SG146535A1 - Semiconductor wafer and process for its production - Google Patents
Semiconductor wafer and process for its productionInfo
- Publication number
- SG146535A1 SG146535A1 SG200801645-3A SG2008016453A SG146535A1 SG 146535 A1 SG146535 A1 SG 146535A1 SG 2008016453 A SG2008016453 A SG 2008016453A SG 146535 A1 SG146535 A1 SG 146535A1
- Authority
- SG
- Singapore
- Prior art keywords
- semiconductor wafer
- production
- lattice constant
- relates
- monocrystalline
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000012777 electrically insulating material Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
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EP07006387.0A EP1975988B1 (fr) | 2007-03-28 | 2007-03-28 | Tranche semi-conductrice multicouches et son procédé de fabrication |
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EP (1) | EP1975988B1 (fr) |
JP (3) | JP5285942B2 (fr) |
KR (1) | KR100979148B1 (fr) |
CN (1) | CN101276791B (fr) |
SG (1) | SG146535A1 (fr) |
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US7785706B2 (en) | 2010-08-31 |
JP2008294412A (ja) | 2008-12-04 |
TW200845137A (en) | 2008-11-16 |
JP5693497B2 (ja) | 2015-04-01 |
TWI443712B (zh) | 2014-07-01 |
KR20080088407A (ko) | 2008-10-02 |
JP2013102212A (ja) | 2013-05-23 |
JP2012134539A (ja) | 2012-07-12 |
US20100221869A1 (en) | 2010-09-02 |
JP5490271B2 (ja) | 2014-05-14 |
US8268076B2 (en) | 2012-09-18 |
EP1975988A1 (fr) | 2008-10-01 |
EP1975988B1 (fr) | 2015-02-25 |
CN101276791A (zh) | 2008-10-01 |
CN101276791B (zh) | 2010-06-02 |
JP5285942B2 (ja) | 2013-09-11 |
KR100979148B1 (ko) | 2010-08-31 |
US20080241519A1 (en) | 2008-10-02 |
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