Publication Date
KR20060045058A KR20060045058A (ko) 2006-05-16
KR101143287B1 true KR101143287B1 (ko) 2012-05-08

Family

ID=35049108

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050026885A Expired - Lifetime KR101143287B1 (ko) 2004-04-02 2005-03-31 반송장치 및 그 제어방법 그리고 진공처리장치

Country Status (5)

Country Link
US (1) US7572093B2 (enExample)
JP (1) JP4515133B2 (enExample)
KR (1) KR101143287B1 (enExample)
CN (1) CN100463783C (enExample)
TW (1) TW200536689A (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9117859B2 (en) * 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US8752449B2 (en) * 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
KR101191074B1 (ko) * 2007-05-15 2012-10-15 가부시키가이샤 알박 반송 장치 및 이것을 사용한 진공 처리 장치
CN103862463B (zh) * 2007-05-31 2017-08-15 应用材料公司 延伸双scara机械手连接装置的伸出距离的方法及设备
WO2009096373A1 (ja) * 2008-01-31 2009-08-06 Canon Anelva Corporation 真空搬送装置
JP5150608B2 (ja) * 2009-11-20 2013-02-20 株式会社アルバック 搬送装置及び真空装置
JP5395271B2 (ja) 2010-08-17 2014-01-22 キヤノンアネルバ株式会社 基板搬送装置、電子デバイスの製造システムおよび電子デバイスの製造方法
ITBO20120015A1 (it) * 2012-01-16 2013-07-17 Marchesini Group Spa Apparato per introdurre articoli all'interno di astucci
JP6349947B2 (ja) * 2013-11-19 2018-07-04 株式会社ジェイテクト 搬送装置
CN103904008B (zh) * 2014-03-20 2016-08-17 上海华力微电子有限公司 一种半导体设备的机械臂的动态传感器结构
CN106298583B (zh) * 2015-05-27 2019-12-03 中微半导体设备(上海)股份有限公司 处理腔、处理腔和真空锁组合以及基片处理系统
CN105598971A (zh) * 2016-02-03 2016-05-25 先驱智能机械（深圳）有限公司 机械手臂的控制系统
CN105500385A (zh) * 2016-02-03 2016-04-20 先驱智能机械（深圳）有限公司 机械手臂的控制方法
CN114709124A (zh) * 2017-06-14 2022-07-05 株式会社爱发科 真空处理装置
JP7506971B2 (ja) * 2019-07-23 2024-06-27 川崎重工業株式会社 ブレード間隔調整装置
CN211208421U (zh) * 2020-03-05 2020-08-07 福建北电新材料科技有限公司 一种可拆卸蚀刻多片碳化硅蚀刻工装治具
CN112234008B (zh) * 2020-09-03 2023-05-30 北京晶亦精微科技股份有限公司 用于晶圆的夹取及传输机构、cmp抛光设备
CN117124339A (zh) * 2023-09-05 2023-11-28 上海广川科技有限公司 一种基于磁流体的紧凑型同心两轴真空机器人传动结构

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09262788A (ja) * 1996-01-25 1997-10-07 Daikin Ind Ltd ワーク搬送ロボット
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP2001118905A (ja) 1999-10-20 2001-04-27 Hitachi Ltd 搬送方法及び搬送装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3204115A (en) * 1961-07-31 1965-08-31 Rca Corp Four-terminal solid state superconductive device with control current flowing transverse to controlled output current
JPH0773833B2 (ja) * 1992-04-23 1995-08-09 アプライド マテリアルズ インコーポレイテッド ロボット・アセンブリ
WO1994023911A1 (en) * 1993-04-16 1994-10-27 Brooks Automation, Inc. Articulated arm transfer device
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders
US6299404B1 (en) * 1995-10-27 2001-10-09 Brooks Automation Inc. Substrate transport apparatus with double substrate holders
US5954840A (en) * 1996-06-13 1999-09-21 Genmark Automation Universally tiltable Z axis drive arm
US5789878A (en) * 1996-07-15 1998-08-04 Applied Materials, Inc. Dual plane robot
JPH10163296A (ja) * 1996-11-27 1998-06-19 Rootsue Kk 基板搬送装置
KR20010052275A (ko) * 1998-04-29 2001-06-25 에프씨아이스-헤르토겐보시 비.브이. 2개의 평행한 링크 기구를 포함하는 장치
US6464448B1 (en) * 1998-09-01 2002-10-15 Brooks Automation, Inc. Substrate transport apparatus
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
JP3926501B2 (ja) * 1998-11-13 2007-06-06 ナブテスコ株式会社 ロボットアーム及びその駆動装置
JP4227298B2 (ja) * 1999-12-02 2009-02-18 ローツェ株式会社 搬送用ロボット
JP4489999B2 (ja) 2000-10-24 2010-06-23 株式会社アルバック 搬送装置及び真空処理装置
US6840732B2 (en) * 2000-10-24 2005-01-11 Ulvac, Inc. Transport apparatus and vacuum processing system using the same
CN2461719Y (zh) * 2000-12-19 2001-11-28 沈宗麟 多连杆式机械手
JP4173309B2 (ja) * 2002-01-28 2008-10-29 東京エレクトロン株式会社 センタリング装置及び枚葉式検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09262788A (ja) * 1996-01-25 1997-10-07 Daikin Ind Ltd ワーク搬送ロボット
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP2001118905A (ja) 1999-10-20 2001-04-27 Hitachi Ltd 搬送方法及び搬送装置

Also Published As

Publication number Publication date
CN100463783C (zh) 2009-02-25
JP4515133B2 (ja) 2010-07-28
TWI339611B (enExample) 2011-04-01
CN1676285A (zh) 2005-10-05
US20050232744A1 (en) 2005-10-20
KR20060045058A (ko) 2006-05-16
JP2005294662A (ja) 2005-10-20
TW200536689A (en) 2005-11-16
US7572093B2 (en) 2009-08-11

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