SG153820A1 - Exposure apparatus, exposure method, and device producing method - Google Patents

Exposure apparatus, exposure method, and device producing method

Info

Publication number
SG153820A1
SG153820A1 SG200903982-7A SG2009039827A SG153820A1 SG 153820 A1 SG153820 A1 SG 153820A1 SG 2009039827 A SG2009039827 A SG 2009039827A SG 153820 A1 SG153820 A1 SG 153820A1
Authority
SG
Singapore
Prior art keywords
optical element
exposure
liquid
area
substrate
Prior art date
Application number
SG200903982-7A
Inventor
Hiroyuki Nagasaka
Minoru Onda
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of SG153820A1 publication Critical patent/SG153820A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)

Abstract

An exposure apparatus EX has a projection optical system PL. The projection optical system PL has a first optical element LS1 closest to an image plane thereof and a second optical element LS2 which is second closest to the image plane with respect to the first optical element LS1. The first optical element LS1 has a lower surface Tl arranged opposite to a surface of a substrate P and an upper surface T2 arranged opposite to the second optical element LS2. A space between the second optical element LS2 and the upper surface T2 of the first optical element LS1 is filled with a second liquid LQ2 so that a liquid immersion area is formed in an area of the upper surface T2, the area including an area AR' through which an exposure light beam EL passes. The substrate P is exposed by radiating the exposure light beam EL onto the substrate P through a first liquid LQ1 on a side of the lower surface Tl of the first optical element LS1 and the second liquid LQ2 on a side of the upper surface T2. It is possible to avoid any deterioration of the exposure accuracy caused by the pollution of the optical element, and to suppress any enormous expansion of the liquid immersion area.
SG200903982-7A 2004-06-10 2005-06-08 Exposure apparatus, exposure method, and device producing method SG153820A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004172568 2004-06-10

Publications (1)

Publication Number Publication Date
SG153820A1 true SG153820A1 (en) 2009-07-29

Family

ID=35503357

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200903982-7A SG153820A1 (en) 2004-06-10 2005-06-08 Exposure apparatus, exposure method, and device producing method

Country Status (10)

Country Link
US (3) US20080068567A1 (en)
EP (3) EP3067750B1 (en)
JP (1) JP5287948B2 (en)
KR (7) KR101577515B1 (en)
CN (2) CN100570822C (en)
HK (2) HK1225811A1 (en)
IL (1) IL179936A0 (en)
SG (1) SG153820A1 (en)
TW (4) TW201729012A (en)
WO (1) WO2005122220A1 (en)

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Also Published As

Publication number Publication date
US20160363870A1 (en) 2016-12-15
US20080068567A1 (en) 2008-03-20
IL179936A0 (en) 2007-05-15
CN101685269A (en) 2010-03-31
HK1225811A1 (en) 2017-09-15
TWI412895B (en) 2013-10-21
TW201602739A (en) 2016-01-16
KR20170010906A (en) 2017-02-01
EP3067750A3 (en) 2017-03-15
KR101577515B1 (en) 2015-12-14
US20140043593A1 (en) 2014-02-13
TW201341975A (en) 2013-10-16
EP3067749A2 (en) 2016-09-14
KR20150046360A (en) 2015-04-29
KR20070026603A (en) 2007-03-08
HK1225810B (en) 2017-09-15
TW201729012A (en) 2017-08-16
EP3067749B1 (en) 2017-10-18
TW200611083A (en) 2006-04-01
EP3067750A2 (en) 2016-09-14
EP1768171A1 (en) 2007-03-28
CN100570822C (en) 2009-12-16
KR20140114461A (en) 2014-09-26
KR20130023397A (en) 2013-03-07
KR20120026639A (en) 2012-03-19
EP3067750B1 (en) 2019-01-30
TWI598700B (en) 2017-09-11
JP2011223036A (en) 2011-11-04
CN1985354A (en) 2007-06-20
WO2005122220A1 (en) 2005-12-22
KR20130133065A (en) 2013-12-05
EP1768171A4 (en) 2008-01-09
EP3067749A3 (en) 2016-11-16
KR101700546B1 (en) 2017-01-26
JP5287948B2 (en) 2013-09-11
US9411247B2 (en) 2016-08-09
TWI516875B (en) 2016-01-11
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KR101505756B1 (en) 2015-03-26

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