TW200402404A - Method for manufacturing silicon carbide sintered compact jig and silicon carbide sintered compact jig manufactured by the method - Google Patents

Method for manufacturing silicon carbide sintered compact jig and silicon carbide sintered compact jig manufactured by the method Download PDF

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Publication number
TW200402404A
TW200402404A TW092105107A TW92105107A TW200402404A TW 200402404 A TW200402404 A TW 200402404A TW 092105107 A TW092105107 A TW 092105107A TW 92105107 A TW92105107 A TW 92105107A TW 200402404 A TW200402404 A TW 200402404A
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Taiwan
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pseudo
silicon carbide
manufacturing
sintered body
carbide sintered
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TW092105107A
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English (en)
Chinese (zh)
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TWI297002B (OSRAM
Inventor
Motoyama Tsuyoshi
Shinogaya Toshikazu
Odaka Fumio
Taguchi Jin-Ichi
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Bridgestone Corp
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Publication of TW200402404A publication Critical patent/TW200402404A/zh
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Publication of TWI297002B publication Critical patent/TWI297002B/zh

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62625—Wet mixtures
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/123—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by a material, a roughness, a coating or the like
    • C—CHEMISTRY; METALLURGY
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3817—Carbides
    • C04B2235/3826—Silicon carbides
    • C04B2235/383—Alpha silicon carbide
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3817—Carbides
    • C04B2235/3826—Silicon carbides
    • C04B2235/3834—Beta silicon carbide
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
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    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
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    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9669—Resistance against chemicals, e.g. against molten glass or molten salts
    • C04B2235/9684—Oxidation resistance

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
TW092105107A 2002-03-11 2003-03-10 Method for manufacturing silicon carbide sintered compact jig and silicon carbide sintered compact jig manufactured by the method TW200402404A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002065899 2002-03-11
JP2002169656 2002-06-11

Publications (2)

Publication Number Publication Date
TW200402404A true TW200402404A (en) 2004-02-16
TWI297002B TWI297002B (OSRAM) 2008-05-21

Family

ID=27806963

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092105107A TW200402404A (en) 2002-03-11 2003-03-10 Method for manufacturing silicon carbide sintered compact jig and silicon carbide sintered compact jig manufactured by the method

Country Status (8)

Country Link
US (1) US7226561B2 (OSRAM)
EP (1) EP1484297A4 (OSRAM)
JP (1) JPWO2003076363A1 (OSRAM)
KR (1) KR100907316B1 (OSRAM)
AU (1) AU2003211822A1 (OSRAM)
CA (1) CA2478657A1 (OSRAM)
TW (1) TW200402404A (OSRAM)
WO (1) WO2003076363A1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI911584B (zh) * 2022-10-25 2026-01-11 美商恩特葛瑞斯股份有限公司 形成矽滲透陶瓷基板之經拋光表面之方法

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JP4261130B2 (ja) 2002-06-18 2009-04-30 株式会社東芝 シリコン／炭化ケイ素複合材料
TW200416208A (en) * 2002-11-12 2004-09-01 Bridgestone Corp Silicon carbide sintered product and method for production the same
JP4612608B2 (ja) * 2006-10-31 2011-01-12 株式会社東芝 シリコン／炭化ケイ素複合材料の製造方法
JP2010024084A (ja) * 2008-07-18 2010-02-04 Tosoh Quartz Corp 型材を用いた石英ガラス材料の成形方法
US8255806B2 (en) * 2008-09-15 2012-08-28 Vmware, Inc. Unified secure virtual machine player and remote desktop client
KR101054863B1 (ko) * 2009-07-31 2011-08-05 에스케이씨솔믹스 주식회사 반응소결 탄화규소 소결체 접합체의 제조방법 및 이에 의해 제조되는 반응소결 탄화규소 소결체 접합체
US20120201736A1 (en) * 2009-10-09 2012-08-09 Yoshitaka Aoki Method of producing a silicon carbide molded item
DE102012220439A1 (de) * 2012-11-09 2014-05-15 Sgl Carbon Se Werkzeug zum spanabhebenden Bearbeiten von Werkstücken und Verfahren zu dessen Herstellung
KR101545813B1 (ko) 2014-03-28 2015-08-27 주)에코텍코리아 Si 함침법을 응용한 튜브 및 도가니형 SiC 제품 제조방법
KR20200089367A (ko) 2019-01-16 2020-07-27 신라대학교 산학협력단 고인성 SiC 발열체의 제조방법
KR102854971B1 (ko) * 2020-10-07 2025-09-04 교세라 가부시키가이샤 클램프용 지그, 클램프용 지그의 제조 방법, 및 세정 장치
CN114956828B (zh) * 2022-05-17 2023-08-15 合肥商德应用材料有限公司 碳化硅陶瓷及其制备方法和应用
CN115466123B (zh) * 2022-11-14 2023-04-07 山东华美新材料科技股份有限公司 一种碳化硅陶瓷晶舟的制备方法
KR102697964B1 (ko) * 2023-09-27 2024-08-22 솔믹스 주식회사 지그 및 이를 이용한 보트바의 제조방법
CN117756544B (zh) * 2024-02-22 2024-05-31 山东华美新材料科技股份有限公司 一种大尺寸碳化硅陶瓷晶舟的制备方法
CN118084498B (zh) * 2024-04-26 2024-07-26 山东华美新材料科技股份有限公司 一种碳化硅陶瓷晶舟的成型方法
CN119019173B (zh) * 2024-08-14 2025-06-06 沈阳西卡精细陶瓷有限公司 一种碳化硅舟托的制造方法

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JPH0264063A (ja) * 1988-08-30 1990-03-05 Shin Etsu Chem Co Ltd 接合型炭化けい素成形体の製造方法
JP4390872B2 (ja) 1997-06-20 2009-12-24 株式会社ブリヂストン 半導体製造装置用部材および半導体製造装置用部材の製造方法
EP0885859B1 (en) * 1997-06-20 2002-03-13 Bridgestone Corporation Member for semiconductor equipment
WO2000007959A1 (fr) * 1998-08-07 2000-02-17 Bridgestone Corporation Fritte de carbure de silicium et son procede de production
JP2001048651A (ja) * 1999-06-02 2001-02-20 Bridgestone Corp 炭化ケイ素質焼結体及びその製造方法
US6387834B1 (en) * 1999-06-02 2002-05-14 Bridgestone Corporation Sintered silicon carbide body and method for producing the same
JP4471043B2 (ja) * 1999-06-07 2010-06-02 株式会社ブリヂストン ウエハ支持具及びその製造方法
JP2001019552A (ja) * 1999-07-09 2001-01-23 Bridgestone Corp 炭化ケイ素焼結体及びその製造方法
JP4589491B2 (ja) * 1999-08-24 2010-12-01 株式会社ブリヂストン 炭化ケイ素粉末、グリーン体の製造方法、及び炭化ケイ素焼結体の製造方法
JP2001257056A (ja) * 2000-03-09 2001-09-21 Tokai Konetsu Kogyo Co Ltd 三相型炭化珪素発熱体
CA2463887C (en) * 2001-10-16 2010-08-24 Bridgestone Corporation Method of producing sintered silicon carbide and sintered silicon carbide obtained by this method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI911584B (zh) * 2022-10-25 2026-01-11 美商恩特葛瑞斯股份有限公司 形成矽滲透陶瓷基板之經拋光表面之方法

Also Published As

Publication number Publication date
US7226561B2 (en) 2007-06-05
AU2003211822A1 (en) 2003-09-22
KR100907316B1 (ko) 2009-07-13
KR20040111393A (ko) 2004-12-31
TWI297002B (OSRAM) 2008-05-21
EP1484297A1 (en) 2004-12-08
WO2003076363A1 (fr) 2003-09-18
JPWO2003076363A1 (ja) 2005-07-07
CA2478657A1 (en) 2003-09-18
EP1484297A4 (en) 2010-07-14
US20050116394A1 (en) 2005-06-02

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