JP7506971B2 - ブレード間隔調整装置 - Google Patents
ブレード間隔調整装置 Download PDFInfo
- Publication number
- JP7506971B2 JP7506971B2 JP2019135250A JP2019135250A JP7506971B2 JP 7506971 B2 JP7506971 B2 JP 7506971B2 JP 2019135250 A JP2019135250 A JP 2019135250A JP 2019135250 A JP2019135250 A JP 2019135250A JP 7506971 B2 JP7506971 B2 JP 7506971B2
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- JP
- Japan
- Prior art keywords
- base
- base portions
- movement
- displacement block
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000007246 mechanism Effects 0.000 claims description 56
- 238000006073 displacement reaction Methods 0.000 claims description 39
- 230000008859 change Effects 0.000 claims description 6
- 230000004044 response Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 14
- 230000032258 transport Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
- B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Feeding Of Workpieces (AREA)
- Manipulator (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Coating Apparatus (AREA)
- Nonmetal Cutting Devices (AREA)
- Transmission Devices (AREA)
Description
図1は、一実施形態に係るブレード間隔調整装置1とブレード12を示す平面図である。図2は、複数のブレード10~14が固定された複数のベース部20~24の間隔V1~V4を平行に調整するリンク機構30の一例を示す背面図である。図1では、図2における最上部のブレード12を例に説明する。
図3は、図1に示すブレード間隔調整装置1の一部を示す図面であり、(A)は平面図、(B)は正面図である。図4(A)、(B)は、図3に示すブレード間隔調整装置1の間隔微調整機構50によるベース部21~24の間隔調整時における作用を示す拡大図である。ベース部21~24には、それぞれ間隔微調整機構50が備えられているが、以下の説明でも、ベース部22に設けられた間隔微調整機構50を例に説明する。
図5は、ブレード間隔調整装置1における駆動部54の他の例を示す断面図である。図示するように、駆動部54は、差動ねじ機構70とすることもできる。差動ねじ機構70は、第1可動ベース部21~第4可動ベース部24の全てに設けることができる。なお、図3と同一の構成には同一符号を付し、その説明は省略する。
10 固定ブレード
11 第1ブレード
12 第2ブレード
13 第3ブレード
14 第4ブレード
20 固定ベース部
21 第1可動ベース部
22 第2可動ベース部
23 第3可動ベース部
24 第4可動ベース部
25 制限溝
30 リンク機構
31 第1リンク部材
32 第2リンク部材
33 第3リンク部材
34 第4リンク部材
35 第5リンク部材
40 ガイド機構
50 間隔微調整機構
51 変位ブロック
52 長孔
53 固定ボルト(固定部)
54 駆動部
55 ねじ部材
58 傾斜溝
60 スライドブロック
61 制限部
62 軸部材
70 差動ねじ機構
73 差動ねじ
V1~V4 間隔
F1~F4 力
Claims (3)
- 複数のブレードと、
複数の前記ブレードが固定される複数のベース部と、
前記ベース部が並設される方向に該ベース部の移動をガイドするガイド機構と、
複数の前記ベース部に連結されたリンク部材の角度変化に応じて前記ベース部の間隔を平行に変更するリンク機構と、
を備え、
複数の前記ベース部と前記リンク部材との連結部分に、前記ベース部を個別にその並設方向位置を微調整する間隔微調整機構を備え、
前記間隔微調整機構は、前記ベース部が並設された方向と交差する方向に移動する変位ブロックと、前記変位ブロックを移動させる駆動部と、前記変位ブロックの移動に伴って前記ベース部と前記リンク部材との前記連結部分を移動させるスライドブロックと、前記変位ブロックの移動を止める固定部と、を有し、
前記ベース部は、前記スライドブロックの該ベース部が並設された方向への移動は許容し、この方向と直交する方向への移動は制限する制限溝を有している、
ことを特徴とするブレード間隔調整装置。 - 前記変位ブロックは、前記スライドブロックをガイドする傾斜したガイド部を有し、
前記スライドブロックは、前記変位ブロックの移動に伴って前記ガイド部に対して前記ベース部が並設された方向に移動するように構成されている、
請求項1に記載のブレード間隔調整装置。 - 前記駆動部は、差動ねじ機構で構成されている、
請求項1又は2に記載のブレード間隔調整装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019135250A JP7506971B2 (ja) | 2019-07-23 | 2019-07-23 | ブレード間隔調整装置 |
CN202080043603.3A CN113966549A (zh) | 2019-07-23 | 2020-07-09 | 托板间隔调整装置 |
KR1020227004681A KR20220025900A (ko) | 2019-07-23 | 2020-07-09 | 블레이드 간격 조정 장치 |
US17/628,900 US20220250255A1 (en) | 2019-07-23 | 2020-07-09 | Blade interval adjusting device |
PCT/JP2020/026775 WO2021014982A1 (ja) | 2019-07-23 | 2020-07-09 | ブレード間隔調整装置 |
TW109124400A TWI768408B (zh) | 2019-07-23 | 2020-07-20 | 葉片間隔調整裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019135250A JP7506971B2 (ja) | 2019-07-23 | 2019-07-23 | ブレード間隔調整装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021019145A JP2021019145A (ja) | 2021-02-15 |
JP7506971B2 true JP7506971B2 (ja) | 2024-06-27 |
Family
ID=74193903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019135250A Active JP7506971B2 (ja) | 2019-07-23 | 2019-07-23 | ブレード間隔調整装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220250255A1 (ja) |
JP (1) | JP7506971B2 (ja) |
KR (1) | KR20220025900A (ja) |
CN (1) | CN113966549A (ja) |
TW (1) | TWI768408B (ja) |
WO (1) | WO2021014982A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102669767B1 (ko) * | 2022-04-01 | 2024-05-28 | 주식회사 유진테크 | 기판 이송장치 및 기판 이송장치의 이상 판단방법 |
CN115148639B (zh) * | 2022-07-12 | 2023-04-07 | 上海申和投资有限公司 | 一种免交叉污染的晶圆槽式清洗机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000174099A (ja) | 1998-12-01 | 2000-06-23 | Koyo Thermo System Kk | 薄板状部材移載装置 |
JP2005116807A (ja) | 2003-10-08 | 2005-04-28 | Kawasaki Heavy Ind Ltd | 基板保持装置 |
JP2018161729A (ja) | 2017-03-27 | 2018-10-18 | 日本電産サンキョー株式会社 | 産業用ロボット |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4720790B2 (ja) | 2007-05-31 | 2011-07-13 | 株式会社安川電機 | ウェハのアライメント装置、それを備えた搬送装置、半導体製造装置、ソータ装置 |
CN108027718B (zh) * | 2015-07-13 | 2022-04-08 | 博鲁可斯自动化美国有限责任公司 | 在传输中自动晶圆定中方法及设备 |
TWI639495B (zh) * | 2016-12-13 | 2018-11-01 | 日商川崎重工業股份有限公司 | 機器人之教示方法 |
-
2019
- 2019-07-23 JP JP2019135250A patent/JP7506971B2/ja active Active
-
2020
- 2020-07-09 CN CN202080043603.3A patent/CN113966549A/zh active Pending
- 2020-07-09 KR KR1020227004681A patent/KR20220025900A/ko not_active Application Discontinuation
- 2020-07-09 US US17/628,900 patent/US20220250255A1/en active Pending
- 2020-07-09 WO PCT/JP2020/026775 patent/WO2021014982A1/ja active Application Filing
- 2020-07-20 TW TW109124400A patent/TWI768408B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000174099A (ja) | 1998-12-01 | 2000-06-23 | Koyo Thermo System Kk | 薄板状部材移載装置 |
JP2005116807A (ja) | 2003-10-08 | 2005-04-28 | Kawasaki Heavy Ind Ltd | 基板保持装置 |
JP2018161729A (ja) | 2017-03-27 | 2018-10-18 | 日本電産サンキョー株式会社 | 産業用ロボット |
Also Published As
Publication number | Publication date |
---|---|
CN113966549A (zh) | 2022-01-21 |
TW202109719A (zh) | 2021-03-01 |
US20220250255A1 (en) | 2022-08-11 |
KR20220025900A (ko) | 2022-03-03 |
JP2021019145A (ja) | 2021-02-15 |
TWI768408B (zh) | 2022-06-21 |
WO2021014982A1 (ja) | 2021-01-28 |
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