SG10201508134VA - Workpiece Processing Method - Google Patents
Workpiece Processing MethodInfo
- Publication number
- SG10201508134VA SG10201508134VA SG10201508134VA SG10201508134VA SG10201508134VA SG 10201508134V A SG10201508134V A SG 10201508134VA SG 10201508134V A SG10201508134V A SG 10201508134VA SG 10201508134V A SG10201508134V A SG 10201508134VA SG 10201508134V A SG10201508134V A SG 10201508134VA
- Authority
- SG
- Singapore
- Prior art keywords
- processing method
- workpiece processing
- workpiece
- processing
- Prior art date
Links
- 238000003672 processing method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02258—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by anodic treatment, e.g. anodic oxidation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014206614A JP6382055B2 (ja) | 2014-10-07 | 2014-10-07 | 被処理体を処理する方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201508134VA true SG10201508134VA (en) | 2016-05-30 |
Family
ID=54199559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201508134VA SG10201508134VA (en) | 2014-10-07 | 2015-09-30 | Workpiece Processing Method |
Country Status (7)
Country | Link |
---|---|
US (1) | US9607811B2 (ko) |
EP (1) | EP3007205B1 (ko) |
JP (1) | JP6382055B2 (ko) |
KR (1) | KR102311575B1 (ko) |
CN (2) | CN105489483A (ko) |
SG (1) | SG10201508134VA (ko) |
TW (1) | TWI661464B (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6559430B2 (ja) | 2015-01-30 | 2019-08-14 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
JP6462477B2 (ja) | 2015-04-27 | 2019-01-30 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
KR102362282B1 (ko) | 2016-03-29 | 2022-02-11 | 도쿄엘렉트론가부시키가이샤 | 피처리체를 처리하는 방법 |
KR20170114579A (ko) | 2016-04-05 | 2017-10-16 | 주식회사 만도 | 전압 제어 방법 및 그 제어 시스템 |
JP6541618B2 (ja) * | 2016-05-25 | 2019-07-10 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
JP6832171B2 (ja) | 2017-01-24 | 2021-02-24 | 東京エレクトロン株式会社 | プラズマ処理装置のチャンバ本体の内部のクリーニングを含むプラズマ処理方法 |
JP6895352B2 (ja) * | 2017-09-12 | 2021-06-30 | 東京エレクトロン株式会社 | 被加工物を処理する方法 |
JP6886940B2 (ja) * | 2018-04-23 | 2021-06-16 | 東京エレクトロン株式会社 | プラズマ処理方法 |
CN110581050A (zh) * | 2018-06-07 | 2019-12-17 | 东京毅力科创株式会社 | 处理方法和等离子体处理装置 |
JP7345283B2 (ja) * | 2018-07-26 | 2023-09-15 | 東京エレクトロン株式会社 | プラズマ処理方法およびプラズマ処理装置 |
JP7178918B2 (ja) | 2019-01-30 | 2022-11-28 | 東京エレクトロン株式会社 | エッチング方法、プラズマ処理装置、及び処理システム |
JP7240946B2 (ja) * | 2019-04-26 | 2023-03-16 | 株式会社トリケミカル研究所 | 酸化珪素膜形成方法 |
US11955318B2 (en) * | 2021-03-12 | 2024-04-09 | Applied Materials, Inc. | Ash rate recovery method in plasma strip chamber |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04137725A (ja) * | 1990-09-28 | 1992-05-12 | Tonen Corp | ガラス基板多結晶シリコン薄膜 |
JP4137725B2 (ja) * | 2002-07-10 | 2008-08-20 | 松下電器産業株式会社 | 接合部材の加工寸法決定方法および装置 |
US7989354B2 (en) * | 2007-06-08 | 2011-08-02 | Tokyo Electron Limited | Patterning method |
US7790531B2 (en) * | 2007-12-18 | 2010-09-07 | Micron Technology, Inc. | Methods for isolating portions of a loop of pitch-multiplied material and related structures |
US8647722B2 (en) * | 2008-11-14 | 2014-02-11 | Asm Japan K.K. | Method of forming insulation film using plasma treatment cycles |
JP5698950B2 (ja) * | 2009-10-23 | 2015-04-08 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4733214B1 (ja) * | 2010-04-02 | 2011-07-27 | 東京エレクトロン株式会社 | マスクパターンの形成方法及び半導体装置の製造方法 |
EP2378543B1 (en) * | 2010-04-14 | 2015-05-20 | ASM Genitech Korea Ltd. | Method of forming semiconductor patterns |
KR20120001339A (ko) * | 2010-06-29 | 2012-01-04 | 삼성전자주식회사 | 반도체 소자의 미세 패턴 형성 방법 |
JP5674375B2 (ja) * | 2010-08-03 | 2015-02-25 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
US8298951B1 (en) * | 2011-04-13 | 2012-10-30 | Asm Japan K.K. | Footing reduction using etch-selective layer |
US9666414B2 (en) * | 2011-10-27 | 2017-05-30 | Applied Materials, Inc. | Process chamber for etching low k and other dielectric films |
US9922802B2 (en) * | 2012-02-20 | 2018-03-20 | Tokyo Electron Limited | Power supply system, plasma etching apparatus, and plasma etching method |
KR102052936B1 (ko) * | 2012-11-13 | 2019-12-06 | 삼성전자 주식회사 | 반도체 소자 제조 방법 |
JP6366454B2 (ja) * | 2014-10-07 | 2018-08-01 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
-
2014
- 2014-10-07 JP JP2014206614A patent/JP6382055B2/ja active Active
-
2015
- 2015-09-23 EP EP15186427.9A patent/EP3007205B1/en active Active
- 2015-09-23 KR KR1020150134479A patent/KR102311575B1/ko active IP Right Grant
- 2015-09-25 US US14/866,467 patent/US9607811B2/en active Active
- 2015-09-29 CN CN201510634852.0A patent/CN105489483A/zh active Pending
- 2015-09-29 CN CN202011049271.8A patent/CN112133630A/zh active Pending
- 2015-09-30 SG SG10201508134VA patent/SG10201508134VA/en unknown
- 2015-10-06 TW TW104132754A patent/TWI661464B/zh active
Also Published As
Publication number | Publication date |
---|---|
CN112133630A (zh) | 2020-12-25 |
KR102311575B1 (ko) | 2021-10-08 |
EP3007205B1 (en) | 2017-08-16 |
JP6382055B2 (ja) | 2018-08-29 |
CN105489483A (zh) | 2016-04-13 |
US9607811B2 (en) | 2017-03-28 |
EP3007205A1 (en) | 2016-04-13 |
TWI661464B (zh) | 2019-06-01 |
US20160099131A1 (en) | 2016-04-07 |
JP2016076621A (ja) | 2016-05-12 |
TW201626434A (zh) | 2016-07-16 |
KR20160041764A (ko) | 2016-04-18 |
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